CN104833606A - High-quality factor QCM sensor - Google Patents

High-quality factor QCM sensor Download PDF

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CN104833606A
CN104833606A CN201510236324.XA CN201510236324A CN104833606A CN 104833606 A CN104833606 A CN 104833606A CN 201510236324 A CN201510236324 A CN 201510236324A CN 104833606 A CN104833606 A CN 104833606A
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base plate
resonance
electrode
circular
round boss
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CN104833606B (en
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谭峰
叶芃
邱渡裕
黄武煌
曾浩
蒋俊
杨扩军
张沁川
潘卉青
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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Abstract

The invention discloses a high-quality factor QCM sensor which comprises a resonance bottom plate, as well as an upper metal electrode and a lower metal electrode which are positioned on the upper surface and the lower surface of the resonance bottom plate, wherein the resonance bottom plate is of an asymmetric single-faced lug boss type structure, the upper metal electrode is a circular electrode covering the surface of a circular lug boss, and the lower metal electrode is a circular electrode and covers a geometric center position of the resonance bottom plate. In this way, by increasing the thickness of an effective resonance region of the resonance bottom plate, the purposes of improving the energy entrapping effect and the energy concentrating effect and further improving the quality factor of the QCM sensor are achieved.

Description

A kind of high quality factor qcm sensor
Technical field
The invention belongs to piezoelectric sensor technical field, more specifically say, relate to a kind of high quality factor qcm sensor, the fields such as chemistry, material, biology and physics can be applied to.
Background technology
Qcm sensor, is also QCM (Quartz Crystal Microbalance), is the perception device that a kind of piezoelectric quartz crystalline material working in thickness shearing mode is made.It is very responsive to mass change, is commonly used to detect small mass change, can realize the quality testing of nanogram magnitude.
The linear variation relation of quality (the Sauerbrey G that Sauerbrey G adsorbs in frequency change and its face of nineteen fifty-nine discovery qcm sensor; Verwendung von schwingquarzen zur w ¨ agung d ¨ unnerschichten und zur mikrow, agung Z.Phys.No.155,1959,206 – 222), this discovery makes qcm sensor be used widely in micro-quality perception field.
In fact, qcm sensor is not just used for detecting small mass change at gaseous environment, can also carry out other detections that biological chemistry is relevant.The eighties in last century, Nomura teams experiment demonstrates QCM and also can normally work (see paper: T.Nomura and A.Minemura in the liquid phase, " Behavior of apiezoelectric quartz crystal in an aqueous-solution and the application to thedetermination of minute amount of cyanide, " Nippon Kagaku Kaishi, pp.1621 – 1625, 1980.), the application space of QCM has been expanded in this discovery widely, especially be used widely at analytical chemistry and biomedical sector.In decades recently, the analysis that QCM sensing is used for film thickness and the field such as Density Detection and Young modulus detection, analytical chemistry, polymkeric substance, biomedicine in gas phase or liquid phase environment is widely used, and in rising trend gradually.(details see reference document: M.A.Cooper, V.T.Singleton.A survey of the 2001 to 2005 quartz crystal microbalance biosensorliterature:applications of acoustic physics to the analysis of biomolecularinteractions [J] .J Mol Recognit, 2007,20 (3): 154-184; Chen Lingxin, Guan Yafeng, Yang Bingcheng. the progress of piezoeletric quartz sensor. chemical progress.2002,14 (1): 68-76; Molino PJ, Hodson OM, Quinn JF, Wetherbee R.The quartz crystal microbalance:a new tool for theinvestigation of the bioadhesion of diatoms to surfaces of differing surfaceenergies [J] .Langmuir, 2008,24:6730-6737; Speight RE, Cooper MA.A Survey ofthe 2010 Quartz Crystal Microbalance Literature [J] .J Mol Recognit, 2012,25 (9): 451-473; S.K.Vashist, P.Vashist.Recent Advances in Quartz Crystal Microbalance – Based Sensors [J] .Journal of Sensors, 2011,11 (4): 1-13; He Jianan, Fu Long, Huang Mo etc. the new development of QCM (Quartz Crystal Microbalance). Chinese science: chemical .2011,41 (11): 1679-1698).
Figure 1 shows that the structural drawing of traditional Q CM sensor, wherein (A) is vertical view, and (B) is sectional view.As shown in figure (1), traditional Q CM sensor is that upper and lower two electrodes 2,3 sandwich one is two-sided for the piezoelectric quartz crystal plate of plane and the sandwich structure of resonance base plate 1.Due to the existence of piezoelectric effect and inverse piezoelectric effect, the electrode on qcm sensor two sides applies suitable pumping signal, can there is resonance and the frequency signal of stable output in qcm sensor.
Fig. 2 is the mass sensitivity scatter chart of traditional round qcm sensor.As shown in Figure 2, the distribution of its mass sensitivity of traditional Q CM sensor is rough.
