CN103237405B - Integrated plasma generation device - Google Patents

Abstract

The invention discloses an integrated plasma generation device, belonging to the technical field of plasma processing equipment, and solving the problem that working instability of the plasma generation device is caused due to the fact that the distance of a matcher and a plasma torch is overlarge in a normal temperature atmosphere plasma machining process. When the matcher and a capacity coupling plasma jet torch module are combined to be connected, the upper end face of a first connecting support of the capacity coupling plasma jet torch module is connected with a lower end face of the matcher; when the matcher and an inductive coupling plasma jet torch module are combined to be connected, the upper end face of a second connecting support is connected with the lower end face of the matcher; and when the matcher and a shaped electrode module are combined to be connected, the upper end face of a third connecting support of the shaped electrode module is connected with the lower end face of the matcher. With the adoption of the integrated plasma generation device, the matcher and the plasma torch are integrated, and need not to be connected by a load line, the distance of the matcher and a load is shortened, the electromagnetic interference on the device from outside can be effectively lowered, and meanwhile, the impedance matching effect is more stable.

Description

Integrated plasma generating means

Technical field

The invention belongs to the technical field of plasma processing device.

Background technology

Plasma torch is used in the processing of current ambient temperature atmosphere plasma, comprises capacitance coupling plasma torch (CCP) and induction coupled plasma torch (ICP).These two kinds of plasma torchs all need under the driving of radio-frequency power supply, by the tuning rear work of impedance matching box, therefore radio-frequency power supply and impedance matching box are the important component parts of atmosphere plasma system of processing, they alternating current is converted to can for plasma exciatiaon radio-frequency current.

For radio-frequency technique, impedance matching is a kind of conventional operating state.When circuit realiration impedance matching, maximum power delivery will be obtained; When circuit mismatch, the energy that high frequency electric source sends can not be delivered in load to greatest extent, do not have the energy loaded can reflect and produce standing wave, detection shows as reflection power higher, the damage of high frequency electric source final power amplifier may be caused time serious, so, not only can not obtain maximum power transfer, also likely higher level's circuit be caused damage.Matching status between high frequency electric source and load can affect the efficiency of transmission of electric energy, and when both reactance are equal, its power transmission efficiency is the highest, therefore in circuit, all by the tuning circuit be made up of tunable capacitor and inductance and match circuit.Its function regulates variable capacitance to make matches impedances between load and high frequency electric source, to keep plasma to obtain enough power, and maintain plasma stable operation.When the load, can there is significant change in load impedance, now needs to change the variable capacitance in tuning circuit, makes load and circuit again be in good matching status, otherwise plasma can not get enough energy will extinguish.

Different with industrial frequency AC circuit from conventional DC circuit, in high-frequency circuit, a hop count centimeter length wire, it not only has the resistance of can not ignore, and has very large induction reactance and capacitive reactance, can not ignore its existence in the loop.Operating time is long, due to induction reactance and the capacitive reactance of load line itself, makes part energy consumption on load line, causes its caloric value large, has certain danger, and especially in inductively state, when high power work, load line presents red heat state; Secondly, the load line between impedance matching box and load plasma torch is long, also will be subject to external environment electromagnetic interference; Moreover, if the cable between impedance matching and load reverses and grand movement, also plasma torch job insecurity will be caused.Therefore, the distance in a device between adaptation and load (plasma) is more near better.For making negative plasma torch working stability, impedance matching box realizes best working effect, in existing plasma processing device, normal require by adaptation cabinet and Processing Room close as far as possible.Adaptation is arranged in rack, by rack and Processing Room close as far as possible, preferably can directly contact with Processing Room or workbench.

During atmosphere plasma processing work, according to different processing requests, different plasma torch need be adopted.Because the plasma generation mechanism of CCP and ICP is different, related device difference is obvious, and interchangeability is poor.Existing atmosphere plasma machining tool only adopts a kind of plasma torch, under different processing request, need change different lathe and process, reorientate, in the course of processing, add error, extend the process-cycle according to material removing rate.

Summary of the invention

The object of this invention is to provide a kind of integrated plasma generating means, is that adaptation and plasma torch, apart from excessive, cause the problem of its job insecurity in order to solve in the normal temperature atmosphere plasma course of processing.

Described object is realized by following scheme: described a kind of integrated plasma generating means, and it is made up of adaptation, capacitance coupling plasma jet torch module, induction coupled plasma torch module, shaped electrode module:

Described capacitance coupling plasma jet torch module (2) is made up of capacitance coupling plasma jet torch (2-1), the first connection bracket (2-2), the first insulation link (2-3), the first protective cover (2-4), the bottom face of the first described insulation link (2-3) is connected to the middle part of the first connection bracket (2-2), be embedded in the hole (2-5) of the first insulation link (2-3) in the middle part of the shell of described capacitance coupling plasma jet torch (2-1), described the first protective cover (2-4) is centered around capacitance coupling plasma jet torch (2-1) around, and be connected with the first connection bracket (2-2), the nozzle of capacitance coupling plasma jet torch (2-1) is made to be exposed at the outside of the first connection bracket (2-2) and the first protective cover (2-4), described induction coupled plasma torch module (3) is made up of induction coupled plasma torch (3-1), the second connection bracket (3-2), the second insulation link (3-3), the second protective cover (3-4), the bottom face of the second described insulation link (3-3) is connected to the middle part of the second connection bracket (3-2), be embedded in the hole (3-5) of the second insulation link (3-3) in the middle part of the shell of described induction coupled plasma torch (3-1), described the second protective cover (3-4) is centered around induction coupled plasma torch (3-1) around, and be connected with the second connection bracket (3-2), make the nozzle of induction coupled plasma torch (3-1) be exposed at the outside of the second connection bracket (3-2) and the second protective cover (3-4), described shaped electrode module (4) is made up of shaped electrode (4-1), the 3rd connection bracket (4-2), the 3rd insulation link (4-3), the 3rd protective cover (4-4), the upper surface of the 3rd described insulation link (4-3) is connected with the lower surface of the 3rd connection bracket (4-2), the insulate lower surface of link (4-3), the upper surface and the 3rd of described shaped electrode (4-1) is connected, the conductive lead wire (4-5) of shaped electrode (4-1) is through the near middle being arranged on the 3rd connection bracket (4-2) behind the hole in the 3rd insulation link (4-3) and the hole on the downside of the 3rd connection bracket (4-2), the 3rd described protective cover (4-4) is centered around conductive lead wire (4-5) around, and be connected with the 3rd connection bracket (4-2), when adaptation (1) is connected with capacitance coupling plasma jet torch module (2), the upper surface of first connection bracket (2-2) of capacitance coupling plasma jet torch module (2) is connected with end face below adaptation (1), the positive wire of adaptation (1) passes the positive wire conduction connection of Kong Houyu capacitance coupling plasma jet torch (2-1) of the first connection bracket (2-2) upper end, the negative wire of adaptation (1) passes the negative wire conduction connection of Kong Houyu capacitance coupling plasma jet torch (2-1) of the first connection bracket (2-2) upper end, when adaptation (1) is connected with induction coupled plasma torch module (3), the upper surface of second connection bracket (3-2) of induction coupled plasma torch module (3) is connected with end face below adaptation (1), the positive wire of adaptation (1) passes the positive wire conduction connection of the Kong Houyu induction coupled plasma torch (3-1) of the second connection bracket (3-2) upper end, the negative wire of adaptation (1) passes the negative wire conduction connection of the Kong Houyu induction coupled plasma torch (3-1) of the second connection bracket (3-2) upper end, when adaptation (1) is connected with shaped electrode module (4), the upper surface of the 3rd connection bracket (4-2) of shaped electrode module (4) is connected with end face below adaptation (1), and the positive wire of adaptation (1) passes the positive wire conduction connection of the Kong Houyu shaped electrode (4-1) of the 3rd connection bracket (4-2) upper end.

The present invention compared with prior art has following advantages:

Adaptation and plasma torch become one by the present invention, connect, shorten the distance between adaptation and load, effectively can reduce the electromagnetic interference of outer bound pair device, make impedance matching effect more stable simultaneously without the need to load line; When adopting ICP module, without the need to load line, during high power work, fail safe is high; Integrated design is convenient to whole mechanism and is placed in lathe moving platform, and compliant platform moves on request, does not affect ICP stability.

The present invention by the modularized design of ICP and CCP plasma torch, for reaching different processing object, can easy quick-replaceable load plasma source, and do not need all to change adaptation and plasma torch, greatly reduce operation, save process time.

CCP shaped electrode module of the present invention can the quick correction of the flank shape of large area, ICP module can local small size correction of the flank shape, CCP fluidics module can realize the face type finish trimming of little removal amount, device is integrated on a lathe, different processing objects can be realized, the disposable location of workpiece, without the need to repeated clamping, improves the accuracy of manufacture.Present invention uses modularized design, interchangeability is strong, adopts disparate modules, can realize difference in functionality, is convenient to various processing situation and selects, humanization designing.

Accompanying drawing explanation

Fig. 1 is the structural representation when adaptation 1 is connected with capacitance coupling plasma jet torch module 2;

Fig. 2 is the structural representation when adaptation 1 is connected with induction coupled plasma torch module 3;

Fig. 3 is the structural representation when adaptation 1 is connected with shaped electrode module 4.

Embodiment

Embodiment one: shown in composition graphs 1, Fig. 2, it is made up of adaptation 1, capacitance coupling plasma jet torch module 2, induction coupled plasma torch module 3, shaped electrode module 4:

Described capacitance coupling plasma jet torch module (2) is made up of capacitance coupling plasma jet torch (2-1), the first connection bracket (2-2), the first insulation link (2-3), the first protective cover (2-4), the bottom face of the first described insulation link (2-3) is connected to the middle part of the first connection bracket (2-2), be embedded in the hole (2-5) of the first insulation link (2-3) in the middle part of the shell of described capacitance coupling plasma jet torch (2-1), described the first protective cover (2-4) is centered around capacitance coupling plasma jet torch (2-1) around, and be connected with the first connection bracket (2-2), the nozzle of capacitance coupling plasma jet torch (2-1) is made to be exposed at the outside of the first connection bracket (2-2) and the first protective cover (2-4), described induction coupled plasma torch module (3) is made up of induction coupled plasma torch (3-1), the second connection bracket (3-2), the second insulation link (3-3), the second protective cover (3-4), the bottom face of the second described insulation link (3-3) is connected to the middle part of the second connection bracket (3-2), be embedded in the hole (3-5) of the second insulation link (3-3) in the middle part of the shell of described induction coupled plasma torch (3-1), described the second protective cover (3-4) is centered around induction coupled plasma torch (3-1) around, and be connected with the second connection bracket (3-2), make the nozzle of induction coupled plasma torch (3-1) be exposed at the outside of the second connection bracket (3-2) and the second protective cover (3-4), described shaped electrode module (4) is made up of shaped electrode (4-1), the 3rd connection bracket (4-2), the 3rd insulation link (4-3), the 3rd protective cover (4-4), the upper surface of the 3rd described insulation link (4-3) is connected with the lower surface of the 3rd connection bracket (4-2), the insulate lower surface of link (4-3), the upper surface and the 3rd of described shaped electrode (4-1) is connected, the conductive lead wire (4-5) of shaped electrode (4-1) is through the near middle being arranged on the 3rd connection bracket (4-2) behind the hole in the 3rd insulation link (4-3) and the hole on the downside of the 3rd connection bracket (4-2), the 3rd described protective cover (4-4) is centered around conductive lead wire (4-5) around, and be connected with the 3rd connection bracket (4-2), when adaptation (1) is connected with capacitance coupling plasma jet torch module (2), the upper surface of first connection bracket (2-2) of capacitance coupling plasma jet torch module (2) is connected with end face below adaptation (1), the positive wire of adaptation (1) passes the positive wire conduction connection of Kong Houyu capacitance coupling plasma jet torch (2-1) of the first connection bracket (2-2) upper end, the negative wire of adaptation (1) passes the negative wire conduction connection of Kong Houyu capacitance coupling plasma jet torch (2-1) of the first connection bracket (2-2) upper end, when adaptation (1) is connected with induction coupled plasma torch module (3), the upper surface of second connection bracket (3-2) of induction coupled plasma torch module (3) is connected with end face below adaptation (1), the positive wire of adaptation (1) passes the positive wire conduction connection of the Kong Houyu induction coupled plasma torch (3-1) of the second connection bracket (3-2) upper end, the negative wire of adaptation (1) passes the negative wire conduction connection of the Kong Houyu induction coupled plasma torch (3-1) of the second connection bracket (3-2) upper end, when adaptation (1) is connected with shaped electrode module (4), the upper surface of the 3rd connection bracket (4-2) of shaped electrode module (4) is connected with end face below adaptation (1), and the positive wire of adaptation (1) passes the positive wire conduction connection of the Kong Houyu shaped electrode (4-1) of the 3rd connection bracket (4-2) upper end.

The model that adopted Changzhou rishige Electronic Technology Co., Ltd. of described adaptation 1 produces is the adaptation of PSG-III, and its radio frequency incoming frequency is 27.12MHz or 40.68MHz.

The concrete structure design of described capacitance coupling plasma jet torch 2-1 can see Chinese patent 200610010156.3 " capacitive coupling radio frequency normal pressure plasma torch for super smooth surface processing ".

Described induction coupled plasma torch 3-1 adopts Fassel torch pipe common in inductivity coupled plasma mass spectrometry technology and inductance coupling plasma emissioning spectral analysis technology and Greenfild torch pipe.

When adaptation 1 is connected with shaped electrode module 4, should electrode co-operation use ordinatedly.

Operation principle: adaptation and plasma torch become one by the present invention, adaptation power is directly loaded on plasma torch, connect without the need to load line, shorten the distance between adaptation and load, effectively can reduce the electromagnetic interference of outer bound pair device, make impedance matching effect more stable simultaneously; When adopting ICP module, without the need to load line, during high power work, fail safe is high; Integrated design is convenient to whole mechanism and is placed in lathe moving platform, and compliant platform moves on request, does not affect ICP stability.

Claims (1)

1. integrated plasma generating means, is characterized in that it is made up of adaptation (1), capacitance coupling plasma jet torch module (2), induction coupled plasma torch module (3), shaped electrode module (4):

Described capacitance coupling plasma jet torch module (2) is made up of capacitance coupling plasma jet torch (2-1), the first connection bracket (2-2), the first insulation link (2-3), the first protective cover (2-4), the bottom face of the first described insulation link (2-3) is connected to the middle part of the first connection bracket (2-2), be embedded in the hole (2-5) of the first insulation link (2-3) in the middle part of the shell of described capacitance coupling plasma jet torch (2-1), described the first protective cover (2-4) is centered around capacitance coupling plasma jet torch (2-1) around, and be connected with the first connection bracket (2-2), the nozzle of capacitance coupling plasma jet torch (2-1) is made to be exposed at the outside of the first connection bracket (2-2) and the first protective cover (2-4), described induction coupled plasma torch module (3) is made up of induction coupled plasma torch (3-1), the second connection bracket (3-2), the second insulation link (3-3), the second protective cover (3-4), the bottom face of the second described insulation link (3-3) is connected to the middle part of the second connection bracket (3-2), be embedded in the hole (3-5) of the second insulation link (3-3) in the middle part of the shell of described induction coupled plasma torch (3-1), described the second protective cover (3-4) is centered around induction coupled plasma torch (3-1) around, and be connected with the second connection bracket (3-2), make the nozzle of induction coupled plasma torch (3-1) be exposed at the outside of the second connection bracket (3-2) and the second protective cover (3-4), described shaped electrode module (4) is made up of shaped electrode (4-1), the 3rd connection bracket (4-2), the 3rd insulation link (4-3), the 3rd protective cover (4-4), the upper surface of the 3rd described insulation link (4-3) is connected with the lower surface of the 3rd connection bracket (4-2), the insulate lower surface of link (4-3), the upper surface and the 3rd of described shaped electrode (4-1) is connected, the conductive lead wire (4-5) of shaped electrode (4-1) is through the near middle being arranged on the 3rd connection bracket (4-2) behind the hole in the 3rd insulation link (4-3) and the hole on the downside of the 3rd connection bracket (4-2), the 3rd described protective cover (4-4) is centered around conductive lead wire (4-5) around, and be connected with the 3rd connection bracket (4-2), when adaptation (1) is connected with capacitance coupling plasma jet torch module (2), the upper surface of first connection bracket (2-2) of capacitance coupling plasma jet torch module (2) is connected with end face below adaptation (1), the positive wire of adaptation (1) passes the positive wire conduction connection of Kong Houyu capacitance coupling plasma jet torch (2-1) of the first connection bracket (2-2) upper end, the negative wire of adaptation (1) passes the negative wire conduction connection of Kong Houyu capacitance coupling plasma jet torch (2-1) of the first connection bracket (2-2) upper end, when adaptation (1) is connected with induction coupled plasma torch module (3), the upper surface of second connection bracket (3-2) of induction coupled plasma torch module (3) is connected with end face below adaptation (1), the positive wire of adaptation (1) passes the positive wire conduction connection of the Kong Houyu induction coupled plasma torch (3-1) of the second connection bracket (3-2) upper end, the negative wire of adaptation (1) passes the negative wire conduction connection of the Kong Houyu induction coupled plasma torch (3-1) of the second connection bracket (3-2) upper end, when adaptation (1) is connected with shaped electrode module (4), the upper surface of the 3rd connection bracket (4-2) of shaped electrode module (4) is connected with end face below adaptation (1), and the positive wire of adaptation (1) passes the positive wire conduction connection of the Kong Houyu shaped electrode (4-1) of the 3rd connection bracket (4-2) upper end.