CN104820766A - Double layout design method and system - Google Patents
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- CN104820766A CN104820766A CN201510275937.4A CN201510275937A CN104820766A CN 104820766 A CN104820766 A CN 104820766A CN 201510275937 A CN201510275937 A CN 201510275937A CN 104820766 A CN104820766 A CN 104820766A
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Abstract
The invention provides a double layout design method and system which includes searching for conflict graphs in the original layout, wherein the conflict graphs are a pair of graphs with the distance in between smaller than preset distance; searching for a conflict loop according to the conflict graphs, wherein the conflict loop is a graph loop with the odd number of graphs; cutting the graphs in the conflict loop to eliminate the conflict loop. By means of the method, graph cutting is conducted based on the conflict loop, design complexity is reduced, and design efficiency is improved.
Description
Technical field
The present invention relates to integrated circuit (IC) design field, particularly a kind of method for designing of dual domain.
Background technology
Along with constantly reducing of integrated circuit feature size, traditional 193nm wavelength light source is difficult to use in the photoetching of below 22nm figure, and single-exposure lithography reaches geometry baseline, and lithographic issues becomes the emphasis of research.
At present, dual layout techniques (DPL, Double Pattering Lithography) become and reduce lithographic dimensioned first-selection further, a set of highdensity circuitous pattern is resolved into that two covers are discrete, the figure of relative low density by dual layout techniques, and carry out imaging and etching respectively, thus by highdensity Graphic transitions on target wafer.Key in dual layout techniques is the decomposition of highdensity domain, and in decomposition, between the cutting of figure and two domains after decomposing, the balance of figure quantity is all the problem needing to consider and solve.
Summary of the invention
Object of the present invention is intended at least solve one of above-mentioned technological deficiency, provides a kind of method for designing and system of dual domain, carries out the cutting of figure, reduces the complexity of design, improve design efficiency based on conflict loop.
For this reason, the invention provides following technical scheme:
A method for designing for dual domain, comprising:
Search the conflict figure in original layout, conflict figure is a pair figure that distance between figure is less than predeterminable range;
Conflict loop is searched, the figure loop of conflict loop to be figure figurate number be odd number according to conflict figure;
Figure in conflict loop is split, with conflict removal loop.
Optionally, the step of searching the conflict relationship in domain comprises:
By the figure label in domain;
Search the conflict figure in domain, conflict figure is a pair figure that distance between figure is less than predeterminable range, and a pair label of conflict figure is recorded in the chained list centering of the first chained list and the second chained list respectively;
The step of searching conflict loop according to conflict relationship comprises:
Carry out right the searching of label, stop searching when the label in the second chained list is identical with the label of label centering first chained list before, to obtain label sequence, each label comprises the step of searching: search chained list centering with the label of the first chained list, obtain the label pair when time to search, and the label of the first chained list label when time label centering second chained list is set as next time searches;
From label sequence, select loop, be that the loop of odd number is defined as the loop that conflicts by figure quantity.
Optionally, select loop from label sequence after, also step is comprised:
Be that the loop of even number is defined as non conflicting loop by figure quantity;
Delete end label pair, the step of deleting end label right comprises: by last label in the label sequence of non conflicting loop to deletion;
The label of last label centering second chained list is set as the label of the first chained list continuing to search, and returns and carry out label to the step of searching;
If next label pair cannot be found, then return the delete step that end label is right;
If find next label pair, then return and carry out the right finding step of label.
Optionally, after conflict removal loop, also comprise:
Carry out the grouping of figure, the figure each other with conflict relationship is classified as same group, the figure that there is not conflict relationship with other figures is classified as same group;
In organizing, pattern spacing is painted.
Optionally, also comprise:
Add up each group to have the quantity of same color and different colours at intersection and adjacent pattern difference with adjacent group;
Graphic color difference be greater than in the group of predetermined value overturns.