Traditional qcm sensor is all generally adopt biplane construction, but also there is certain defect and deficiency in the qcm sensor of this structure, main manifestations is that the quality of effective resonance range resonance base plate is little, effect can be fallen into not too obvious, concentration of energy effect is poor have impact on resonance base plate quality factor simultaneously, causes the output frequency stability of qcm sensor poor and affects test accuracy and measuring accuracy.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, a kind of high quality factor qcm sensor is provided, improve the output frequency stability of qcm sensor.
For achieving the above object, high quality factor qcm sensor of the present invention, comprises resonance base plate and is positioned at the metal electrode up and down of resonance base plate upper and lower surface, it is characterized in that:
Described resonance base plate bottom side is plane, be projective table type circular configuration on the upside of resonance base plate, comprise round boss and circular platform, round boss is positioned at the geometric center position on the upside of resonance base plate, circular platform is positioned at round boss periphery, and its height is equal with round boss outer edge height;
Upper metal electrode comprises the circular electrode covering round boss upper surface, and is connected with a contact conductor, and lower metal electrode is a circular electrode, covers resonance base plate geometric center position, and is connected with another contact conductor.
The object of the present invention is achieved like this.
High quality factor qcm sensor of the present invention, comprise resonance base plate and be positioned at the metal electrode up and down of resonance base plate upper and lower surface, wherein, resonance base plate adopts a kind of asymmetric one side projective table type structure, upper metal electrode is the circular electrode covering round boss surface, lower metal electrode is a circular electrode, covers resonance base plate geometric center position.Like this by increasing the thickness of the effective resonance range of resonance base plate, reaching to improve and can fall into effect and concentration of energy effect, improving the object of qcm sensor quality factor further.
Accompanying drawing explanation
Fig. 1 is the structural drawing of traditional Q CM sensor;
Fig. 2 is the mass sensitivity scatter chart of traditional Q CM sensor;
Fig. 3 is a kind of embodiment structural drawing of high quality factor qcm sensor of the present invention;
Fig. 4 is the cross-sectional view of qcm sensor shown in Fig. 3 along the center of circle;
Fig. 5 is the mass sensitivity scatter chart of high quality factor qcm sensor of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described, so that those skilled in the art understands the present invention better.Requiring particular attention is that, in the following description, when perhaps the detailed description of known function and design can desalinate main contents of the present invention, these are described in and will be left in the basket here.
In the present embodiment, as shown in Figure 3,4, high quality factor qcm sensor of the present invention comprises: resonance base plate 1 and be positioned at the metal electrode up and down of resonance base plate 1 upper and lower surface.
Described resonance base plate 1 bottom side is plane, it is projective table type circular configuration on the upside of resonance base plate 1, comprise round boss 101 and circular platform 102, round boss 101 is positioned at the geometric center position on the upside of resonance base plate 1, it is peripheral that circular platform 102 is positioned at round boss 101, and its height is equal with round boss 101 outer edge height;
Upper metal electrode comprises the circular electrode 201 covering round boss upper surface, and is connected with contact conductor 203, to be connected with subsequent conditioning circuit.
Lower metal electrode is a circular electrode, covers resonance base plate geometric center position,
In the present embodiment, as shown in Figure 3,4, asymmetrical structure is shown as between the two sides of qcm sensor of the present invention.It is pointed out that there being this one side of projective table type circular configuration, from round boss 101 outer edge to the edge of resonance base plate 1, is ring-shaped platform 102.In the present embodiment, described qcm sensor resonance base plate 1, its round boss 101 thickness is the thickest, from ring-shaped platform 102 inside edge toward third side to thickening gradually, namely round boss 101 progressively increases from outer edge to distance center certain position height, then highly remain unchanged, form flat-top round boss, its flat-top border circular areas is resonance range, cover circular electrode 201, it highly progressively increases part and covers gradual change type electrode 202, cover circular electrode 201 to be communicated with gradual change type electrode 202, metal electrode on composition, be connected with contact conductor 203, to be connected with subsequent conditioning circuit.
Fig. 5 is the mass sensitivity scatter chart of high quality factor qcm sensor of the present invention.
In the present embodiment, as shown in Figure 5, its mass sensitivity of high quality factor qcm sensor of the present invention is smooth respectively, but due to the increase of resonance range thickness, mass sensitivity declines to some extent.
