CN104934359B - 一种插片机花篮夹具 - Google Patents

一种插片机花篮夹具 Download PDF

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CN104934359B
CN104934359B CN201510310242.5A CN201510310242A CN104934359B CN 104934359 B CN104934359 B CN 104934359B CN 201510310242 A CN201510310242 A CN 201510310242A CN 104934359 B CN104934359 B CN 104934359B
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decorated basket
support
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CN104934359A (zh
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朱兴华
刘宏华
王昊淇
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Konca Solar Cell Co Ltd
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Konca Solar Cell Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)

Abstract

本发明公开了一种插片机花篮夹具，包括支架、底板、侧挡板和后挡板，所述底板通过螺栓固定在支架上，所述侧挡板通过螺栓固定在底板上，所述两块侧挡板之间的距离与花篮宽度一致，所述后挡板也设置在底板上，并通过支架上的安装横杆固定在支架上，所述侧挡板上端开设有开槽，所述通孔内设置有活动折弯压板，所述活动折弯压板上设置有连接螺栓，所述连接螺栓上固定连接有弹簧，所述弹簧下端与固定在侧挡板上的连接螺栓固定连接，所述插片机花篮夹具保证了花篮的稳定性，从而可以精确插片，防止硅片碰撞花篮造成隐裂缺角，降低了碎片率。

Description

一种插片机花篮夹具
技术领域
本发明涉及硅片加工装置，尤其涉及一种插片机花篮夹具。
背景技术
硅片在去胶过后进入插片工序,经常由于人为的操作造成隐裂或者缺角。造成硅片隐裂缺角的原因很多，在实际生产把控中也很难全部解决，但由于插片花篮插不稳导致硅片撞击到花篮边缘或者插不进,需要人为去按压硅片,导致1％‐3％的碎片率。
发明内容
本发明的目的在于提供一种保证插片花篮位置稳定，从而方便插片的插片机花篮夹具。
为实现上述目的，本发明提供如下技术方案：
一种插片机花篮夹具，包括支架、底板、侧挡板和后挡板，所述底板通过螺栓固定在支架上，所述侧挡板通过螺栓固定在底板上，所述两块侧挡板之间的距离与花篮宽度一致，所述后挡板也设置在底板上，并通过支架上的安装横杆固定在支架上，所述侧挡板上端开设有开槽，所述通孔内设置有活动折弯压板，所述活动折弯压板上设置有连接螺栓，所述连接螺栓上固定连接有弹簧，所述弹簧下端与固定在侧挡板上的连接螺栓固定连接。
作为本发明进一步的方案：所述侧挡板的进口处一体设置有向外折弯的导向板。
作为本发明进一步的方案：所述支架上至少设置有一组插片机花篮夹具。
本发明的有益效果为：所述插片机花篮夹具通过后档板、侧挡板配合活动折弯挡板牢牢的定位住插片机花篮，从而方便插片，从而防止硅片碰撞花篮造成隐裂缺角，降低了碎片率。
附图说明
图1为本发明提供的插片机花篮夹具的正视图。
图中：1、支架；11、安装横杆；2、底板；3、侧挡板；31、导向板；32、开槽；4、后挡板；5、活动折弯压板；6、弹簧；7、连接螺栓；8、螺栓。
具体实施方式
下面结合附图并通过具体实施方式来进一步说明本发明的技术方案。
请参阅图1，所述插片机花篮夹具，包括支架1、底板2、侧挡板3和后挡板4，所述支架1上连接有两套插片机花篮夹具，所述底板2通过螺栓8固定在支架1上，所述侧挡板3通过螺栓8固定在底板2上，所述两块侧挡板3之间的距离与花篮宽度一致，所述侧挡板3的进口处一体设置有向外折弯的导向板31，方便将花篮插入两块侧挡板之间，所述后挡板4也设置在底板2上，并通过支架1上的安装横杆11固定在支架1上，所述侧挡板3上端开设有开槽32，所述开槽32内设置有活动折弯压板5，所述活动折弯压板5上设置有连接螺栓7，所述连接螺栓7上固定连接有弹簧6，所述弹簧6下端与固定在侧挡板3上的连接螺栓6固定连接。
所述插片机花篮夹具使用时，将花篮通过导向板31插入两块侧挡板3之间，并靠到后挡板4上，再通过活动折弯压板5配合弹簧6可将花篮压住，牢牢定位住花篮，方便精确插片，防止硅片碰撞花篮造成隐裂缺角，降低了碎片率。
以上仅以实施例对本发明进行了说明，但本发明并不限于上述尺寸和外观例证，更不应构成本发明的任何限制。只要对本发明所做的任何改进或者变型均属于本发明权利要求主张的保护范围之内。

Claims (1)

1.一种插片机花篮夹具，其特征在于：包括支架、底板、侧挡板和后挡板，所述底板通过螺栓固定在支架上，所述侧挡板通过螺栓固定在底板上，所述两块侧挡板之间的距离与花篮宽度一致，所述后挡板也设置在底板上，并通过支架上的安装横杆固定在支架上，所述侧挡板的进口处一体设置有向外折弯的导向板，所述侧挡板上端开设有开槽，所述开槽内设置有活动折弯压板，所述活动折弯压板上设置有连接螺栓，所述连接螺栓上固定连接有弹簧，所述弹簧下端与固定在所述侧挡板上的连接螺栓固定连接，所述支架上至少设置有一组插片机花篮夹具。
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CN106124959A (zh) * 2016-08-24 2016-11-16 高佳太阳能股份有限公司 硅片少子寿命测试仪用定位装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0657919A1 (en) * 1993-12-10 1995-06-14 Shin-Etsu Handotai Company Limited Device for handling wafers
CN203150532U (zh) * 2013-02-05 2013-08-21 润峰电力有限公司 硅片花篮夹具
CN103326059A (zh) * 2013-06-26 2013-09-25 双登集团股份有限公司 蓄电池极群打包夹具
CN104552055A (zh) * 2013-10-25 2015-04-29 常州市佳和工具有限公司 弹簧轴承夹具
CN204966474U (zh) * 2015-06-08 2016-01-13 高佳太阳能股份有限公司 一种插片机花篮夹具

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0657919A1 (en) * 1993-12-10 1995-06-14 Shin-Etsu Handotai Company Limited Device for handling wafers
CN203150532U (zh) * 2013-02-05 2013-08-21 润峰电力有限公司 硅片花篮夹具
CN103326059A (zh) * 2013-06-26 2013-09-25 双登集团股份有限公司 蓄电池极群打包夹具
CN104552055A (zh) * 2013-10-25 2015-04-29 常州市佳和工具有限公司 弹簧轴承夹具
CN204966474U (zh) * 2015-06-08 2016-01-13 高佳太阳能股份有限公司 一种插片机花篮夹具

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