CN104820306A - Stripping method of base plate, stacked structure, display panel and display device - Google Patents

Stripping method of base plate, stacked structure, display panel and display device Download PDF

Info

Publication number
CN104820306A
CN104820306A CN201510278641.8A CN201510278641A CN104820306A CN 104820306 A CN104820306 A CN 104820306A CN 201510278641 A CN201510278641 A CN 201510278641A CN 104820306 A CN104820306 A CN 104820306A
Authority
CN
China
Prior art keywords
substrate
magnetosphere
display panel
carrier
binding layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510278641.8A
Other languages
Chinese (zh)
Other versions
CN104820306B (en
Inventor
贾倩
周晓东
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN201510278641.8A priority Critical patent/CN104820306B/en
Publication of CN104820306A publication Critical patent/CN104820306A/en
Application granted granted Critical
Publication of CN104820306B publication Critical patent/CN104820306B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133351Manufacturing of individual cells out of a plurality of cells, e.g. by dicing
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133377Cells with plural compartments or having plurality of liquid crystal microcells partitioned by walls, e.g. one microcell per pixel

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)

Abstract

The embodiment provides a stripping method of a base plate, a stacked structure, a display panel and a display device, which relate to the display technical field, and are easier to strip a rear carrier base plate of a paired box. The stacked structure comprises a display panel, wherein the display panel comprises a first and a second base plates of a paired box, and further comprises a first and a second carrier base plates, the first carrier base plate is provided with a first magnetic layer, a substrate base plate of the first base plate is adhered on the first magnetic layer, a second magnetic layer is arranged on the second carrier base plate, and a substrate base plate of the second base plate is adhered on the second magnetic layer. The stripping method of the base plate, the stacked structure, the display panel and the display device are used for making displays.