Lower surface electrode 3 covers resonance base plate center position, and the area of lower surface electrode 3 is equal with the size of round boss 101 part on the upside of resonance base plate 1.
The upper surface electrode of resonance base plate and lower surface electrode are set up electromagnetic field by sound wave coupling scheme and produce driving voltage in resonance regions in the vibration area of resonance base plate, and the energy that resonance region produces is tied to resonator area good can fall into effect and concentration of energy effect to reduce energy leakage to ensure that the resonance base plate of sensor has.
Φ e ≤ l q M n n [ f e f s - f e ] 1 2 - - - ( 1 )
C = n · Φ e 2 l q f s - f e f s - - - ( 3 )
Wherein, Φ ethe diameter of electrode, l qfor the thickness of quartz wafer, f sthe cutoff frequency in the non-coated electrode region of resonance base plate, f ebe the cutoff frequency in resonance base plate coated electrode region, n is overtone number of times, it is correction factor.
The one side projective table type resonance base plate of unsymmetric structure of the present invention, one side is plane, and the central position of one side is resonance range is in addition round boss shape.Asymmetrical structure is shown as between the two sides of qcm sensor.It is pointed out that having round boss this one side, from its edge to middle position by with certain pitch angle gradual change type slope around.In the middle of qcm sensor resonance base plate of the present invention, round boss plateau region is the thickest, and thinning gradually toward direction, edge, its structure as shown in Figure 3 and Figure 4.The resonance frequency of qcm sensor is determined by the thickness of its resonance base plate upper mounting plate, and this thickness can affect qcm sensor can fall into effect ability as sound wave.The quality that simultaneously improve resonance range by the design of round boss reaches the object improving sensor quality factor.
Relation between qcm sensor quality factor and resonance base plate quality can be provided by following formula:
Q q = m q ρ q ρ q μ q nπ η q A s - - - ( 4 )
Wherein, ρ qthe density of quartz, A sthe area of resonance base plate, μ qthe elasticity coefficient of quartz, η qthe viscosity coefficient of quartz, m qfor the quality of quartz resonance base plate, n is overtone number of times, n=1,3,5 ...
Essence of the present invention is: by an asymmetric one side projective table type resonance base plate, increase the quality of effective resonance range, thus improves the quality factor of sensor.Meanwhile, by being centered around around resonance platform, from the flat-top border circular areas of the resonance range of sensor and round boss 101 to the gradual change type electrode of ring-shaped platform 102, improving and can fall into effect, raising concentration of energy effect.
The present invention has the following advantages: compared with traditional double-side flat formula qcm sensor, the asymmetric one side projective table type sensor that the present invention describes, and has and better can fall into effect and concentration of energy effect, have higher quality factor.Meanwhile, due to the raising of quality factor, make, during qcm sensor generation resonance, there is higher frequency stability, so just can improve measuring accuracy and accuracy.
In the present embodiment, upper metal electrode and lower metal electrode material are that gold, silver or chromium+gold are (in order to increase the absorption affinity of gold at resonance base plate, first be basic unit with crome metal, on layers of chrome, plate one deck gold again), the thickness of metal electrode is 1 ~ 2 × 10 -7m.
In the present embodiment, resonance base plate diameter is within the scope of 8mm ~ 20mm, and the diameter of round boss is 5mm ~ 10mm scope.Its material is α type quartz crystal, and cut type is that AT cuts, and corner cut scope is 35 ° 1 ' ~ 35 ° 15 '.
In the present embodiment, the resonance frequency of resonance base plate is 10MHz ~ 30MHz, and work overtone number of times can be respectively: fundamental frequency, 3 overtones or 5 overtones.
According to technique scheme, select overtone number of times to be 1 time (namely fundamental frequency), AT cut type, corner cut 35 ° 12 ' of being, resonance frequency is that the quartz crystal materials of 10MHz makes qcm sensor.Wherein, resonance base plate diameter is 18mm, and resonance base plate round boss diameter is 10mm, and the thickness of resonance base plate is 0.18mm.
Certainly, the present invention is not limited to above-mentioned embodiment, and other equivalent way (as piezoelectric ceramics, piezoelectric membrane, quartz crystal, the piezoelectric resonant sensor that the piezoelectrics such as lithium carbonate are made; The shape of sensor can be circular, also can be square) be also protection scope of the present invention.
Although be described the illustrative embodiment of the present invention above; so that those skilled in the art understand the present invention; but should be clear; the invention is not restricted to the scope of embodiment; to those skilled in the art; as long as various change to limit and in the spirit and scope of the present invention determined, these changes are apparent, and all innovation and creation utilizing the present invention to conceive are all at the row of protection in appended claim.

