CN104811055B - Large-power broadband ultrasonic power and its control method based on silicon carbide device - Google Patents
Large-power broadband ultrasonic power and its control method based on silicon carbide device Download PDFInfo
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- CN104811055B CN104811055B CN201510190582.9A CN201510190582A CN104811055B CN 104811055 B CN104811055 B CN 104811055B CN 201510190582 A CN201510190582 A CN 201510190582A CN 104811055 B CN104811055 B CN 104811055B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M5/00—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
- H02M5/40—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc
- H02M5/42—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters
- H02M5/44—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac
- H02M5/453—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal
- H02M5/458—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M5/4585—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only having a rectifier with controlled elements
Abstract
The present invention relates to a kind of large-power broadband ultrasonic power based on silicon carbide device and its control method, including PWM rectification circuits, DC chopped-wave power regulation circuit, full bridge inverter, main transformer, matching network, matching network drive circuit, digital control circuit, phase lock circuitry, voltage sample circuit, current sampling circuit, Power Regulation control circuit, protection circuit, drive circuit, DDS(Direct digital synthesis technique)Circuit, PZT (piezoelectric transducer) etc..Wherein PWM rectification circuits, DC chopped-wave power regulation circuit and device for power switching used in full bridge inverter are broad stopband silicon carbide device, switching frequency, conversion efficiency, power density and the reliability of power supply are obviously improved, power output 1kW 10kW, frequency search range 18kHz 100kHz;Power supply employs the variable step frequency-tracking digital control method based on resonant frequency automatic identification.
Description
Technical field
The present invention relates to ultrasonic power technical field, and in particular to a kind of large-power broadband based on silicon carbide device
Ultrasonic power and its control method.
Background technology
Ultrasonic power is commonly referred to as ultrasonic wave generating source, and its effect is to convert electrical current into and ultrasonic transducer phase
The high-frequency ac electric signal of matching.The load of ultrasonic power is typically piezoelectric ceramic transducer, and piezoelectric ceramic transducer is present
Direct capacitance, in the course of the work, its resonant frequency point will drift about piezoelectric ceramic transducer, therefore, and ultrasonic power must
Must possess the ability of tracking ultrasound transducers resonant frequency.
At present, conventional ultrasonic power frequency tracking method has, maximum current search resonant frequency method, frequency of phase locking
Tracking, matching network regulation method.The control accuracy of matching network regulation method will be influenceed by minimum switching inductance, maximum electricity
The method and frequency of phase locking tracking of stream search resonant frequency must all search for the resonance frequency of transducer within the specific limits
Rate, needs to spend substantial amounts of calculating cycle to find the resonant frequency of transducer from power initiation to stable state, and system is from starting to
The transit time of stable state is longer.
The content of the invention
Present invention aims at disclose a kind of large-power broadband ultrasonic power based on silicon carbide device and its control
Method.
The present invention discloses a kind of large-power broadband ultrasonic power based on silicon carbide device and its control method, its institute
The switching tube used is silicon carbide device, low with energy consumption, the advantages of frequency is high, and power-supply system has automatic identification transducer
The function of load resonant frequency, is then tracked amendment using variable step tracking to transducer resonant frequency, it is ensured that negative
Carry and be in resonant condition, system has shorter transit time.
The purpose of the present invention can be realized using following technical scheme.
Large-power broadband ultrasonic power based on silicon carbide device, it includes PWM rectification circuits, DC chopped-wave Power Regulation
Circuit, full bridge inverter, main transformer, voltage sample circuit circuit, current sampling circuit, matching network, matching network drive
Dynamic circuit, PZT (piezoelectric transducer), protection circuit, Power Regulation control circuit, drive circuit, DDS circuit, phase lock circuitry and digital control electricity
Road;PWM rectification circuits, full bridge inverter and DC chopper circuit employ broad stopband device silicon carbide power FET
It is used as power switch;The input access civil power of PWM rectification circuits, its output end accesses the input of DC chopped-wave power regulation circuit
End, the input and the input of voltage sample circuit of the output end access full bridge inverter of DC chopped-wave power regulation circuit, entirely
The output end of bridge inverter circuit accesses the primary input terminal of main transformer, the secondary output first end access pair net of main transformer
Second end of the inductance of network first and the first end of PZT (piezoelectric transducer), the secondary output second of main transformer are terminated into current sampling
The first input end of circuit, the second end of PZT (piezoelectric transducer) and the second end of the inductance of matching network second and current sampling circuit
The second input be connected, digital control circuit input termination phase lock circuitry output end, the first of digital control circuit
Output end accesses the input of DDS circuit, and the output end of DDS circuit accesses the input of drive circuit, the output of drive circuit
The drive end into full bridge inverter is terminated, the second output end of digital control circuit accesses the input of matching network drive circuit
End, the gate pole of the first IGCT of the first output end access matching network of matching network drive circuit, matching network driving electricity
The sun of the gate pole of second IGCT of the second output end access matching network on road, the negative electrode of the first IGCT and the second IGCT
The first end of pole and the first inductance is connected, the negative electrode and the second inductance of the anode of the first IGCT and the second IGCT
First end is connected, and the output end of current sampling circuit and the output end of voltage sample circuit are respectively connected to Power Regulation control circuit
First input end and the second input, protection circuit output end access Power Regulation control circuit input, protection circuit it is defeated
Enter to terminate the output end of current sampling circuit, the output end of Power Regulation control circuit accesses the drive end of DC chopped-wave power regulation circuit,
The output end of current sampling circuit accesses the first input end of phase lock circuitry, and the of the sampling end access phase lock circuitry of drive circuit
Two inputs, drive circuit sampling end output voltage signal as phase lock circuitry Voltage Feedback.
In above-mentioned ultrasonic power, digital control circuit controls matching network to access main electricity by matching network drive circuit
The size of road equivalent inductance, makes the inductance size of matching network and the electric capacity of transducer match, reaches required resonance effect.
In above-mentioned ultrasonic power, ultrasonic power has resonant frequency automatic identification function, power supply to transducer load
The dutycycle of internal phase lock circuitry output pulse directly feeds back electric power output voltage, the phase difference of output current, power supply
Load is piezoelectric ceramic transducer, and the dynamic electric inductance value of piezoelectric ceramic transducer is L, and dynamic electric capacitance is C, and differential resistance values are
R。
The power output 1kW-10kW of above-mentioned ultrasonic power, the frequency range 18kHz-100kHz of ultrasonic power.
For a kind of control method of above-mentioned large-power broadband ultrasonic power based on silicon carbide device, specifically
It is:Digital control circuit communicates with DDS circuit and produces given first frequency signal and second frequency signal, first frequency signal
Full bridge inverter output frequency is controlled to be f respectively by drive circuit respectively with second frequency signal1And f2Alternating current, number
Word control circuit collection full bridge inverter output voltage frequency is respectively f1And f2In the case of phase lock circuitry export pulse duty
Compare D1、D2, then full bridge inverter output voltage frequency f1、f2In the case of corresponding load impedance angle be respectively:
θ1=D1*π (4-1)
θ2=D2*π (4-2)
It can then obtain:
Then equation 4-3 can transform to:
Wherein:
Can be in the hope of:
Because the resonant frequency of transducer is:
Therefore, it can obtain:
The automatic identification of resonant frequency is realized, its resonant frequency can be produced in the course of the work due to ultrasonic transducer load
Raw drift, therefore after the resonant frequency of ultrasonic transducer is calculated, in addition it is also necessary to utilize variable step tracking and controlling method pair
The output frequency of ultrasonic power is modified, and the variable step tracking and controlling method comprises the following steps:(1) digital control electricity
Electric power output voltage that road is fed back according to phase lock circuitry, current and phase difference θ obtain output voltage frequency and transducer resonant frequency
Gap, if step-length switching phase difference reference threshold beWhen output voltage, the phase difference of electric currentWhen, using setting
Big step-length transducer resonant frequency is tracked, when electric power output voltage, the phase difference of electric currentWhen, using setting
Small step-length exchange energy device resonant frequency is tracked;(2) when electric power output voltage leading current, determined according to step (1)
Step-length reduces output frequency, when electric power output voltage lagging current, and the step-length determined according to step (1) increases output frequency,
After the delay of setting, step (1) is returned to.