In addition, present invention also offers a kind of design system of dual domain, comprising:
Conflict figure searches unit, and for searching the conflict figure in original layout, conflict figure is a pair figure that distance between figure is less than predeterminable range;
Conflict loop searches unit, for searching conflict loop according to conflict figure, and the figure loop of conflict loop to be figure figurate number be odd number;
Figure cutting unit, for splitting the figure in conflict loop, with conflict removal loop.
Optionally, described conflict figure is searched unit and is comprised:
Label unit, for by the figure label in domain;
Conflict figure determining unit, is a pair figure that distance between figure is less than predeterminable range for the figure that conflicts, and a pair label of conflict figure is recorded in respectively the chained list centering of the first chained list and the second chained list;
Described conflict loop is searched unit and is comprised:
Search sequence number setup unit, for the label of previous label centering second chained list being set as the label of this first chained list searched;
Label retrieval unit, for searching chained list centering with the label of the first chained list, obtain when the secondary label pair searched, and the label of the first chained list label when time label centering second chained list is set as next time searches, stop searching, to obtain label sequence when the label in the second chained list is identical with the label of label centering first chained list before;
Figure quantity, for selecting loop from label sequence, is that the loop of odd number is defined as the loop that conflicts by conflict loop determining unit.
Optionally, also comprise:
Non conflicting loop determining unit, for being that the loop of even number is defined as non conflicting loop by figure quantity;
End label to delete cells, for by last label in the label sequence of non conflicting loop to deletion;
Continue to search sequence number setup unit, for the label of the first chained list that the label of last label centering second chained list is set as continuing to search.
Optionally, also comprise:
Grouped element, for the grouping by carrying out figure, is classified as same group by the figure each other with conflict relationship, and the figure that there is not conflict relationship with other figures is classified as same group;
Coloring units, painted for interior pattern spacing will be organized.
Optionally, also comprise:
Boundary Statistic unit, for adding up each group to have the quantity of same color and different colours at intersection and adjacent pattern difference with adjacent group;
Roll-over unit, for by difference, the graphic color be greater than in the group of predetermined value overturns.
The method for designing of the dual domain that the embodiment of the present invention provides and system, conflict figure is a pair figure distance between figure being less than predeterminable range, conflict loop is determined based on conflict figure, and then the figure in conflict loop is cut, thus conflict removal loop, carries out the cutting of figure based on conflict loop, reduce the complexity of design, improve design efficiency.
Further, by by the label of conflict figure to being stored in two chained lists, by the label that stores in chained list searching the loop that carries out conflicting, greatly can reduce operand, improve design efficiency, be particularly useful for the process of extensive domain.
Further, in the coloring process for decomposing, determining whether carry out the upset organizing interior graphic color according to the quantity of intersection adjacent pattern, making the quantity between two domains that must decompose realizes balance, and there is less cutting quantity.
Accompanying drawing explanation
The present invention above-mentioned and/or additional aspect and advantage will become obvious and easy understand from the following description of the accompanying drawings of embodiments, wherein:
Fig. 1 is the schematic flow sheet of the method for designing of dual domain according to the embodiment of the present invention;
Fig. 2 is the schematic diagram of loop figure label of conflicting in the method for designing according to the embodiment of the present invention;
Fig. 3 is the schematic diagram of figure loop in the method for designing according to the embodiment of the present invention;
Fig. 4 be conflict in the method for designing according to the embodiment of the present invention loop eliminate figure and loop schematic diagram;
Fig. 5 is the schematic diagram divided into groups in the method for designing according to the embodiment of the present invention;
Fig. 6 is schematic diagram painted in the method for designing according to the embodiment of the present invention;
Fig. 7 is the schematic diagram overturn in the method for designing according to the embodiment of the present invention;
Fig. 8 is the structural representation of the design system according to the embodiment of the present invention.
Embodiment
Be described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Being exemplary below by the embodiment be described with reference to the drawings, only for explaining the present invention, and can not limitation of the present invention being interpreted as.
In the present invention, propose a kind of method for designing of dual domain, shown in figure 1, comprising: search the conflict figure in original layout, conflict figure is a pair figure that distance between figure is less than predeterminable range; Conflict loop is searched, the figure loop of conflict loop to be figure figurate number be odd number according to conflict figure; Figure in conflict loop is cut, with conflict removal loop.
