CN104942288A - Capacitance thick film pressure sensor manufacturing method based on femto-second laser hybrid technology - Google Patents
Capacitance thick film pressure sensor manufacturing method based on femto-second laser hybrid technology Download PDFInfo
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- 238000005516 engineering process Methods 0.000 title claims abstract description 21
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- 238000002360 preparation method Methods 0.000 claims abstract description 9
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- 238000010223 real-time analysis Methods 0.000 claims description 4
- 238000011897 real-time detection Methods 0.000 claims description 4
- 229910001316 Ag alloy Inorganic materials 0.000 claims description 3
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical group [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 claims description 3
- 238000012795 verification Methods 0.000 claims description 3
- 238000005215 recombination Methods 0.000 claims description 2
- 238000010146 3D printing Methods 0.000 abstract description 5
- 238000007664 blowing Methods 0.000 abstract description 4
- 238000005245 sintering Methods 0.000 abstract description 3
- 238000004140 cleaning Methods 0.000 abstract description 2
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- 239000000463 material Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
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- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000002679 ablation Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
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- 238000000110 selective laser sintering Methods 0.000 description 1
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- 230000003685 thermal hair damage Effects 0.000 description 1
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Abstract
本发明公开了一种基于飞秒激光复合技术的电容式厚膜压力传感器制备方法，包括：首先，根据压力传感器各层的精度要求，选择纳秒、皮秒或飞秒激光作为原始激光进行扫描烧结熔化。然后，根据实时监测反馈选择对特定区域使用皮秒或飞秒激光进行精加工。根据压力传感器加工的实际需要，实时监测可以为尺寸检测、晶相结构检测、微观形貌检测、成分检测等。本发明可实现更精确的尺寸控制和电阻阻值控制，包括电极间距、电极尺寸等，省去了传统3D打印完成后所需的清理、抛光等工序，有效解决了吹粉、残余应力高、强度低等问题。
The invention discloses a preparation method of a capacitive thick-film pressure sensor based on femtosecond laser composite technology, including: firstly, according to the precision requirements of each layer of the pressure sensor, select nanosecond, picosecond or femtosecond laser as the original laser for scanning Sintering melts. Then, according to the real-time monitoring feedback, choose to use picosecond or femtosecond laser to finish the specific area. According to the actual needs of pressure sensor processing, real-time monitoring can be dimension detection, crystal phase structure detection, microscopic morphology detection, composition detection, etc. The invention can realize more accurate size control and resistance value control, including electrode spacing, electrode size, etc., eliminating the need for cleaning, polishing and other processes required after the completion of traditional 3D printing, and effectively solving the problems of powder blowing, high residual stress, issues of low strength.
Description
技术领域 technical field
本发明属于压力传感器芯片技术领域，具体涉及一种基于飞秒激光复合技术的电容式厚膜压力传感器制备方法。 The invention belongs to the technical field of pressure sensor chips, and in particular relates to a preparation method of a capacitive thick film pressure sensor based on femtosecond laser composite technology.
背景技术 Background technique
厚膜压力传感器是厚膜技术和传感器技术相结合的产物，集成了厚膜技术和压力传感器技术，具有对温度不敏感、工艺简单、重复性好、适用于恶劣环境、可靠性高、成本低等优点。电容式厚膜压力传感器是通过高温烧结而成的，一致性和精度不好控制，而且粘接界面过多，密封性和界面可靠性也不能很好地得到保障。 Thick film pressure sensor is the product of the combination of thick film technology and sensor technology. It integrates thick film technology and pressure sensor technology. It is insensitive to temperature, simple in process, good in repeatability, suitable for harsh environments, high in reliability and low in cost. Etc. The capacitive thick film pressure sensor is sintered at high temperature, the consistency and accuracy are not easy to control, and there are too many bonding interfaces, and the sealing and interface reliability cannot be well guaranteed.
