CN104820346B - Flat workpiece alignment method - Google Patents
Flat workpiece alignment method Download PDFInfo
- Publication number
- CN104820346B CN104820346B CN201510197413.8A CN201510197413A CN104820346B CN 104820346 B CN104820346 B CN 104820346B CN 201510197413 A CN201510197413 A CN 201510197413A CN 104820346 B CN104820346 B CN 104820346B
- Authority
- CN
- China
- Prior art keywords
- air supporting
- transmission plane
- flat panel
- supporting transmission
- para
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Liquid Crystal (AREA)
Abstract
The invention provides a flat workpiece alignment method. The method includes the following steps: providing a gas floatation conveying platform comprising a gas floatation conveying surface, forming continuous upward buoyancy through gas via the gas floatation conveying surface, and enabling to-be-aligned flat workpieces to suspend over the gas floatation conveying surface and to be at a free state without contact friction; providing two alignment retaining plates, and connecting the two alignment retaining plates to two adjacent edges of the gas floatation conveying surface respectively to form an alignment benchmark structure; downwardly inclining the gas floatation conveying surface along the side where the alignment benchmark structure is located, further enabling the to-be-aligned flat workpieces to automatically lean to the alignment benchmark structure under the action of inertia and own gravity for alignment, and finally finishing alignment operation of the flat workpieces. The method for aligning the flat workpieces under the action of own gravity is simple to operate and free of contact pollution.
Description
Technical field
The present invention relates to technique of counterpoint field before flat-type work pieces process, more particularly to a kind of para-position side of flat panel workpieces
Method.
Background technology
During automatic continuous production, it is its basic task that workpiece is sent to into predetermined position, such as,
In the production of printed circuit board (PCB), have one procedure to be exposed to substrate by exposure machine, and before being exposed to substrate, needed
The panel assembly that enters for first passing through exposure machine moves to substrate on hack from Jin Ban areas, for make at work can be accurately into panel assembly
Substrate is placed on the clamping device of hack, substrate must carry out pre- para-position in Jin Ban areas.However, existing flat panel workpieces
Alignment method not only needs to install some groups of rollers to transmit to substrate, and after substrate transmission in place, also needs to arrange
Fixation device, to align substrate by clamp operation the purpose of pre- para-position is reached.It can be seen that, the para-position side of existing flat panel workpieces
Not only substrate is easily worn and produces the pollution of contact surface method in complex structure, and transmit process, ultimately results in exposure effect
It is really undesirable.
The content of the invention
It is an object of the invention to overcome the defect of prior art, there is provided one kind is simple to operate, it is dirty to produce contact
The alignment method of the flat panel workpieces of dye.
What the present invention was realized in：
A kind of alignment method of flat panel workpieces, comprises the following steps：An air supporting delivery platform is provided, the air supporting transmission is flat
Platform includes an air supporting transmission plane, and the air supporting transmission plane forms unbroken to buoyancy by gas so that treat the flat board of para-position
Workpiece is suspended in the top of the air supporting transmission plane and in the free state of contactless friction；Two para-position baffle plates are provided, it is described
Two para-position baffle plates connect respectively on two adjacent edgewise of the air supporting transmission plane, form contraposition reference structure；Make the gas
Floating transmission plane is rolled obliquely along the place of the contraposition reference structure, and then treats the flat panel workpieces of para-position in inertia described in causing
And be close to the contraposition reference structure in the presence of self gravitation automatically and alignd, it is finally completed the para-position work of flat panel workpieces
Make.
Used as the improvement of the alignment method of above-mentioned flat panel workpieces, the air supporting transmission plane is rectangular configuration, the para-position base
Quasi- structure is " L " shape structure.
Used as the improvement of the alignment method of above-mentioned flat panel workpieces, the air supporting transmission plane is porous material dielectric layer, and institute
State and some trickle pores being evenly distributed are offered on porous material dielectric layer.
Used as the improvement of the alignment method of above-mentioned flat panel workpieces, the air supporting delivery platform also includes an air pump, described
The bottom side of air supporting delivery platform offers the air inlet for connecting each trickle pore, and the air pump passes through the air inlet handle
Cross air filtering to type it out from the trickle pore, and then cause to form unbroken to buoyancy on the air supporting transmission plane.
Used as the improvement of the alignment method of above-mentioned flat panel workpieces, the porous material dielectric layer is ceramic layer or aluminum metal material
The bed of material.
Used as the improvement of the alignment method of above-mentioned flat panel workpieces, the air supporting transmission plane is planar design structure, the gas
The bottom side of floating delivery platform is provided with some altitude mixture control legs, with the height by adjusting some altitude mixture control legs respectively
So that the air supporting transmission plane is downward along the place azimuthal tilt of the contraposition reference structure.
