CN104890131B - A kind of definitiveness modification processing based on face shape error slope - Google Patents
A kind of definitiveness modification processing based on face shape error slope Download PDFInfo
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- CN104890131B CN104890131B CN201510255832.2A CN201510255832A CN104890131B CN 104890131 B CN104890131 B CN 104890131B CN 201510255832 A CN201510255832 A CN 201510255832A CN 104890131 B CN104890131 B CN 104890131B
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Abstract
The invention discloses a kind of definitiveness modification processing based on face shape error slope, step includes: the face shape error slope and the height that 1) input optical element to be processed remove function；2) height is removed function and be converted to slope removal function；3) remove the convolution relation between the residence time function needed for function, face shape error slope and definitiveness correction of the flank shape machining control according to slope, utilize deconvolution computational methods to calculate described residence time function；4) surface the being determined property correction of the flank shape processing of processing optical part is treated based on the residence time function calculated.The present invention directly uses and measures the necessary residence time of face shape error slope data calculating processing control obtained, need not face shape error slope is converted to face shape error height, thus avoid face shape error slope and be transformed into the transformed error that face shape error height introduces, be conducive to improving the definitiveness of the course of processing and improving machining accuracy.
Description
Technical field
The present invention relates to optical manufacturing field, be specifically related to a kind of determination based on face shape error slope for one dimensional optical part
Property modification processing.
Background technology
The current model used by optical manufacturing method (the most computer-controlled definitiveness modification processing) and calculating are all bases
Definitiveness modification processing based on face shape error height it is referred to as in face shape error height, this case.Based on face shape error
In the definitiveness modification processing of height, face shape error represents with the form of height, in-process stock removal amount (highly)
Equal to removing function and the convolution of residence time.
Face shape error slope is the most extensively applied as a kind of new face shape error index, particularly anti-in high-precision glancing
Penetrating mirror, in X ray reflection mirror, face shape error slope instead of face shape error high evaluation index the most substantially.Use face shape is by mistake
Difference slope has the obvious benefit of following two than use face shape error height.(1) face shape error slope ratio face shape error height more can
The optical property of reflection optical surface.It is known that the optical surface of same face shape error height, if error frequency is different,
So optical property is the most different.Face shape error height marker has lacked error frequency information, and face shape error slope exactly contains
Error frequency information is therefore, more desirable as metrics evaluation optical surface profile precision with face shape error slope.(2) face shape error is oblique
Rate is more readily detected.It is limited to calibrating and the measurement capability of common wavefront interferometer, large-sized flat in X ray reflection mirror
Face, cylinder, the very difficult interferometer measurement of ellipsoid, common measuring method is Long travel contourograph.Long travel contourograph is measured
Direct result be exactly face shape error slope.Just because of above 2 reasons, make the application of face shape error slope more and more extensive.
And in current definitiveness modification processing based on face shape error height, it is necessary to oblique for the face shape error measuring gained
Rate is converted to face shape error height, just can calculate residence time necessary to the course of processing.Such conversion, owing to being subject to
The impact of original measurement error, will be greatly increased the uncertainty of conversion errors height, and this certainly will have influence on definitiveness optics
The effect of processing, affects final machining accuracy.
In sum, prior art definitiveness based on face shape error height modification processing does not adapts to and meets new
For evaluation index and the optical manufacturing demand exported is measured with face shape error slope.
Summary of the invention
The technical problem to be solved in the present invention is: for the problems referred to above of prior art, it is provided that a kind of direct use measurement obtains
Face shape error slope data calculating processing controls necessary residence time, it is not necessary to face shape error slope is converted to face shape error
Highly, thus avoid face shape error slope and be transformed into the transformed error that face shape error height introduces, be conducive to improving the course of processing
Definitiveness and improve machining accuracy definitiveness modification processing based on face shape error slope.
In order to solve above-mentioned technical problem, the technical solution used in the present invention is:
A kind of definitiveness modification processing based on face shape error slope, step includes:
1) face shape error slope s (x) and the height that input optical element to be processed remove function p (x)；
2) height is removed function p (x) and be converted to slope removal function q (x)；
3) the residence time letter needed for function q (x), face shape error slope s (x) and definitiveness correction of the flank shape machining control is removed according to slope
Meet relational expression shown in formula (1) between number τ (x), utilize deconvolution computational methods to calculate described residence time function τ (x)；
In formula (1), s (x) represents face shape error slope, and q (x) represents that slope removes function, and τ (x) represents residence time function,
Represent convolution operator；
4) surface the being determined property correction of the flank shape processing of processing optical part is treated based on residence time function τ (x) calculated.