3D打印技术是一种运用粉末状材料通过选择性激光烧结或熔化逐层堆积出制造产品的增材制造方法。相对传统制造技术而言，它可以轻松地制造出传统技术难以生产的复杂、高难度的产品。但是，3D打印出的零件表面往往显现出强度不高、吹粉、球化、残余应力高及表面粗糙高等缺点，需要对成型零件进行除渣和抛光处理。当前的3D打印过程中仅有利用视觉监控来控制尺寸，没有微观结构及成分的实时监控功能，我们无从知道零部件的微观结构，也就不能对其机械性能进行更好地控制。 3D printing technology is an additive manufacturing method that uses powder materials to build up products layer by layer through selective laser sintering or melting. Compared with traditional manufacturing technology, it can easily manufacture complex and difficult products that are difficult to produce with traditional technology. However, the surface of 3D printed parts often shows shortcomings such as low strength, powder blowing, spheroidization, high residual stress, and high surface roughness. It is necessary to remove slag and polish the molded parts. In the current 3D printing process, only visual monitoring is used to control the size. Without the real-time monitoring function of microstructure and composition, we have no way of knowing the microstructure of parts, and we cannot better control their mechanical properties.
近些年，短脉冲激光（如纳秒激光、皮秒激光和飞秒激光）由于热影响小，加工精度高，因而在精密加工领域备受关注。纳秒激光的脉冲宽度为纳秒（10-9秒）级，其重复频率一般为数百kHz，最高可达10MHz，因此可以达到很高的加工效率。皮秒（10-12秒）激光足以避免能量发生热扩散并达到这些消融临界过程所需要的峰值能量密度，可以提供较高的平均功率(10 W)和良好的光束质量（M2 < 1.5），可以在有效工作距离内聚焦成一个10μm或更小的光点。飞秒激光（10-15秒）在每一个激光脉冲与物质相互作用的持续期内，避免了热扩散的存在，在根本上消除了类似于长脉冲加工过程中的熔融区，热影响区，冲击波等多种效应对周围材料造成的影响和热损伤，将加工过程所涉及的空间范围大大缩小，从而提高了准确程度，其光束直径可以聚焦到1μm以内，其精度可达100nm以内，最高可以达到0.1nm。 In recent years, short-pulse lasers (such as nanosecond lasers, picosecond lasers, and femtosecond lasers) have attracted much attention in the field of precision processing due to their small thermal influence and high processing accuracy. The pulse width of nanosecond laser is nanosecond (10 -9 seconds) level, and its repetition frequency is generally hundreds of kHz, up to 10MHz, so it can achieve high processing efficiency. Picosecond (10 -12 seconds) lasers are sufficient to avoid thermal diffusion of energy and achieve the peak energy density required for these ablation critical processes, which can provide high average power (10 W) and good beam quality (M2 < 1.5), Can be focused into a 10μm or smaller spot within the effective working distance. Femtosecond laser (10 -15 seconds) avoids the existence of thermal diffusion during the duration of each laser pulse interacting with matter, and fundamentally eliminates the melting zone and heat affected zone similar to long pulse processing. The impact of shock waves and other effects on surrounding materials and thermal damage greatly reduces the space involved in the processing process, thereby improving the accuracy. The beam diameter can be focused to within 1 μm, and the accuracy can reach within 100nm. up to 0.1nm.
纳秒/皮秒/飞秒激光复合技术可以集成加工速度、精度和成本等方面的优点，将其运用于传感器的烧结和微加工，可以快速、有效避免现今激光烧结过程中出现的吹粉，残余应力等复杂问题，可以省去补偿步骤。目前还没有出现使用该技术的3D打印传感器产品。 Nanosecond/picosecond/femtosecond laser composite technology can integrate the advantages of processing speed, precision and cost, and apply it to the sintering and micromachining of sensors, which can quickly and effectively avoid the powder blowing that occurs in the current laser sintering process, For complex problems such as residual stress, the compensation step can be omitted. There are no 3D printed sensor products using this technology yet.
发明内容 Contents of the invention
针对电容式厚膜压力传感器制作工艺中存在的电极制作精度不高、上下电极间隙一致性不好和材料界面过多等缺陷，本发明结合纳秒-皮秒-飞秒激光复合技术，提出了一种基于飞秒激光复合技术的电容式厚膜压力传感器制备方法。 Aiming at the defects in the manufacturing process of the capacitive thick film pressure sensor, such as low electrode manufacturing accuracy, poor consistency of the gap between the upper and lower electrodes, and too many material interfaces, the present invention combines nanosecond-picosecond-femtosecond laser composite technology and proposes A preparation method of a capacitive thick-film pressure sensor based on femtosecond laser recombination technology.
