CN103337565A - A high-temperature strong acid groove used for an LED chip sidewall corrosion technique - Google Patents
A high-temperature strong acid groove used for an LED chip sidewall corrosion technique Download PDFInfo
- Publication number
- CN103337565A CN103337565A CN 201310218082 CN201310218082A CN103337565A CN 103337565 A CN103337565 A CN 103337565A CN 201310218082 CN201310218082 CN 201310218082 CN 201310218082 A CN201310218082 A CN 201310218082A CN 103337565 A CN103337565 A CN 103337565A
- Authority
- CN
- China
- Prior art keywords
- strong acid
- high temperature
- temperature strong
- led chip
- acid groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Weting (AREA)
Abstract
The invention discloses a high-temperature strong acid groove used for an LED chip sidewall corrosion technique. The high-temperature strong acid groove is composed of a quartz cylinder (9), a ceramic heater (8), a thermal insulation layer (10), a protective housing (7), an exhaust hood (17), and an automatic cover (27). The ceramic heater (8) is arranged outside of the quartz cylinder (9), and a sealed connection is realized in a way that a sealing edge of the quartz cylinder (9) is embedded into a sealing groove (13), which is filled with silica gel, of the ceramic heater (8). The thermal insulation layer (10) is wrapped on the external portion of the ceramic heater (8). The protective housing (7) is sleeved on the external portion of the thermal insulation layer (10). The exhaust hood (17) is installed on the quartz cylinder (9). The automatic cover (27) is installed on the exhaust hood (17). The high-temperature strong acid groove of the invention can heat strong acid solutions in the quartz cylinder to be at a temperature of 300 Celsius degrees. The heating is uniform and stable. The high-temperature strong acid groove of the invention provides convenience for processing, manufacturing and installation. The usage of the high-temperature strong acid groove is safe and reliable. The usage life is long.
Description
Technical field
The present invention relates to semiconductor LED chip fabrication techniques field, relate in particular to a kind of high temperature strong acid groove for led chip sidewall etching process.
Background technology
Current development of global economy more and more highlights shortage of resources and problem of environmental pollution.The LED illuminating industry has started the investment tide with its low energy consumption, pollution-free characteristics in the whole world.Yet along with the development of LED manufacturing technology, how further to improve the luminosity of chip, more and more become the bottleneck of industry development.The sidewall corrosion can effectively be removed many impurity of accumulating at Cutting Road because of radium-shine light beam cutting back, thereby avoid these impurity absorption lights, and then improve the luminosity of led chip as a kind of high temperature wet strong acid etching process.Can improve brightness 6-10% according to measuring and calculating sidewall etching process.For the heating of strong acid, the method that generally adopts quartzy cylinder sidewall to paste heating film in the industry realizes, can be heated to about 200 ℃ solution is the highest.But the sidewall etching process is corrosive liquid to be realized under 260-300 ℃ hot environment, and the method that common quartzy cylinder commonly used pastes heating film is difficult to solution is heated to so high temperature.
At the high temperature heating problems of strong acid, still there are not equipment vendors to propose corresponding solution abroad, the Taiwan has the device fabrication merchant to propose two kinds of implementation methods.First kind be with the silicon-carbide heaters sintering in quartzy casing wall, second kind is to utilize the mica tracklayer heater to be wrapped in quartzy cylinder outer wall.These two kinds of methods all can be heated to solution 300 ℃ high temperature, but all have some drawbacks: the first method manufacturing process is very complicated, and the heating uniformity instability; The life-span of second method heater is short, causes installation very difficult because heater shape is irregular simultaneously.
Along with the progressively rise of area, continent semiconductor manufacturing equipment manufacturer, there is equipment component manufacturer to attempt the corresponding functional unit of exploitation, but up to the present still do not have other successful case.
Summary of the invention
For the heating that the container that solves the sidewall etching process in the existing led chip manufacture process exists inhomogeneous, the problem that preparation is complicated and useful life is short, the invention provides a kind of high temperature strong acid groove that strong acid solution can be heated to 300 ℃ in quartzy cylinder, processing, manufacturing, easy for installation, safe and reliable, the life-span is long.
The present invention is a kind of high temperature strong acid groove, comprises quartzy cylinder, ceramic heater, thermal insulation layer, containment vessel, exhaust hood, automatic lid etc.Ceramic heater is fixed on quartzy cylinder outside, utilizes the seal land of quartzy cylinder and the sealed groove of ceramic heater to carry out the location, front and back, guarantee that both gaps are even.Thermal insulation layer is wrapped in the ceramic heater outside, avoids heat of high temperature excessive in a large number.Containment vessel is that heatproof is corrosion-resistant, and has chliorinated polyvinyl chloride (CPVC) the material making of flame-retarding characteristic, is enclosed within the thermal insulation layer outside.Exhaust hood is installed in quartzy cylinder top, is used for collection and the discharging of high temperature acid mist.Automatically lid is two fan foldable structures, is installed on the exhaust hood, is made up of guide rail, rotating shaft, protecgulum, bonnet, hinge etc.
