CN104942288A - Capacitance thick film pressure sensor manufacturing method based on femto-second laser hybrid technology - Google Patents
Capacitance thick film pressure sensor manufacturing method based on femto-second laser hybrid technology Download PDFInfo
- Publication number
- CN104942288A CN104942288A CN201510356527.2A CN201510356527A CN104942288A CN 104942288 A CN104942288 A CN 104942288A CN 201510356527 A CN201510356527 A CN 201510356527A CN 104942288 A CN104942288 A CN 104942288A
- Authority
- CN
- China
- Prior art keywords
- laser
- layer
- thick film
- film pressure
- pressure transducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a capacitance thick film pressure sensor manufacturing method based on a femto-second laser hybrid technology. Firstly, according to precision requirements of all layers of a pressure sensor, nanosecond, picosecond or femto-second laser is selected to serve as original laser for scanning, sintering and melting; then, according to real-time monitoring feedback, a specific area is selected to be subjected to finish machining through the picosecond or femto-second laser. According to actual requirements of machining of the pressure sensor, real-time monitoring can be used for size detection, crystalline phase structure detection, microstructure detection, component detection and the like. By means of the method, more precise size control and resistance value control can be achieved, including electrode distance, electrode size and the like. The cleaning procedure, the polishing procedure and the like which are required after traditional 3D printing is finished are omitted, and the problems that powder blowing occurs, residual stress is high and strength is low are effectively solved.
Description
Technical field
The invention belongs to pressure sensor chip technical field, be specifically related to a kind of condenser type thick film pressure transducer preparation method based on femtosecond laser complex technique.
Background technology
Thick film pressure transducer is the product that thick film technology and sensor technology combine, and is integrated with thick film technology and pressure sensor technique, have simple, reproducible to temperature-insensitive, technique, be applicable to that adverse circumstances, reliability are high, low cost and other advantages.Condenser type thick film pressure transducer is formed by high temperature sintering, uniformity and the bad control of precision, and bonding interface is too much, and sealing and interface reliability can not be protected well.
3D printing technique is that a kind of dusty material that uses successively piles up by selective laser sintering or fusing the increasing material manufacture method to manufacture a product.Relative traditional manufacturing technology, it can produce complexity, the highly difficult product that conventional art is difficult to produce like a cork.But, the piece surface that 3D prints often show intensity not high, blow the shortcomings such as the high and rough surface of powder, nodularization, residual stress is high, need to remove the gred and polishing to forming part.Only utilize vision monitoring to carry out controlling dimension in current 3D print procedure, do not have the real-time monitoring and control of microstructure and composition, we are unable to find out the microstructure of parts, also just can not control better its mechanical performance.
In recent years, short-pulse laser (as nanosecond laser, picosecond laser and femtosecond laser) due to heat affecting little, machining accuracy is high, thus receives much concern in Precision Machining field.The pulse width of nanosecond laser is nanosecond (10
-9second) level, its repetition rate is generally hundreds of kHz, reaches as high as 10MHz, therefore can reach very high working (machining) efficiency.Psec (10
-12second) laser is enough to avoid energy generation thermal diffusion and reaches these melt peak energy denisty required for critical process, higher mean power (10 W) and good beam quality (M2 < 1.5) can be provided, one 10 μm or less luminous point can be become at effective working distance inner focusing.Femtosecond laser (10
-15second) within the duration of each laser pulse and matter interaction, avoid the existence of thermal diffusion, fundamentally eliminating the melting zone be similar in long pulse process, heat affected area, the impact that the multiple effect such as shock wave causes adjacent material and fire damage, reduce greatly by the spatial dimension involved by process, thus improve order of accuarcy, its beam diameter can focus within 1 μm, within its precision can reach 100nm, the highlyest can reach 0.1nm.
Nanosecond/psec/femtosecond laser complex technique can the advantage of the aspect such as integrated process velocity, precision and cost, applied to sintering and the micro Process of sensor, that can fast, effectively avoid occurring in laser sintered process now blows powder, the challenges such as residual stress, can save compensation process.Also there is not the 3D print sensor product using this technology at present.
Summary of the invention
, the defect such as upper/lower electrode gap uniformity bad and material interface too much not high for the electrode fabrication precision existed in condenser type thick film pressure transducer manufacture craft, the present invention in conjunction with nanosecond-psec-femtosecond laser complex technique, propose a kind of condenser type thick film pressure transducer preparation method based on femtosecond laser complex technique.
