CN104842368A - Mechanical arm capable of automatically learning vertical height and automatic learning method of mechanical arm - Google Patents
Mechanical arm capable of automatically learning vertical height and automatic learning method of mechanical arm Download PDFInfo
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- CN104842368A CN104842368A CN201510271724.4A CN201510271724A CN104842368A CN 104842368 A CN104842368 A CN 104842368A CN 201510271724 A CN201510271724 A CN 201510271724A CN 104842368 A CN104842368 A CN 104842368A
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- wafer
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- vertical height
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- stepper motor
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Abstract
The invention discloses a mechanical arm capable of automatically learning a vertical height and an automatic learning method of the mechanical arm. The mechanical arm comprises a diode transmitting end, a light receiving end, a vertical stepping motor and a vertical height position recording and storing control module, wherein the vertical height position recording and storing control module is connected with the light receiving end; and the vertical stepping motor transmits a channel of signals to the vertical height position recording and storing control module. When light signals of the tail end of the mechanical arm are interrupted, the vertical height position recording and storing control module records the position of the mechanical arm. The mechanical arm can be stopped from scratching or impacting wafers.
Description
Technical field
The present invention relates to semiconductor equipment and manufacture field, particularly relate to a kind of mechanical arm and Auto-learning Method thereof of automatic learning vertical height.
Background technology
Transmit at present the delivering position of arm at the air of the front end interface FI (Front interface) of 12 cun of semiconductors, be all by artificial manual calibration robot arm (robot) initial position of disposable range estimation and be recorded in inside robot arm (robot) controller.Fig. 1 is the structural representation of the robot arm of prior art, as shown in Figure 1, according to Fig. 1, when detecting wafer number (mapping wafer) and grippale tabs, through following steps:
1. obtain the position of the 1st robot motion;
2. the position of robot being sent to stepper motor drives arm to remove mapping;
3. arm motion mapping, or grippale tabs.
Visible, in the prior art, the calibrating position of arm is by primary calibration, and inside memory position being stored in computer, when transmitting, inside memory, directly reads fixed position.
Be by artificial manual calibration robot arm (robot) initial position of disposable range estimation due to prior art and be recorded in inside robot arm (robot) controller, when meaning subsequent robot's arm motion like this, as long as there is an object of reference to be subjected to displacement, then robot arm needs to recalibrate.Such as, arm integrates the position of box FOUP (Front open unified pod) relative to front opening; When the height of FOUP bogey loadport changes, then need the relative altitude recalibrating arm.Again or due to the angularity on wafer wafer surface change time, robot arm position also can remain unchanged equally, and the crawl position of artificial calibration machine human arm is fixing all the time, the deformation of wafer wafer itself cannot be detected, thus very easily wafer wafer is caused damage.
Summary of the invention
For overcoming the deficiency that above-mentioned prior art exists, the object of the present invention is the mechanical arm and the Auto-learning Method thereof that provide a kind of automatic learning vertical height, by when robot arm (robot) detects wafer (wafer) quantity, also record the physical location of wafer (wafer) simultaneously, by the wafer position stored, make the adjustment crawl position that arm also can be suitable, thus arm scratch can be avoided or strike wafer (wafer) or scratch wafer (wafer).
For reaching above-mentioned and other object, the present invention proposes a kind of mechanical arm of automatic learning vertical height, comprise diode emitter end, light receiver end and vertical stepper motor, described mechanical arm also comprises vertical height position record storage control module, described vertical height position record storage control module connects with described light receiver end, described vertical stepper motor connects a road signal to described vertical height position record storage control module, when the light signal of described mechanical arm end is interdicted, position when being interdicted by described vertical height position record storage control module tracer signal.
Further, when mechanical arm moves from top to bottom along crystal round fringes, described vertical height position record storage control module is recorded the position of the corresponding stepper motor of all wafers by the position of interdicting by light, and by obtaining stepper motor step number thus obtaining the deviate that the median of this wafer is outer and obtain between centre position to two wafer.
Further, the centre position of two wafer is got in the crawl position of the 2nd to the 25th wafer.
Further, the crawl position of the 1st wafer is averaged deviate.
Further, the mean value of the median of current grasping silicon wafer is (B-A)+(C-B)+(D-C) ... / 2 (N-1), wherein, A, B, C, D .... be respectively the 1st, 2nd, 3rd, the 4th ... wafer corresponds to the position that described vertical height position record storage control module gets stepper motor when light is interdicted, and N is the quantity of wafer.