Claims (3)

1. a high quality factor qcm sensor, comprising: resonance base plate and be positioned at the upper and lower metal electrode up and down of resonance base plate, it is characterized in that:
Described resonance base plate bottom side is plane, be projective table type circular configuration on the upside of resonance base plate, comprise round boss and circular platform, round boss is positioned at the geometric center position on the upside of resonance base plate, circular platform is positioned at round boss periphery, and its height is equal with round boss outer edge height;
Upper metal electrode comprises the circular electrode covering round boss upper surface, and is connected with a contact conductor, and lower metal electrode is a circular electrode, covers resonance base plate geometric center position, and is connected with another contact conductor.
2. qcm sensor according to claim 1, it is characterized in that, described round boss progressively increases from outer edge to distance center certain position height, then highly remains unchanged, form flat-top round boss, its flat-top border circular areas is resonance range, covers circular electrode, and it highly progressively increases part and covers gradual change type electrode, cover circular electrode 201 to be communicated with gradual change type electrode 202, metal electrode on composition, is connected with contact conductor, to be connected with subsequent conditioning circuit.
3. qcm sensor according to claim 1, upper metal electrode and lower metal electrode material are gold, silver or chromium+gold (in order to increase the absorption affinity of gold at resonance base plate, being first basic unit with crome metal, on layers of chrome, plating one deck gold again).
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109374731A (en) * 2018-11-14 2019-02-22 江苏科技大学 A kind of quartz crystal microbalance of annular indium-tin oxide electrode
WO2020062675A1 (en) * 2018-09-25 2020-04-02 深圳大学 Acoustic micro-mass sensor and detection method

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JPS5768921A (en) * 1980-10-17 1982-04-27 Matsushita Electric Ind Co Ltd Thickness slip quartz oscillator
JP2002261574A (en) * 2001-02-28 2002-09-13 Nippon Dempa Kogyo Co Ltd Crystal oscillator and its producing method
JP2007271284A (en) * 2006-03-30 2007-10-18 Kyocera Kinseki Corp Qcm sensor element and method of manufacturing same
CN102967521A (en) * 2012-11-15 2013-03-13 电子科技大学 Quartz crystal microbalance (QCM) mass sensor

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JPS5768921A (en) * 1980-10-17 1982-04-27 Matsushita Electric Ind Co Ltd Thickness slip quartz oscillator
JP2002261574A (en) * 2001-02-28 2002-09-13 Nippon Dempa Kogyo Co Ltd Crystal oscillator and its producing method
JP2007271284A (en) * 2006-03-30 2007-10-18 Kyocera Kinseki Corp Qcm sensor element and method of manufacturing same
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020062675A1 (en) * 2018-09-25 2020-04-02 深圳大学 Acoustic micro-mass sensor and detection method
CN109374731A (en) * 2018-11-14 2019-02-22 江苏科技大学 A kind of quartz crystal microbalance of annular indium-tin oxide electrode
CN109374731B (en) * 2018-11-14 2021-07-13 江苏科技大学 Quartz crystal microbalance with annular indium tin oxide electrode

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