Further, phase difference reference thresholdThe step-length step determined with step (1) should meet relational expression
Wherein Krel is the setting safety coefficient more than 1.
Compared with the prior art the present invention has advantages below:
A kind of large-power broadband ultrasonic power based on silicon carbide device proposed by the invention and traditional ultrasound
Ripple power supply is different, and traditional ultrasonic power uses MOS switch pipe or IGBT switching tubes, and its working frequency is by power supply output work
Rate is limited, and traditional ultrasonic power frequency tracking method needs to search for the resonance frequency of ultrasonic power in the range of certain frequency
Rate is, it is necessary to expend substantial amounts of calculating cycle, and the transit time of system is longer.
A kind of large-power broadband ultrasonic power based on silicon carbide device proposed by the invention uses broad stopband carbon
SiClx device, the frequency of power supply output is influenceed smaller by power, can meet high-power, high-frequency demand, and power supply system
Function of the system with resonant frequency automatic identification, by the double sampling under the conditions of different output frequencies, by calculating, you can
Substantially the resonant frequency of transducer load is drawn, sampling process only needs to spend two sampling periods, with traditional frequency-tracking
Method is compared, short with transit time, the fast advantage of dynamic response.
Brief description of the drawings
Fig. 1 is that the ultrasonic power based on carborundum constitutes schematic diagram.
Fig. 2 is the control flow chart based on resonant frequency automatic identification and variable step tracing control.
Embodiment
Below in conjunction with accompanying drawing and specific implementation, make further narration in detail to the present invention.
A kind of large-power broadband ultrasonic power based on silicon carbide device disclosed by the invention is as shown in Figure 1.It is based on
The large-power broadband ultrasonic power of silicon carbide device, it includes PWM rectification circuits 1, DC chopped-wave power regulation circuit 2, full-bridge
Inverter circuit 3, main transformer 4, voltage sample circuit circuit, current sampling circuit, matching network, matching network drive circuit,
PZT (piezoelectric transducer), protection circuit, Power Regulation control circuit, drive circuit, DDS (direct digital synthesis technique) circuit, phase lock circuitry
And digital control circuit;PWM rectification circuits, full bridge inverter and DC chopper circuit employ broad stopband device carborundum
Power field effect pipe is used as power switch;The input access civil power of PWM rectification circuits, the access DC chopped-wave Power Regulation of its output end
The input of circuit, the input and voltage sample circuit of the output end access full bridge inverter of DC chopped-wave power regulation circuit
Input, the output end of full bridge inverter accesses the primary input terminal of main transformer, the secondary output first end of main transformer
Access the first inductance of matching network L1 the second end and the first end of PZT (piezoelectric transducer), the second end of secondary output of main transformer
Access the first input end of current sampling circuit, the second end of PZT (piezoelectric transducer) and the second inductance of matching network L2 the second end with
And the second input of current sampling circuit is connected, the output end of the input termination phase lock circuitry of digital control circuit, numeral
The first output end of circuit is controlled to access the input of DDS circuit, the output end of DDS circuit accesses the input of drive circuit,
The output end of drive circuit accesses the drive end of full bridge inverter, the second output end access matching network of digital control circuit
The input of drive circuit, the first IGCT THY1 of the first output end access matching network of matching network drive circuit door
Pole G1, the second IGCT THY2 of the second output end access matching network of matching network drive circuit gate pole G2, first is brilliant
Brake tube THY1 negative electrode K1 is connected with the second IGCT THY2 inductance L1 of anode A 2 and first first end, the first brilliant lock
Pipe THY1 anode A 1 is connected with the second IGCT THY2 negative electrode K2 and the second inductance L2 first end, current sampling electricity
The output end on road and the output end of voltage sample circuit are respectively connected to the first input end and the second input that Power Regulation controls circuit,
The output end access Power Regulation of protection circuit controls the input of circuit, the output of the input termination current sampling circuit of protection circuit
End, the output end of Power Regulation control circuit accesses the drive end of DC chopped-wave power regulation circuit, the output end access of current sampling circuit
The first input end of phase lock circuitry, the sampling end of drive circuit accesses the second input of phase lock circuitry, drive circuit sampling end
The voltage signal of output is inverse as Voltage Feedback wherein PWM rectification circuits, DC chopped-wave power regulation circuit and the full-bridge of phase lock circuitry
Device for power switching used in becoming circuit is broad stopband silicon carbide device, and switching frequency, conversion efficiency, the power of power supply are close
Degree and reliability are obviously improved, power output 1kW-10kW, frequency search range 18kHz-100kHz.Power supply employs base
In the modified variable step digital control method of resonant frequency automatic identification.Phase lock circuitry can feed back electric power output voltage,
The lead lag relationship and electric power output voltage of electric current, the phase difference of electric current, digital control circuit are fed back by phase lock circuitry
Phase information, calculated by the good algorithm of internal composition, the frequency that power supply exports alternating voltage can be controlled, made defeated
The resonant frequency of transducer load can fast and accurately be tracked by going out the frequency of alternating voltage.