Used as the improvement of the alignment method of above-mentioned flat panel workpieces, the air supporting transmission plane is inclined design structure so that institute
The place azimuthal tilt that air supporting transmission plane is stated along the contraposition reference structure is downward.
The invention has the beneficial effects as follows：The alignment method of the flat panel workpieces that the present invention is provided, not only simple to operate, para-position effect
It is really good, and due to when flat panel workpieces pass through air supporting transmission plane, it is between the two and contactless, it is to avoid both produce friction at contact
And cause flat panel workpieces to be worn and torn or cause flat panel workpieces to produce the problem of contact surface pollution.
Description of the drawings
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, without having to pay creative labor, may be used also
To obtain other accompanying drawings according to these accompanying drawings.
Fig. 1 is a kind of overall structure diagram of preferred embodiment of alignment method of flat panel workpieces of the present invention.
Fig. 2 is the implementation structural representation one of the alignment method of flat panel workpieces shown in Fig. 1.
Fig. 3 is the implementation structural representation two of the alignment method of flat panel workpieces shown in Fig. 1.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than the embodiment of whole.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
As shown in figure 1, the present embodiment provides a kind of alignment method of flat panel workpieces, it is comprised the following steps：
Step S1, there is provided an air supporting delivery platform, the air supporting delivery platform includes an air supporting transmission plane, and the air supporting is passed
Face is sent to form unbroken to buoyancy by gas so that the flat panel workpieces for treating para-position are suspended in the top of the air supporting transmission plane
And in the free state of contactless friction；
Specifically, as shown in Figure 2, there is provided an air supporting delivery platform 11, the air supporting delivery platform 11 is passed including an air supporting
Face 111 is sent, the air supporting transmission plane 111 is to offer some points on porous material dielectric layer, and the porous material dielectric layer
The uniform trickle pore 112 of cloth.The air supporting delivery platform 11 also includes an air pump 113, the air supporting delivery platform 11
Bottom side offers the air inlet (not shown) for connecting each trickle pore 112, and the air pump 113 passes through the air inlet handle
Cross air filtering to type it out from the trickle pore 112, and then cause to form unbroken to floating on the air supporting transmission plane 111
Power, it is preferable that the porous material dielectric layer is ceramic layer or aluminum metallic material layer.Direction shown in arrow X is to treat para-position in Fig. 2
Flat panel workpieces 2 enter plate direction, when described when the flat panel workpieces 2 of para-position are sent in X direction the air supporting transmission plane 111,
Under unbroken buoyancy upwards, the flat panel workpieces 2 for treating para-position are suspended in the top of the air supporting transmission plane 111 and locate
In the free state of contactless friction.
Step S2, there is provided two para-position baffle plates, the two para-positions baffle plate connects respectively located at the biphase of the air supporting transmission plane
On adjacent edgewise, contraposition reference structure is formed；
Specifically, as shown in Figure 2, there is provided two para-position baffle plates 12, the two para-positions baffle plate 12 connects respectively located at the gas
On two adjacent edgewise of floating transmission plane 11, contraposition reference structure is formed.Preferably due to the most flat board for treating para-position
Workpiece 2 is all rectangular configuration, so, the air supporting transmission plane 111 is rectangular configuration, and the contraposition reference structure is " L " shape knot
Structure.
Step S3, makes the air supporting transmission plane roll obliquely along the place of the contraposition reference structure, and then causes institute
State the flat panel workpieces for treating para-position and be close to the contraposition reference structure automatically in the presence of inertia and self gravitation and alignd, most
The para-position work of flat panel workpieces is completed eventually.
Specifically, it is so that the air supporting transmission plane as shown in Fig. 2 the air supporting transmission plane 111 is planar design structure
111 roll obliquely (i.e. so that the air supporting transmission plane 111 is along the two para-positions baffle plate along the place of the contraposition reference structure
A 12 intersecting angle lappings are obliquely), the bottom side of the air supporting delivery platform 11 is provided with some altitude mixture control legs 114, so just
The air supporting transmission plane 111 can be caused by adjusting the height of some altitude mixture control legs 114 respectively along the para-position
The place azimuthal tilt of benchmark architecture downwards (i.e. so that the air supporting transmission plane 111 intersect along the two para-positions baffle plate 12 one
Angle lapping is obliquely).In addition, the air supporting transmission plane 111 also directly can cause the air supporting transmission using inclined design structure
Face 111 is downward along the place azimuthal tilt of the contraposition reference structure.So, as shown in figure 3, the flat board for treating para-position
Workpiece 2 is close to the contraposition reference structure in the presence of inertia and self gravitation, automatically and is alignd, and then reaches para-position
Purpose.