Further, after conflict removal loop, carry out the grouping of figure, the figure each other with conflict relationship is classified as same group, the figure that there is not conflict relationship with other figures is classified as same group; And pattern spacing is painted in organizing, and it is painted to carry out upset further, and then is two cover figures by a set of graphics decomposition.
In the present invention, determine conflict loop based on conflict figure, and then the figure in conflict loop is cut, thus conflict removal loop, carries out the cutting of figure, reduce the complexity of design, improve design efficiency based on conflict loop.
For a better understanding of the present invention, below with reference to specific embodiment, technical scheme of the present invention is described in detail.
First, original layout is provided.This original layout is the domain designed, and this original layout will carry out the design of dual domain, to be decomposed into two cover domains.
Then, search the conflict figure in original layout, conflict figure is a pair figure that distance between figure is less than predeterminable range.
In the present embodiment, concrete, first, by the figure label in domain, shown in figure 2, by each figure label in turn, the label of figure is 1,2,3,4,5,6,7.Then, the distance can searching this figure successively according to the order of label is less than the figure of predeterminable range, distance between two figures is less than predeterminable range, be conflict figure, such as, in the illustrated figure of this Fig. 2, first search the figure conflicted with figure 1, find figure 2 and be less than predeterminable range with the spacing of figure 1, then the label of conflict figure to (1, 2) the first chained list listA is recorded in respectively, in second chained list listB, namely label 1 is recorded in the first chained list, and label 2 is recorded in the second chained list, same, continues to search the figure conflicted with figure 2, finds figure 2 and figure 1, figure 3, figure 5, the spacing of figure 7 is all less than predeterminable range, then conflict figure label to (2, 1), (2, 3), (2, 5), (2, 7) the first chained list listA is recorded in respectively, in second chained list listB, same, search the conflict figure of residue figure successively, and by label to being recorded in respectively in the first chained list and the second chained list, thus, obtain following chained list pair:
listA：1，2，2，2，2，3，3，4，4，4，5，5，6，6，7，7。
listB：2，1，3，5，7，2，4，3，5，6，2，4，4，7，2，6。
Then, searching of conflict loop is carried out.In the present embodiment, based on chained list to searching: in searching at every turn, the label of previous label centering second chained list is set as the label of this first chained list searched, search chained list centering with the label of this first chained list, obtain the label pair that this is searched, stop searching when the label in the second chained list is identical with the label of label centering first chained list before, thus obtain label sequence, owing to searching on the figure that stops at and occurred in the first chained list, loop is certainly existed in this label sequence, thus, conflict loop can be obtained from this label sequence.
The acquisition step of concrete label sequence, shown in figure 3, if first label is to being (1, 2), then carry out first time to search, the label that the middle label 2 by the second chained list of first label centering is set as this first chained list searched is searched in this time, and from the first chained list, figure label is that in the 2, second chained list, graph of a correspondence label is 3, 5, 7, (2, 1) with (1, 2) be same conflict figure, ignore in searching and the previous label pair for the same figure that conflicts, according to this label pair searched of label select progressively, this label searched can be obtained to (2, 3), proceed to search, same, obtain label successively to (3, 4), (4, 5) and (5, 2), at label to (5, 2) label 2 in the second chained list and the previous label searched are to (2, 1) label 2 in the first chained list is identical, and that is, figure defines closed loop, then stop searching, obtain label sequence (1, 2) > (2, 3) > (3, 4) > (4, 5) > (5, 2).
