CN104923322B - A kind of dielectrophoretic particles sorting micro-fluidic chip - Google Patents
A kind of dielectrophoretic particles sorting micro-fluidic chip Download PDFInfo
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- CN104923322B CN104923322B CN201510362444.4A CN201510362444A CN104923322B CN 104923322 B CN104923322 B CN 104923322B CN 201510362444 A CN201510362444 A CN 201510362444A CN 104923322 B CN104923322 B CN 104923322B
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Abstract
The invention discloses a kind of dielectrophoretic particles sorting micro-fluidic chip, first with micro-fluidic chip soft lithographic technique, obtain having effigurate micro through hole and microchannel, unlatching and closed action in conjunction with plating solution electromagnetic valve, the topochemistry realizing microchannel interior walls is gold-plated or silver-plated, forms cladding region. Coating electrode in cladding region and the plane electrode after energising collectively form the non-uniform electric field region of Guan Bi, apply, above through shape control electromagnetic valve, the electromagnetic force that size is variable at coating electrode, cause the deformation of coating electrode, the electric-field intensity distribution causing non-uniform electric field region changes, and causes the change that dielectrophoretic force is distributed. The present invention changes the amplitude of external electric field without regulating external signal source, and only needs the size by controlling shape control electromagnetic valve electromagnetic force, can realize the field intensity to non-uniform electric field region and the adjustment of Electric Field Distribution, it is achieved the sorting to different attribute dielectric particle.
Description
Technical field
The present invention relates to particle sorting technology field, be specially a kind of dielectrophoretic particles sorting micro-fluidic chip.
Background technology
Microfluidic chip technology is integrated into basic operation units such as biology, the sample preparation of chemical analysis processes, pretreatment, reaction, separation, detections on the chip of one piece of micro-meter scale, the operations such as fluid, micro-nano particle or the transport of drop, mixing, sorting, enrichment, logical operations can be realized, the development of life sciences and information science is had important strategic importance. Under non-uniform electric field, in solution, the dielectric particle (such as polymer particle, various kinds of cell, antibacterial, virus, DNA, drop etc.) of micro/nano-scale can be subject to the effect of dielectrophoresis (DEP) power and to the strongest or the most weak region clustering of electric field intensity, is called positive dielectrophoresis (pDEP) and negative dielectrophoresis (nDEP) effect. This technology has that the suitability is wide, is easily manipulated, the advantage such as rapidly and efficiently, the fast enriching being usually used on micro-fluidic chip various biological cells and DNA fragmentation and detection, have huge application potential in the field such as Rapid&Early diagnosis of the pretreatment of biological sample, disease.
For the solution containing multiple micro-nano particle, it is possible to according to particle difference in size, dielectric properties (polarizability) etc., it is achieved the dielectrophoresis of intended particle is separated and sorting. Application number is 201110162637.7 disclose a kind of micro blood cell separation device and using method thereof: by the synergism of cell harvestor after signal generator, sample-adding pump, separating chips and separation, it is achieved that the separation of micro blood cell. But the adjustment of the core technology dielectrophoresis of the method is completed by additional signal generator, by artificially regulating amplitude and the frequency of ac signal, reaching the purpose that hemocyte separates, the amplitude range of the signal of telecommunication is limited to the characteristic of signal generator itself, it is difficult to flexible.
Summary of the invention
Shortcoming for prior art, what the present invention intended to solve technical problem is that: propose a kind of dielectrophoretic particles sorting micro-fluidic chip, first with micro-fluidic chip soft lithographic technique, obtain having effigurate micro through hole and microchannel, unlatching and closed action in conjunction with plating solution electromagnetic valve, the topochemistry realizing microchannel interior walls is gold-plated or silver-plated, forms cladding region.Coating electrode in cladding region and the plane electrode after energising collectively form the non-uniform electric field region of Guan Bi, apply, above through shape control electromagnetic valve, the electromagnetic force that size is variable at coating electrode, cause the deformation of coating electrode, the electric-field intensity distribution causing non-uniform electric field region changes, and causes the change that dielectrophoretic force is distributed. The present invention changes the amplitude of external electric field without regulating external signal source, and only needs the size by controlling shape control electromagnetic valve electromagnetic force, can realize the field intensity to non-uniform electric field region and the adjustment of Electric Field Distribution, it is achieved the sorting to different attribute dielectric particle.