Further, the crawl position of the 1st wafer is A-[(B-A)+(C-B)+(D-C) ... / 2 (N-1)].
For achieving the above object, the present invention also provides a kind of Auto-learning Method of mechanical arm of automatic learning vertical height, comprises the steps:
Step one, when described mechanical arm moves from top to bottom along crystal round fringes, vertical height position record storage control module records the step number of the pedometer of vertical stepper motor when each light is interdicted simultaneously;
Step 2, by calculating, obtains the deviate between the centre position of two wafer and centre position to two panels wafer.
Further, in step 2, when continuous sweep two panels wafer position, pedometer record twice light of vertical stepper motor is by the position of interdicting, and the deviate between the median of twice pedometer record or centre position to two wafer is got in the position of grasping silicon wafer.
Further, the centre position of two wafer is got in the crawl position of the 2nd to the 25th wafer, and the crawl position of the 1st wafer is averaged deviate.
Further, the mean value of the median of current grasping silicon wafer is (B-A)+(C-B)+(D-C) ... / 2 (N-1), the crawl position of the 1st wafer is A-[(B-A)+(C-B)+(D-C) ... / 2 (N-1)], wherein, A, B, C, D,. be respectively the 1st, the 2nd, the 3rd, 4th ... wafer corresponds to the position that described vertical height position record storage control module gets stepper motor when light is interdicted, and N is the quantity of wafer.
Compared with prior art, the signal when mechanical arm of a kind of automatic learning vertical height of the present invention and Auto-learning Method thereof utilize light to interdict, record the position of stepper motor simultaneously, then can by calculating the physical location of every wafer (wafer), wafer (wafer) position simultaneously passed through, make the adjustment crawl position that mechanical arm also can be suitable, thus arm scratch can be avoided or strike on wafer (wafer), or scratch wafer (wafer).
Accompanying drawing explanation
Fig. 1 is the structured flowchart of the mechanical arm of prior art;
Fig. 2 is the operation principle schematic diagram of the detection wafer number of current mechanical arm;
Fig. 3 is the structural representation of the mechanical arm of a kind of automatic learning vertical height of the present invention;
Fig. 4 is the enforcement block diagram of the present invention one specific embodiment;
Fig. 5 is the flow chart of steps of the Auto-learning Method of the mechanical arm of a kind of automatic learning vertical height of the present invention.
Detailed description of the invention
Below by way of specific instantiation and accompanying drawings embodiments of the present invention, those skilled in the art can understand other advantage of the present invention and effect easily by content disclosed in the present specification.The present invention is also implemented by other different instantiation or is applied, and the every details in this description also can based on different viewpoints and application, carries out various modification and change not deviating under spirit of the present invention.
Before explaining the present invention, first introduce the operation principle of mechanical arm: as shown in Figure 2, current mechanical arm has a diode emitter end and a light receiver end (diode emitter end and light receiver end form mapping sensor jointly) usually, be used for calculating the quantity detecting wafer, its principle utilizes mechanical arm in top-down motion process, the light of diode emitter by the number of times interdicted, thus calculates wafer (wafer) in the inner quantity of FOUP (Front Open Unified Pod).Usually, when new FOUP arrives FI, arm uses slower speed near wafer (wafer), arm can carry out 3 scanning in the front end of wafer, for 1st time that the distance of carrying out between arm to wafer (wafer) confirms, the phenomenon skidded off whether is had to detect wafer (wafer), it is for 2nd time the actual range detecting wafer (wafer), and start the quantity detecting wafer (wafer), detect wafer (wafer) when detecting for the 3rd time and whether have lamination, or the phenomenon of wafer (wafer) oblique cutting.
Fig. 3 is the structural representation of the mechanical arm of a kind of automatic learning vertical height of the present invention.As shown in Figure 3, the mechanical arm 30 of a kind of automatic learning vertical height of the present invention, comprises diode emitter end 31, light receiver end 32, vertical stepper motor 33 and vertical height position record storage control module 34.
At the light receiver end 32 Shang Jie mono-road signal of arm, receive vertical height position record storage control module 33, vertical stepper motor 33 also connects a road holding wire simultaneously and receives vertical height position record storage control module 34, when the light signal of mechanical arm end is interdicted, then position when being interdicted by vertical height position record storage control module 33 tracer signal, when mechanical arm moves from top to bottom along wafer (wafer) edge, the position of recording the corresponding stepper motor of all wafer wafer then can be reached by the position of interdicting by light, by obtaining stepper motor step number thus the median that can obtain this wafer (wafer) also can obtain between centre position to two wafer wafer outward deviate, by that analogy, the centre position of two wafer wafer can be got from the crawl positions of 2 ~ 25, and the 1st only needs to be averaged deviate, thus reach all wafer wafer and have a safe pulldown position.