In this label sequence, figure 2-3-4-5 forms loop, and in loop, the quantity of figure is even number, and therefore, this loop is defined as non conflicting loop.For non conflicting loop, by end label to deletion, to carry out searching of other loops, concrete, first by last label in the label sequence of non conflicting loop to deletion, in this specific embodiment, by label to (5, 2) delete, after deletion, label sequence becomes (1, 2) > (2, 3) > (3, 4) > (4, 5), and continue right the searching of label, in searching, the label of last label centering second chained list in this sequence is set as the label of the first chained list continuing to search, and repeat above-mentioned label to the step of searching, in this specific embodiment, by label to (4, 5) 5 in are set as the label of the first chained list continuing to search, next conflict figure is not found when continuing to search, then, continue end label (4, 5) delete, label sequence becomes (1, 2) > (2, 3) > (3, 4), similarly, by last label in this sequence to (3, 4) in, the label 4 of the second chained list is set as the label of the first chained list continuing to search, repeat above-mentioned label to the step of searching, obtain new label to sequence (1, 2) > (2, 3) > (3, 4) > (4, 6) > (6, 7) > (7, 2), in this sequence, figure 2-3-4-6-7 forms loop, in loop, the quantity of figure is odd number, then the figure in conflict loop is split, with conflict removal loop, when splitting, can split according to concrete the need suitable figure of selection and suitable cut-point, shown in figure 4 (A), figure 6 is split, like this, loop becomes 2-3-4-6-8-7, become non conflicting loop, shown in figure 4 (B), thus, solve the problem of conflict loop, so far, chained list pair is upgraded according to new conflict figure, and carry out searching of other loops, lookup method is as above-mentioned.For the loop searched, mark, no longer search in follow-up searching.
So far, complete the segmentation of the conflict loop of the present embodiment, solve the problem of conflict loop, then, can continue the subsequent step of complete design, as the painted of domain and according to the painted cutting carrying out domain, tinting steps is distinguished according to two kinds of different colors by the figure in domain, then cut according to color, thus obtain two domains.
In the present embodiment, first, carry out the grouping of figure, the figure each other with conflict relationship is classified as same group, the figure that there is not conflict relationship with other figures is classified as same group, and shown in figure 3, each figure in this embodiment and another figure have conflict relationship, therefore, all figures in this diagram are all divided in same group.
In order to the subsequent step of the present embodiment is better described, be described with the figure shown in Fig. 4, shown in figure 5, conflict relationship is there is between every two of figure 13-4-1-3-2-12, they are classified as first group, there is conflict relationship between every two of figure 10-11-9-14 but there is not conflict relationship with the arbitrary figure in first group, they are classified as second group, conflict relationship is there is not between figure 5-6-7-8, with first group and second group in arbitrary figure also there is not conflict relationship, they are classified as the 3rd group, then, in organizing, pattern spacing is painted, namely adjacent figure different colours, figure separately identical color, like this, the figure in group is made to be divided into two kinds of colors, shown in figure 6, in first group, figure 1, 2, 13 a kind of color, figure 2, 13 a kind of color, in second group, figure 11,14 a kind of color, figure 9,10 another kind of color, in 3rd group, figure 5,7 a kind of color, figure 6,8 another kind of color, painted complete after, can according to the painted cutting carrying out domain.
In order to balance the quantity of figure in two kinds of colors i.e. two domains, reduce the quantity of cutting, the step that the present embodiment also overturns, concrete, add up each group to have the quantity of same color and different colours at intersection and adjacent pattern difference with adjacent group, then, by difference, the graphic color be greater than in the group of predetermined value overturns.In the particular embodiment, each figures different for intersection color is added 1, each figure that color is identical subtracts 1, obtains the score in a group, and shown in figure 6, the figure 4 of first group is different from figure 5 color of second group, and the score of first group is 1, the figure 5 of the 3rd group is different from figure 4 color of first group, the figure 8 of the 3rd group is different from figure 9 color of second group, the score of the 3rd group is 2, same, the score of second group is 1, like this, the color of figure in group higher for score can be overturn, as the graphic color of the 3rd group is overturn, shown in figure 7, like this, after upset, the figure 8 of the 3rd group is identical with figure 9 color of second group, the figure 5 of the 3rd group is identical with figure 4 color of first group, this overturning step can carry out repeatedly, until cutting quantity needed for realizing and the optimum condition that balances of figure quantity.In this overturning step, the quantity of the color of intersection figure between consideration group, ensure that the quality of figure while cutting, is realized the balance of figure quantity between two domains after dicing by color upset.
Above the method for designing of the embodiment of the present invention is described in detail, in addition, present invention also offers a kind of design system of dual domain, shown in figure 8, comprising:
Conflict figure searches unit, and for searching the conflict figure in original layout, conflict figure is a pair figure that distance between figure is less than predeterminable range;
Conflict loop searches unit, for searching conflict loop according to conflict figure, and the figure loop of conflict loop to be figure figurate number be odd number;
Figure cutting unit, for splitting the figure in conflict loop, with conflict removal loop.
Further, described conflict figure is searched unit and is comprised:
Label unit, for by the figure label in domain;
Conflict figure determining unit, is a pair figure that distance between figure is less than predeterminable range for the figure that conflicts, and a pair label of conflict figure is recorded in respectively the chained list centering of the first chained list and the second chained list;
Described conflict loop is searched unit and is comprised:
Search sequence number setup unit, for the label of previous label centering second chained list being set as the label of this first chained list searched;
Label retrieval unit, for searching chained list centering with the label of the first chained list, obtain when the secondary label pair searched, and the label of the first chained list label when time label centering second chained list is set as next time searches, stop searching, to obtain label sequence when the label in the second chained list is identical with the label of label centering first chained list before;
Figure quantity, for selecting loop from label sequence, is that the loop of odd number is defined as the loop that conflicts by conflict loop determining unit.
Further, also comprise:
Non conflicting loop determining unit, for being that the loop of even number is defined as non conflicting loop by figure quantity;
End label to delete cells, for by last label in the label sequence of non conflicting loop to deletion;
Continue to search sequence number setup unit, for the label of the first chained list that the label of last label centering second chained list is set as continuing to search.
Further, also comprise:
Grouped element, for the grouping by carrying out figure, is classified as same group by the figure each other with conflict relationship, and the figure that there is not conflict relationship with other figures is classified as same group;
Coloring units, painted for interior pattern spacing will be organized.
Interval is painted, and namely adjacent pattern different colours, and figure separately same color.
Also comprise:
Boundary Statistic unit, for adding up each group to have the quantity of same color and different colours at intersection and adjacent pattern difference with adjacent group;
Roll-over unit, for by difference, the graphic color be greater than in the group of predetermined value overturns.
Each embodiment in this instructions all adopts the mode of going forward one by one to describe, between each embodiment identical similar part mutually see, what each embodiment stressed is the difference with other embodiments.Especially, for system embodiment, because it is substantially similar to embodiment of the method, so describe fairly simple, relevant part illustrates see the part of embodiment of the method.System embodiment described above is only schematic, the wherein said unit illustrated as separating component or can may not be and physically separates, parts as unit display can be or may not be physical location, namely can be positioned at a place, or also can be distributed on multiple artificial window.Some or all of module wherein can be selected according to the actual needs to realize the object of the present embodiment scheme.Those of ordinary skill in the art, when not paying creative work, are namely appreciated that and implement.
Although the present invention discloses as above with preferred embodiment, but and be not used to limit the present invention.Any those of ordinary skill in the art, do not departing under technical solution of the present invention ambit, the Method and Technology content of above-mentioned announcement all can be utilized to make many possible variations and modification to technical solution of the present invention, or be revised as the Equivalent embodiments of equivalent variations.Therefore, every content not departing from technical solution of the present invention, according to technical spirit of the present invention to any simple modification made for any of the above embodiments, equivalent variations and modification, all still belongs in the scope of technical solution of the present invention protection.
Claims (10)
1. a method for designing for dual domain, is characterized in that, comprising:
Search the conflict figure in original layout, conflict figure is a pair figure that distance between figure is less than predeterminable range;
Conflict loop is searched, the figure loop of conflict loop to be figure figurate number be odd number according to conflict figure;
Figure in conflict loop is split, with conflict removal loop.
2. method for designing according to claim 1, is characterized in that,
The step of searching the conflict relationship in domain comprises:
By the figure label in domain;
Search the conflict figure in domain, conflict figure is a pair figure that distance between figure is less than predeterminable range, and a pair label of conflict figure is recorded in the chained list centering of the first chained list and the second chained list respectively;
The step of searching conflict loop according to conflict relationship comprises:
Carry out right the searching of label, stop searching when the label in the second chained list is identical with the label of label centering first chained list before, to obtain label sequence, each label comprises the step of searching: search chained list centering with the label of the first chained list, obtain the label pair when time to search, and the label of the first chained list label when time label centering second chained list is set as next time searches;
From label sequence, select loop, be that the loop of odd number is defined as the loop that conflicts by figure quantity.
3. method for designing according to claim 2, is characterized in that, after selecting loop, also comprises step from label sequence:
Be that the loop of even number is defined as non conflicting loop by figure quantity;
Delete end label pair, the step of deleting end label right comprises: by last label in the label sequence of non conflicting loop to deletion;
The label of last label centering second chained list is set as the label of the first chained list continuing to search, and returns and carry out label to the step of searching;
If next label pair cannot be found, then return the delete step that end label is right;
If find next label pair, then return and carry out the right finding step of label.
4. the method for designing according to any one of claim 1-3, is characterized in that, after conflict removal loop, also comprises:
Carry out the grouping of figure, the figure each other with conflict relationship is classified as same group, the figure that there is not conflict relationship with other figures is classified as same group;
In organizing, pattern spacing is painted.
5. method for designing according to claim 4, is characterized in that, also comprises:
Add up each group to have the quantity of same color and different colours at intersection and adjacent pattern difference with adjacent group;
Graphic color difference be greater than in the group of predetermined value overturns.
6. a design system for dual domain, is characterized in that, comprising:
Conflict figure searches unit, and for searching the conflict figure in original layout, conflict figure is a pair figure that distance between figure is less than predeterminable range;
Conflict loop searches unit, for searching conflict loop according to conflict figure, and the figure loop of conflict loop to be figure figurate number be odd number;
Figure cutting unit, for splitting the figure in conflict loop, with conflict removal loop.
7. design system according to claim 6, is characterized in that,
Described conflict figure is searched unit and is comprised:
Label unit, for by the figure label in domain;
Conflict figure determining unit, is a pair figure that distance between figure is less than predeterminable range for the figure that conflicts, and a pair label of conflict figure is recorded in respectively the chained list centering of the first chained list and the second chained list;
Described conflict loop is searched unit and is comprised:
Search sequence number setup unit, for the label of previous label centering second chained list being set as the label of this first chained list searched;
Label retrieval unit, for searching chained list centering with the label of the first chained list, obtain when the secondary label pair searched, and the label of the first chained list label when time label centering second chained list is set as next time searches, stop searching, to obtain label sequence when the label in the second chained list is identical with the label of label centering first chained list before;
Figure quantity, for selecting loop from label sequence, is that the loop of odd number is defined as the loop that conflicts by conflict loop determining unit.
8. design system according to claim 7, is characterized in that, also comprises:
Non conflicting loop determining unit, for being that the loop of even number is defined as non conflicting loop by figure quantity;
End label to delete cells, for by last label in the label sequence of non conflicting loop to deletion;
Continue to search sequence number setup unit, for the label of the first chained list that the label of last label centering second chained list is set as continuing to search.
9. the design system according to any one of claim 6-8, is characterized in that, also comprises:
Grouped element, for the grouping by carrying out figure, is classified as same group by the figure each other with conflict relationship, and the figure that there is not conflict relationship with other figures is classified as same group;
Coloring units, painted for interior pattern spacing will be organized.
10. design system according to claim 9, is characterized in that, also comprises:
Boundary Statistic unit, for adding up each group to have the quantity of same color and different colours at intersection and adjacent pattern difference with adjacent group;
Roll-over unit, for by difference, the graphic color be greater than in the group of predetermined value overturns.
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