CN208108803U - A kind of novel diffusion furnace - Google Patents
A kind of novel diffusion furnace Download PDFInfo
- Publication number
- CN208108803U CN208108803U CN201820339152.8U CN201820339152U CN208108803U CN 208108803 U CN208108803 U CN 208108803U CN 201820339152 U CN201820339152 U CN 201820339152U CN 208108803 U CN208108803 U CN 208108803U
- Authority
- CN
- China
- Prior art keywords
- diffusion furnace
- pedestal
- tube
- bobbin carriage
- door
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Abstract
The utility model discloses a kind of novel diffusion furnaces, including control panel, exhaust collection case, diffusion furnace bobbin carriage and pedestal, exhaust collection case is equipped on the right side of the control panel, the exhaust collection case right end is equipped with diffusion furnace bobbin carriage, diffusion furnace tube is equipped with inside the diffusion furnace bobbin carriage, the diffusion furnace tube outer wall surrounding is fixedly installed with heating tube, the heating tube is surrounded by insulating layer, thermal insulation board is equipped with outside the insulating layer, the diffusion furnace tube box outer wall is equipped with maintenance door, instrument bezel is equipped on the right side of the diffusion furnace bobbin carriage, the instrument bezel antetheca is equipped with glass door, the bottom of the diffusion furnace bobbin carriage is equipped with pedestal, the base front wall is equipped with pedestal door, the base bottom is equipped with rubber sheet gasket, the utility model product, structure is simple, it is practical, it is highly-safe, effect is good, conducive to popularization.
Description
Technical field
The utility model relates to a kind of area of solar cell, specially a kind of novel diffusion furnace.
Background technique
As global energy day is becoming tight, solar energy becomes new energy and has obtained Devoting Major Efforts To Developing, solar battery conduct
Environmentally protective clean energy resource, installation are growing day by day.Diffusion furnace be process before semiconductor production line important technological equipment it
One, for the diffusion of the industries such as large scale integrated circuit, discrete device, power electronics, photoelectric device and optical fiber, oxidation,
Techniques, the diffusion furnaces such as annealing, alloy and sintering play very important role in solar battery chain type diffusion technique, existing
Diffusion furnace mostly without exhaust gas processing device, will lead to pollution air and be diffused in experimental site, lead to experimental site ring
Border is contaminated.
Utility model content
The purpose of this utility model is to provide a kind of novel diffusion furnaces, to solve mentioned above in the background art ask
Topic.
To achieve the above object, the utility model provides the following technical solutions：
A kind of novel diffusion furnace, including control panel, exhaust collection case, diffusion furnace bobbin carriage and pedestal, the control plane
Exhaust collection case is equipped on the right side of plate, the exhaust collection case right end is equipped with diffusion furnace bobbin carriage, is equipped with inside the diffusion furnace bobbin carriage
Diffusion furnace tube, the diffusion furnace tube outer wall surrounding are fixedly installed with heating tube, and the heating tube is surrounded by insulating layer, the guarantor
Thermal insulation board is equipped with outside warm layer, the diffusion furnace tube box outer wall is equipped with maintenance door, is equipped with glass on the right side of the diffusion furnace bobbin carriage
Frame, the instrument bezel antetheca are equipped with glass door, and the bottom of the diffusion furnace bobbin carriage is equipped with pedestal, and the base front wall is equipped with
Pedestal door, the base bottom are equipped with rubber sheet gasket.
Preferably, diffusion furnace tube inner upper wall face is equipped with temperature sensor, and the left end of the diffusion furnace tube is equipped with
Siphunculus, the diffusion furnace tube are connect by siphunculus with exhaust collection case.
Preferably, handle is equipped on the maintenance door, glass door and pedestal door.
Preferably, the chassis interior is equipped with atmosphere system, and the pedestal door is equipped with ventilation hole.
Preferably, the diffusion furnace tube right end is equipped with boiler tube cap, and the boiler tube cap is close by sealing ring with diffusion furnace tube
Envelope connection.
Preferably, the low side face of the control panel, exhaust collection case and diffusion furnace bobbin carriage is fixedly connected with pedestal.
Compared with prior art, the utility model has the beneficial effects that：The utility model diffusion furnace, structure is reliable, uses
Convenient and simple, heating and thermal insulation effect is good, the temperature conditions in temperature sensor moment monitoring diffuser in diffusion furnace tube, installation
The exhaust collection of boiler tube is got up and prevents from polluting by the exhaust collection case on the left of diffusion furnace tube.The utility model product, structure
Simply, practical, highly-safe, effect is good, is conducive to promote.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of novel diffusion furnace.
Fig. 2 is the area the A enlarged structure schematic diagram of Fig. 1 of novel diffusion furnace a kind of.
In figure：1- control panel, 2- exhaust collection case, 3- siphunculus, 4- insulating layer, 5- diffusion furnace bobbin carriage, 6- thermal insulation board, 7-
Heating tube, 8- temperature sensor, 9- diffusion furnace tube, 10- boiler tube cap, 11- glass door, 12- instrument bezel, 13- maintenance door, 14- rubber
Glue gasket, 15- ventilation hole, 16- pedestal door, 17- pedestal.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1~2 are please referred to, the utility model provides a kind of technical solution：A kind of novel diffusion furnace, including control panel
1, exhaust collection case 2, diffusion furnace bobbin carriage 5 and pedestal 17, exhaust collection case 2 is equipped on the right side of the control panel 1, and the tail gas is received
2 right end of header is equipped with diffusion furnace bobbin carriage 5, is equipped with diffusion furnace tube 9,9 outer wall four of diffusion furnace tube inside the diffusion furnace bobbin carriage 5
It is fixedly installed with heating tube 7 week, the heating tube 7 is surrounded by insulating layer 4, is equipped with thermal insulation board 6, institute outside the insulating layer 4
It states 5 outer wall of diffusion furnace bobbin carriage and is equipped with maintenance door 13, be equipped with instrument bezel 12, the instrument bezel 12 on the right side of the diffusion furnace bobbin carriage 5
Antetheca is equipped with glass door 11, and the bottom of the diffusion furnace bobbin carriage 5 is equipped with pedestal 17, and 17 antetheca of pedestal is equipped with pedestal door
16,17 bottom of pedestal is equipped with rubber sheet gasket 14.
Wherein, the 9 inner upper wall face of diffusion furnace tube is equipped with temperature sensor 8, and the left end of the diffusion furnace tube 9 is equipped with
Siphunculus 3, the diffusion furnace tube 9 are connect by siphunculus 3 with exhaust collection case 2；The maintenance door 13, glass door 11 and pedestal door 16
On be equipped with handle；Atmosphere system is equipped with inside the pedestal 17, the pedestal door 16 is equipped with ventilation hole 15；The diffusion furnace
9 right end of pipe is equipped with boiler tube cap 10, and the boiler tube cap 10 is tightly connected with diffusion furnace tube 9 by sealing ring；The control panel
1, the low side face of exhaust collection case 2 and diffusion furnace bobbin carriage 5 is fixedly connected with pedestal 17.
The working principle of the utility model is：Staff opens glass door and pipe cap, the article that will be processed are put into expansion
It dissipating in boiler tube, the exhaust collection of process has arrived in exhaust collection case, and the temperature sensor moment monitors the temperature in pipe, from
Temperature information is obtained in control panel, to control diffusion furnace tube.
It is obvious to a person skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and
And without departing substantially from the spirit or essential attributes of the utility model, it can realize that this is practical new in other specific forms
Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this is practical new
The range of type is indicated by the appended claims rather than the foregoing description, it is intended that containing for the equivalent requirements of the claims will be fallen in
All changes in justice and range are embraced therein.It should not treat any reference in the claims as limiting
Related claim.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (6)
1. a kind of novel diffusion furnace, including control panel (1), exhaust collection case (2), diffusion furnace bobbin carriage (5) and pedestal (17),
It is characterized in that：Exhaust collection case (2) are equipped on the right side of the control panel (1), exhaust collection case (2) right end is equipped with diffusion
Boiler tube case (5), the diffusion furnace bobbin carriage (5) is internal to be equipped with diffusion furnace tube (9), the fixed peace of diffusion furnace tube (9) the outer wall surrounding
Equipped with heating tube (7), the heating tube (7) is surrounded by insulating layer (4), is equipped with thermal insulation board (6) outside the insulating layer (4),
Diffusion furnace bobbin carriage (5) outer wall is equipped with maintenance door (13), is equipped with instrument bezel (12) on the right side of the diffusion furnace bobbin carriage (5), institute
Instrument bezel (12) antetheca is stated equipped with glass door (11), the bottom of the diffusion furnace bobbin carriage (5) is equipped with pedestal (17), the pedestal
(17) antetheca is equipped with pedestal door (16), and pedestal (17) bottom is equipped with rubber sheet gasket (14).
2. the novel diffusion furnace of one kind according to claim 1, it is characterised in that：Diffusion furnace tube (9) inner upper wall
Face is equipped with temperature sensor (8), and the left end of the diffusion furnace tube (9) is equipped with siphunculus (3), and the diffusion furnace tube (9) passes through logical
Pipe (3) is connect with exhaust collection case (2).
3. the novel diffusion furnace of one kind according to claim 1, it is characterised in that：The maintenance door (13), glass door
(11) and on pedestal door (16) it is equipped with handle.
4. the novel diffusion furnace of one kind according to claim 1, it is characterised in that：Atmosphere is equipped with inside the pedestal (17)
System, the pedestal door (16) are equipped with ventilation hole (15).
5. the novel diffusion furnace of one kind according to claim 1, it is characterised in that：It is set on diffusion furnace tube (9) right end
Have boiler tube cap (10), the boiler tube cap (10) and diffusion furnace tube (9) are tightly connected by sealing ring.
6. the novel diffusion furnace of one kind according to claim 1, it is characterised in that：The control panel (1), exhaust collection
The low side face of case (2) and diffusion furnace bobbin carriage (5) is fixedly connected with pedestal (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820339152.8U CN208108803U (en) | 2018-03-13 | 2018-03-13 | A kind of novel diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820339152.8U CN208108803U (en) | 2018-03-13 | 2018-03-13 | A kind of novel diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208108803U true CN208108803U (en) | 2018-11-16 |
Family
ID=64127113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820339152.8U Expired - Fee Related CN208108803U (en) | 2018-03-13 | 2018-03-13 | A kind of novel diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208108803U (en) |
-
2018
- 2018-03-13 CN CN201820339152.8U patent/CN208108803U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181116 Termination date: 20200313 |