为解决上述技术问题，本发明采用如下的技术方案： In order to solve the problems of the technologies described above, the present invention adopts the following technical solutions:
一种基于飞秒激光复合技术的电容式厚膜压力传感器制备方法，按照从上到下或从下到上逐层制备电容式厚膜压力传感器，所述的电容式厚膜压力传感器从下到上依次包括下基板层、下电极层、支撑环层、上电极层、感知膜片层、焊盘层，支撑环层和感知膜片层分别有引出电极穿过，各层的制作步骤如下： A preparation method of a capacitive thick film pressure sensor based on femtosecond laser composite technology, the capacitive thick film pressure sensor is prepared layer by layer from top to bottom or from bottom to top, and the capacitive thick film pressure sensor is from bottom to bottom The upper layer includes the lower substrate layer, the lower electrode layer, the support ring layer, the upper electrode layer, the sensing diaphragm layer, and the pad layer in turn. The supporting ring layer and the sensing diaphragm layer are respectively passed through by lead-out electrodes. The manufacturing steps of each layer are as follows:
（1）真空环境中，在工作台上加载当前层原材料粉末并预热； (1) In a vacuum environment, load the current layer of raw material powder on the workbench and preheat it;
（2）根据当前层的精度要求确定原始激光，采用原始激光对原材料进行扫描烧结熔化及固化；原始激光的选择原则是：对精度要求高的当前层选用脉冲较短的激光，对精度要求低的当前层则选用脉冲较长的激光；基于上述选择原则并结合经验、试验验证在纳秒激光、皮秒激光和飞秒激光中确定制作当前层所采用的原始激光； (2) Determine the original laser according to the accuracy requirements of the current layer, and use the original laser to scan, sinter, melt and solidify the raw materials; the selection principle of the original laser is: choose a laser with a shorter pulse for the current layer with high precision requirements, and use a laser with a lower precision requirement The current layer of the current layer uses a laser with a longer pulse; based on the above selection principles combined with experience and experimental verification, the original laser used to make the current layer is determined among nanosecond lasers, picosecond lasers and femtosecond lasers;
（3）实时检测和分析已成型当前层的尺寸、晶相结构、表面形貌和成分中的一项或多项，并将分析结果反馈至控制中心； (3) Real-time detection and analysis of one or more of the size, crystal phase structure, surface morphology and composition of the currently formed layer, and feedback the analysis results to the control center;
（4）将控制中心接收的分析结果与预设目标比对，若分析结果达到预设目标，则结束并开始制作下一层；否则，执行步骤（5）。 (4) Compare the analysis result received by the control center with the preset target, if the analysis result reaches the preset target, then end and start to make the next layer; otherwise, perform step (5).
（5）使用精加工激光对已成型当前层的特定区域进行精加工，然后执行步骤（3）；所述的特定区域指分析结果未达到预设目标的区域，所述的精加工激光选择原则为：（a）为皮秒激光或飞秒激光；同时，（b）其加工精度高于原始激光。 (5) Use the finishing laser to finish the specific area of the formed current layer, and then perform step (3); the specific area refers to the area where the analysis result does not reach the preset target, and the selection principle of the finishing laser It is: (a) picosecond laser or femtosecond laser; at the same time, (b) its processing accuracy is higher than that of the original laser.
上述原始激光和精加工激光均由多波长集成光纤激光器提供，所述的多波长集成光纤激光器包括控制器、纳秒激光探头、皮秒激光探头和飞秒激光探头，纳秒激光探头、皮秒激光探头和飞秒激光探头均与控制器相连，控制器用来控制纳秒激光、皮秒激光和飞秒激光的发射和关闭。 The above-mentioned original laser and finishing laser are all provided by multi-wavelength integrated fiber lasers. The multi-wavelength integrated fiber lasers include controllers, nanosecond laser probes, picosecond laser probes and femtosecond laser probes, nanosecond laser probes, picosecond laser probes, and picosecond laser probes. Both the laser probe and the femtosecond laser probe are connected with the controller, and the controller is used to control the emission and shutdown of the nanosecond laser, the picosecond laser and the femtosecond laser.