Description

A kind of stripping means of substrate and stepped construction, display panel and display device
Technical field
Embodiments of the invention relate to display technique field, particularly relate to a kind of stripping means and stepped construction, display panel and display device of substrate.
Background technology
In field of liquid crystal display, the lightening of liquid crystal display is development trend, and wherein a kind of direction uses ultra-thin glass substrate.The thickness of glass of current volume production product is 0.7mm/0.5mm, and ultra-thin glass substrate can reach 0.1mm even 0.05mm.This kind of glass substrate needs to be mounted on carrier substrate in manufacture craft, and wherein carrier substrate is generally carrier glass plate, and first complete array base palte and color membrane substrates to box, need to consider how to peel off carrier glass plate before carrying out cutting technique.
In this kind of technique, the bonding scheme of glass substrate and carrier glass plate is generally adopt tack coat chemisorption or adopt intermolecular force, in such scheme process, bonding is relatively easy, but in stripping process, the stripping of carrier glass easily causes residual or causes the adhesion of glass substrate to damage, and causes the waste of a large amount of glass and reduces yield rate, greatly reduce production capacity, also result in economic waste.
Summary of the invention
Embodiments of the invention provide a kind of stripping means and stepped construction, display panel and display device of substrate, can, in processing procedure latter stage, make more easily to peel off carrier substrate after box.
First aspect, provides a kind of stripping means of substrate, and the carrier substrate for ultra-thin display panel is peeled off, and comprising:
First carrier substrate is formed the first magnetosphere;
By the first magnetic, magnetization treatment is carried out to described first magnetosphere;
The underlay substrate making first substrate is attached to after on described first magnetosphere and makes formation first substrate;
Second support substrate is formed the second magnetosphere;
The underlay substrate making second substrate is attached to after on described second magnetosphere and makes formation second substrate;
Described first substrate is become stepped construction with second substrate to box-like;
Absorption platform forms the 3rd magnetosphere;
By the first magnetic, magnetization treatment is carried out to described 3rd magnetosphere;
Described stepped construction be placed on described absorption platform, wherein said Second support substrate contacts with described 3rd magnetosphere;
Peel off described first carrier substrate;
By the first magnetic, magnetization treatment is carried out to described second magnetosphere;
To be placed on described absorption platform after the stepped construction upset after described first carrier substrate of stripping, wherein said Second support substrate contacts with described 3rd magnetosphere;
Peel off described Second support substrate.
Optionally, the first carrier substrate is formed the first magnetosphere, comprising:
On described first carrier substrate, coating comprises the organic solution of magnetic particle material;
Process is cured to described organic solution and forms described first magnetosphere.
Optionally, Second support substrate is formed the second magnetosphere, comprising:
On described Second support substrate, coating comprises the organic solution of magnetic particle material;
Process is cured to described organic solution and forms described second magnetosphere.
Optionally, described magnetic particle material comprise at least following one or more: hard magnetic material, alloy material, Ferrite Material.
Optionally, the underlay substrate making first substrate is attached on described first magnetosphere, comprises:
Described first magnetosphere forms the first binding layer;
By described first binding layer, the underlay substrate making first substrate is bonded on described first magnetosphere.
Optionally, after peeling off described first carrier substrate, also comprise and remove described first binding layer.
Optionally, the underlay substrate making second substrate is attached on described second magnetosphere, comprises:
Described second magnetosphere forms the second binding layer;
By described second binding layer, the underlay substrate making second substrate is bonded on described second magnetosphere.
Optionally, after peeling off described Second support substrate, also comprise and remove described second binding layer.
Second aspect, provides a kind of stepped construction, comprises display panel, and described display panel comprises first substrate to box and second substrate, also comprises:
First carrier substrate and Second support substrate;
Wherein, the first carrier substrate is provided with the first magnetosphere, the underlay substrate of described first substrate is attached on described first magnetosphere;
Described Second support substrate is provided with the second magnetosphere, and the underlay substrate of described second substrate is attached on described second magnetosphere.
Optionally, the first binding layer is also comprised between described first substrate and described first magnetosphere;
And/or,
The second binding layer is also comprised between described second substrate and described second magnetosphere.