Visible, principle of the present invention is signal when utilizing light to interdict, and obtains simultaneously and stores the position of stepper motor pedometer, then can by calculating the physical location of every wafer wafer.Specifically, light receiver end 32 of the present invention is while detection wafer (wafer), vertical height position record storage control module 33 records the step number of vertical stepper motor 33 pedometer when each light is interdicted simultaneously, calculated by simple again, the centre position of two wafer (wafer) can be drawn.Namely when continuous sweep two panels position, the motor pedometer of vertical direction then can record twice light by the position of interdicting, the median of twice pedometer record then can be got in the position of grasping silicon wafer (wafer), also can obtain the deviate between centre position to two wafer (wafer) except the median obtaining this wafer wafer.By that analogy, the centre position of two wafer (wafer) can be got from the crawl positions of 2 ~ 25, and the 1st only needs to be averaged deviate, thus reach all wafers (wafer) and have a safe pulldown position.
Fig. 4 is the enforcement block diagram of the present invention one specific embodiment.Below will further illustrate the present invention by a specific embodiment: in the present invention, memory is no longer only record disposable fixed position.When detecting wafer (wafer) quantity, the numerical value that time each light of memory record is interdicted, stepper motor pedometer reads.The present invention detects wafer number and grippale tabs process is as follows:
(1) during Mapping motion
1.robot controller obtains the position that last robot (robot) moves;
2. the position of robot being sent to stepper motor drives arm to remove mapping (detecting wafer quantity);
3. arm motion mapping;
4. the signal feedback of being interdicted by light is to memory, and memory obtains stepper motor movement position now according to obstruction signal;
5.UI computer, according to the data fed back to, calculates new wafer physical location, and new position is sent to memory.
(2) grippale tabs
6. obtain the position of mapping robot motion.
7. the position of robot being sent to stepper motor drives arm to remove mapping
8. arm motion grippale tabs.
Such as: when detecting wafer (wafer) quantity, inside this FOUP, have some wafer (wafer).Wafer (wafer) the 1st, the 2nd, the 3rd, the 4th ... correspond to memory to get the position of stepper motor when light is interdicted and be, A, B, C, D.。。
Then the crawl position of the 2nd should be then: (B-A)/2+A.
The crawl position of the 3rd should be then: (C-B)/2+B
The crawl position of the 4th should be then: (D-C)/2+C
The like, then the mean value that can obtain the median of current grasping silicon wafer (wafer) is: (B-A)+(C-B)+(D-C) ... / 2 (N-1) (N is the quantity of wafer)
Therefore the crawl position of the 1st is just A-[(B-A)+(C-B)+(D-C) ... / 2 (N-1)].
Fig. 5 is the flow chart of steps of the Auto-learning Method of the mechanical arm of a kind of automatic learning vertical height of the present invention.As shown in Figure 5, the Auto-learning Method of the mechanical arm of a kind of automatic learning vertical height of the present invention, comprises the steps:
Step 501, when described mechanical arm moves from top to bottom along crystal round fringes, vertical height position record storage control module records the step number of the pedometer of vertical stepper motor when each light is interdicted simultaneously;
Step 502, by calculating, obtains the deviate between the centre position of two wafer and centre position to two wafer (wafer).
In step 502, namely when continuous sweep two panels wafer position, pedometer record twice light of vertical stepper motor is by the position of interdicting, and the deviate between the median of twice pedometer record or centre position to two wafer is got in the position of grasping silicon wafer.
In present pre-ferred embodiments, the centre position of two wafer (wafer) can be got from the crawl position of 2 ~ 25 wafer, and the 1st only needs to be averaged deviate, thus reach all wafer wafer and have a safe pulldown position.
Such as: when detecting wafer number, inside this FOUP, have some wafer (wafer).Wafer (wafer) the 1st, the 2nd, the 3rd, the 4th ... correspond to memory to get the position of stepper motor when light is interdicted and be, A, B, C, D.。。
Then the crawl position of the 2nd should be then: (B-A)/2+A.
The crawl position of the 3rd should be then: (C-B)/2+B
The crawl position of the 4th should be then: (D-C)/2+C
The like, then the mean value that can obtain the median of current grasping silicon wafer (wafer) is: (B-A)+(C-B)+(D-C) ... / 2 (N-1) (N is the quantity of wafer)
Therefore the crawl position of the 1st is just A-[(B-A)+(C-B)+(D-C) ... / 2 (N-1)].