For solving the problems of the technologies described above, the present invention adopts following technical scheme:
A kind of condenser type thick film pressure transducer preparation method based on femtosecond laser complex technique, according to successively preparing condenser type thick film pressure transducer from top to bottom or from top to bottom, described condenser type thick film pressure transducer comprises lower substrate layer, lower electrode layer, support circular layer, upper electrode layer, perception membrane layer, pad layer from top to bottom successively, support circular layer and perception membrane layer have extraction electrode to pass respectively, and the making step of each layer is as follows:
(1), in vacuum environment, current layer raw material powder is loaded on the table and preheating;
(2) according to the required precision determination original laser of current layer, original laser is adopted to carry out the fusing of scanning sintering and solidification to raw material; The selection principle of original laser is: the laser that the current layer high to required precision selects pulse shorter, the laser that the current layer low to required precision then selects pulse longer; Determine to make the original laser that adopts of current layer in nanosecond laser, picosecond laser and femtosecond laser in conjunction with experience, verification experimental verification based on above-mentioned selection principle;
(3) one or more in real time in the size of the molded current layer of determination and analysis, crystal phase structure, surface morphology and composition, and analysis result is fed back to control centre;
(4) analysis result control centre received and goal-selling comparison, if analysis result reaches goal-selling, then terminate and start to make lower one deck; Otherwise, perform step (5).
(5) use fine finishining laser to carry out fine finishining to the specific region of molded current layer, then perform step (3); Described specific region refers to that analysis result does not reach the region of goal-selling, and described fine finishining laser selection principle is: (a) is picosecond laser or femtosecond laser; Meanwhile, (b) its machining accuracy is higher than original laser.
Above-mentioned original laser and fine finishining laser provide by multi-wavelength integrated fiber lasers, described multi-wavelength integrated fiber lasers comprises controller, nanosecond laser probe, picosecond laser probe and femtosecond laser probe, nanosecond laser probe, picosecond laser probe are all connected with controller with femtosecond laser probe, and controller is used for the control transmitting of nanosecond laser, picosecond laser and femtosecond laser and cut out.
Real-time monitoring system is adopted to carry out real-time determination and analysis in step (3), described real-time monitoring system comprises control-driven system and detecting instrument, detecting instrument is connected with control-driven system, described detecting instrument comprise in size detection instrument, crystal phase structure detecting instrument, surface profile measurement instrument, composition detection instrument one or more.Described detecting instrument comprise in ESEM, X-ray diffractometer, infrared video camera and mass spectrograph one or more.
As preferably: the raw material of upper electrode layer and lower electrode layer are palladium-silver; Lower substrate layer, support circular layer, perception membrane layer, pad layer, the raw material supporting circular layer and perception membrane layer are ceramic material
Of the present invention nanosecond-psec-femtosecond laser complex technique, be adopt the multi-wavelength integrated fiber lasers of nanosecond laser, picosecond laser and femtosecond laser can be provided to realize simultaneously.First, according to the required precision of each layer of pressure sensor, select nanosecond, psec or femtosecond laser to carry out the fusing of scanning sintering as original laser.Then, select to use psec or femtosecond laser to carry out fine finishining to specific region according to Real-Time Monitoring feedback.According to the actual needs of pressure sensor processing, Real-Time Monitoring can be size detection, crystal phase structure detection, surface profile measurement, composition detection etc.
Compared to the prior art, tool of the present invention has the following advantages and beneficial effect:
More accurate size Control and resistance control can be realized, comprise electrode spacing, electrode size etc., eliminate traditional 3D and printed the rear required operation such as cleaning, polishing, efficiently solve and blow the problems such as powder, residual stress is high, intensity is low.
Accompanying drawing explanation
In order to be illustrated more clearly in the inventive method, below the accompanying drawing used required in describing embodiment is briefly described, apparently, accompanying drawing in the following describes is only the embodiment of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the cross-section front view of condenser type thick film pressure transducer, in figure, and 101-infrabasal plate, 102a-first through hole, 102b-second through hole, 103-bottom electrode, 104-support ring, 105a-first extraction electrode, 105b-second extraction electrode, 106-top electrode, 107-perception diaphragm, 108a-first pad, 108b-second pad, 109-cavity;
Fig. 2 is the flow chart of the inventive method detailed description of the invention.