Optionally, described first magnetosphere is formed and described second magnetospheric material is magnetic particle material.
Optionally, described magnetic particle material comprise at least following one or more: hard magnetic material, alloy material, Ferrite Material.
Optionally, the material of described first carrier substrate and described Second support substrate comprises: glass and resin.
The third aspect, provides a kind of display panel, comprises the display panel made by the stripping means of above-mentioned substrate.
Fourth aspect, provides a kind of display device, comprises above-mentioned display panel.
The stripping means of the substrate that embodiments of the invention provide and stepped construction, display panel and display device, in the stripping process of carrier substrate, magnetosphere on carrier substrate has identical magnetic with the magnetosphere on absorption platform thus produces mutual repulsion effect, can, in processing procedure latter stage, make more easily to peel off carrier substrate after box.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 provides a kind of schematic flow sheet of stripping means of substrate for embodiments of the invention;
The schematic flow sheet of the stripping means of a kind of substrate that Fig. 2 provides for another embodiment of the present invention;
The structural representation of a kind of stepped construction that Fig. 3 provides for embodiments of the invention;
The structural representation of a kind of stepped construction that Fig. 4 provides for another embodiment of the present invention.
Reference numeral:
Absorption platform-30;
Display panel-31;
First substrate-311;
The underlay substrate-3110 of first substrate;
Second substrate-312;
The underlay substrate-3120 of second substrate;
First carrier substrate-32;
Second support substrate-33;
First magnetosphere-34;
Second magnetosphere-35;
3rd magnetosphere-36;
First binding layer-37;
Second binding layer-38.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
With reference to shown in Fig. 1, embodiments of the invention provide a kind of stripping means of substrate, and the carrier substrate for ultra-thin display panel is peeled off, and comprising:
101, on the first carrier substrate, the first magnetosphere is formed.
Concrete, the first magnetosphere in step 101 can make in the following way, and on the first carrier substrate, coating comprises the organic solution of magnetic particle material; Process is cured to organic solution and forms the first magnetosphere.Exemplary, magnetic particle material comprise at least following one or more: hard magnetic material, alloy material, Ferrite Material.
102, by the first magnetic, magnetization treatment is carried out to the first magnetosphere.
103, the underlay substrate making first substrate is attached to making after on the first magnetosphere and forms first substrate.
104, on Second support substrate, the second magnetosphere is formed.
Concrete, the second magnetosphere in step 104 can make in the following way, and on Second support substrate, coating comprises the organic solution of magnetic particle material; Process is cured to organic solution and forms the second magnetosphere.Exemplary, magnetic particle material comprise at least following one or more: hard magnetic material, alloy material, Ferrite Material.
105, the underlay substrate making second substrate is attached to making after on the second magnetosphere and forms second substrate.
106, first substrate is become stepped construction with second substrate to box-like.
107, on absorption platform, the 3rd magnetosphere is formed.
108, by the first magnetic, magnetization treatment is carried out to the 3rd magnetosphere.
109, be placed on absorption platform by stepped construction, wherein Second support substrate contacts with the 3rd magnetosphere.
110, the first carrier substrate is peeled off.
111, by the first magnetic, magnetization treatment is carried out to the second magnetosphere.
112, will be placed on absorption platform after the stepped construction upset after stripping first carrier substrate, wherein Second support substrate contacts with the 3rd magnetosphere.
113, Second support substrate is peeled off.
The stripping means of the substrate that embodiments of the invention provide, in the stripping process of carrier substrate, magnetosphere on carrier substrate has identical magnetic with the magnetosphere on absorption platform thus produces mutual repulsion effect, can, in processing procedure latter stage, make more easily to peel off carrier substrate after box.
On the basis of above-described embodiment, the underlay substrate wherein making first substrate is attached on the first magnetosphere, the molecular force between underlay substrate and the first magnetosphere can be adopted to realize, certainly consider that the fastness of attaching also can adopt adhesives both to be bondd, the underlay substrate of similar making second substrate adopts similar fashion to be attached on the second magnetosphere, shown in concrete reference Fig. 2, embodiments of the invention provide a kind of stripping means of substrate, carrier substrate for ultra-thin display panel is peeled off, and comprising:
201, on the first carrier substrate, the first magnetosphere is formed.
Concrete, the first magnetosphere in step 201 can make in the following way, and on the first carrier substrate, coating comprises the organic solution of magnetic particle material; Process is cured to organic solution and forms the first magnetosphere.Exemplary, magnetic particle material comprise at least following one or more: hard magnetic material, alloy material, Ferrite Material.