The ceramic heater of high temperature strong acid groove of the present invention embeds the whole die sinking thermal sintering of ceramic slurry by heater strip.The sealing of ceramic heater adopts the seal land embedding to be full of the interior mode of sealed groove of silica gel.Liquid-bearing plate and containment vessel side plate constitute container, are used for collecting the acid solution of overflowing after condensing.The main component of thermal insulation layer is alundum (Al, and containment vessel is made by chliorinated polyvinyl chloride (CPVC) material.Exhaust hood is made by the polytetrafluoroethylene (PTFE) material, forms cavity body structure by cage plate, left interior plate, Right Inboard plate, interior header board, outer panel and outer end plate assembling.Automatically lid is two fan foldable structures, and the rotating shaft rotation drives the switch of lid, and by about two rail-guided, every fan lid is formed by the embedded quartz plate of cover frame.
The invention has the beneficial effects as follows:
High temperature strong acid groove of the present invention can be heated to the strong acid solution in the quartzy cylinder 300 ℃, and homogeneous heating is stable; High temperature strong acid groove of the present invention processing, manufacturing, easy for installation, safe and reliable, the life-span is long; High temperature strong acid groove of the present invention is reasonable in design, structure is convenient, can fully satisfy the needs of led chip sidewall etching process.
Description of drawings
Fig. 1 is the integral central cutaway view of high temperature strong acid groove
Fig. 2 is the structure distribution schematic diagram figure of heater strip in the ceramic heat
Fig. 3 is the sealed structure chart that is connected of quartzy cylinder and ceramic heater
Fig. 4 is the structural representation of exhaust hood
Fig. 5 is the structural representation that covers automatically
1. header board 20. exhaust hood outer panel 21. front cover frame 23. protecgulum quartz plate 24. rear cover frame 26. bonnet quartz plate 27. automatic covers of hinge 25. of exhaust hood outer end plate 22. in exhaust hood 2. track 3. protecgulum 4. bonnet 5. rotating shaft 6. cage plate 7. containment vessel 8. quartzy cylinder 10. thermal insulation layer 11. ceramic slurry 12. heater strip 13. sealed groove 14. seal land 15. liquid-bearing plate 16. containment vessel side plate 17. left inside side plate 18. right inside side plate 19. exhaust hoods of exhaust hood of exhaust hood of ceramic heater 9..
Embodiment
The following examples are to describe in further detail of the present invention.
Referring to accompanying drawing 1-5, the present invention is a kind of high temperature strong acid groove, comprises quartzy cylinder (9), ceramic heater (8), thermal insulation layer (10), containment vessel (7), exhaust hood (17), automatic lid (27) etc.Ceramic heater (8) is fixed on quartzy cylinder (9) outside, utilizes the seal land (14) of quartzy cylinder (9) and the sealed groove (13) of ceramic heater (8) to carry out the location, front and back.Thermal insulation layer (10) is wrapped in ceramic heater (8) outside, and containment vessel (7) is enclosed within thermal insulation layer (10) outside, and exhaust hood (17) is installed in quartzy cylinder (9) top.Automatically lid (27) is two fan foldable structures, is installed on the exhaust hood (17).Ceramic heater (8) embeds the whole die sinking thermal sintering of ceramic slurry (11) by heater strip (12), and the sealing of ceramic heater (8) adopts seal land (14) embedding to be full of the interior mode of sealed groove (13) of silica gel.Liquid-bearing plate (15) and containment vessel side plate (16) constitute container, are used for collecting the acid solution of overflowing after condensing, and the main component of thermal insulation layer (10) is alundum (Al, and containment vessel (7) is made by the CPVC material, and exhaust hood (17) is made by the PTFE material.Exhaust hood (17) forms cavity by drafting board (17), Right Inboard plate (18), interior header board (19), outer panel (20) and outer end plate (21) in cage plate (6), the left side.Automatically lid (27) is two fan foldable structures, and rotating shaft (5) rotation drives the switch of lid, and by about two tracks (2) guiding.Automatically the protecgulum of lid (27) is formed by the embedded quartz plate of preceding cover frame (22) (23), and the bonnet of lid (27) is formed by the back embedded quartz plate of cover frame (25) (26) automatically.