Detailed description of the invention
See Fig. 1, the condenser type thick film pressure transducer prepared by the present invention is formed primarily of infrabasal plate (101), bottom electrode (103), support ring (104), top electrode (106), perception diaphragm (107) and extraction electrode (105a, 105b).Perception diaphragm (107) is used to the deformation layer experiencing ambient pressure, and its lower surface is manufactured with top electrode (106), and its upper surface is manufactured with pad (108a, 108b).Infrabasal plate (101) plays the supporting role to sensor, and its upper surface is manufactured with bottom electrode (103).Support ring (104) is used for connecting infrabasal plate (101) and perception diaphragm (107), and the signal of telecommunication of bottom electrode (103) is by being drawn out to second pad (108b) of perception diaphragm (107) upper surface through second extraction electrode (105b) of support ring (104); Meanwhile, top electrode (106) is also connected to first pad (108a) of perception diaphragm (107) upper surface by the first extraction electrode (105a), and top electrode (106) and bottom electrode (103) be a composition capacitor jointly.
In condenser type thick film pressure transducer, top electrode (106) and bottom electrode (103) adopt palladium-silver or other metals, and remainder is ceramic material, as aluminium oxide and zirconia etc.
Fig. 2 is the particular flow sheet of the inventive method, and the present invention successively performs following steps:
(1), in vacuum environment, current layer raw material powder is loaded on the table and preheating.
(2) according to the required precision determination original laser of current layer, and adopt this original laser to carry out the fusing of scanning sintering and solidification to raw material, described original laser is nanosecond laser, picosecond laser or femtosecond laser.
The present invention successively carries out shaping to make pressure sensor according to pressure sensor structure, the required precision of different layers may be different, so the original laser selected by different layers is also different.The selection principle of original laser is: the laser that the current layer high to required precision can select pulse shorter as original laser, such as picosecond laser or femtosecond laser; The laser that the current layer low to required precision then selects pulse longer is as original laser.This step is based on above-mentioned selection principle and determine to prepare in conjunction with experience, verification experimental verification the original laser that current layer adopts.
(3) what adopt in the size of the real-time determination and analysis of real-time monitoring system molded current layer, crystal phase structure, surface topography, composition is one or more, and analysis result is fed back to control centre.
Real-time monitoring system comprises control-driven system and detecting instrument, detecting instrument is connected with control-driven system, described detecting instrument comprise in size detection instrument, crystal phase structure detecting instrument, surface profile measurement instrument, composition detection instrument one or more.In concrete enforcement, detecting instrument comprises ESEM, X-ray diffractometer, infrared video camera and mass spectrograph.
(4) analysis result control centre received and goal-selling comparison, if analysis result reaches goal-selling, then continue step (6); Otherwise, perform step (5).
(5) use fine finishining laser to carry out fine finishining to the specific region of molded current layer, then perform step (3).Described specific region refers to that analysis result does not reach the region of goal-selling.The laser that the pulse of fine finishining laser general Selection radio original laser is shorter.
(6) step (1) ~ (5) are repeated to complete the shaping of lower one deck.
According to the hierarchy of condenser type thick film pressure transducer, the order that 3D prints can be from top to bottom, also can be from top to bottom.
In concrete enforcement, original laser and fine finishining laser provide by multi-wavelength integrated fiber lasers, described multi-wavelength integrated fiber lasers comprises controller, nanosecond laser probe, picosecond laser probe and femtosecond laser probe, nanosecond laser probe, picosecond laser probe are all connected with controller with femtosecond laser probe, and controller is used for the control transmitting of nanosecond laser, picosecond laser and femtosecond laser and cut out.
Because pressure sensor is sandwich construction, comprise perception membrane layer, insulating barrier, electrode layer etc., different layers is also different to required precision, so the laser selected by different layers is also different.Generally, the laser that higher to required precision layer can select punching second such as picosecond laser or femtosecond laser shorter.In addition, actual processing effect and default effect are also differentiated, so obtain actual processing effect in real time by real-time monitoring system, and adjust used laser further according to actual processing effect, thus realize the accurate processing of product.
In at every turn shaping, three kinds of laser of multi-wavelength integrated fiber lasers and the multiple detection means of real-time monitoring system not all need to use, and generally require to select suitable original laser, fine finishining laser and detection means according to pressure sensor.But multiple laser and multiple detection means make the present invention have versatility, the pointwise that can realize pressure sensor controls, and realizes the On-line Control of any yardstick, shape, composition and microstructure.
