CN104942288B - Capacitance thick film pressure sensor manufacturing method based on nanosecond- picosecond-femtosecond laser hybrid technology - Google Patents
Capacitance thick film pressure sensor manufacturing method based on nanosecond- picosecond-femtosecond laser hybrid technology Download PDFInfo
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- CN104942288B CN104942288B CN201510356527.2A CN201510356527A CN104942288B CN 104942288 B CN104942288 B CN 104942288B CN 201510356527 A CN201510356527 A CN 201510356527A CN 104942288 B CN104942288 B CN 104942288B
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- thick film
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Abstract
The invention discloses a capacitance thick film pressure sensor manufacturing method based on a nanosecond- picosecond-femtosecond laser hybrid technology. Firstly, according to precision requirements of all layers of a pressure sensor, nanosecond, picosecond or femto-second laser is selected to serve as original laser for scanning, sintering and melting; then, according to real-time monitoring feedback, a specific area is selected to be subjected to finish machining through the picosecond or femto-second laser. According to actual requirements of machining of the pressure sensor, real-time monitoring can be used for size detection, crystalline phase structure detection, microstructure detection, component detection and the like. By means of the method, more precise size control and resistance value control can be achieved, including electrode distance, electrode size and the like. The cleaning procedure, the polishing procedure and the like which are required after traditional 3D printing is finished are omitted, and the problems that powder blowing occurs, residual stress is high and strength is low are effectively solved.
Description
Technical field
The invention belongs to pressure sensor chip technical field, and in particular to a kind of multiple based on nanosecond-psec-femtosecond laser
The condenser type thick film pressure transducer preparation method of conjunction technology.
Background technology
Thick film pressure transducer is the product that thick film technology and sensor technology combine, and is integrated with thick film technology and pressure
Sensor technology, with to temperature-insensitive, process is simple, it is reproducible, suitable for adverse circumstances, reliability be high, low cost
The advantages of.Condenser type thick film pressure transducer is formed by high temperature sintering, concordance and the bad control of precision, and bonding
Interface is excessive, and sealing and interface reliability can not be protected well.
3D printing technique is that one kind successively piles up manufacture by selective laser sintering or fusing with dusty material
The increasing material manufacturing method of product.For relatively conventional manufacturing technology, it can easily produce conventional art and be difficult to what is produced
Complicated, highly difficult product.But, the piece surface that 3D printing goes out often shows that intensity is not high, blows powder, nodularization, it is remaining should
The shortcomings of power height and high rough surface, need to remove the gred forming part and polishing.During current 3D printing only
Have using vision monitoring to control size, there is no the real-time monitoring and control of microstructure and composition, we are unable to find out parts
Microstructure, also its mechanical performance cannot be better controled over.
In recent years, short-pulse laser (such as nanosecond laser, picosecond laser and femtosecond laser) due to heat affecting it is little, machining accuracy
Height, thus receive much concern in Precision Machining field.The pulse width of nanosecond laser is nanosecond (10-9Second) level, its repetition rate one
As be hundreds of kHz, reach as high as 10MHz, therefore very high working (machining) efficiency can be reached.Psec (10-12Second) laser be enough to avoid
There is thermal diffusion and reach these peak energy denisties required for ablation critical process in energy, can provide higher average work(
Rate (10W) and good beam quality (M2<1.5), can be in effective working distance inner focusing into one 10 μm or less light
Point.Femtosecond laser (10-15Second) within the duration of each laser pulse and matter interaction, it is to avoid depositing for thermal diffusion
Fundamentally eliminating similar to various effects such as the melting zone in the long pulse course of processing, heat affected area, shock wave to week
Impact and hot injury that material is caused are enclosed, the spatial dimension involved by the course of processing is substantially reduced, so as to improve accurate journey
Degree, its beam diameter can be focused within 1 μm, and within its precision is up to 100nm, highest can reach 0.1nm.
Nanosecond/psec/femtosecond laser complex technique can be with the advantage of the aspects such as integrated process velocity, precision and cost, will
Which applies to the sintering and micro Process of sensor, can quickly, be prevented effectively from it is laser sintered now during occur blow powder, it is residual
The challenges such as residue stress, can save compensation process.There is presently no the 3D printing product sensor for occurring using the technology.
The content of the invention
For electrode fabrication precision present in condenser type thick film pressure transducer processing technology is high, upper/lower electrode gap
The defect such as concordance is bad and material interface is excessive, the present invention combine nanosecond-psec-femtosecond laser complex technique, it is proposed that one
Plant the condenser type thick film pressure transducer preparation method based on nanosecond-psec-femtosecond laser complex technique.