The frequency tracing control flow chart of power-supply system is as shown in Fig. 2 after power initiation, digital control circuit and DDS
Circuit communication produces given first frequency signal and second frequency signal, and first, second frequency signal passes through drive circuit control
Full bridge inverter output frequency processed is f respectively1And f2Alternating voltage, sampled respectively full bridge inverter using phase lock circuitry
Output voltage frequency is respectively f1And f2When corresponding electric power output voltage, current and phase difference angle, θ1And θ2, phase difference angle
It is identical with load impedance angle, transducer load resonant frequency f can be calculated by resonant frequency algorithms, then power supply is in terms of
Resonant frequency f obtained by calculationsAlternating voltage is exported, to reduce ultrasonic power from the transit time started to stable state, due to super
Acoustic wave transducer, which is supported on the resonant frequency of its in work process, can produce drift, therefore after resonant frequency is calculated, also need
Its transducer resonant frequency is modified using variable step tracing control, digital control circuit feeds back according to phase lock circuitry
Electric power output voltage, current and phase difference signal magnitude and then the gap for obtaining output voltage frequency and transducer resonant frequency, step
The phase difference reference threshold of long switchingDetermined by formula (5-1), it is assumed that transducer dynamic electric resistor R=15 Ω, dynamic inductance L=
35mH, dynamic capacity C=1.81pF, Krel=1.5, step=10Hz,To prevent step-length handoff failure, when
The phase difference of output voltage, electric currentWhen, then power supply output frequency and transducer resonant frequency gap are larger, using big step-length
Frequency search is carried out, now step=10Hz, makes power supply output frequency track transducer resonant frequency quickly, when power supply is defeated
Go out the phase difference of voltage, electric currentWhen, then power supply output frequency and transducer resonant frequency gap are smaller, and power supply uses small step
Long search, step=0.01Hz, to ensure that system has higher FREQUENCY CONTROL precision and less steady-state error, when voltage is advanced
During electric current, output frequency f=f-step reduces frequency;When voltage delay electric current, output frequency f=f+step, increase frequency
Rate.So circulation, power-supply system can rapidly and accurately track transducer resonant frequency.