In sum, the signal when mechanical arm of a kind of automatic learning vertical height of the present invention and Auto-learning Method thereof utilize light to interdict, record the position of stepper motor simultaneously, then can by calculating the physical location of every wafer (wafer), wafer (wafer) position simultaneously passed through, make the adjustment crawl position that mechanical arm also can be suitable, thus arm scratch can be avoided or strike on wafer (wafer), or scratch wafer (wafer).
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not for limiting the present invention.Any those skilled in the art all without prejudice under spirit of the present invention and category, can carry out modifying to above-described embodiment and change.Therefore, the scope of the present invention, should listed by claims.
Claims (10)
1. the mechanical arm of an automatic learning vertical height, comprise diode emitter end, light receiver end and vertical stepper motor, it is characterized in that: described mechanical arm also comprises vertical height position record storage control module, described vertical height position record storage control module connects with described light receiver end, described vertical stepper motor connects a road signal to described vertical height position record storage control module, when the light signal of described mechanical arm end is interdicted, position when being interdicted by described vertical height position record storage control module tracer signal.
2. the mechanical arm of a kind of automatic learning vertical height as claimed in claim 1, it is characterized in that: when mechanical arm moves from top to bottom along crystal round fringes, described vertical height position record storage control module is recorded the position of the corresponding stepper motor of all wafers by the position of interdicting by light, and by obtaining stepper motor step number thus obtaining the deviate that the median of this wafer is outer and obtain between centre position to two wafer.
3. the mechanical arm of a kind of automatic learning vertical height as claimed in claim 2, is characterized in that: the centre position of two wafer is got in the crawl position of the 2nd to the 25th wafer.
4. the mechanical arm of a kind of automatic learning vertical height as claimed in claim 3, is characterized in that: the crawl position of the 1st wafer is averaged deviate.
5. the mechanical arm of a kind of automatic learning vertical height as claimed in claim 4, it is characterized in that: the mean value of the median of current grasping silicon wafer is (B-A)+(C-B)+(D-C) ... / 2 (N-1), wherein, A, B, C, D .... be respectively the 1st, 2nd, 3rd, the 4th ... wafer corresponds to the position that described vertical height position record storage control module gets stepper motor when light is interdicted, and N is the quantity of wafer.
6. the mechanical arm of a kind of automatic learning vertical height as claimed in claim 5, is characterized in that: the crawl position of the 1st wafer is A-[(B-A)+(C-B)+(D-C) ... / 2 (N-1)].
7. an Auto-learning Method for the mechanical arm of automatic learning vertical height, comprises the steps:
Step one, when described mechanical arm moves from top to bottom along crystal round fringes, vertical height position record storage control module records the step number of the pedometer of vertical stepper motor when each light is interdicted simultaneously;
Step 2, by calculating, obtains the deviate between the centre position of two wafer and centre position to two panels wafer.
8. the Auto-learning Method of the mechanical arm of a kind of automatic learning vertical height as claimed in claim 7, it is characterized in that: in step 2, when continuous sweep two panels wafer position, pedometer record twice light of vertical stepper motor is by the position of interdicting, and the deviate between the median of twice pedometer record or centre position to two wafer is got in the position of grasping silicon wafer.
9. the Auto-learning Method of the mechanical arm of a kind of automatic learning vertical height as claimed in claim 8, is characterized in that: the centre position of two wafer is got in the crawl position of the 2nd to the 25th wafer, and the crawl position of the 1st wafer is averaged deviate.
10. the Auto-learning Method of the mechanical arm of a kind of automatic learning vertical height as claimed in claim 9, it is characterized in that: the mean value of the median of current grasping silicon wafer is (B-A)+(C-B)+(D-C) ... / 2 (N-1), the crawl position of the 1st wafer is A-[(B-A)+(C-B)+(D-C) ... / 2 (N-1)], wherein, A, B, C, D, . be respectively the 1st, 2nd, 3rd, 4th ... wafer corresponds to the position that described vertical height position record storage control module gets stepper motor when light is interdicted, N is the quantity of wafer.
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| CN107252785A (en) * | 2017-06-29 | 2017-10-17 | 顺丰速运有限公司 | A kind of express mail grasping means applied to quick despatch robot piece supplying |
| CN110231803A (en) * | 2018-03-06 | 2019-09-13 | 发那科株式会社 | Position of collision estimating device and machine learning device |
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Application publication date: 20150819 |