202, by the first magnetic, magnetization treatment is carried out to described first magnetosphere.
203, on the first magnetosphere, the first binding layer is formed.
204, by the first binding layer, the underlay substrate making first substrate is bonded on the first magnetosphere.
205, on Second support substrate, the second magnetosphere is formed.
Concrete, the second magnetosphere in step 20504 can make in the following way, and on Second support substrate, coating comprises the organic solution of magnetic particle material; Process is cured to organic solution and forms the second magnetosphere.Exemplary, magnetic particle material comprise at least following one or more: hard magnetic material, alloy material, Ferrite Material.
206, on the second magnetosphere, the second binding layer is formed.
207, by the second binding layer, the underlay substrate making second substrate is bonded on the second magnetosphere.
208, first substrate is become stepped construction with second substrate to box-like.
209, on absorption platform, the 3rd magnetosphere is formed.
210, by the first magnetic, magnetization treatment is carried out to the 3rd magnetosphere.
211, be placed on absorption platform by stepped construction, wherein Second support substrate contacts with the 3rd magnetosphere.
212, the first carrier substrate is peeled off.
213, the first binding layer is removed.
Physics mode wherein can be adopted in step 213 to peel off the first binding layer, organic solvent certainly also can be adopted to be dissolved by this first binding layer and remove.
214, by the first magnetic, magnetization treatment is carried out to the second magnetosphere.
215, will be placed on absorption platform after the stepped construction upset after stripping first carrier substrate, wherein Second support substrate contacts with the 3rd magnetosphere.
216, Second support substrate is peeled off.
217, the second binding layer is removed.
Physics mode wherein can be adopted in step 217 to peel off the second binding layer, organic solvent certainly also can be adopted to be dissolved by this first binding layer and remove.
The stripping means of the substrate that embodiments of the invention provide, in the stripping process of carrier substrate, magnetosphere on carrier substrate has identical magnetic with the magnetosphere on absorption platform thus produces mutual repulsion effect, can, in processing procedure latter stage, make more easily to peel off carrier substrate after box.
Embodiments of the invention, provide a kind of stepped construction, with reference to shown in Fig. 3, comprise display panel 31, and display panel 31 comprises first substrate 311 to box and second substrate 312, also comprises:
First carrier substrate 32 and Second support substrate 33;
Wherein, the first carrier substrate 32 is provided with the first magnetosphere 34, the underlay substrate 3110 of first substrate is attached on the first magnetosphere 34;
On described Second support substrate, 33 are provided with the second magnetosphere 35, and the underlay substrate 3120 of second substrate is attached on the second magnetosphere 35.
Wherein, this stepped construction is placed on stripping absorption platform 30 as shown in Figure 3 carrying out carrier substrate, absorption platform 30 is provided with the 3rd magnetosphere 36.Wherein Fig. 3 is a kind of example, and other structures in not shown display panel.
The stepped construction that embodiments of the invention provide, owing to being provided with magnetosphere on carrier substrate, in the stripping process of carrier substrate, magnetosphere on carrier substrate has identical magnetic with the magnetosphere on absorption platform thus produces mutual repulsion effect, can, in processing procedure latter stage, make more easily to peel off carrier substrate after box.
On the basis of above-described embodiment, the underlay substrate wherein making first substrate is attached on the first magnetosphere, the molecular force between underlay substrate and the first magnetosphere can be adopted to realize, certainly consider that the fastness of attaching also can adopt adhesives both to be bondd, the underlay substrate of similar making second substrate adopts similar fashion to be attached on the second magnetosphere, with reference to shown in Fig. 4, optionally, between first substrate 311 and the first magnetosphere 34, also comprise the first binding layer 37;
And/or,
The second binding layer 38 is also comprised between second substrate 312 and the second magnetosphere 35.
Optionally, the material forming the first magnetosphere 34 and the second magnetosphere 35 is magnetic particle material.
Optionally, magnetic particle material comprise at least following one or more: hard magnetic material, alloy material, Ferrite Material.The material of the first carrier substrate 32 and Second support substrate 33 comprises: glass and resin.
Embodiments of the invention provide a kind of display panel, comprise the display panel made by the stripping means of above-mentioned substrate.
Embodiments of the invention provide a kind of display device, comprise above-mentioned display panel.This display device can be Electronic Paper, mobile phone, TV, digital album (digital photo frame) etc. display device.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; change can be expected easily or replace, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.