To solve above-mentioned technical problem, the present invention is adopted the following technical scheme that：
A kind of condenser type thick film pressure transducer preparation method based on nanosecond-psec-femtosecond laser complex technique, according to
Condenser type thick film pressure transducer is prepared from top to bottom or from top to bottom successively, described condenser type thick film pressure transducer is under
To it is upper successively include lower substrate layer, lower electrode layer, support circular layer, upper electrode layer, perceive membrane layer, pad layer, support circular layer and
Perceiving membrane layer has extraction electrode to pass through respectively, and the making step of each layer is as follows：
(1), in vacuum environment, current layer raw material powder is loaded on the table and is preheated；
(2) original laser is determined according to the required precision of current layer, sintering is scanned using original laser to raw material
Fusing and solidification；The selection principle of original laser is：The current layer high to required precision selects the shorter laser of pulse, to precision
Require low current layer then from the laser that pulse is longer；Based on above-mentioned selection principle and incorporate experience into, verification experimental verification is in nanosecond
The original laser for making that current layer is adopted is determined in laser, picosecond laser and femtosecond laser；
(3) in the size of real-time detection and the molded current layer of analysis, crystal phase structure, surface morphology and composition one or
It is multinomial, and analysis result is fed back to into control centre；
(4) analysis result that control centre receives is compared with goal-selling, if analysis result reaches goal-selling, is tied
Beam simultaneously starts from next layer；Otherwise, execution step (5).
(5) polish is carried out to the specific region of molded current layer using polish laser, then execution step (3)；
Described specific region refers to that analysis result is not up to the region of goal-selling, and described polish laser selection principle is：A () is
Picosecond laser or femtosecond laser；Meanwhile, (b) its machining accuracy is higher than original laser.
Above-mentioned original laser and polish laser are provided by multi-wavelength integrated fiber lasers, and described multi-wavelength is integrated
Optical fiber laser includes controller, nanosecond laser probe, picosecond laser probe and femtosecond laser probe, nanosecond laser probe, skin
Second laser probe and femtosecond laser probe are connected with controller, and controller is used for controlling nanosecond laser, picosecond laser and femtosecond
The transmitting and closing of laser.
Real-time detection and analysis are carried out using real-time monitoring system in step (3), described real-time monitoring system includes control
Drive system processed and detecting instrument, detecting instrument are connected with control drive system, and described detecting instrument includes dimension detector
One or more in device, crystal phase structure detecting instrument, surface profile measurement instrument, composition detection instrument.Described detector
Device includes one or more in scanning electron microscope, X-ray diffractometer, infrared video camera and mass spectrograph.
As preferred：The raw material of upper electrode layer and lower electrode layer is palladium-silver；Lower substrate layer, support circular layer, perception
Membrane layer, the raw material of pad layer are ceramic material.
Nanosecond of the present invention-psec-femtosecond laser complex technique, is that employing can be while provide nanosecond laser, skin
The multi-wavelength integrated fiber lasers of second laser and femtosecond laser are realized.First, the required precision according to each layer of pressure transducer,
Nanosecond, psec or femtosecond laser is selected to be scanned sintering fusing as original laser.Then, selected according to real-time monitoring feedback
Polish is carried out using psec or femtosecond laser to specific region.According to being actually needed for pressure transducer processing, real-time monitoring
Can be size detection, crystal phase structure detection, surface profile measurement, composition detection etc..
Compared to the prior art, the invention has the advantages that and beneficial effect：
More accurate size Control and resistance control are capable of achieving, including electrode spacing, electrode size etc., biography is eliminated
The operations such as cleaning, polishing needed for after the completion of system 3D printing, efficiently solve the problems such as blowing high powder, residual stress, low intensity.
Description of the drawings
In order to be illustrated more clearly that the inventive method, embodiment will be described below needed for accompanying drawing to be used make simple
Introduce on ground, it should be apparent that, drawings in the following description are only the embodiment of the present invention, for those of ordinary skill in the art come
Say, on the premise of not paying creative work, can be with according to these other accompanying drawings of accompanying drawings acquisition.
Cross-section front views of the Fig. 1 for condenser type thick film pressure transducer, in figure, 101- infrabasal plates, 102a- first through hole,
The second through holes of 102b-, 103- bottom electrodes, 104- support rings, the first extraction electrodes of 105a-, the second extraction electrodes of 105b-, 106-
Top electrode, 107- perceive diaphragm, the first pads of 108a-, the second pads of 108b-, 109- cavitys；
Flow charts of the Fig. 2 for the inventive method specific embodiment.