步骤（3）中采用实时监测系统进行实时检测和分析，所述的实时监测系统包括控制驱动系统和检测仪器，检测仪器与控制驱动系统相连，所述的检测仪器包括尺寸检测仪器、晶相结构检测仪器、表面形貌检测仪器、成分检测仪器中的一种或多种。所述的检测仪器包括扫描电镜、X射线衍射仪、红外摄像仪和质谱仪中的一种或多种。 In step (3), a real-time monitoring system is used for real-time detection and analysis. The real-time monitoring system includes a control drive system and a detection instrument. The detection instrument is connected to the control drive system. The detection instrument includes a size detection instrument, a crystal phase structure One or more of testing instruments, surface morphology testing instruments, and component testing instruments. The detection instrument includes one or more of a scanning electron microscope, an X-ray diffractometer, an infrared camera and a mass spectrometer.
作为优选：上电极层和下电极层的原材料为钯银合金；下基板层、支撑环层、感知膜片层、焊盘层，支撑环层和感知膜片层的原材料均为陶瓷材料 As preferred: the raw materials of the upper electrode layer and the lower electrode layer are palladium-silver alloy; the raw materials of the lower substrate layer, the support ring layer, the sensing diaphragm layer, the pad layer, the supporting ring layer and the sensing diaphragm layer are all ceramic materials
本发明所采用的纳秒-皮秒-飞秒激光复合技术，是采用可同时提供纳秒激光、皮秒激光和飞秒激光的多波长集成光纤激光器实现。首先，根据压力传感器各层的精度要求，选择纳秒、皮秒或飞秒激光作为原始激光进行扫描烧结熔化。然后，根据实时监测反馈选择对特定区域使用皮秒或飞秒激光进行精加工。根据压力传感器加工的实际需要，实时监测可以为尺寸检测、晶相结构检测、表面形貌检测、成分检测等。 The nanosecond-picosecond-femtosecond laser composite technology adopted in the present invention is realized by using a multi-wavelength integrated fiber laser that can provide nanosecond laser, picosecond laser and femtosecond laser at the same time. First, according to the precision requirements of each layer of the pressure sensor, a nanosecond, picosecond or femtosecond laser is selected as the original laser for scanning sintering and melting. Then, according to the real-time monitoring feedback, choose to use picosecond or femtosecond laser to finish the specific area. According to the actual needs of pressure sensor processing, real-time monitoring can be size detection, crystal phase structure detection, surface morphology detection, composition detection, etc.
和现有技术相比，本发明具有如下优点和有益效果： Compared with the prior art, the present invention has the following advantages and beneficial effects:
可实现更精确的尺寸控制和电阻阻值控制，包括电极间距、电极尺寸等，省去了传统3D打印完成后所需的清理、抛光等工序，有效解决了吹粉、残余应力高、强度低等问题。 It can achieve more precise size control and resistance value control, including electrode spacing, electrode size, etc., eliminating the need for cleaning, polishing and other processes after traditional 3D printing is completed, and effectively solving powder blowing, high residual stress, and low strength. And other issues.
附图说明 Description of drawings
为了更清楚地说明本发明方法，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅为本发明实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。 In order to illustrate the method of the present invention more clearly, the accompanying drawings that need to be used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings in the following description are only the embodiments of the present invention. For those of ordinary skill in the art, In other words, other drawings can also be obtained from these drawings on the premise of not paying creative work.
图1为电容式厚膜压力传感器的剖面正视图，图中，101-下基板，102a-第一通孔，102b-第二通孔，103-下电极，104-支撑环，105a-第一引出电极，105b-第二引出电极，106-上电极，107-感知膜片，108a-第一焊盘，108b-第二焊盘，109-空腔； Fig. 1 is a sectional front view of a capacitive thick film pressure sensor, in which, 101-lower substrate, 102a-first through hole, 102b-second through hole, 103-lower electrode, 104-support ring, 105a-first Extraction electrode, 105b-second extraction electrode, 106-upper electrode, 107-sensing diaphragm, 108a-first pad, 108b-second pad, 109-cavity;
图2为本发明方法具体实施方式的流程图。 Fig. 2 is a flowchart of a specific embodiment of the method of the present invention.