Claims (15)

1. a stripping means for substrate, the carrier substrate for ultra-thin display panel is peeled off, and it is characterized in that, comprising:
First carrier substrate is formed the first magnetosphere;
By the first magnetic, magnetization treatment is carried out to described first magnetosphere;
The underlay substrate making first substrate is attached to after on described first magnetosphere and makes formation first substrate;
Second support substrate is formed the second magnetosphere;
The underlay substrate making second substrate is attached to after on described second magnetosphere and makes formation second substrate;
Described first substrate is become stepped construction with second substrate to box-like;
Absorption platform forms the 3rd magnetosphere;
By the first magnetic, magnetization treatment is carried out to described 3rd magnetosphere;
Described stepped construction be placed on described absorption platform, wherein said Second support substrate contacts with described 3rd magnetosphere;
Peel off described first carrier substrate;
By the first magnetic, magnetization treatment is carried out to described second magnetosphere;
To be placed on described absorption platform after the stepped construction upset after described first carrier substrate of stripping, wherein said Second support substrate contacts with described 3rd magnetosphere;
Peel off described Second support substrate.
2. method according to claim 1, is characterized in that, the first carrier substrate is formed the first magnetosphere, comprising:
On described first carrier substrate, coating comprises the organic solution of magnetic particle material;
Process is cured to described organic solution and forms described first magnetosphere.
3. method according to claim 1, is characterized in that, Second support substrate is formed the second magnetosphere, comprising:
On described Second support substrate, coating comprises the organic solution of magnetic particle material;
Process is cured to described organic solution and forms described second magnetosphere.
4. according to the method in claim 2 or 3, it is characterized in that, described magnetic particle material comprise at least following one or more: hard magnetic material, alloy material, Ferrite Material.
5. method according to claim 1, is characterized in that, is attached on described first magnetosphere by the underlay substrate making first substrate, comprises:
Described first magnetosphere forms the first binding layer;
By described first binding layer, the underlay substrate making first substrate is bonded on described first magnetosphere.
6. method according to claim 5, is characterized in that, after peeling off described first carrier substrate, also comprises and removes described first binding layer.
7. method according to claim 1, is characterized in that, is attached on described second magnetosphere by the underlay substrate making second substrate, comprises:
Described second magnetosphere forms the second binding layer;
By described second binding layer, the underlay substrate making second substrate is bonded on described second magnetosphere.
8. method according to claim 7, is characterized in that, after peeling off described Second support substrate, also comprises and removes described second binding layer.
9. a stepped construction, comprises display panel, and described display panel comprises first substrate to box and second substrate, it is characterized in that, also comprises:
First carrier substrate and Second support substrate,
Wherein, the first carrier substrate is provided with the first magnetosphere, the underlay substrate of described first substrate is attached on described first magnetosphere;
Described Second support substrate is provided with the second magnetosphere, and the underlay substrate of described second substrate is attached on described second magnetosphere.
10. stepped construction according to claim 9, is characterized in that, also comprises the first binding layer between described first substrate and described first magnetosphere;
And/or,
The second binding layer is also comprised between described second substrate and described second magnetosphere.
11. stepped constructions according to claim 9, is characterized in that, form described first magnetosphere and described second magnetospheric material is magnetic particle material.
12. stepped constructions according to claim 11, is characterized in that, described magnetic particle material comprise at least following one or more: hard magnetic material, alloy material, Ferrite Material.
13. stepped constructions according to any one of claim 9-12, it is characterized in that, the material of described first carrier substrate and described Second support substrate comprises: glass and resin.
14. 1 kinds of display panels, is characterized in that, comprise the display panel made by the stripping means of the substrate described in any one of claim 1-8.
15. 1 kinds of display device, is characterized in that, comprise display panel according to claim 14.
CN201510278641.8A 2015-05-27 2015-05-27 Stripping means and stepped construction, the display panel and display device of a kind of substrate Active CN104820306B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510278641.8A CN104820306B (en) 2015-05-27 2015-05-27 Stripping means and stepped construction, the display panel and display device of a kind of substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510278641.8A CN104820306B (en) 2015-05-27 2015-05-27 Stripping means and stepped construction, the display panel and display device of a kind of substrate

Publications (2)

Publication Number Publication Date
CN104820306A true CN104820306A (en) 2015-08-05
CN104820306B CN104820306B (en) 2018-01-26

Family

ID=53730641

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510278641.8A Active CN104820306B (en) 2015-05-27 2015-05-27 Stripping means and stepped construction, the display panel and display device of a kind of substrate

Country Status (1)

Country Link
CN (1) CN104820306B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105428393A (en) * 2016-01-05 2016-03-23 京东方科技集团股份有限公司 Flexible display substrate, manufacturing method of flexible display panel, and correlation apparatus
CN106959777A (en) * 2016-01-12 2017-07-18 三星显示有限公司 Display device and its manufacture method
US10916464B1 (en) 2019-07-26 2021-02-09 Applied Materials, Inc. Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency
US11196360B2 (en) 2019-07-26 2021-12-07 Applied Materials, Inc. System and method for electrostatically chucking a substrate to a carrier
US11756816B2 (en) 2019-07-26 2023-09-12 Applied Materials, Inc. Carrier FOUP and a method of placing a carrier

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003332403A (en) * 2002-05-10 2003-11-21 Seiko Epson Corp Substrate holding apparatus, substrate bonding apparatus, manufacturing method of electro-optic device, and electronic device
CN1676445A (en) * 2004-03-31 2005-10-05 安内华株式会社 Substrate moving device
KR20080081495A (en) * 2007-03-05 2008-09-10 엘지디스플레이 주식회사 Manufacturing method of display device
KR20110122456A (en) * 2010-05-04 2011-11-10 엘지디스플레이 주식회사 Apparatus and method for manufacturing liquid crystal display device
CN104124207A (en) * 2014-08-11 2014-10-29 友达光电股份有限公司 Manufacturing method of ultrathin display device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003332403A (en) * 2002-05-10 2003-11-21 Seiko Epson Corp Substrate holding apparatus, substrate bonding apparatus, manufacturing method of electro-optic device, and electronic device
CN1676445A (en) * 2004-03-31 2005-10-05 安内华株式会社 Substrate moving device
KR20080081495A (en) * 2007-03-05 2008-09-10 엘지디스플레이 주식회사 Manufacturing method of display device
KR20110122456A (en) * 2010-05-04 2011-11-10 엘지디스플레이 주식회사 Apparatus and method for manufacturing liquid crystal display device
CN104124207A (en) * 2014-08-11 2014-10-29 友达光电股份有限公司 Manufacturing method of ultrathin display device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105428393A (en) * 2016-01-05 2016-03-23 京东方科技集团股份有限公司 Flexible display substrate, manufacturing method of flexible display panel, and correlation apparatus
WO2017118302A1 (en) * 2016-01-05 2017-07-13 Boe Technology Group Co., Ltd. Flexible display substrate, flexible display panel, and flexible display apparatus, and fabrication methods thereof
US10128451B2 (en) 2016-01-05 2018-11-13 Boe Technology Group Co., Ltd Flexible display substrate, flexible display panel, and flexible display apparatus, and fabrication methods thereof
CN105428393B (en) * 2016-01-05 2019-10-18 京东方科技集团股份有限公司 The production method and relevant apparatus of a kind of flexible display substrates, flexible display panels
CN106959777A (en) * 2016-01-12 2017-07-18 三星显示有限公司 Display device and its manufacture method
US10916464B1 (en) 2019-07-26 2021-02-09 Applied Materials, Inc. Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency
US11183411B2 (en) 2019-07-26 2021-11-23 Applied Materials, Inc. Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency
US11196360B2 (en) 2019-07-26 2021-12-07 Applied Materials, Inc. System and method for electrostatically chucking a substrate to a carrier
US11756816B2 (en) 2019-07-26 2023-09-12 Applied Materials, Inc. Carrier FOUP and a method of placing a carrier

Also Published As

Publication number Publication date
CN104820306B (en) 2018-01-26

Similar Documents

Publication Publication Date Title
CN104820306A (en) Stripping method of base plate, stacked structure, display panel and display device
US10128451B2 (en) Flexible display substrate, flexible display panel, and flexible display apparatus, and fabrication methods thereof
US11024611B1 (en) Micro-LED array transfer method, manufacturing method and display device
US10497762B2 (en) Method for manufacturing flexible display device and flexible display device
CN102496599B (en) Flexible substrate structure and manufacturing method thereof
CN104752443B (en) Substrate support plate, flexible display panels and corresponding manufacture method, flexible display apparatus
US9950505B2 (en) Method for manufacturing flexible display device
CN100495137C (en) Method for making Electric impedance type glass/glass type touch screen
KR20090120454A (en) Glass substrate provided with protection glass and method for manufacturing display device using glass substrate provided with protection glass
JP2017535824A (en) Array substrate and manufacturing method thereof, flexible display panel and display device
CN103995377A (en) Display panel manufacturing method and system
CN103298621A (en) Metal-colored and non-conductive transfer film
CN104540672B (en) Layered product including adhesive layer and preparation method thereof
CN104461203A (en) Method for attaching cover plate and touch induction thin film and touch screen
CN103681357A (en) Flexible display device, flexible display device manufacturing method and display unit
CN103531715A (en) Flexible photoelectric device substrate, flexible photoelectric device and preparation method
CN108546520B (en) Adhesive film and application method thereof
CN103187007A (en) Display panel, display device and manufacturing method for display panel
CN103358604B (en) Touch screen protective structure and preparation method thereof
CN109401651B (en) Protective film, preparation method thereof and display mother board assembly
CN203840630U (en) Carrier film suitable for single-side flexible circuit board
CN104317074A (en) Stripping method of ultrathin glass and carrier base plate for carrying ultrathin glass
CN101702402B (en) Glue overflow-preventing device and baseplate-laminating method using same
CN106527796A (en) Panel manufacturing method, touch control panel and display device
CN102264550A (en) Pressure-bonding-type metallic decorative plate, metallic decorative plate, and methods for manufacturing same

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
EXSB Decision made by sipo to initiate substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant