CN104820766B - A kind of design method and system of dual domain - Google Patents

A kind of design method and system of dual domain Download PDF

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Publication number
CN104820766B
CN104820766B CN201510275937.4A CN201510275937A CN104820766B CN 104820766 B CN104820766 B CN 104820766B CN 201510275937 A CN201510275937 A CN 201510275937A CN 104820766 B CN104820766 B CN 104820766B
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label
conflict
loop
chained list
pair
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CN104820766A (en
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方山
吴玉平
张学连
陈岚
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Institute of Microelectronics of CAS
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Institute of Microelectronics of CAS
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Abstract

The present invention provides a kind of design method of dual domain, including:The conflict figure in original layout is searched, conflict figure is a pair of figures of the distance between figure less than pre-determined distance;Conflict loop is searched according to conflict figure, conflict loop is the figure loop that figure number is odd number;Figure in the loop that conflicts is cut, to eliminate conflict loop.This method carries out the cutting of figure based on conflict loop, reduces the complexity of design, improves design efficiency.

Description

A kind of design method and system of dual domain
Technical field
The present invention relates to IC design field, more particularly to a kind of design method of dual domain.
Background technology
With the continuous diminution of integrated circuit feature size, traditional 193nm wavelength light sources are difficult to use in 22nm with figure below The photoetching of shape, single-exposure lithography has reached geometry baseline, and lithographic issues turn into the emphasis of research.
At present, dual layout techniques (DPL, Double Pattering Lithography), which turn into, further reduces photoetching The first choice of size, dual layout techniques are that a set of highdensity circuitous pattern is resolved into two sets of discrete, relative low densities Figure, and be imaged and etched respectively, so that by highdensity pattern transfer to target wafer.In dual layout techniques Key is the balance of figure quantity between two domains in the decomposition of highdensity domain, decomposition after the cutting and decomposition of figure All it is the problem of needing to consider and solve.
The content of the invention
The purpose of the present invention be intended at least to solve one of above-mentioned technological deficiency there is provided a kind of design method of dual domain and System, the cutting of figure is carried out based on conflict loop, the complexity of design is reduced, design efficiency is improved.
Therefore, the invention provides following technical scheme:
A kind of design method of dual domain, including:
The conflict figure in original layout is searched, conflict figure is a pair of figures of the distance between figure less than pre-determined distance Shape;
Conflict loop is searched according to conflict figure, conflict loop is the figure loop that figure number is odd number;
Figure in the loop that conflicts is split, to eliminate conflict loop.
Optionally, the step of searching the conflict figure in domain includes:
By the figure label in domain;
The conflict figure in domain is searched, conflict figure is a pair of figures of the distance between figure less than pre-determined distance, and A pair of labels of the figure that conflicts are separately recorded in the chained list centering of the first chained list and the second chained list;
The step of searching conflict loop according to conflict figure includes:
Enter the lookup of line label pair, when the label in the second chained list is identical with the label of the chained list of label centering before first Stop searching, to obtain label sequence, the step of each label is to searching includes:Looked into the label of the first chained list in chained list pair Look for, obtain when time label pair of lookup, and the first chain of lookup next time will be set as when time label of label the second chained list of centering The label of table;
Loop is selected from label sequence, figure quantity is defined as the loop that conflicts for the loop of odd number.
Optionally, after selecting loop from label sequence, in addition to step:
Figure quantity is defined as non conflicting loop for the loop of even number;
End label pair is deleted, deleting the step of end label pair includes:By in the label sequence of non conflicting loop most Latter label is to deleting;
The label for the first chained list that the label of last chained list of label centering second is set as continuing to search for, and return Enter the step of line label is to lookup;
If next label pair can not be found, the delete step of end label pair is returned;
If finding next label pair, the finding step of label pair is come back for.
Optionally, after conflict loop is eliminated, in addition to:
The packet of figure is carried out, the figure with conflict relationship each other is classified as same group, will not deposited with other figures Same group is classified as in the figure of conflict relationship;
Will the interior pattern spacing coloring of group.
Optionally, in addition to:
Statistics each group has the difference of the quantity of same color and different colours with adjacent group in intersection and adjacent pattern;
Graphic color difference being more than in the group of predetermined value is overturn.