Inject strong acid solution in the quartzy cylinder (9) behind certain altitude, the energising of the heating wire of ceramic heater (8) begins heating.Heater strip at first conducts heat on the ceramic slurry (11) of solidifying, and the recycling thermal radiation is heated solution in the quartzy cylinder, because its area is big and be evenly distributed on quartzy cylinder (9) outer wall, the solution temperature uniformity is relatively good.Strong acid is volatilization easily at high temperature, damage heater strip (12) in the ceramic heater (8) for preventing that acid gas from entering, in quartzy cylinder (9) design seal land is arranged, in ceramic heater (8) design sealed groove (13) is arranged, both embed mutually, fill up silica gel again and effectively seal.In whole heating process, the temperature of ceramic heater (8) self can reach near 1000 ℃, therefore will use heatproof and the extraordinary alundum (Al of effect of heat insulation as thermal insulation layer (10).For safety avoid breaking out of fire, containment vessel is with having flame-retarding characteristic and acidproof CPVC material making.High temperature acid mist quick ejection notch when uncapping is given the environment build-up of pressure easily, therefore exhaust hood (17) is installed above notch, so that guiding in real time goes out acid mist to factory's acid mist treatment system of being engaged in.Automatically lid (27) is selected the superior PTFE material of acid resistance for use, embeds quartz glass then in two fan lids, to gain in strength, prevents from deforming under the high temperature.
Although illustrated and described embodiments of the invention, for the ordinary skill in the art, be appreciated that without departing from the principles and spirit of the present invention and can carry out multiple variation, modification, replacement and modification to these embodiment, scope of the present invention is limited by claims and equivalent thereof.
Claims (10)
1. high temperature strong acid groove that is used for led chip sidewall etching process is characterized in that: this high temperature strong acid groove is by quartzy cylinder (9), ceramic heater (8), thermal insulation layer (10), containment vessel (7), exhaust hood (17) and cover (27) automatically and form; Ceramic heater (8) is positioned at the outside of quartzy cylinder (9), and the mode that the inside that the seal land (14) by quartzy cylinder (9) embeds ceramic heater (8) is full of in the sealed groove (13) of silica gel is tightly connected; Thermal insulation layer (10) is wrapped in the outside of ceramic heater (8); Containment vessel (7) is sleeved on thermal insulation layer (10) outside; Exhaust hood (17) is installed in above the quartzy cylinder (9); Automatically lid (27) is installed on the exhaust hood (17).
2. as the described a kind of high temperature strong acid groove for led chip sidewall etching process of claim 1, it is characterized in that: ceramic heater (8) embeds the whole die sinking sinter molding of ceramic slurry (11) by heater strip (12).
3. as the described a kind of high temperature strong acid groove for led chip sidewall etching process of claim 1; it is characterized in that: the outside top of ceramic heater (8) has a circle liquid-bearing plate (15); it is connected with the seal land (14) of quartzy cylinder (9) and the container of back acid solution that condenses is overflowed in collection of containment vessel side plate (16) formation.
4. as the described a kind of high temperature strong acid groove for led chip sidewall etching process of claim 1, it is characterized in that: the composition of thermal insulation layer (10) is alundum (Al.
5. as the described a kind of high temperature strong acid groove for led chip sidewall etching process of claim 1, it is characterized in that: containment vessel (7) is made by the chliorinated polyvinyl chloride material.
6. as the described a kind of high temperature strong acid groove for led chip sidewall etching process of claim 1, it is characterized in that: exhaust hood (17) is made by polytetrafluoroethylmaterial material.
7. as the described a kind of high temperature strong acid groove for led chip sidewall etching process of claim 1, it is characterized in that: exhaust hood (17) forms cavity by drafting board (17), Right Inboard plate (18), interior header board (19), outer panel (20) and outer end plate (21) in cage plate (6), the left side.
8. as the described a kind of high temperature strong acid groove for led chip sidewall etching process of claim 1, it is characterized in that: lid (27) is two fan foldable structures automatically, by about two tracks (2), rotating shaft (5), protecgulum (3) and bonnet (4) form, protecgulum (3) is connected by hinge (24) with bonnet (4), rotating shaft (5) rotation drives the switch of lid, and by about two tracks (2) guiding.
9. a kind of high temperature strong acid groove for led chip sidewall etching process as claimed in claim 8 is characterized in that: the protecgulum (3) of lid (27) is formed by the embedded quartz plate of preceding cover frame (22) (23) automatically.