Preferably, described step 2) specifically refer to by height remove function p (x) carry out differential obtain slope remove function q (x).
Preferably, described step 1) in face shape error slope s (x) of input and height remove function p (x) and be two-dimensional discrete data,
Described step 2) slope that obtains removes function q (x), described step 3) residence time function τ (x) that obtains is two-dimensional discrete
Data.
Preferably, described step 1) in face shape error slope s (x) of input and height remove function p (x) and be one-dimensional discrete data,
Described step 2) slope that obtains removes function q (x), described step 3) residence time function τ (x) that obtains is one-dimensional discrete
Data.
Present invention definitiveness based on face shape error slope modification processing has an advantage that the present invention is to be processed according to input
Face shape error slope s (x) of optical element and height remove function p (x), height removal function p (x) is converted to slope and removes letter
Number q (x), removes function q (x) according to slope, relation between face shape error slope s (x) and residence time function τ (x) utilizes instead
Convolutional calculation method calculates residence time function τ (x) needed for machining control, treats processing optical based on residence time function τ (x)
Surface the being determined property correction of the flank shape processing of part, face shape error slope s (x) that the present invention directly uses measurement to obtain directly calculates and adds
Residence time function τ (x) necessary to industry control system, without face shape error slope s (x) being converted to face shape error height, thus
Avoid face shape error slope s (x) and be transformed into the step of face shape error height and the transformed error of introducing thereof, be greatly improved processing
The definitiveness of process and raising machining accuracy.
Accompanying drawing explanation
Fig. 1 is the schematic flow sheet of embodiment of the present invention method.
Fig. 2 is face shape error slope s (x) curve of optical element to be processed in the embodiment of the present invention.
Fig. 3 is that in the embodiment of the present invention, the height of input removes function p (x) curve.
Fig. 4 is that in the embodiment of the present invention, calculated slope removes function q (x) curve.
Fig. 5 is the face shape error slope curve of optical element after processing in the embodiment of the present invention.
Fig. 6 is the face shape error degree of contrast in the embodiment of the present invention before and after optical effect correction as a comparison.
Detailed description of the invention
Optical element to be processed in the present embodiment is the silicon materials plane mirror of a block length 100mm, the effective length on this minute surface
Degree is 80mm, hereafter will be as a example by this optical element to be processed, and definitiveness correction of the flank shape based on face shape error slope to the present invention adds
Work method is further detailed.
As it is shown in figure 1, the step of the present embodiment definitiveness based on face shape error slope modification processing includes:
1) face shape error slope s (x) and the height that input optical element to be processed remove function p (x).
In the present embodiment, face shape error slope s (x) and height are removed function p (x) and are given data, wherein face shape error slope
S (x) obtains for employing slope detection instrument measurement, the face in 80mm effective length on the minute surface of optical element to be processed in the present embodiment
The result that shape error slope s (x) is measured with slope detection instrument is as in figure 2 it is shown, root-mean-square (RMS) value of face shape error slope s (x)
It is 0.40urad.Highly remove the removal function that function p (x) is existing definitiveness modification processing based on face shape error height,
The technique that the present embodiment definitiveness modification processing specifically uses is one-dimensional ion beam processing technique, and the height of its correspondence is removed
Function p (x) is as shown in Figure 3.
2) height is removed function p (x) and be converted to slope removal function q (x).
In the present embodiment, step 2) specifically refer to remove height function p (x) and carry out differential (i.e. q (x)=dp (x)/dx) and obtain
Slope removes function q (x), and the slope finally given removes the curve of function q (x) as shown in Figure 4.It should be noted that also may be used
Slope removal function q (x) of function p (x) is removed to use additive method to obtain height as required.
3) the residence time letter needed for function q (x), face shape error slope s (x) and definitiveness correction of the flank shape machining control is removed according to slope
Meet relational expression shown in formula (1) between number τ (x), utilize deconvolution computational methods to calculate described residence time function τ (x)；
In formula (1), s (x) represents face shape error slope, and q (x) represents that slope removes function, and τ (x) represents residence time function,
Represent convolution operator；According to formula (1), remove function q (x) at slope, face shape error slope s (x) be known on the basis of,
Utilize deconvolution computational methods can calculate residence time function τ (x).
4) surface the being determined property correction of the flank shape processing of processing optical part is treated based on residence time function τ (x) calculated.
On the basis of calculating residence time function τ (x), the method identical with prior art can be used to carry out based on time resident
Between the definitiveness correction of the flank shape course of processing of ion beam that controls.After the present embodiment being determined by property correction of the flank shape processing, optical element face shape is by mistake
The testing result of difference slope is as it is shown in figure 5, the RMS value processing shape error slope below has been reduced to 0.15urad.In order to more straight
Seeing to find out the processing effect of this programme, we are by unified for face shape error slope s (x) forward and backward for the processing shown in Fig. 2 and Fig. 5
Conversion is for face shape error height, and result shows as shown in Figure 6, and wherein before processing, the RMS value of face shape error height is 3.84nm.
The correlation curve seeing Fig. 6 understands, after using the processing of the present embodiment definitiveness based on face shape error slope modification processing,
The RMS value of face shape error height has been reduced to 0.38nm, and under prior art conditions based on face shape error further processing method pair
The result that like parts in this example is processed is general all at more than 0.5nm.As can be seen here, the present embodiment is based on face shape error
The definitiveness modification processing of slope is highly effective for improving machining accuracy.
It should be noted that step 1 in the present embodiment) in face shape error slope s (x) of input and height remove function p (x) and be
One-dimensional discrete data, step 2) slope that obtains removes function q (x), step 3) residence time function τ (x) that obtains also is one
Dimension discrete data.Additionally, step 1) middle face shape error slope s (x) inputted removes function p (x) with height can also be as required
All use two-dimensional discrete data, in the case, certainly step 2) slope that obtains removes function q (x), step 3)
Residence time function τ (x) arrived is also for two-dimensional discrete data.
The above is only the preferred embodiment of the present invention, and protection scope of the present invention is not limited merely to above-described embodiment, all
The technical scheme belonged under thinking of the present invention belongs to protection scope of the present invention.It should be pointed out that, for the art is common
For technical staff, some improvements and modifications without departing from the principles of the present invention, these improvements and modifications also should be regarded as this
The protection domain of invention.
Claims (4)
1. a definitiveness modification processing based on face shape error slope, it is characterised in that step includes:
1) face shape error slope s (x) and the height that input optical element to be processed remove function p (x)；
2) height is removed function p (x) and be converted to slope removal function q (x)；
3) the residence time letter needed for function q (x), face shape error slope s (x) and definitiveness correction of the flank shape machining control is removed according to slope
Meet relational expression shown in formula (1) between number τ (x), utilize deconvolution computational methods to calculate described residence time function τ (x)；
In formula (1), s (x) represents face shape error slope, and q (x) represents that slope removes function, and τ (x) represents residence time function,
Represent convolution operator；
4) surface the being determined property correction of the flank shape processing of processing optical part is treated based on residence time function τ (x) calculated.
Definitiveness modification processing based on face shape error slope the most according to claim 1, it is characterised in that described
Step 2) specifically refer to by height remove function p (x) carry out differential obtain slope remove function q (x).
Definitiveness modification processing based on face shape error slope the most according to claim 1 and 2, it is characterised in that:
Described step 1) in input face shape error slope s (x) and height remove function p (x) be two-dimensional discrete data, described step 2)
The slope that obtains removes function q (x), described step 3) residence time function τ (x) that obtains is two-dimensional discrete data.
Definitiveness modification processing based on face shape error slope the most according to claim 1 and 2, it is characterised in that:
Described step 1) in input face shape error slope s (x) and height remove function p (x) be one-dimensional discrete data, described step 2)
The slope that obtains removes function q (x), described step 3) residence time function τ (x) that obtains is one-dimensional discrete data.
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| CN106007406B (en) * | 2016-05-17 | 2019-02-01 | 中国科学院上海光学精密机械研究所 | The processing method of meter level heavy caliber phosphate laser neodymium glass optical surface wavefront gradients reparation and scratch passivation |
| CN111266937B (en) * | 2020-03-20 | 2021-09-10 | 大连理工大学 | Rocker arm type polishing device and method for full-caliber deterministic polishing of planar parts |
| CN111347294B (en) * | 2020-03-30 | 2021-08-10 | 中科院南京天文仪器有限公司 | High-gradient optical mirror surface error polishing correction processing method |
| CN114858090B (en) * | 2022-04-27 | 2023-10-03 | 西安工业大学 | Surface shape error measurement method for array structure optical element |
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| CN101274822B (en) * | 2008-03-31 | 2010-08-11 | 中国人民解放军国防科学技术大学 | Planning method for ion beam polishing path |
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