This invention address that the technical scheme of described technical problem is: provide a kind of dielectrophoretic particles sorting micro-fluidic chip, it is characterised in that described micro-fluidic chip includes plane electrode layer, microchannel layers and key-course; Described key-course is positioned on microchannel layers, and described microchannel layers is positioned on plane electrode layer;
Described plane electrode layer includes electrode substrate, plane electrode and Wiring area; Described plane electrode is deposited in electrode substrate; One end, described Wiring area is connected with plane electrode, other end external power supply;
Described microchannel layers includes microchannel and micro through hole; Described micro through hole includes plating solution entrance, plating solution outlet, sorting solution injection port and sorting solution outlet; Described microchannel includes plating solution microchannel and sorting solution microchannel; Described plating solution microchannel is configured with plating solution electromagnetic valve station, described sorting solution microchannel is configured with sorting solution electromagnetic valve station; Described plating solution microchannel forms cladding region by conventional coating technology coating; Described cladding region has coating electrode, coating electrode and the plane electrode after energising and collectively forms the non-uniform electric field region of Guan Bi;
Described key-course includes key-course substrate, plating solution electromagnetic valve, sorting solution electromagnetic valve and shape control electromagnetic valve; The effect of described key-course substrate is to position for plating solution electromagnetic valve, sorting solution electromagnetic valve and the installation of shape control electromagnetic valve; Described plating solution electromagnetic valve is installed on plating solution electromagnetic valve station; Described sorting solution electromagnetic valve is installed on sorting solution electromagnetic valve station; Described shape control electromagnetic valve is placed on coating electrode, external adjustment power supply.
Compared with prior art, the invention has the beneficial effects as follows: the present invention changes the amplitude of external electric field without regulating external signal source, and only need the size by controlling shape control electromagnetic valve electromagnetic force, the field intensity to non-uniform electric field region and the adjustment of Electric Field Distribution can be realized, realize the sorting to different attribute dielectric particle, and coating electrode deformation process is reversible, controlled; The microfluidic chip structure of the present invention is reasonable, and layout is proper, and manufacturing process is simple, with low cost.
Accompanying drawing explanation
The master that Fig. 1 is dielectrophoretic particles of the present invention sorting a kind of embodiment of micro-fluidic chip looks overall structure schematic diagram; (wherein: 1, plane electrode layer; 2 microchannel layers; 3, key-course)
Fig. 2 is the main TV structure schematic diagram of plane electrode layer of dielectrophoretic particles of the present invention sorting a kind of embodiment of micro-fluidic chip; (wherein: 11, electrode substrate; 12, plane electrode; 13, Wiring area)
Fig. 3 is the main TV structure schematic diagram of microchannel layers of dielectrophoretic particles of the present invention sorting a kind of embodiment of micro-fluidic chip; (wherein: 211, plating solution entrance; 212, plating solution outlet; 221, the first plating solution electromagnetic valve station; 222, the second plating solution electromagnetic valve station;231, sorting solution injection port; 232, the first sorting solution outlet; 233, the second sorting solution outlet; 234, the 3rd sorting solution outlet; 241, the first sorting solution electromagnetic valve station; 242, the second sorting solution electromagnetic valve station; 243, the 3rd sorting solution electromagnetic valve station the 244, the 4th sorts solution electromagnetic valve station; )
Fig. 4 is the main TV structure schematic diagram of key-course of dielectrophoretic particles of the present invention sorting a kind of embodiment of micro-fluidic chip; (wherein: 31, key-course substrate; 34, shape control electromagnetic valve; 321, the first plating solution electromagnetic valve; 322, the second plating solution electromagnetic valve; 331, the first sorting solution electromagnetic valve; 332, the second sorting solution electromagnetic valve; 333, the 3rd sorting solution electromagnetic valve; 334, the 4th sorting solution electromagnetic valve)