The alignment method of the flat panel workpieces that the present embodiment is provided, not only simple to operate, para-position effect is good, and due to flat board
It is between the two and contactless when workpiece passes through air supporting transmission plane, it is to avoid both produce friction and cause flat panel workpieces to be ground contact
Damage or cause flat panel workpieces to produce the problem of contact surface pollution.
Presently preferred embodiments of the present invention is the foregoing is only, not to limit the present invention, all essences in the present invention
Within god and principle, any modification, equivalent substitution and improvements made etc. should be included within the scope of the present invention.
Claims (7)
1. a kind of alignment method of flat panel workpieces, it is characterised in that comprise the following steps：
An air supporting delivery platform is provided, the air supporting delivery platform includes an air supporting transmission plane and an air pump, and the air supporting is passed
Face is sent to type it out gas from some trickle pores being evenly distributed by the air pump unbroken to buoyancy to be formed,
So that the flat panel workpieces for treating para-position are suspended in the top of the air supporting transmission plane and in the free state of contactless friction；
Two para-position baffle plates are provided, the two para-positions baffle plate connects respectively on two adjacent edgewise of the air supporting transmission plane, shape
Into para-position benchmark architecture；
The air supporting transmission plane is rolled obliquely along the place of the contraposition reference structure, and then the flat of para-position is treated described in causing
Plate workpiece is close to the contraposition reference structure and is alignd automatically in the presence of inertia and self gravitation, is finally completed flat board work
The para-position work of part.
2. the alignment method of flat panel workpieces as claimed in claim 1, it is characterised in that the air supporting transmission plane is rectangle knot
Structure, the contraposition reference structure is " L " shape structure.
3. the alignment method of flat panel workpieces as claimed in claim 2, it is characterised in that the air supporting transmission plane is porous material
Some trickle pores being evenly distributed are offered on dielectric layer, and the porous material dielectric layer.
4. the alignment method of flat panel workpieces as claimed in claim 3, it is characterised in that open the bottom side of the air supporting delivery platform
The air inlet of each trickle pore is communicated with, the air pump crosses air filtering from the trickle gas by air inlet handle
Hole types it out, and then causes to form unbroken to buoyancy on the air supporting transmission plane.
5. the alignment method of the flat panel workpieces as described in claim 3 or 4, it is characterised in that the porous material dielectric layer is
Ceramic layer or aluminum metallic material layer.
6. the alignment method of flat panel workpieces as claimed in claim 5, it is characterised in that the air supporting transmission plane is planar design
Structure, the bottom side of the air supporting delivery platform is provided with some altitude mixture control legs, to be adjusted by adjusting some height respectively
The height of section leg causes the air supporting transmission plane downward along the place azimuthal tilt of the contraposition reference structure.
7. the alignment method of flat panel workpieces as claimed in claim 6, it is characterised in that the air supporting transmission plane is inclined design
Structure so that the air supporting transmission plane is downward along the place azimuthal tilt of the contraposition reference structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510197413.8A CN104820346B (en) | 2015-04-24 | 2015-04-24 | Flat workpiece alignment method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510197413.8A CN104820346B (en) | 2015-04-24 | 2015-04-24 | Flat workpiece alignment method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104820346A CN104820346A (en) | 2015-08-05 |
| CN104820346B true CN104820346B (en) | 2017-04-12 |
Family
ID=53730675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510197413.8A Active CN104820346B (en) | 2015-04-24 | 2015-04-24 | Flat workpiece alignment method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104820346B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107686002A (en) * | 2016-08-05 | 2018-02-13 | 台湾暹劲股份有限公司 | Position correction mechanism and its implement of application |
| CN106413262A (en) * | 2016-11-09 | 2017-02-15 | 上海展华电子有限公司 | PCB substrate batch marking device |
| CN106597814B (en) * | 2017-01-11 | 2018-02-23 | 深圳市大川光电设备有限公司 | Multi-functional exposure stage |
| CN114694519B (en) * | 2022-04-24 | 2023-10-20 | 湖北长江新型显示产业创新中心有限公司 | Panel splicing system and panel splicing method |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1731963A2 (en) * | 2005-06-08 | 2006-12-13 | Canon Kabushiki Kaisha | Mold, pattern forming method, and pattern forming apparatus |
| CN101082775A (en) * | 2007-06-29 | 2007-12-05 | 上海微电子装备有限公司 | Vertically delicate adjusting and gravity force compensating mechanism and photo-etching machine |
| CN101510056A (en) * | 2009-03-13 | 2009-08-19 | 上海微电子装备有限公司 | Adjustment device and method for movement of work head of mask aligner |
| CN102537049A (en) * | 2010-12-30 | 2012-07-04 | 上海微电子装备有限公司 | Radial air floatation guide module and photoetching machine motion platform applying same |
| CN103197504A (en) * | 2012-01-09 | 2013-07-10 | 上海微电子装备有限公司 | Equal altitude test apparatus of air floatation blocks |
| CN103226287A (en) * | 2013-04-25 | 2013-07-31 | 河北工业大学 | Two-in-parallel parallel decoupling flexible microposition mechanism |
| CN103782239A (en) * | 2011-08-30 | 2014-05-07 | 株式会社尼康 | Substrate treatment device, substrate treatment method, light exposure method, light exposure device, method for manufacturing device, and method for manufacturing flat panel display |
| CN104181778A (en) * | 2011-05-31 | 2014-12-03 | 上海微电子装备有限公司 | Balance mass system of lithography machine |
| CN204178122U (en) * | 2014-08-22 | 2015-02-25 | 深圳市大川光电设备有限公司 | Be applicable to the film and the workpiece adherence device of image transfer exposure machine |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1036191A1 (en) * | 2007-12-05 | 2009-06-08 | Asml Netherlands Bv | Marker structure and method of forming the same. |
-
2015
- 2015-04-24 CN CN201510197413.8A patent/CN104820346B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1731963A2 (en) * | 2005-06-08 | 2006-12-13 | Canon Kabushiki Kaisha | Mold, pattern forming method, and pattern forming apparatus |
| CN101082775A (en) * | 2007-06-29 | 2007-12-05 | 上海微电子装备有限公司 | Vertically delicate adjusting and gravity force compensating mechanism and photo-etching machine |
| CN101510056A (en) * | 2009-03-13 | 2009-08-19 | 上海微电子装备有限公司 | Adjustment device and method for movement of work head of mask aligner |
| CN102537049A (en) * | 2010-12-30 | 2012-07-04 | 上海微电子装备有限公司 | Radial air floatation guide module and photoetching machine motion platform applying same |
| CN104181778A (en) * | 2011-05-31 | 2014-12-03 | 上海微电子装备有限公司 | Balance mass system of lithography machine |
| CN103782239A (en) * | 2011-08-30 | 2014-05-07 | 株式会社尼康 | Substrate treatment device, substrate treatment method, light exposure method, light exposure device, method for manufacturing device, and method for manufacturing flat panel display |
| CN103197504A (en) * | 2012-01-09 | 2013-07-10 | 上海微电子装备有限公司 | Equal altitude test apparatus of air floatation blocks |
| CN103226287A (en) * | 2013-04-25 | 2013-07-31 | 河北工业大学 | Two-in-parallel parallel decoupling flexible microposition mechanism |
| CN204178122U (en) * | 2014-08-22 | 2015-02-25 | 深圳市大川光电设备有限公司 | Be applicable to the film and the workpiece adherence device of image transfer exposure machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104820346A (en) | 2015-08-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104820346B (en) | Flat workpiece alignment method | |
| CN209580110U (en) | A kind of quartzite slate polishing production line | |
| CN106024724A (en) | Support substrate and method for manufacturing panel by support substrate | |
| CN209087806U (en) | A kind of coating clamp and its carrier strip | |
| CN104776979A (en) | Panel detecting machine table | |
| CN206596292U (en) | A kind of wave-soldering product supporting carrier | |
| CN106319799A (en) | Textile sizing device | |
| CN207578060U (en) | A kind of novel timber polishing machine | |
| CN204613595U (en) | The alignment device of flat panel workpieces | |
| CN202174570U (en) | Platform for placing and cleaning films | |
| CN215394239U (en) | Edge chamfering device for plates | |
| CN202862012U (en) | Abrasive injecting and finishing device | |
| CN206153775U (en) | Laser cutting tool | |
| CN109634061A (en) | Transmitting device, transmission method and the lithographic equipment of substrate | |
| CN214558431U (en) | Automatic seam welder for processing steel drum | |
| CN1500033A (en) | Method for hydroenhancing fabrics using shaped orifice | |
| CN108116888A (en) | Automatic substrate processing system with double process equipments | |
| CN204413840U (en) | Glass grinding frame and glass grinding device | |
| CN103005794A (en) | Silk screen printing wax patch machining process | |
| CN208485243U (en) | A kind of workpiece enters the automatic arrangement machine of conveyer belt | |
| CN207414659U (en) | A kind of mold for being used to make cable bearer | |
| KR102583012B1 (en) | Substrate transfering apparatus and substrate processing system having the same | |
| TWI680807B (en) | Shower curtain coating device and shower curtain coating system with the shower curtain coating device | |
| CN106032034A (en) | Full-automatic production line for stone bricks and production technology thereof | |
| CN207139062U (en) | A kind of scolding tin tool for liquid crystal module FPC |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Dai Yuping Inventor after: Dai Tongqing Inventor before: Dai Yuping Inventor before: Dai Tongqing |