CN104916519A - Fire-polishing auxiliary inductively coupled plasma processing apparatus - Google Patents
Fire-polishing auxiliary inductively coupled plasma processing apparatus Download PDFInfo
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- CN104916519A CN104916519A CN201510389614.8A CN201510389614A CN104916519A CN 104916519 A CN104916519 A CN 104916519A CN 201510389614 A CN201510389614 A CN 201510389614A CN 104916519 A CN104916519 A CN 104916519A
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- coupled plasma
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Abstract
The invention, which belongs to the technical field of precision optical part processing, relates to a fire-polishing auxiliary inductively coupled plasma processing apparatus. A processing inductively coupled plasma torque and a fire-polishing inductively coupled plasma torque are installed on a dual-torque connecting assembly. Working gas led into the processing inductively coupled plasma torque is fluorine-contained gas and a removing effect can be realized; and gas led into the fire-polishing inductively coupled plasma torque is gas not containing fluorine and no removing effect can be realized. A fire-polishing inductively coupled plasma torque action zone of the fire-polishing inductively coupled plasma torque is located at the front side of the moving direction of a processing inductively coupled plasma torque action zone of the processing inductively coupled plasma torque. When an optical lens is processed, the fire-polishing inductively coupled plasma torque is used for pretreatment; and no waviness error is caused and microcracks can be restored partially; and then processing by plasma in air can be carried out. Therefore, phenomena of damage and opening during plasma processing can be avoided and the high-quality optical processing can be realized.
Description
Technical field
The invention belongs to the technical field of precision optics part processing.
Background technology
In traditional optical processing, there is damaged surface layer in surface, there is a large amount of micro-crack.Inductively coupled plasma processing optical eyeglass, removes speed high, does not produce damaged surface layer, is a kind of without subsurface stratum damage processing method.Due to optical lens surface metamorphic layer to be processed.Inductively coupled plasma adds can make these micro-cracks progressively open man-hour, causes lens surface quality degradation.
Summary of the invention
The object of this invention is to provide a kind of fire polishing auxiliary induction coupled plasma processing unit (plant), be add man-hour to solve existing inductively coupled plasma, surface slightly crackle is progressively opened, the problem of lens surface quality degradation.
Described object is realized by following scheme: described a kind of fire polishing auxiliary induction coupled plasma processing unit (plant), and it comprises processing induction coupled plasma torch 1, fire polishing induction coupled plasma torch 2, two torch coupling assembling 3;
Processing induction coupled plasma torch 1 and fire polishing induction coupled plasma torch 2 are all arranged on two torch coupling assembling 3; The structure of processing induction coupled plasma torch 1 is identical with the structure of fire polishing induction coupled plasma torch 2, and the working gas that processing induction coupled plasma torch 1 passes into is fluoro-gas, has removal effect; The gas that fire polishing induction coupled plasma torch 2 passes into is not fluoro-gas, without removal effect; The processing induction coupled plasma torch active region 1-1 of the fire polishing induction coupled plasma torch active region 2-1 of fire polishing induction coupled plasma torch 2 and processing induction coupled plasma torch 1 is on the upper surface of work piece 4, and the fire polishing induction coupled plasma torch active region 2-1 of fire polishing induction coupled plasma torch 2 is positioned on front side of the processing induction coupled plasma torch active region 1-1 direction of motion of processing induction coupled plasma torch 1.
The present invention is adding man-hour to optical mirror slip, uses the preliminary treatment of fire polishing induction coupled plasma torch, can not produce waviness error, part repairs micro-crack, and then use atmosphere plasma processing, avoid plasma process and damage the effect opened, achieve high-quality optical manufacturing.
The present invention is compared with the accurate work method of existing optical element, and advantage is:
1, method of the present invention is based on inductively coupled plasma processing method, is a kind of contactless chemical processes, can not introduce subsurface stratum damage; And efficiency comparatively traditional optical Precision Machining is high;
2, the method introduces the repair of inductively coupled plasma fire polishing to optical element surface damage, and in conjunction with plasma process feature, compensate for the shortcoming that atmospheric plasma processing expands micro-crack, realize high-quality processing;
3, the processing induction coupled plasma torch in the method is identical with the structure of fire polishing induction coupled plasma torch, passes into gas difference; Simplify the structure design, reduces cost.
Accompanying drawing explanation
Fig. 1 is overall structure schematic diagram of the present invention.
Embodiment
Embodiment one: shown in composition graphs 1, it comprises processing induction coupled plasma torch 1, fire polishing induction coupled plasma torch 2, two torch coupling assembling 3;
Processing induction coupled plasma torch 1 and fire polishing induction coupled plasma torch 2 are all arranged on two torch coupling assembling 3; The structure of processing induction coupled plasma torch 1 is identical with the structure of fire polishing induction coupled plasma torch 2, and the working gas that processing induction coupled plasma torch 1 passes into is fluoro-gas, has removal effect; The gas that fire polishing induction coupled plasma torch 2 passes into is not fluoro-gas, without removal effect; The processing induction coupled plasma torch active region 1-1 of the fire polishing induction coupled plasma torch active region 2-1 of fire polishing induction coupled plasma torch 2 and processing induction coupled plasma torch 1 is on the upper surface of work piece 4, and the fire polishing induction coupled plasma torch active region 2-1 of fire polishing induction coupled plasma torch 2 is positioned on front side of the processing induction coupled plasma torch active region 1-1 direction of motion of processing induction coupled plasma torch 1.
Described fire polishing induction coupled plasma torch 2 passes into working gas and is only high-purity argon gas, applies the power of 900W ~ 1500W.
Operation principle: start processing induction coupled plasma torch 1 and fire polishing induction coupled plasma torch 2; Fire polishing induction coupled plasma torch 2 passes into working gas and is only high-purity argon gas, applies the power of 900W ~ 1500W.Start to process work piece 4, work piece 4 upper surface is when fire polishing induction coupled plasma torch 2, the fluorine-free plasma of high temperature is ejected into the upper surface of work piece 4, work piece 4 absorbs heat, micro-crack occurs to melt repair, forms fire polishing induction coupled plasma torch active region 2-1; Work piece 4 continues motion, and processing induction coupled plasma torch 1 couple of fire polishing induction coupled plasma torch active region 2-1 carries out removal processing, thus achieves high-quality processing.
Claims (2)
1. a fire polishing auxiliary induction coupled plasma processing unit (plant), is characterized in that it comprises processing induction coupled plasma torch (1), fire polishing induction coupled plasma torch (2), two torch coupling assembling (3);
Processing induction coupled plasma torch (1) and fire polishing induction coupled plasma torch (2) are all arranged on two torch coupling assembling (3); The structure of processing induction coupled plasma torch (1) is identical with the structure of fire polishing induction coupled plasma torch (2), and the working gas that processing induction coupled plasma torch (1) passes into is fluoro-gas, has removal effect; The gas that fire polishing induction coupled plasma torch (2) passes into is not fluoro-gas, without removal effect; The processing induction coupled plasma torch active region (1-1) of the fire polishing induction coupled plasma torch active region (2-1) of fire polishing induction coupled plasma torch (2) and processing induction coupled plasma torch (1) is all on the upper surface of work piece (4), and the fire polishing induction coupled plasma torch active region (2-1) of fire polishing induction coupled plasma torch (2) is positioned on front side of processing induction coupled plasma torch active region (1-1) direction of motion of processing induction coupled plasma torch (1).
2. a kind of fire polishing auxiliary induction coupled plasma processing unit (plant) according to claim 1, is characterized in that described fire polishing induction coupled plasma torch (2) passes into working gas and is only high-purity argon gas, applies the power of 900W ~ 1500W.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201510389614.8A CN104916519B (en) | 2015-07-06 | 2015-07-06 | A kind of fire polishing auxiliary induction coupled plasma processing unit (plant) |
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| CN201510389614.8A CN104916519B (en) | 2015-07-06 | 2015-07-06 | A kind of fire polishing auxiliary induction coupled plasma processing unit (plant) |
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| CN104916519A true CN104916519A (en) | 2015-09-16 |
| CN104916519B CN104916519B (en) | 2017-03-15 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105619205A (en) * | 2016-01-14 | 2016-06-01 | 长春设备工艺研究所 | Plasma polishing device used for quickly polishing aspheric surfaces with medium and large calibers |
| CN106373848A (en) * | 2016-11-10 | 2017-02-01 | 中国原子能科学研究院 | Plasma neutralization mode-based electronic microscope device |
| CN107200464A (en) * | 2017-06-27 | 2017-09-26 | 中国工程物理研究院激光聚变研究中心 | Crackle fuser and its method |
| CN114900942A (en) * | 2022-04-12 | 2022-08-12 | 南方科技大学 | Device and method for repairing surface damage of element |
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| US20030087530A1 (en) * | 2001-11-07 | 2003-05-08 | Carr Jeffrey W. | Apparatus and method for reactive atom plasma processing for material deposition |
| US20050061783A1 (en) * | 2003-08-14 | 2005-03-24 | Rapt Industries, Inc. | Systems and methods for laser-assisted plasma processing |
| CN101032802A (en) * | 2007-04-11 | 2007-09-12 | 哈尔滨工业大学 | Method of polishing normal pressure plasma |
| CN102989720A (en) * | 2012-10-16 | 2013-03-27 | 江苏大学 | Method and device for eliminating nanoparticles on surfaces of substrates under assistance of laser |
| CN103227093A (en) * | 2013-05-14 | 2013-07-31 | 哈尔滨工业大学 | Atmosphere plasma processing device suitable for aspheric optical element with large calibre |
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2015
- 2015-07-06 CN CN201510389614.8A patent/CN104916519B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030087530A1 (en) * | 2001-11-07 | 2003-05-08 | Carr Jeffrey W. | Apparatus and method for reactive atom plasma processing for material deposition |
| US20050061783A1 (en) * | 2003-08-14 | 2005-03-24 | Rapt Industries, Inc. | Systems and methods for laser-assisted plasma processing |
| CN101032802A (en) * | 2007-04-11 | 2007-09-12 | 哈尔滨工业大学 | Method of polishing normal pressure plasma |
| CN102989720A (en) * | 2012-10-16 | 2013-03-27 | 江苏大学 | Method and device for eliminating nanoparticles on surfaces of substrates under assistance of laser |
| CN103227093A (en) * | 2013-05-14 | 2013-07-31 | 哈尔滨工业大学 | Atmosphere plasma processing device suitable for aspheric optical element with large calibre |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105619205A (en) * | 2016-01-14 | 2016-06-01 | 长春设备工艺研究所 | Plasma polishing device used for quickly polishing aspheric surfaces with medium and large calibers |
| CN106373848A (en) * | 2016-11-10 | 2017-02-01 | 中国原子能科学研究院 | Plasma neutralization mode-based electronic microscope device |
| CN106373848B (en) * | 2016-11-10 | 2018-05-22 | 中国原子能科学研究院 | The electron microscopic lens device that using plasma neutralizes |
| CN107200464A (en) * | 2017-06-27 | 2017-09-26 | 中国工程物理研究院激光聚变研究中心 | Crackle fuser and its method |
| CN114900942A (en) * | 2022-04-12 | 2022-08-12 | 南方科技大学 | Device and method for repairing surface damage of element |
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| Publication number | Publication date |
|---|---|
| CN104916519B (en) | 2017-03-15 |
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