Fig. 5 is the cladding region schematic diagram of dielectrophoretic particles of the present invention sorting a kind of embodiment of micro-fluidic chip; (wherein: 25, cladding region; 251, coating electrode)
Fig. 6 be dielectrophoretic particles of the present invention sorting micro-fluidic chip Fig. 5 shown in dashed region look up structural representation;
Fig. 7 is strong electric field region and the weak electric field region formation basic theory figure of dielectrophoretic particles of the present invention sorting a kind of embodiment of micro-fluidic chip; (wherein: a-quadrant-strong electric field region; B region and C region-weak electric field region; F is the electromagnetic force of shape control electromagnetic valve 34)
Detailed description of the invention
Below in conjunction with embodiment and accompanying drawing thereof, the inventive method is further described:
The invention provides a kind of dielectrophoretic particles sorting micro-fluidic chip (referring to Fig. 1-6), including plane electrode layer 1, microchannel layers 2 and key-course 3; Described key-course 3 is positioned on microchannel layers 2, and described microchannel layers 2 is positioned on plane electrode layer 1;
Described plane electrode layer 1 includes electrode substrate 11, plane electrode 12 and Wiring area 13; Described plane electrode 12 is deposited in electrode substrate 11; Described electrode substrate 11 material is glass, acrylic, epoxy resin, ABS etc., and size dimension is 5mm��100mm, thickness 1��3mm; The material of described plane electrode 12 is conductive material, it is possible to for copper, aluminum, gold, silver, ITO, IFO etc., thickness is 100um��1mm, and width is 10��400um; One end, described Wiring area 13 is connected with plane electrode 12, other end external power supply, for providing alternating current power supply for plane electrode 12;
Described microchannel layers 2 includes microchannel and micro through hole; The material of described microchannel layers 2 is polydimethylsiloxane (PDMS), and size dimension is 5mm��100mm, and thickness 1��3mm makes micro through hole and microchannel by soft lithographic technique; Described micro through hole includes plating solution entrance 211, plating solution outlet 212, sorting solution injection port 231 and sorting solution outlet, is respectively used to the sample introduction of plating solution and sorting solution and goes out sample; Described sorting solution outlet has three, is specially the first sorting solution outlet 232, second and sorts solution outlet 233 and the 3rd sorting solution outlet 234; The degree of depth of described microchannel is 10��500um, and width is 20��800um, and the flowing for plating solution and sorting solution provides passage, including plating solution microchannel and sorting solution microchannel; Described plating solution microchannel is configured with plating solution electromagnetic valve station, described sorting solution microchannel is configured with sorting solution electromagnetic valve station; The diameter of described plating solution electromagnetic valve station and solution electromagnetic valve station is 1��10mm, is used for coordinating the corresponding electromagnetic valve of installation; Described plating solution electromagnetic valve station has two, specifically the first plating solution electromagnetic valve station 221 and the second plating solution electromagnetic valve station 222;Described sorting solution electromagnetic valve station has four, is specially the first sorting solution electromagnetic valve station 241, second and sorts solution electromagnetic valve station the 242, the 3rd sorting solution electromagnetic valve station 243 and the 4th sorting solution electromagnetic valve station 244; Described plating solution microchannel forms cladding region 25 (shadow region shown in Figure 5) after conventional coating technology coating; Described cladding region 25 has coating electrode 251 (dashed region shown in Figure 5); Plane electrode 12 after described coating electrode 251 and energising collectively forms the non-uniform electric field region of Guan Bi so that flows through the various dielectric particles in the solution of coating electrode 251 and is subject to the effect of dielectrophoretic force; Vertical dimension between described coating electrode 251 and plane electrode 12 is 10��500um.
The material of described key-course 3 is glass, acrylic, epoxy resin, ABS etc., and size dimension is 5mm��100mm, thickness 1��3mm, concrete size reference plane electrode layer 1 and microchannel layers 2, accomplishes that size is mated; Described key-course 3 includes key-course substrate 31, plating solution electromagnetic valve, sorting solution electromagnetic valve and shape control electromagnetic valve 34; The effect of described key-course substrate 31 is to be accurately positioned for plating solution electromagnetic valve, sorting solution electromagnetic valve and the installation of shape control electromagnetic valve 34; Described plating solution electromagnetic valve has two, it is specially the first plating solution electromagnetic valve 321 and the second plating solution electromagnetic valve 322, first plating solution electromagnetic valve 321 is installed on the first plating solution electromagnetic valve station 221, and the second plating solution electromagnetic valve 322 is installed on the second plating solution electromagnetic valve station 222; Described sorting solution electromagnetic valve has four, it is specially the first sorting solution electromagnetic valve 331, second and sorts solution electromagnetic valve the 332, the 3rd sorting solution electromagnetic valve 333 and the 4th sorting solution electromagnetic valve 334, correspondence is installed on first sorting solution electromagnetic valve station the 241, second sorting solution electromagnetic valve station the 242, the 3rd sorting solution electromagnetic valve station 243 and the 4th sorting solution electromagnetic valve station 244 respectively, for controlling the break-make of sorting solution, carry out the sorting of solution particle; Described shape control electromagnetic valve 34 is placed on coating electrode 251, external adjustment power supply, electromagnetic force F can be formed, the size of electromagnetic force F is regulated by the voltage of external adjustment power supply, by the change of electromagnetic force, coating electrode 251 being produced pressure and deformation, the plane electrode 12 after controlling coating electrode 251 with this and be energized collectively forms the electric-field intensity distribution in the non-uniform electric field region of Guan Bi.
The generation type of described cladding region 25 is: the first plating solution electromagnetic valve 321 and the second plating solution electromagnetic valve 322 are opened, all sorting solution electromagnetic valve are closed, then pass into plating solution at plating solution entrance 211, under atmospheric pressure, form cladding region 25 (referring to Fig. 5 shadow region).
The dielectrophoretic particles of the present invention sorting operation principle of micro-fluidic chip and process be (referring to Fig. 5,7):
Plane electrode 12 after described coating electrode 251 (shown in Fig. 5 dashed region) and energising collectively forms the non-uniform electric field region of Guan Bi, under the control of described shape control electromagnetic valve 34 electromagnetic force F, coating electrode 251 can produce deformation in various degree, between the 1%��99% of the deformation quantity scope of coating electrode 251 vertical dimension between plane electrode 12 and coating electrode 251, wherein the size of electromagnetic force F is regulated by the voltage of external adjustment power supply. Deformation causes non-uniform electric field intra-zone electric field intensity to change, form strong electric field region (a-quadrant, corresponding second sorting solution outlet 233) and weak electric field region (B region and C region, corresponding first sorting solution outlet 232 and the 3rd sorting solution outlet 234 respectively), pass through the dielectrophoretic force that the various dielectric particles in the solution in coating electrode 251 region are subject to change, it is made to deflect respectively, flow out from different sorting solution outlets, it is achieved sorting function.
When sorting starts, first plating solution electromagnetic valve 321 and the second plating solution electromagnetic valve 322 are closed, all sorting solution electromagnetic valve are opened, the solution containing multiple different dielectric attribute particle is passed at sorting solution injection port 231, particle sorting can be completed under the effect of non-uniform electric field, particle after sorting sorts solution outlet 232��234 from difference respectively and flows out, it is achieved sorting.
Embodiment 1
First plating solution electromagnetic valve 321 and the second plating solution electromagnetic valve 322 are closed, all sorting solution electromagnetic valve are opened, passing into the solution containing anyway yeast cell at sorting solution injection port 231, yeast cell is subject to the dielectrophoretic force of different attribute (just or bear) respectively anyway. Microchannel width is 200um, degree of depth 50um herein, and the diameter of all plating solution electromagnetic valve stations and sorting solution electromagnetic valve station is 3mm, and the vertical dimension between coating electrode and plane electrode is 15um. Dead cell sorts solution outlet 232 from first and the 3rd sorting solution outlet 234 flows out, corresponding weak electric field region; Living cells sorts solution outlet 233 from second and flows out, corresponding strong electric field region.
Embodiment 2
First plating solution electromagnetic valve 321 and the second plating solution electromagnetic valve 322 are closed, all sorting solution electromagnetic valve are opened, passing into the human blood containing 1:50 dilution at sorting solution injection port 231, erythrocyte and leukocyte are subject to the dielectrophoretic force of different attribute (just or negative) respectively. Microchannel width is 120um, degree of depth 60um herein, and the diameter of all plating solution electromagnetic valve stations and sorting solution electromagnetic valve station is 8mm, and the vertical dimension between coating electrode and plane electrode is 20um. Erythrocyte sorts solution outlet 232 from first and the 3rd sorting solution outlet 234 flows out, corresponding weak electric field region; Leukocyte sorts solution outlet 233 from second and flows out, corresponding strong electric field region.
The present invention does not address part and is applicable to prior art.
Claims (4)
1. a dielectrophoretic particles sorting micro-fluidic chip, it is characterised in that described micro-fluidic chip includes plane electrode layer, microchannel layers and key-course; Described key-course is positioned on microchannel layers, and described microchannel layers is positioned on plane electrode layer;
Described plane electrode layer includes electrode substrate, plane electrode and Wiring area; Described plane electrode is deposited in electrode substrate; One end, described Wiring area is connected with plane electrode, other end external power supply;
Described microchannel layers includes microchannel and micro through hole; Described micro through hole includes plating solution entrance, plating solution outlet, sorting solution injection port and sorting solution outlet; Described microchannel includes plating solution microchannel and sorting solution microchannel; Described plating solution microchannel is configured with plating solution electromagnetic valve station, described sorting solution microchannel is configured with sorting solution electromagnetic valve station; Described plating solution microchannel forms cladding region by conventional coating technology coating; Described cladding region has coating electrode, coating electrode and the plane electrode after energising and collectively forms the non-uniform electric field region of Guan Bi;
Described key-course includes key-course substrate, plating solution electromagnetic valve, sorting solution electromagnetic valve and shape control electromagnetic valve; The effect of described key-course substrate is to position for plating solution electromagnetic valve, sorting solution electromagnetic valve and the installation of shape control electromagnetic valve; Described plating solution electromagnetic valve is installed on plating solution electromagnetic valve station; Described sorting solution electromagnetic valve is installed on sorting solution electromagnetic valve station; Described shape control electromagnetic valve is placed on coating electrode, external adjustment power supply.
2. dielectrophoretic particles according to claim 1 sorting micro-fluidic chip, it is characterised in that the degree of depth of described microchannel is 10��500um, and width is 20��800um.
3. dielectrophoretic particles according to claim 1 sorting micro-fluidic chip, it is characterised in that the diameter of described plating solution electromagnetic valve station and sorting solution electromagnetic valve station is 1��10mm.
4. dielectrophoretic particles according to claim 1 sorting micro-fluidic chip, it is characterised in that the vertical dimension between described coating electrode and plane electrode is 10��500um.
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| CN109337796A (en) * | 2018-11-15 | 2019-02-15 | 江南大学 | Yeast cell high frequency zone system and its ito glass operation module |
| CN110270386B (en) * | 2019-04-11 | 2021-06-04 | 上海天马微电子有限公司 | Microfluidic chip and driving method thereof |
| CN112871229B (en) * | 2021-01-21 | 2022-06-28 | 中国科学技术大学 | Chip for water dielectrophoresis bacteria sorting |
| CN113265327B (en) * | 2021-04-26 | 2022-06-14 | 大连海事大学 | Alternating current-dielectrophoresis microalgae multistage sorting device and method based on algae lipid content |
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| CA2520956C (en) * | 2005-04-08 | 2013-05-07 | Uti Limited Partnership | Integrated microfluidic transport and sorting system |
| US8367018B2 (en) * | 2009-12-07 | 2013-02-05 | Southern Taiwan University Of Technology | Chip with tri-layer electrode and micro-cavity arrays for control of bioparticle and manufacturing method thereof |
| CN103667054B (en) * | 2013-09-18 | 2015-09-30 | 中国航天员科研训练中心 | A kind of integrated micro-flow control cell cultivation chip and preparation method thereof |
| CN204724184U (en) * | 2015-06-26 | 2015-10-28 | 河北工业大学 | A kind of dielectrophoretic particles sorting micro-fluidic chip |
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