具体实施方式 Detailed ways
见图1，本发明所制备的电容式厚膜压力传感器主要由下基板（101）、下电极（103）、支撑环（104）、上电极（106）、感知膜片（107）和引出电极（105a、105b）构成。感知膜片（107）是用来感受外界压力的变形层，其下表面制作有上电极（106），其上表面制作有焊盘（108a、108b）。下基板（101）起到对传感器的支撑作用，其上表面制作有下电极（103）。支撑环（104）用来连接下基板（101）和感知膜片（107），下电极（103）的电信号通过穿过支撑环（104）的第二引出电极（105b）引出到感知膜片（107）上表面的第二焊盘（108b）；同时，上电极（106）也通过第一引出电极（105a）连接到感知膜片（107）上表面的第一焊盘（108a），上电极（106）和下电极（103）共同组成一个电容器。 As shown in Figure 1, the capacitive thick film pressure sensor prepared by the present invention is mainly composed of a lower substrate (101), a lower electrode (103), a support ring (104), an upper electrode (106), a sensing diaphragm (107) and an extraction electrode (105a, 105b) constitute. The sensing diaphragm (107) is a deformable layer for sensing external pressure, with an upper electrode (106) formed on its lower surface and pads (108a, 108b) formed on its upper surface. The lower substrate (101) serves as a support for the sensor, and a lower electrode (103) is fabricated on its upper surface. The support ring (104) is used to connect the lower substrate (101) and the sensing diaphragm (107), and the electrical signal of the lower electrode (103) is drawn to the sensing diaphragm through the second extraction electrode (105b) passing through the supporting ring (104) (107) the second pad (108b) on the upper surface; at the same time, the upper electrode (106) is also connected to the first pad (108a) on the upper surface of the sensing diaphragm (107) through the first extraction electrode (105a), the upper The electrode (106) and the lower electrode (103) together form a capacitor.
电容式厚膜压力传感器中上电极（106）和下电极（103）采用钯银合金或其他金属，其余部分均为陶瓷材料，如氧化铝和氧化锆等。 In the capacitive thick film pressure sensor, the upper electrode (106) and the lower electrode (103) are made of palladium-silver alloy or other metals, and the rest are made of ceramic materials, such as alumina and zirconia.
图2为本发明方法的具体流程图，本发明逐层执行以下步骤： Fig. 2 is the specific flowchart of the method of the present invention, and the present invention carries out following steps layer by layer:
（1）真空环境中，在工作台上加载当前层原材料粉末并预热。 (1) In a vacuum environment, load the current layer of raw material powder on the workbench and preheat it.
（2）根据当前层的精度要求确定原始激光，并采用该原始激光对原材料进行扫描烧结熔化及固化，所述的原始激光为纳秒激光、皮秒激光或飞秒激光。 (2) Determine the original laser according to the accuracy requirements of the current layer, and use the original laser to scan, sinter, melt and solidify the raw materials. The original laser is a nanosecond laser, picosecond laser or femtosecond laser.
本发明根据压力传感器结构逐层进行成型以制作压力传感器，不同层的精度要求可能不同，所以，不同层所选择的原始激光也不同。原始激光的选择原则为：对精度要求高的当前层可选用脉冲较短的激光作为原始激光，例如皮秒激光或飞秒激光；对精度要求低的当前层则选用脉冲较长的激光作为原始激光。本步骤基于上述选择原则并结合经验、试验验证确定制备当前层所采用的原始激光。 In the present invention, the pressure sensor is formed layer by layer according to the structure of the pressure sensor. The precision requirements of different layers may be different, so the original lasers selected for different layers are also different. The selection principle of the original laser is: the current layer that requires high precision can choose a laser with a shorter pulse as the original laser, such as picosecond laser or femtosecond laser; the current layer that requires low precision can choose a laser with a longer pulse as the original laser. laser. This step is based on the above selection principles combined with experience and experimental verification to determine the original laser used to prepare the current layer.
（3）采用实时监测系统实时检测和分析已成型当前层的尺寸、晶相结构、表面形貌、成分中的一项或多项，并将分析结果反馈至控制中心。 (3) Use a real-time monitoring system to detect and analyze one or more of the size, crystal phase structure, surface morphology, and composition of the currently formed layer in real time, and feed back the analysis results to the control center.
实时监测系统包括控制驱动系统和检测仪器，检测仪器与控制驱动系统相连，所述的检测仪器包括尺寸检测仪器、晶相结构检测仪器、表面形貌检测仪器、成分检测仪器中的一种或多种。具体实施中，检测仪器包括扫描电镜、X射线衍射仪、红外摄像仪和质谱仪。 The real-time monitoring system includes a control drive system and a detection instrument. The detection instrument is connected to the control drive system. The detection instrument includes one or more of a size detection instrument, a crystal phase structure detection instrument, a surface morphology detection instrument, and a component detection instrument. kind. In a specific implementation, the detection instrument includes a scanning electron microscope, an X-ray diffractometer, an infrared camera and a mass spectrometer.
（4）将控制中心接收的分析结果与预设目标比对，若分析结果达到预设目标，则继续步骤（6）；否则，执行步骤（5）。 (4) Compare the analysis result received by the control center with the preset target, if the analysis result reaches the preset target, proceed to step (6); otherwise, execute step (5).
（5）使用精加工激光对已成型当前层的特定区域进行精加工，然后执行步骤（3）。所述的特定区域指分析结果未达到预设目标的区域。精加工激光一般选择比原始激光脉冲更短的激光。 (5) Use the finishing laser to finish the specific area of the formed current layer, and then perform step (3). The specific area refers to the area where the analysis result does not reach the preset target. Finishing lasers are generally chosen with shorter pulses than the original laser.
（6）重复步骤（1）~（5）以完成下一层的成型。 (6) Repeat steps (1)~(5) to complete the molding of the next layer.
根据电容式厚膜压力传感器的分层结构，3D打印的顺序可以是从上到下，也可以是从下到上。 According to the layered structure of the capacitive thick film pressure sensor, the order of 3D printing can be from top to bottom or from bottom to top.
具体实施中，原始激光和精加工激光均由多波长集成光纤激光器提供，所述的多波长集成光纤激光器包括控制器、纳秒激光探头、皮秒激光探头和飞秒激光探头，纳秒激光探头、皮秒激光探头和飞秒激光探头均与控制器相连，控制器用来控制纳秒激光、皮秒激光和飞秒激光的发射和关闭。 In specific implementation, both the original laser and the finishing laser are provided by a multi-wavelength integrated fiber laser, and the multi-wavelength integrated fiber laser includes a controller, a nanosecond laser probe, a picosecond laser probe and a femtosecond laser probe, and the nanosecond laser probe , the picosecond laser probe and the femtosecond laser probe are all connected to the controller, and the controller is used to control the emission and shutdown of the nanosecond laser, the picosecond laser and the femtosecond laser.
因为压力传感器是多层结构，包括感知膜片层、绝缘层、电极层等，不同层对精度要求也是不同的，所以，不同层所选择的激光也不同。一般，对精度要求较高的层可选用皮秒激光或飞秒激光等秒冲较短的激光。此外，实际加工效果和预设效果也是有差别的，所以通过实时监测系统实时获得实际加工效果，并根据实际加工效果进一步调整所使用的激光，从而实现产品的精确加工。 Because the pressure sensor is a multi-layer structure, including the sensing diaphragm layer, insulating layer, electrode layer, etc., different layers have different requirements for accuracy, so the lasers selected for different layers are also different. Generally, lasers with shorter second pulses such as picosecond lasers or femtosecond lasers can be used for layers that require higher precision. In addition, the actual processing effect is also different from the preset effect, so the actual processing effect can be obtained in real time through the real-time monitoring system, and the laser used can be further adjusted according to the actual processing effect, so as to realize the precise processing of the product.
每次成型中，多波长集成光纤激光器的三种激光和实时监控系统的多种检测手段并非均需要使用，一般根据压力传感器要求选择合适的原始激光、精加工激光和检测手段。但多种激光和多种检测手段使得本发明具有通用性，可实现压力传感器的逐点控制，实现任意尺度、形状、成分和微观组织的在线控制。 In each molding process, the three lasers of the multi-wavelength integrated fiber laser and the multiple detection methods of the real-time monitoring system are not all required. Generally, the appropriate original laser, finishing laser and detection methods are selected according to the requirements of the pressure sensor. However, a variety of lasers and a variety of detection means make the present invention versatile, and can realize point-by-point control of the pressure sensor, and realize online control of any scale, shape, composition and microstructure.
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