10. a kind of high temperature strong acid groove for led chip sidewall etching process as claimed in claim 8 is characterized in that: the bonnet (4) of lid (27) is formed by the back embedded quartz plate of cover frame (25) (26) automatically.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310218082.2A CN103337565B (en) | 2013-06-04 | 2013-06-04 | A kind of high-temperature strong acid groove for LED chip sidewall etching process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310218082.2A CN103337565B (en) | 2013-06-04 | 2013-06-04 | A kind of high-temperature strong acid groove for LED chip sidewall etching process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103337565A true CN103337565A (en) | 2013-10-02 |
| CN103337565B CN103337565B (en) | 2016-08-24 |
Family
ID=49245695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310218082.2A Active CN103337565B (en) | 2013-06-04 | 2013-06-04 | A kind of high-temperature strong acid groove for LED chip sidewall etching process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103337565B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104902592A (en) * | 2015-05-07 | 2015-09-09 | 合肥彩虹蓝光科技有限公司 | High-temperature quartz heating trough and manufacturing method |
| CN105372575A (en) * | 2015-12-10 | 2016-03-02 | 重庆凯西驿电子科技有限公司 | Diode failure analysis device |
| CN105425133A (en) * | 2015-12-10 | 2016-03-23 | 重庆凯西驿电子科技有限公司 | Reaction kettle used for diode failure analysis experiment |
| CN111508875A (en) * | 2020-04-29 | 2020-08-07 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Quartz groove and manufacturing method thereof |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006040925A (en) * | 2004-07-22 | 2006-02-09 | Tokuyama Corp | Etching method |
| CN202712136U (en) * | 2012-07-31 | 2013-01-30 | 耿彪 | High-temperature etching technology tank |
| CN102842526B (en) * | 2012-07-31 | 2015-03-04 | 耿彪 | High temperature etching process tank |
-
2013
- 2013-06-04 CN CN201310218082.2A patent/CN103337565B/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104902592A (en) * | 2015-05-07 | 2015-09-09 | 合肥彩虹蓝光科技有限公司 | High-temperature quartz heating trough and manufacturing method |
| CN104902592B (en) * | 2015-05-07 | 2017-01-04 | 合肥彩虹蓝光科技有限公司 | The manufacture method of high quartz heating tank |
| CN105372575A (en) * | 2015-12-10 | 2016-03-02 | 重庆凯西驿电子科技有限公司 | Diode failure analysis device |
| CN105425133A (en) * | 2015-12-10 | 2016-03-23 | 重庆凯西驿电子科技有限公司 | Reaction kettle used for diode failure analysis experiment |
| CN105372575B (en) * | 2015-12-10 | 2018-11-27 | 重庆凯西驿电子科技有限公司 | Diode fails analytical equipment |
| CN111508875A (en) * | 2020-04-29 | 2020-08-07 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Quartz groove and manufacturing method thereof |
| CN111508875B (en) * | 2020-04-29 | 2023-04-14 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Quartz groove and manufacturing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103337565B (en) | 2016-08-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204062539U (en) | A kind of LED silk bulb lamp | |
| CN103337565A (en) | A high-temperature strong acid groove used for an LED chip sidewall corrosion technique | |
| CN204249377U (en) | The temperature control system of a kind of wind electricity blade precuring and Post RDBMS | |
| CN205751783U (en) | A kind of high-temperature-resisting transformer tank envelope | |
| CN103673327B (en) | Multipurpose plate type solar device manufacture method and goods thereof | |
| CN202876853U (en) | Novel heating equipment | |
| CN208539061U (en) | A kind of battery heat radiation rack of robot | |
| CN205317636U (en) | Steel macrostructure thermal acid generator loses device | |
| CN210005157U (en) | pressure gauge with antifreezing function | |
| CN203964401U (en) | A kind of double containment chamber type flat-plate solar collector | |
| CN103882528B (en) | A kind of preparation method of polysilicon chip matte | |
| CN206272119U (en) | A kind of Novel distribution box | |
| CN207365434U (en) | A kind of plate solar collector | |
| CN206270568U (en) | One kind radiating fiber cable cross connection box | |
| CN203298510U (en) | Fused salt electric heater for solar energy storage system | |
| CN207664190U (en) | A kind of new energy car battery group low temperature starter | |
| CN205842494U (en) | A kind of specular removal energy-saving LED lamp | |
| CN202803212U (en) | Phosphorus melting tank | |
| CN208445779U (en) | A kind of electric heating tube for edible fat production | |
| CN206364027U (en) | A kind of anti-PID is from cooling photovoltaic module | |
| CN208108803U (en) | A kind of novel diffusion furnace | |
| CN204285180U (en) | The low ceiling fitting of a kind of LED | |
| CN201488108U (en) | Superconducting medium automatic temperature-control electric heat radiator | |
| CN109936937A (en) | The moisture-proof power supply of a kind of electronic equipment | |
| CN207905236U (en) | A kind of building energy conservation glass |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |