CN104902592A - High-temperature quartz heating trough and manufacturing method - Google Patents
High-temperature quartz heating trough and manufacturing method Download PDFInfo
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- CN104902592A CN104902592A CN201510229945.5A CN201510229945A CN104902592A CN 104902592 A CN104902592 A CN 104902592A CN 201510229945 A CN201510229945 A CN 201510229945A CN 104902592 A CN104902592 A CN 104902592A
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- tank
- quartzy cylinder
- quartzy
- cell body
- fixed support
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Abstract
The invention provides a high-temperature quartz heating trough and a manufacturing method, and relates to the field of LED (light emitting diode) manufacturing. The high-temperature quartz heating trough comprises a quartz cylinder, a water trough, water inlets, a quartz cylinder fixing support, a heating film, heat preservation cotton and a water outlet, wherein a water trough baffle of the water trough is provided with four holes, three are the water inlets, and one is the water outlet; the water trough of the quartz heating trough is connected with the quartz cylinder fixing support; the quartz cylinder fixing support is connected with the quartz cylinder in the trough body; the heat preservation cotton is placed between the outer wall of the quartz cylinder and the inner wall of the trough body; and the heating film is adhered to four walls of the quartz cylinder. By adopting the high-temperature quartz heating trough, the problem that the service life is shortened due to corrosion of the trough body is solved, the replacing frequency of the quartz cylinder fixing support is reduced, the equipment consumption cost and the equipment fault rate are reduced, and the running efficiency and the safety of equipment are improved.
Description
Technical field
The present invention relates to LED and manufacture field, be specifically related to a kind of high quartz heating tank and manufacture method.
Background technology
In modern LED manufacturing process, wafer needs to carry out pickling, usually carries out in quartz heating tank, and temperatures as high more than 200 DEG C during Acidwash solution configuration, high temperature can cause damage to cell body, so cell body is made up of resistant to elevated temperatures quartz.
And domestic quartz cell as used in middle electric 45 institutes, Taiwan foundation for a great undertaking, Hua Lian, Beijing, Changzhou Gui Mideng device fabrication producer is by cell body outer wall sticking heating membrane, fill heat-preservation cotton between quartz cell and outside fixed head, the outside white polypropylene board of salt that adopts fixes quartz cell.A kind of quartz heating tank is disclosed in CN201110110726.7, this quartz heating tank cell body upper end is not protected, can make in chip fetching process the high temperature mixed solution on chip low to outside for the polypropylene cell body of fixing quartzy cylinder, cause polypropylene cell body to occur chapping, aging phenomenon, cell body is reduced useful life greatly, and spare parts consumption expense increases.
Because the highest bearing temperature of polypropylene board is 100 DEG C, pick and place again in product process at the outer peripheral polypropylene material of quartz cell, high-temperature acid aqueous slkali drops on polypropylene board, cause polypropylene material after hot environment uses a period of time, chapping just appears in the fixing polypropylene material outside quartz cylinder, aging phenomenon, shortens service life of equipment, danger when increasing operation, increases cost of equipment maintenance, increases the equipment obstacle management time.
Summary of the invention
(1) technical problem solved
For the deficiencies in the prior art, the invention provides a kind of high quartz heating tank and manufacture method, solve the problem that outside quartzy cylinder, fixed support is scorched by high temperature mixed solution.
(2) technical scheme
For realizing above object, the present invention is achieved by the following technical programs:
A kind of high quartz heating tank, comprises quartzy cylinder (1), quartzy cylinder fixed support (4), adds thermosticking film (5), heat-preservation cotton (6), it is characterized in that, also comprises tank (2);
Described tank (2) is provided with tank baffle plate (3);
Described tank baffle plate (3) offers water inlet (31) and delivery port (32);
Described tank (2) is connected with quartzy cylinder fixed support (4), described quartzy cylinder fixed support (4) is connected to quartzy cylinder (1) outside, and the connector of described quartzy cylinder fixed support (4) and quartzy cylinder (1) is positioned in cell body (7);
Be placed with heat-preservation cotton (6) between the outer wall of described quartzy cylinder (1) and cell body (7) inwall, described quartzy cylinder (1) wall posts and adds thermosticking film (5).
Preferably, described water inlet (31) has three, and delivery port (32) has one.
Preferably, the mode of the connection between described tank (2) with quartzy cylinder fixed support (4) is for welding.
Preferably, described tank (2) is outside at cell body (7).
A manufacture method for high quartz heating tank, is characterized in that, comprises the following steps:
S1, measure the peripheral maximum space size of quartzy cylinder (1), design and draw the structural drawings of tank (2);
The structural drawings of the tank (2) that S2, foundation design selects respective material to make tank (2);
S3, the tank made (2) is arranged on quartzy cylinder fixed support (4);
S4, offer a hole respectively in tank baffle plate four side, the hole selecting any side of tank baffle plate is delivery port (32), and the hole of its excess-three side is water inlet (31);
S5, by quartzy cylinder (1) and quartzy cylinder fixed support (4) combination after be arranged in cell body (7).
Preferably, in step S5, quartzy cylinder (1) and quartzy cylinder fixed support (4) combination are mounted for quartzy cell body, it is inner that described quartzy cell body is arranged on cell body (7), described quartzy cylinder (1) wall posts and adds thermosticking film (5), fill heat-preservation cotton (6) between described quartzy cylinder (1) outer wall and cell body (7) inwall, the material of described cell body (7) is polypropylene.
Preferably, the connected mode of tank described in step S3 (2) and quartzy cylinder fixed support (4) is welding.
Preferably, water inlet described in step S4 (31) and delivery port (32) are separately installed with water inlet connection and water outlet joint.
Preferably, the diameter of water inlet pipe described in step S4 is 1/8 inch, and described diameter of outflow tube is 1/4 inch, and described outlet pipe delivery port (32) is lower than water inlet pipe water inlet (31) 5mm.
(3) beneficial effect
The invention provides a kind of manufacture method of high quartz heating tank, by the fixed support outside quartz heating tank cell body increases tank, ensure that the pyrosol dropped in process of production outside quartz cell on polypropylene board can fall into tank and be undertaken lowering the temperature and diluting by the water flowed in time, thus effectively ensure that polypropylene board is not damaged by pyrosol, cell body is significantly extended useful life, reduce quartz body external stability support replace frequency, reduce spare parts consumption expense, reduce equipment failure rate, improve equipment safety operation performance.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is high quartz heating tank stereogram in the embodiment of the present invention;
Fig. 2 is high quartz heating tank vertical view in the embodiment of the present invention;
Fig. 3 is high quartz heating tank tank baffle plate sectional view in the embodiment of the present invention;
Fig. 4 is high quartz heating tank profile in the embodiment of the present invention.
In figure, 1-quartz cylinder, 2-tank, 3-tank baffle plate, 31-water inlet, 32-delivery port, 4-quartz cylinder fixed support, 5-add thermosticking film, 6-heat-preservation cotton, 7-cell body.
Embodiment
For making the object of the embodiment of the present invention, technical scheme and advantage clearly, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Below in conjunction with accompanying drawing, the embodiment of the present invention is described further:
Embodiment 1
Embodiments provide a kind of high quartz heating tank, comprise quartzy cylinder 1, quartzy cylinder fixed support 4, add thermosticking film 5, heat-preservation cotton 6, it is characterized in that, also comprise tank 2; Described tank 2 is provided with tank baffle plate 3; Described tank baffle plate 3 offers water inlet 31 and delivery port 32; Described tank 2 is connected with described quartzy cylinder fixed support 4; Described quartzy cylinder fixed support 4 is connected to outside quartzy cylinder 1, and the connector of described quartzy cylinder fixed support 4 and quartzy cylinder 1 is positioned in cell body 7; Be placed with heat-preservation cotton 6 between the outer wall of described quartzy cylinder 1 and cell body 7 inwall, described quartzy cylinder 1 wall posts and adds thermosticking film 5.
Tank 2 is provided with owing to increasing in quartzy cylinder 1 periphery, the reaction solution dripped in chip fetching process can drop onto in tank 2, diluted by the circulating water in tank 2 and lower the temperature, reach corrosion-resistant effect, in order to keep reaction temperature, between the outer wall and cell body 7 inwall of quartzy cylinder 1, be placed with heat-preservation cotton 6, quartzy cylinder 1 wall posts and adds thermosticking film 5.
Described water inlet 31 has three, and delivery port 32 has one.
The tank 2 of described quartz heating tank and the mode of the connection between quartzy cylinder fixed support 4 are for welding.
Embodiment 2
Embodiments provide a kind of manufacture method of high quartz heating tank, comprise the following steps:
Measure the peripheral maximum space size of quartzy cylinder 1, design and draw the structural drawings of tank 2; Structural drawings according to the tank 2 designed selects acid-alkali-corrosive-resisting exotic material to make tank 2; Be welded on by the tank 2 made on quartzy cylinder fixed support 4, tank 2 is lower than quartzy cylinder 1 upper surface and tank 2 is not less than 5mm apart from quartzy cylinder 1 upper surface distance, and the circulating water in anti-water stopping trough 2 flows in quartzy cylinder 1; A hole is offered respectively in tank 2 four side, the hole selecting any side of tank 2 is delivery port, the hole of its excess-three side is water inlet, to select acid-alkali-corrosive-resisting exotic material to make diameter be the water inlet pipe of 1/8 inch and diameter is the outlet pipe of 1/4 inch, the outlet pipe made is arranged on delivery port by water outlet joint 7, water inlet pipe is arranged on water inlet by water inlet connection 3, outlet pipe delivery port will lower than water inlet pipe water inlet 5mm, in order to control water velocity, increase manual modulation valve at outlet pipe end; Quartzy cylinder 1 and the combination of quartzy cylinder fixed support 4 are mounted for quartzy cell body, quartz cell body is arranged in polypropylene cell body, heat-preservation cotton 6 is filled between quartz cylinder 1 outer wall and polypropylene cell body inwall, quartz cylinder 1 wall posts and adds thermosticking film 5, is placed in cell body 7 after quartzy cell body and polypropylene cell body combine.
To sum up, the embodiment of the present invention 1 and the embodiment of the present invention 2 have following beneficial effect:
Embodiments provide a kind of manufacture method of high quartz heating tank, by the fixed support outside quartz heating tank cell body increases tank, ensure that the pyrosol dropped in process of production outside quartz cell on polypropylene board can fall into tank and be undertaken lowering the temperature and diluting by the water flowed in time, thus effectively ensure that polypropylene board is not damaged by pyrosol, cell body is significantly extended useful life, reduce quartz body external stability support replace frequency, reduce spare parts consumption expense, reduce equipment failure rate, improve equipment safety operation performance.
It should be noted that, in this article, term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability, thus make to comprise the process of a series of key element, method, article or equipment and not only comprise those key elements, but also comprise other key elements clearly do not listed, or also comprise by the intrinsic key element of this process, method, article or equipment.When not more restrictions, the key element limited by statement " comprising ... ", and be not precluded within process, method, article or the equipment comprising described key element and also there is other identical element.
Above embodiment only in order to technical scheme of the present invention to be described, is not intended to limit; Although with reference to previous embodiment to invention has been detailed description, those of ordinary skill in the art is to be understood that: it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein portion of techniques feature; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the spirit and scope of various embodiments of the present invention technical scheme.
Claims (9)
1. a high quartz heating tank, comprises quartzy cylinder (1), quartzy cylinder fixed support (4), adds thermosticking film (5), heat-preservation cotton (6), it is characterized in that, also comprises tank (2);
Described tank (2) is provided with tank baffle plate (3);
Described tank baffle plate (3) offers water inlet (31) and delivery port (32);
Described tank (2) is connected with quartzy cylinder fixed support (4), described quartzy cylinder fixed support (4) is connected to quartzy cylinder (1) outside, and the connector of described quartzy cylinder fixed support (4) and quartzy cylinder (1) is positioned in cell body (7);
Be placed with heat-preservation cotton (6) between the outer wall of described quartzy cylinder (1) and cell body (7) inwall, described quartzy cylinder (1) wall posts and adds thermosticking film (5).
2. high quartz heating tank according to claim 1, is characterized in that, described water inlet (31) has three, and delivery port (32) has one.
3. high quartz heating tank according to claim 1, is characterized in that, the mode of the connection between described tank (2) with quartzy cylinder fixed support (4) is for welding.
4. high quartz heating tank according to claim 1, is characterized in that, described tank (2) is outside at cell body (7).
5. a manufacture method for high quartz heating tank, is characterized in that, comprises the following steps:
S1, measure the peripheral maximum space size of quartzy cylinder (1), design and draw the structural drawings of tank (2);
The structural drawings of the tank (2) that S2, foundation design selects respective material to make tank (2);
S3, the tank made (2) is arranged on quartzy cylinder fixed support (4);
S4, offer a hole respectively in tank baffle plate four side, the hole selecting any side of tank baffle plate is delivery port (32), and the hole of its excess-three side is water inlet (31);
S5, by quartzy cylinder (1) and quartzy cylinder fixed support (4) combination after be arranged in cell body (7).
6. the manufacture method of high quartz heating tank as claimed in claim 5, it is characterized in that, in step S5, quartzy cylinder (1) and quartzy cylinder fixed support (4) combination are mounted for quartzy cell body, it is inner that described quartzy cell body is arranged on cell body (7), described quartzy cylinder (1) wall posts and adds thermosticking film (5), fill heat-preservation cotton (6) between described quartzy cylinder (1) outer wall and cell body (7) inwall, the material of described cell body (7) is polypropylene.
7. the manufacture method of high quartz heating tank as claimed in claim 5, is characterized in that, the connected mode of tank described in step S3 (2) and quartzy cylinder fixed support (4) is welding.
8. the manufacture method of high quartz heating tank as claimed in claim 5, it is characterized in that, water inlet described in step S4 (31) and delivery port (32) are separately installed with water inlet connection and water outlet joint.
9. the manufacture method of high quartz heating tank as claimed in claim 5, it is characterized in that, the diameter of water inlet pipe described in step S4 is 1/8 inch, and described diameter of outflow tube is 1/4 inch, and described outlet pipe delivery port (32) is lower than water inlet pipe water inlet (31) 5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510229945.5A CN104902592B (en) | 2015-05-07 | 2015-05-07 | The manufacture method of high quartz heating tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510229945.5A CN104902592B (en) | 2015-05-07 | 2015-05-07 | The manufacture method of high quartz heating tank |
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| Publication Number | Publication Date |
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| CN104902592A true CN104902592A (en) | 2015-09-09 |
| CN104902592B CN104902592B (en) | 2017-01-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510229945.5A Active CN104902592B (en) | 2015-05-07 | 2015-05-07 | The manufacture method of high quartz heating tank |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111508875A (en) * | 2020-04-29 | 2020-08-07 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Quartz groove and manufacturing method thereof |
Citations (5)
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|---|---|---|---|---|
| JPH0437131A (en) * | 1990-06-01 | 1992-02-07 | Fuji Electric Co Ltd | Pure water washing vessel for semiconductor wafer and washing thereof |
| JPH1050652A (en) * | 1996-07-29 | 1998-02-20 | Dan Kagaku:Kk | Down-flow rectifying type cleaning tank |
| CN102201329A (en) * | 2011-04-29 | 2011-09-28 | 苏州凯西石英电子有限公司 | Quartz heating groove |
| CN203071050U (en) * | 2013-01-24 | 2013-07-17 | 苏州锝耀电子有限公司 | Pickling tank |
| CN103337565A (en) * | 2013-06-04 | 2013-10-02 | 中国电子科技集团公司第四十五研究所 | A high-temperature strong acid groove used for an LED chip sidewall corrosion technique |
-
2015
- 2015-05-07 CN CN201510229945.5A patent/CN104902592B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0437131A (en) * | 1990-06-01 | 1992-02-07 | Fuji Electric Co Ltd | Pure water washing vessel for semiconductor wafer and washing thereof |
| JPH1050652A (en) * | 1996-07-29 | 1998-02-20 | Dan Kagaku:Kk | Down-flow rectifying type cleaning tank |
| CN102201329A (en) * | 2011-04-29 | 2011-09-28 | 苏州凯西石英电子有限公司 | Quartz heating groove |
| CN203071050U (en) * | 2013-01-24 | 2013-07-17 | 苏州锝耀电子有限公司 | Pickling tank |
| CN103337565A (en) * | 2013-06-04 | 2013-10-02 | 中国电子科技集团公司第四十五研究所 | A high-temperature strong acid groove used for an LED chip sidewall corrosion technique |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111508875A (en) * | 2020-04-29 | 2020-08-07 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Quartz groove and manufacturing method thereof |
| CN111508875B (en) * | 2020-04-29 | 2023-04-14 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Quartz groove and manufacturing method thereof |
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| CN104902592B (en) | 2017-01-04 |
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Effective date of registration: 20210226 Address after: Room 110-7, building 3, 290 Xingci 1st Road, Hangzhou Bay New District, Ningbo City, Zhejiang Province, 315336 Patentee after: Ningbo anxinmei Semiconductor Co.,Ltd. Address before: 230012 Hefei City, Anhui, New Station Industrial Park Patentee before: HEFEI IRICO EPILIGHT TECHNOLOGY Co.,Ltd. |
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