In addition, present invention also offers a kind of design system of dual domain, including:
Conflict figure searching unit, and for searching the conflict figure in original layout, conflict figure is the distance between figure Less than a pair of figures of pre-determined distance;
Conflict loop searching unit, and for searching conflict loop according to conflict figure, conflict loop is that figure number is odd number Figure loop;
Figure cutting unit, for the figure in the loop that conflicts to be split, to eliminate conflict loop.
Optionally, the conflict figure searching unit includes:
Label unit, for by the figure label in domain;
Conflict figure determining unit, is less than a pair of figures of pre-determined distance for the distance between figure for the figure that conflicts, and A pair of labels of the figure that conflicts are separately recorded in the chained list centering of the first chained list and the second chained list;
The conflict loop searching unit includes:
Sequence number setup unit is searched, for the label of the previous chained list of label centering second to be set as into the first of this lookup The label of chained list;
Label retrieval unit, for being searched with the label of the first chained list in chained list pair, is obtained when time mark of lookup It is number right, and the label of the first chained list of lookup next time will be set as when time label of label the second chained list of centering, when the second chained list In label it is identical with the label of the chained list of label centering before first when stop search, to obtain label sequence;
Conflict loop determining unit, for selecting loop from label sequence, and figure quantity is true for the loop of odd number It is set to conflict loop.
Optionally, in addition to:
Non conflicting loop determining unit, for figure quantity to be defined as into non conflicting loop for the loop of even number;
End label is to deleting unit, for last label in the label sequence by non conflicting loop to deleting;
Sequence number setup unit is continued to search for, for the label of last chained list of label centering second to be set as continuing to look into The label for the first chained list looked for.
Optionally, in addition to:
Grouped element, for the packet by figure is carried out, will be classified as same group with the figure of conflict relationship each other, will be with Other figures are all classified as same group in the absence of the figure of conflict relationship;
Coloring units, for the interior pattern spacing of group to be coloured.
Optionally, in addition to:
Boundary Statistic unit, has same color and not for counting each group and adjacent group in intersection and adjacent pattern With the difference of the quantity of color;
Roll-over unit, is overturn for difference to be more than to the graphic color in the group of predetermined value.
The design method and system of dual domain provided in an embodiment of the present invention, conflict figure are that the distance between figure is small In a pair of figures of pre-determined distance, conflict loop is determined based on conflict figure, and then the figure in the loop that conflicts is cut Cut, so that, conflict loop is eliminated, the cutting of figure is carried out based on conflict loop, the complexity of design is reduced, design effect is improved Rate.
Further, by the way that to being stored in two chained lists, the label for the figure that conflicts is passed through into the label stored in chained list Lookup to carrying out conflict loop, can greatly reduce operand, improve design efficiency, be particularly suitable for use in extensive domain Processing.
Further, in the coloring process for decomposition, decide whether to carry out according to the quantity of intersection adjacent pattern The upset of graphic color in group so that balance is realized in the quantity between two domains to be decomposed, and with less cutting quantity.
Brief description of the drawings
Of the invention above-mentioned and/or additional aspect and advantage will become from the following description of the accompanying drawings of embodiments Substantially and be readily appreciated that, wherein:
Fig. 1 is the schematic flow sheet of the design method of the dual domain according to the embodiment of the present invention;
Fig. 2 is the schematic diagram of conflict loop figure label in the design method according to the embodiment of the present invention;
Fig. 3 is the schematic diagram of figure loop in the design method according to the embodiment of the present invention;
Fig. 4 is the figure and loop schematic diagram of conflict loop elimination in the design method according to the embodiment of the present invention;
Fig. 5 is the schematic diagram that is grouped in design method according to the embodiment of the present invention;
Fig. 6 is the schematic diagram that is coloured in design method according to the embodiment of the present invention;
Fig. 7 is the schematic diagram that is overturn in design method according to the embodiment of the present invention;
Fig. 8 is the structural representation of the design system according to the embodiment of the present invention.
Embodiment
Embodiments of the invention are described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning to end Same or similar label represents same or similar element or the element with same or like function.Below with reference to attached The embodiment of figure description is exemplary, is only used for explaining the present invention, and is not construed as limiting the claims.