Specific embodiment
See Fig. 1, the condenser type thick film pressure transducer prepared by the present invention is mainly by infrabasal plate (101), bottom electrode
(103), support ring (104), Top electrode (106), perception diaphragm (107) and extraction electrode (105a, 105b) are constituted.Perceive diaphragm
(107) it is deformation layer for experiencing ambient pressure, its lower surface makes Top electrode (106), its upper surface makes pad
(108a、108b).Infrabasal plate (101) plays the supporting role to sensor, and its upper surface makes bottom electrode (103).Support
, for connecting infrabasal plate (101) and perceiving diaphragm (107), the signal of telecommunication of bottom electrode (103) is by through support ring for ring (104)
(104) the second extraction electrode (105b) is drawn out to the second pad (108b) for perceiving diaphragm (107) upper surface；Meanwhile, upper electricity
Pole (106) is connected to the first pad (108a) for perceiving diaphragm (107) upper surface, upper electricity also by the first extraction electrode (105a)
Pole (106) and bottom electrode (103) collectively constitute a capacitor.
In condenser type thick film pressure transducer, Top electrode (106) and bottom electrode (103) be using palladium-silver or other metals,
Remainder is ceramic material, such as aluminium oxide and zirconium oxide etc..
Particular flow sheets of the Fig. 2 for the inventive method, the present invention successively perform following steps：
(1), in vacuum environment, current layer raw material powder is loaded on the table and is preheated.
(2) original laser is determined according to the required precision of current layer, and raw material is scanned using the original laser
Sintering fusing and solidification, described original laser are nanosecond laser, picosecond laser or femtosecond laser.
The present invention successively carries out molding to make pressure transducer, the required precision of different layers according to pressure sensor structure
May be different, so, the selected original laser of different layers is also different.The selection principle of original laser is：It is high to required precision
Current layer can select the shorter laser of pulse as original laser, such as picosecond laser or femtosecond laser；It is low to required precision
Current layer then from the longer laser of pulse as original laser.This step is based on above-mentioned selection principle and incorporates experience into, tries
Checking determination prepares the original laser adopted by current layer.
(3) using the size of real-time monitoring system real-time detection and the molded current layer of analysis, crystal phase structure, surface shape
One or more in looks, composition, and analysis result is fed back to into control centre.
Real-time monitoring system includes controlling drive system and detecting instrument, and detecting instrument is connected with control drive system, institute
During the detecting instrument stated includes size detection instrument, crystal phase structure detecting instrument, surface profile measurement instrument, composition detection instrument
One or more.In being embodied as, detecting instrument includes scanning electron microscope, X-ray diffractometer, infrared video camera and mass spectrograph.
(4) analysis result that control centre receives is compared with goal-selling, if analysis result reaches goal-selling, after
Continuous step (6)；Otherwise, execution step (5).
(5) polish is carried out to the specific region of molded current layer using polish laser, then execution step (3).
Described specific region refers to that analysis result is not up to the region of goal-selling.Polish laser is typically chosen than original laser pulse
Shorter laser.
(6) repeat step (1)～(5) are completing next layer of molding.
According to the hierarchy of condenser type thick film pressure transducer, the order of 3D printing can be from top to bottom, it is also possible to
It is from top to bottom.
In being embodied as, original laser and polish laser are provided by multi-wavelength integrated fiber lasers, and described is more
Wavelength integrated fiber lasers include controller, nanosecond laser probe, picosecond laser probe and femtosecond laser probe, nanosecond laser
Probe, picosecond laser probe and femtosecond laser probe are connected with controller, and controller is used for controlling nanosecond laser, picosecond laser
With the transmitting and closing of femtosecond laser.
Because pressure transducer is multiple structure, including perceives membrane layer, insulating barrier, electrode layer etc., different layers are to precision
Requirement be also it is different, so, the selected laser of different layers is also different.Typically, the layer higher to required precision can select skin
The second such as laser or femtosecond laser second rushes shorter laser.Additionally, reality processing effect and default effect are also differentiated, so
Reality processing effect is obtained in real time by real-time monitoring system, and further adjusted according to reality processing effect used swash
Light, so as to realize the accurate processing of product.
Every time in molding, three kinds of laser and various detection meanss of real-time monitoring system of multi-wavelength integrated fiber lasers
Not it is required to use, is typically based on pressure transducer requirement and selects suitable original laser, polish laser and detection meanss.
But various laser and various detection meanss cause the present invention to have versatility, the pointwise control of pressure transducer is capable of achieving, is realized
The On-line Control of any yardstick, shape, composition and microstructure.