Claims (3)
1. a kind of control method of the large-power broadband ultrasonic power based on silicon carbide device, described to be based on silicon carbide device
Large-power broadband ultrasonic power include PWM rectification circuits, DC chopped-wave power regulation circuit, full bridge inverter, main transformer pressure
Device, voltage sample circuit, current sampling circuit, matching network, matching network drive circuit, PZT (piezoelectric transducer), protection circuit, tune
Power control circuit, drive circuit, DDS circuit, phase lock circuitry and digital control circuit;PWM rectification circuits, full bridge inverter and
DC chopped-wave power regulation circuit employs broad stopband device silicon carbide power FET as power switch;PWM rectification circuits
Input access civil power, its output end access DC chopped-wave power regulation circuit input, the output of DC chopped-wave power regulation circuit
Terminate the input of the input and voltage sample circuit into full bridge inverter, the output end access main transformer of full bridge inverter
The primary input terminal of depressor, the second end of the secondary output first end access inductance of matching network first (L1) of main transformer and
The first end of PZT (piezoelectric transducer), the secondary output second of main transformer terminates the first input end into current sampling circuit, piezoelectricity
Second end of transducer is connected with the second end of the inductance of matching network second (L2) and the second input of current sampling circuit
Connect, the output end of the input termination phase lock circuitry of digital control circuit, the first output end access DDS circuit of digital control circuit
Input, the output end of DDS circuit accesses the input of drive circuit, the output end access full bridge inverter of drive circuit
Drive end, the second output end of digital control circuit accesses the input of matching network drive circuit, matching network driving electricity
The gate pole (G1) of the first IGCT (THY1) of the first output end access matching network on road, the second of matching network drive circuit
The gate pole (G2) of the second IGCT (THY2) of output end access matching network, the negative electrode (K1) of the first IGCT (THY1) and the
The anode (A2) of two IGCTs (THY2) and the first end of the first inductance (L1) are connected, the anode of the first IGCT (THY1)
(A1) it is connected with the negative electrode (K2) of the second IGCT (THY2) and the first end of the second inductance (L2), current sampling circuit
Output end and the output end of voltage sample circuit are respectively connected to the first input end and the second input that Power Regulation controls circuit, protection
The output end access Power Regulation of circuit controls the input of circuit, and the input of protection circuit terminates the output end of current sampling circuit,
The output end of Power Regulation control circuit accesses the drive end of DC chopped-wave power regulation circuit, the output end access lock phase of current sampling circuit
The first input end of circuit, the sampling end of drive circuit accesses the second input of phase lock circuitry, the output of drive circuit sampling end
Voltage signal as phase lock circuitry Voltage Feedback;Ultrasonic power has resonant frequency automatic identification work(to transducer load
Can, the dutycycle of the phase lock circuitry output pulse of power source internal directly feeds back electric power output voltage, the phase difference of output current,
The load of power supply is piezoelectric ceramic transducer, and the dynamic electric inductance value of piezoelectric ceramic transducer is L, and dynamic electric capacitance is C, dynamic electric
Resistance is R;It is characterized in that:Digital control circuit is communicated with DDS circuit produces given first frequency signal and second frequency letter
Number, first frequency signal and second frequency signal control full bridge inverter output frequency to be f respectively by drive circuit respectively1
And f2Alternating current, digital control circuit collection full bridge inverter output voltage frequency be respectively f1And f2In the case of lock mutually electricity
Road exports the dutycycle D of pulse1、D2, then full bridge inverter output voltage frequency f1、f2In the case of corresponding load impedance angle
Respectively:
θ1=D1*π (4-1)
θ2=D2*π (4-2)
It can then obtain:
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</mrow>
The automatic identification of resonant frequency is realized, its resonant frequency can produce drift in the course of the work due to ultrasonic transducer load
Move, therefore after the resonant frequency of ultrasonic transducer is calculated, in addition it is also necessary to using variable step tracking and controlling method to ultrasound
The output frequency of ripple power supply is modified, and the variable step tracking and controlling method comprises the following steps:(1) digital control circuit root
The electric power output voltage, the current and phase difference θ that are fed back according to phase lock circuitry obtain the difference of output voltage frequency and transducer resonant frequency
Away from if the phase difference reference threshold of step-length switching isWhen output voltage, the phase difference of electric currentWhen, using the big of setting
Step-length is tracked to transducer resonant frequency, when electric power output voltage, the phase difference of electric currentWhen, using the small step of setting
Length is tracked to transducer resonant frequency;(2) when electric power output voltage leading current, the step-length determined according to step (1)
Reduce output frequency, when electric power output voltage lagging current, the step-length determined according to step (1) increases output frequency, passes through
After the delay of setting, step (1) is returned to.
2. control method according to claim 1, it is characterised in that phase difference reference thresholdThe step determined with step (1)
Long step should meet relational expression
Wherein Krel is the setting safety coefficient more than 1.
3. control method according to claim 1, it is characterised in that ultrasonic power power output 1kW-10kW, ultrasonic wave
The frequency range 18kHz-100kHz of power supply.
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CN108649788B (en) * | 2018-07-16 | 2024-03-26 | 哈尔滨天达控制股份有限公司 | Ultrasonic power supply |
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