In the present invention, a kind of design method of dual domain is proposed, with reference to shown in Fig. 1, including:Search in original layout Conflict figure, conflict figure be figure between distance be less than pre-determined distance a pair of figures;Conflict is searched according to conflict figure Loop, conflict loop is the figure loop that figure number is odd number;Figure in the loop that conflicts is cut, to eliminate conflict ring Road.
Further, after conflict loop is eliminated, the packet of figure is carried out, the figure with conflict relationship each other is returned For same group, same group all will be classified as in the absence of the figure of conflict relationship with other figures;And will pattern spacing coloring in group, go forward side by side one Step carries out upset coloring, and then is two sets of figures by a set of graphics decomposition.
In the present invention, conflict loop is determined based on conflict figure, and then the figure in the loop that conflicts is cut, So as to eliminate conflict loop, the cutting of figure is carried out based on conflict loop, the complexity of design is reduced, design efficiency is improved.
In order to be better understood from the present invention, technical scheme is carried out below with reference to specific embodiment detailed Description.
There is provided original layout first.The original layout is designed domain, and the original layout will carry out dual domain Design, to be broken down into two sets of domains.
Then, the conflict figure in original layout is searched, conflict figure is that the distance between figure is less than the one of pre-determined distance To figure.
In the present embodiment, it is with reference to shown in Fig. 2, each figure is suitable by the figure label in domain specifically, first Secondary label, figure marked as 1,2,3,4,5,6,7.It is then possible to search the distance of the figure successively according to the order of label Less than the figure of pre-determined distance, the distance between two figures is less than pre-determined distance, and as conflict figure, for example, in Fig. 2 diagrams Figure in, first look for the figure conflicted with figure 1, find figure 2 and figure 1 is smaller than pre-determined distance, then The label of conflict figure is separately recorded in (1,2) in the first chained list listA, the second chained list listB, i.e., label 1 is recorded the In one chained list, label 2 is recorded in the second chained list, likewise, continue to search for the figure conflicted with figure 2, find figure 2 with Figure 1, figure 3, figure 5, the spacing of figure 7 are respectively less than pre-determined distance, then the label of conflict figure to (2,1), (2,3), (2,5), (2,7) are separately recorded in the first chained list listA, the second chained list listB, likewise, searching remaining figure successively Conflict figure, and by label to being separately recorded in the first chained list and the second chained list, so that, obtain following chained list pair:
listA:1,2,2,2,2,3,3,4,4,4,5,5,6,6,7,7.
listB:2,1,3,5,7,2,4,3,5,6,2,4,4,7,2,6.
Then, the lookup of conflict loop is carried out.In the present embodiment, based on chained list to searching:, will in each search The label of the previous chained list of label centering second is set as the label of this first chained list searched, with the label of this first chained list Searched in chained list pair, the label pair of this lookup is obtained, when the label in the second chained list and the chained list of label centering before first Label it is identical when stop searching, so as to obtain label sequence, the figure occurred in the first chained list is stopped at due to searching On, loop is certainly existed in the label sequence, it is thus possible to obtain conflict loop from the label sequence.
The acquisition step of specific label sequence, with reference to shown in Fig. 3, if first label is to for (1,2), then carrying out first Secondary to search, the label 2 of the second chained list of first label centering is set as this first chained list searched by this time in searching Label, figure is marked as corresponding figure in 2, second chained lists marked as 3,5,7 from the first chained list, and (2,1) and (1,2) are same One conflict figure, ignore in lookup with the previous label pair for the same figure that conflicts, can according to label sequential selection this The label pair of lookup, obtain this lookup label to (2,3), proceed search, likewise, successively obtain label to (3, 4), (4,5) and (5,2), the label of label 2 in the second chained list during label is to (5,2) and previous lookup to (2,1) first Label 2 in chained list is identical, that is to say, that figure forms closed loop, then stops searching, obtain label sequence (1,2)>(2、3)> (3、4)>(4、5)>(5、2)。
The quantity that figure 2-3-4-5 constitutes figure in loop, loop in the label sequence is even number, and therefore, the loop is true It is set to non conflicting loop.For non conflicting loop, by end label to deleting, to carry out the lookup of other loops, specifically, first By last label in the label sequence of non conflicting loop to deleting, in the specific embodiment, label is deleted to (5,2) Remove, after deletion, label sequence is changed into (1,2)>(2、3)>(3、4)>(4,5), and continue the lookup of label pair, in lookup, by this The label of the label of last in sequence the second chained list of centering is set as the label of the first chained list continued to search for, and repeats above-mentioned The step of label is to searching, in the specific embodiment, the first chain that label is set as continuing to search for 5 in (4,5) The label of table, next conflict figure is not found when continuing to search for, then, continues to delete end label to (4,5), label sequence becomes For (1,2)>(2、3)>(3,4), similarly, last label in the sequence is set to the label 4 of the second chained list in (3,4) For the label of the first chained list continued to search for, the step of above-mentioned label is to searching is repeated, new label is obtained to sequence (1,2)> (2、3)>(3、4)>(4、6)>(6、7)>Figure 2-3-4-6-7 constitutes the quantity of figure in loop, loop in (7,2), the sequence For odd number, then the figure in the loop that conflicts is split,, can be according to specific need in segmentation to eliminate conflict loop Select suitable figure and suitable cut-point to be split, with reference to shown in Fig. 4 (A), figure 6 is split, so, loop becomes For 2-3-4-6-8-7, it is changed into non conflicting loop, with reference to shown in Fig. 4 (B), so that, the problem of solving conflict loop, so far, root Chained list pair is updated according to new conflict figure, and carries out the lookup of other loops, lookup method is as described above.For the ring searched Road, is marked, and is no longer searched in follow-up search.
So far, the segmentation of the conflict loop of the present embodiment is completed, the problem of conflicting loop, then, Ke Yiji is solved The subsequent step of continuous complete design, the coloring of such as domain and the cutting that domain is carried out according to coloring, tinting steps are by domain In figure distinguished according to two kinds of different colors, then cut according to color, so as to obtain two domains.
In the present embodiment, first, the packet of figure is carried out, the figure with conflict relationship each other is classified as same group, All same group will be classified as in the absence of the figure of conflict relationship with other figures, with reference to shown in Fig. 3, each figure in the embodiment with Another figure all has conflict relationship, and therefore, all figures in the diagram are all divided into same group.
In order to better illustrate the subsequent step of the present embodiment, it will be illustrated with the figure shown in Fig. 4, with reference to Fig. 5 institutes Show there is conflict relationship between figure 13-4-1-3-2-12 each twos, they are classified as first group, figure 10-11-9-14 is every There is conflict relationship between two but conflict relationship is not present with any figure in first group, they are classified as second group, figure Any figure in conflict relationship, with first group and second group is not present between shape 5-6-7-8 conflict relationship is also not present, by them Be classified as the 3rd group, then, will pattern spacing coloring in group, i.e., adjacent figure different colours, and figure separately identical Color, so so that the figure in group is divided into two kinds of colors, with reference to shown in Fig. 6, in first group, figure 1,2,13 it is a kind of Color, figure 3,4,12 a kind of color;In second group, figure 11,14 a kind of color, figure 9,10 another color; In 3rd group, figure 5,7 a kind of color, figure 6,8 another color, after the completion of coloring, can according to coloring carry out version The cutting of figure.
In order to balance the quantity of figure in i.e. two domains of two kinds of colors, the quantity of cutting is reduced, the present embodiment is also carried out The step of upset, specifically, statistics each group has a same color and different face with adjacent group in intersection and adjacent pattern The difference of the quantity of color, then, graphic color difference being more than in the group of predetermined value are overturn.In the particular embodiment, The different each figure of intersection color is added 1, each figure of color identical subtracts 1, the score in a group is obtained, with reference to figure Shown in 6, first group of figure 4 is different from the 3rd group of the color of figure 5, and first group of score is 1;3rd group of figure 5 and One group of the color of figure 4 is different, and the 3rd group of figure 8 is different from second group of the color of figure 9, and the 3rd group of score is 2, equally , second group of score is 1, so, can be overturn the color of figure in higher group of scoring, such as by the 3rd group of figure Shape color is overturn, and with reference to shown in Fig. 7, so, after upset, the 3rd group of figure 8 is identical with second group of the color of figure 9, and the 3rd The figure 5 of group is identical with first group of the color of figure 4, and the overturning step can be repeated, until the cutting number needed for realization The optimum state that amount is balanced with figure quantity.In the overturning step, it is considered to the quantity of the color of intersection figure between group, in cutting While ensure that the quality of figure, the balance for realizing figure quantity between two domains is overturn by color after dicing.
The design method to the embodiment of the present invention is described in detail above, in addition, present invention also offers one kind The design system of dual domain, with reference to shown in Fig. 8, including:
Conflict figure searching unit, and for searching the conflict figure in original layout, conflict figure is the distance between figure Less than a pair of figures of pre-determined distance;
Conflict loop searching unit, and for searching conflict loop according to conflict figure, conflict loop is that figure number is odd number Figure loop;
Figure cutting unit, for the figure in the loop that conflicts to be split, to eliminate conflict loop.
Further, the conflict figure searching unit includes:
Label unit, for by the figure label in domain;
Conflict figure determining unit, is less than a pair of figures of pre-determined distance for the distance between figure for the figure that conflicts, and A pair of labels of the figure that conflicts are separately recorded in the chained list centering of the first chained list and the second chained list;
The conflict loop searching unit includes:
Sequence number setup unit is searched, for the label of the previous chained list of label centering second to be set as into the first of this lookup The label of chained list;
Label retrieval unit, for being searched with the label of the first chained list in chained list pair, is obtained when time mark of lookup It is number right, and the label of the first chained list of lookup next time will be set as when time label of label the second chained list of centering, when the second chained list In label it is identical with the label of the chained list of label centering before first when stop search, to obtain label sequence;
Conflict loop determining unit, for selecting loop from label sequence, and figure quantity is true for the loop of odd number It is set to conflict loop.
Further, in addition to:
Non conflicting loop determining unit, for figure quantity to be defined as into non conflicting loop for the loop of even number;
End label is to deleting unit, for last label in the label sequence by non conflicting loop to deleting;
Sequence number setup unit is continued to search for, for the label of last chained list of label centering second to be set as continuing to look into The label for the first chained list looked for.
Further, in addition to:
Grouped element, for the packet by figure is carried out, will be classified as same group with the figure of conflict relationship each other, will be with Other figures are all classified as same group in the absence of the figure of conflict relationship;
Coloring units, for the interior pattern spacing of group to be coloured.
Interval coloring, i.e., adjacent pattern different colours, and figure separately same color.
Also include:
Boundary Statistic unit, has same color and not for counting each group and adjacent group in intersection and adjacent pattern With the difference of the quantity of color;
Roll-over unit, is overturn for difference to be more than to the graphic color in the group of predetermined value.
Each embodiment in this specification is described by the way of progressive, identical similar portion between each embodiment Divide mutually referring to what each embodiment was stressed is the difference with other embodiment.It is real especially for system Apply for example, because it is substantially similar to embodiment of the method, so describing fairly simple, related part is referring to embodiment of the method Part explanation.System embodiment described above is only schematical, wherein described illustrate as separating component Unit can be or may not be physically separate, the part shown as unit can be or may not be Physical location, you can with positioned at a place, or can also be distributed on multiple artificial windows.Can be according to the actual needs Some or all of module therein is selected to realize the purpose of this embodiment scheme.Those of ordinary skill in the art are not paying In the case of creative work, you can to understand and implement.
Although the present invention is disclosed as above with preferred embodiment, but is not limited to the present invention.It is any to be familiar with ability The technical staff in domain, without departing from the scope of the technical proposal of the invention, all using in the methods and techniques of the disclosure above Appearance makes many possible variations and modification to technical solution of the present invention, or is revised as the equivalent embodiment of equivalent variations.Therefore, Every content without departing from technical solution of the present invention, the technical spirit according to the present invention is to made for any of the above embodiments any simple Modification, equivalent variations and modification, in the range of still falling within technical solution of the present invention protection.

Claims (8)

1. a kind of design method of dual domain, it is characterised in that including:
The conflict figure in original layout is searched, conflict figure is a pair of figures of the distance between figure less than pre-determined distance;
Conflict loop is searched according to conflict figure, conflict loop is the figure loop that figure number is odd number;
Figure in the loop that conflicts is split, to eliminate conflict loop;
The step of searching the conflict figure in domain includes:
By the figure label in domain;
The conflict figure in domain is searched, conflict figure is a pair of figures of the distance between figure less than pre-determined distance, and will punching A pair of labels of prominent figure are separately recorded in the chained list centering of the first chained list and the second chained list;
The step of searching conflict loop according to conflict figure includes:
Enter the lookup of line label pair, stop when the label in the second chained list is identical with the label of the chained list of label centering before first Search, to obtain label sequence, the step of each label is to searching includes:Searched with the label of the first chained list in chained list pair, Obtain when time label pair of lookup, and the first chained list of lookup next time will be set as when time label of label the second chained list of centering Label;
Loop is selected from label sequence, figure quantity is defined as the loop that conflicts for the loop of odd number.
2. design method according to claim 1, it is characterised in that select after loop, also wrap from label sequence Include step:
Figure quantity is defined as non conflicting loop for the loop of even number;
End label pair is deleted, deleting the step of end label pair includes:By last in the label sequence of non conflicting loop Individual label is to deleting;
The label for the first chained list that the label of last chained list of label centering second is set as continuing to search for, and come back for The step of label is to searching;
If next label pair can not be found, the delete step of end label pair is returned;
If finding next label pair, the finding step of label pair is come back for.
3. the design method according to any one of claim 1-2, it is characterised in that after conflict loop is eliminated, also Including:
The packet of figure is carried out, the figure with conflict relationship each other is classified as same group, punching will be all not present with other figures The figure of tip out system is classified as same group;
Will the interior pattern spacing coloring of group.
4. design method according to claim 3, it is characterised in that also include:
Statistics each group has the difference of the quantity of same color and different colours with adjacent group in intersection and adjacent pattern;
Graphic color difference being more than in the group of predetermined value is overturn.
5. a kind of design system of dual domain, it is characterised in that including:
Conflict figure searching unit, and for searching the conflict figure in original layout, conflict figure is that the distance between figure is less than A pair of figures of pre-determined distance;
Conflict loop searching unit, and for searching conflict loop according to conflict figure, conflict loop is the figure that figure number is odd number Shape loop;
Figure cutting unit, for the figure in the loop that conflicts to be split, to eliminate conflict loop;
The conflict figure searching unit includes:
Label unit, for by the figure label in domain;
Conflict figure determining unit, is less than a pair of figures of pre-determined distance for the distance between figure for the figure that conflicts, and will punching A pair of labels of prominent figure are separately recorded in the chained list centering of the first chained list and the second chained list;
The conflict loop searching unit includes:
Sequence number setup unit is searched, for the label of the previous chained list of label centering second to be set as into this first chained list searched Label;
Label retrieval unit, for being searched with the label of the first chained list in chained list pair, is obtained when time label pair of lookup, And the label of the first chained list of lookup next time, the mark in the second chained list will be set as when time label of label the second chained list of centering Stop searching when number identical with the label of the chained list of label centering before first, to obtain label sequence;
Conflict loop determining unit, for selecting loop from label sequence, and figure quantity is defined as the loop of odd number Conflict loop.
6. design system according to claim 5, it is characterised in that also include:
Non conflicting loop determining unit, for figure quantity to be defined as into non conflicting loop for the loop of even number;
End label is to deleting unit, for last label in the label sequence by non conflicting loop to deleting;
Sequence number setup unit is continued to search for, for the label of last chained list of label centering second to be set as into what is continued to search for The label of first chained list.
7. the design system according to any one of claim 5-6, it is characterised in that also include:
Grouped element, for the packet by figure is carried out, same group is classified as by the figure with conflict relationship each other, will be with other Figure is all classified as same group in the absence of the figure of conflict relationship;
Coloring units, for the interior pattern spacing of group to be coloured.
8. design system according to claim 7, it is characterised in that also include:
Boundary Statistic unit, has same color and different face for counting each group and adjacent group in intersection and adjacent pattern The difference of the quantity of color;
Roll-over unit, is overturn for difference to be more than to the graphic color in the group of predetermined value.
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