Claims (6)
1. a kind of condenser type thick film pressure transducer preparation method based on nanosecond-psec-femtosecond laser complex technique, its feature
It is：
According to condenser type thick film pressure transducer is successively prepared from top to bottom or from top to bottom, described condenser type thick film pressure is passed
Sensor includes lower substrate layer, lower electrode layer from top to bottom successively, supports circular layer, upper electrode layer, perceives membrane layer, pad layer,
Pushing out ring layer and perception membrane layer have extraction electrode to pass through respectively, and the making step of each layer is as follows：
(1), in vacuum environment, current layer raw material powder is loaded on the table and is preheated；
(2) original laser is determined according to the required precision of current layer, sintering fusing is scanned using original laser to raw material
And solidification；The selection principle of original laser is：The current layer high to required precision selects the shorter laser of pulse, to required precision
Low current layer is then from the laser that pulse is longer；Based on above-mentioned selection principle and incorporate experience into, verification experimental verification nanosecond laser,
The original laser for making that current layer is adopted is determined in picosecond laser and femtosecond laser；
(3) or many in the size of real-time detection and the molded current layer of analysis, crystal phase structure, surface morphology and composition
, and analysis result is fed back to into control centre；
(4) analysis result that control centre receives is compared with goal-selling, if analysis result reaches goal-selling, is terminated simultaneously
Start from next layer；Otherwise, execution step (5)；
(5) polish is carried out to the specific region of molded current layer using polish laser, then execution step (3)；It is described
Specific region refer to that analysis result is not up to the region of goal-selling, described polish laser selection principle is：A () is psec
Laser or femtosecond laser；Meanwhile, (b) its machining accuracy is higher than original laser.
2. the condenser type thick film pressure transducer system based on nanosecond-psec-femtosecond laser complex technique as claimed in claim 1
Preparation Method, it is characterised in that：
Described original laser and polish laser are provided by multi-wavelength integrated fiber lasers, described multi-wavelength Integrated Light
Fibre laser includes controller, nanosecond laser probe, picosecond laser probe and femtosecond laser probe, nanosecond laser probe, psec
Laser probe and femtosecond laser probe are connected with controller, and controller is swashed for controlling nanosecond laser, picosecond laser and femtosecond
The transmitting and closing of light.
3. the condenser type thick film pressure transducer system based on nanosecond-psec-femtosecond laser complex technique as claimed in claim 1
Preparation Method, it is characterised in that：
Real-time detection and analysis are carried out using real-time monitoring system in step (3), described real-time monitoring system includes that control is driven
Dynamic system and detecting instrument, detecting instrument are connected with control drive system, and described detecting instrument includes size detection instrument, crystalline substance
One or more in phase structure detecting instrument, surface profile measurement instrument, composition detection instrument.
4. the condenser type thick film pressure transducer system based on nanosecond-psec-femtosecond laser complex technique as claimed in claim 3
Preparation Method, it is characterised in that：
Described detecting instrument includes one or more in scanning electron microscope, X-ray diffractometer, infrared video camera and mass spectrograph.
5. the condenser type thick film pressure transducer system based on nanosecond-psec-femtosecond laser complex technique as claimed in claim 1
Preparation Method, it is characterised in that：
The raw material of upper electrode layer and lower electrode layer is palladium-silver.
6. the condenser type thick film pressure transducer system based on nanosecond-psec-femtosecond laser complex technique as claimed in claim 1
Preparation Method, it is characterised in that：
Lower substrate layer, support circular layer, perception membrane layer, the raw material of pad layer are ceramic material.
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| CN1142049A (en) * | 1995-07-28 | 1997-02-05 | 山东三鑫科技(集团)股份有限公司 | Ceramic capacitor-type pressure transmitter and production technology thereof |
| US20060020415A1 (en) * | 2004-07-23 | 2006-01-26 | Hardwicke Canan U | Sensor and method for making same |
| CN100442036C (en) * | 2006-04-28 | 2008-12-10 | 中国科学院合肥物质科学研究院 | Preparation method of double capacitance thick film ceramic pressure element |
| CN201300207Y (en) * | 2008-10-30 | 2009-09-02 | 华中科技大学 | Selective laser melting rapid molding device for metal parts |
| CN203791625U (en) * | 2014-05-05 | 2014-08-27 | 武汉新瑞达激光工程有限责任公司 | Detachable selective quick forming device |
| CN104708003B (en) * | 2015-03-19 | 2017-03-08 | 西安铂力特激光成形技术有限公司 | A kind of picosecond laser Compound Machining SLM device and laser fast forming method |
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Effective date of registration: 20211229 Address after: 430075 No. 2, floor 3, building 12, zone B, high tech medical device Park, No. 818, Gaoxin Avenue, Donghu New Technology Development Zone, Wuhan, Hubei (Wuhan area of free trade zone) Patentee after: WUHAN FINE MEMS Inc. Address before: 430072 Hubei Province, Wuhan city Wuchang District of Wuhan University Luojiashan Patentee before: WUHAN University Patentee before: Wuhan feien Microelectronics Co., Ltd |
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