Claims (6)
1., based on a condenser type thick film pressure transducer preparation method for femtosecond laser complex technique, it is characterized in that:
According to successively preparing condenser type thick film pressure transducer from top to bottom or from top to bottom, described condenser type thick film pressure transducer comprises lower substrate layer, lower electrode layer, support circular layer, upper electrode layer, perception membrane layer, pad layer from top to bottom successively, support circular layer and perception membrane layer have extraction electrode to pass respectively, and the making step of each layer is as follows:
(1), in vacuum environment, current layer raw material powder is loaded on the table and preheating;
(2) according to the required precision determination original laser of current layer, original laser is adopted to carry out the fusing of scanning sintering and solidification to raw material; The selection principle of original laser is: the laser that the current layer high to required precision selects pulse shorter, the laser that the current layer low to required precision then selects pulse longer; Determine to make the original laser that adopts of current layer in nanosecond laser, picosecond laser and femtosecond laser in conjunction with experience, verification experimental verification based on above-mentioned selection principle;
(3) one or more in real time in the size of the molded current layer of determination and analysis, crystal phase structure, surface morphology and composition, and analysis result is fed back to control centre;
(4) analysis result control centre received and goal-selling comparison, if analysis result reaches goal-selling, then terminate and start to make lower one deck; Otherwise, perform step (5);
(5) use fine finishining laser to carry out fine finishining to the specific region of molded current layer, then perform step (3); Described specific region refers to that analysis result does not reach the region of goal-selling, and described fine finishining laser selection principle is: (a) is picosecond laser or femtosecond laser; Meanwhile, (b) its machining accuracy is higher than original laser.
2., as claimed in claim 1 based on the condenser type thick film pressure transducer preparation method of femtosecond laser complex technique, it is characterized in that:
Described original laser and fine finishining laser provide by multi-wavelength integrated fiber lasers, described multi-wavelength integrated fiber lasers comprises controller, nanosecond laser probe, picosecond laser probe and femtosecond laser probe, nanosecond laser probe, picosecond laser probe are all connected with controller with femtosecond laser probe, and controller is used for the control transmitting of nanosecond laser, picosecond laser and femtosecond laser and cut out.
3., as claimed in claim 1 based on the condenser type thick film pressure transducer preparation method of femtosecond laser complex technique, it is characterized in that:
Real-time monitoring system is adopted to carry out real-time determination and analysis in step (3), described real-time monitoring system comprises control-driven system and detecting instrument, detecting instrument is connected with control-driven system, described detecting instrument comprise in size detection instrument, crystal phase structure detecting instrument, surface profile measurement instrument, composition detection instrument one or more.
4., as claimed in claim 3 based on the condenser type thick film pressure transducer preparation method of femtosecond laser complex technique, it is characterized in that:
Described detecting instrument comprise in ESEM, X-ray diffractometer, infrared video camera and mass spectrograph one or more.
5., as claimed in claim 1 based on the condenser type thick film pressure transducer preparation method of femtosecond laser complex technique, it is characterized in that:
The raw material of upper electrode layer and lower electrode layer are palladium-silver.
6., as claimed in claim 1 based on the condenser type thick film pressure transducer preparation method of femtosecond laser complex technique, it is characterized in that:
Lower substrate layer, support circular layer, perception membrane layer, pad layer, the raw material supporting circular layer and perception membrane layer are ceramic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510356527.2A CN104942288B (en) | 2015-06-25 | 2015-06-25 | Capacitance thick film pressure sensor manufacturing method based on nanosecond- picosecond-femtosecond laser hybrid technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510356527.2A CN104942288B (en) | 2015-06-25 | 2015-06-25 | Capacitance thick film pressure sensor manufacturing method based on nanosecond- picosecond-femtosecond laser hybrid technology |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104942288A true CN104942288A (en) | 2015-09-30 |
| CN104942288B CN104942288B (en) | 2017-04-12 |
Family
ID=54157645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510356527.2A Active CN104942288B (en) | 2015-06-25 | 2015-06-25 | Capacitance thick film pressure sensor manufacturing method based on nanosecond- picosecond-femtosecond laser hybrid technology |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104942288B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1142049A (en) * | 1995-07-28 | 1997-02-05 | 山东三鑫科技(集团)股份有限公司 | Ceramic capacitor-type pressure transmitter and production technology thereof |
| US20060020415A1 (en) * | 2004-07-23 | 2006-01-26 | Hardwicke Canan U | Sensor and method for making same |
| CN101063637A (en) * | 2006-04-28 | 2007-10-31 | 中国科学院合肥物质科学研究院 | Preparation method of double-capacitor thick film ceramic pressure-sensitive element |
| CN201300207Y (en) * | 2008-10-30 | 2009-09-02 | 华中科技大学 | Selective laser melting rapid molding device for metal parts |
| CN203791625U (en) * | 2014-05-05 | 2014-08-27 | 武汉新瑞达激光工程有限责任公司 | Detachable selective quick forming device |
| CN104708003A (en) * | 2015-03-19 | 2015-06-17 | 西安铂力特激光成形技术有限公司 | Pico-second laser combined machining SLM device and laser rapid prototyping methods |
-
2015
- 2015-06-25 CN CN201510356527.2A patent/CN104942288B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1142049A (en) * | 1995-07-28 | 1997-02-05 | 山东三鑫科技(集团)股份有限公司 | Ceramic capacitor-type pressure transmitter and production technology thereof |
| US20060020415A1 (en) * | 2004-07-23 | 2006-01-26 | Hardwicke Canan U | Sensor and method for making same |
| CN101063637A (en) * | 2006-04-28 | 2007-10-31 | 中国科学院合肥物质科学研究院 | Preparation method of double-capacitor thick film ceramic pressure-sensitive element |
| CN201300207Y (en) * | 2008-10-30 | 2009-09-02 | 华中科技大学 | Selective laser melting rapid molding device for metal parts |
| CN203791625U (en) * | 2014-05-05 | 2014-08-27 | 武汉新瑞达激光工程有限责任公司 | Detachable selective quick forming device |
| CN104708003A (en) * | 2015-03-19 | 2015-06-17 | 西安铂力特激光成形技术有限公司 | Pico-second laser combined machining SLM device and laser rapid prototyping methods |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104942288B (en) | 2017-04-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104907568B (en) | Piezoresistive thick film pressure sensor manufacturing method based on femtosecond laser composite technology | |
| US10682716B2 (en) | Method for rapidly forming a part using combination of arc deposition and laser shock forging and device implementing same | |
| CN104972124B (en) | Real-time monitoring rapid prototyping device and method based on femtosecond laser composite technology | |
| CN104959600B (en) | Preparation method for planar-type oxygen sensor based on nanosecond-picosecond-femtosecond laser composite technology | |
| JP6815522B2 (en) | Full laser composite laminated molding method and equipment | |
| CN108111139B (en) | SMD quartz resonator and processing equipment and method thereof | |
| CN105252145B (en) | A kind of method and apparatus of sheet metal superposition manufacture complicated shape part | |
| WO2019140965A1 (en) | Device and method for improving surface quality of slm forming part with integrated double-type laser | |
| US9816887B2 (en) | Ceramic pressure measuring cell and method for its manufacture | |
| CN106425125A (en) | Ceramic drilling method of composite nanosecond-picosecond-femtosecond laser technology | |
| CN105855549B (en) | A kind of method of pulse laser silk filling increasing material manufacturing nickel-base alloy structure | |
| CN107217253B (en) | Light-powder-gas coaxial conveying laser cladding impact forging forming composite manufacturing method | |
| US20090081512A1 (en) | Micromachined electrolyte sheet, fuel cell devices utilizing such, and micromachining method for making fuel cell devices | |
| CN112453730B (en) | Laser processing system and processing method for micropores with high depth-to-diameter ratio | |
| Liao et al. | High quality full ablation cutting and stealth dicing of silica glass using picosecond laser Bessel beam with burst mode | |
| CN206294135U (en) | A kind of SMD quartz resonators and its process equipment | |
| CN111548023B (en) | Method for finely processing glass surface by using red light nanosecond laser | |
| CN101269443A (en) | Process for resurfacing an aluminum alloy part | |
| CN104400244B (en) | Thin-wall titanium alloy spinning part laser weld fire check sensitivity tests method | |
| JP2013063454A (en) | Laser machining method and laser machining device | |
| CN103128451B (en) | Method and equipment for utilizing ultrafast lasers for frequency modulation of quartz crystals | |
| CN114473214A (en) | Double laser beam coupling polishing method for ceramic surface | |
| CN107385431B (en) | Laser cladding impact forging constrained forming method for non-matrix and non-support destressing metal part | |
| CN107442955A (en) | A kind of laser auxiliary heating and immediately cleaning formula ultrasonic wave rapid molding device | |
| CN104942288A (en) | Capacitance thick film pressure sensor manufacturing method based on femto-second laser hybrid technology |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211229 Address after: 430075 No. 2, floor 3, building 12, zone B, high tech medical device Park, No. 818, Gaoxin Avenue, Donghu New Technology Development Zone, Wuhan, Hubei (Wuhan area of free trade zone) Patentee after: WUHAN FINE MEMS Inc. Address before: 430072 Hubei Province, Wuhan city Wuchang District of Wuhan University Luojiashan Patentee before: WUHAN University Patentee before: Wuhan feien Microelectronics Co., Ltd |