CN104810424A - CdTe thin film solar battery with CdxTe insertion layer - Google Patents

CdTe thin film solar battery with CdxTe insertion layer Download PDF

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Publication number
CN104810424A
CN104810424A CN201510183116.8A CN201510183116A CN104810424A CN 104810424 A CN104810424 A CN 104810424A CN 201510183116 A CN201510183116 A CN 201510183116A CN 104810424 A CN104810424 A CN 104810424A
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cdte
thin film
cds
tco
back contact
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CN201510183116.8A
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Inventor
武莉莉
冯良桓
李卫
王文武
曾广根
张静全
黎兵
徐航
束青
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Sichuan University
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Sichuan University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264Inorganic materials
    • H01L31/0296Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0352Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/072Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
    • H01L31/073Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising only AIIBVI compound semiconductors, e.g. CdS/CdTe solar cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/543Solar cells from Group II-VI materials

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Photovoltaic Devices (AREA)

Abstract

The invention belongs to the field of new energy materials and devices, and particularly relates to a CdTe thin film solar battery with a CdTe thin film as an auxiliary absorption layer to widen infrared spectrum response. A layer of band gap adjustable CdxTe binary system film material is inserted in the CdTe thin film battery structure. As the band gap can change between 0.33eV and 1.44eV, infrared incapable of being absorbed by CdTe film with the wavelength larger than 860nm can be absorbed, photoproduction carriers of the battery are increased, and photoproduction current is improved. The CdxTe film can be introduced between a Cds thin film and a CdTe thin film, can be introduced between the CdTe film and a back contact layer and can further be introduced in the CdTe thin film. The infrared spectrum response of the CdTe thin film solar battery with the CdTe absorption layer can be widened from 860nm to over 3000nm.

Description

There is Cd xthe CdTe thin film solar cell of Te insert layer
Technical field
Field belonging to this invention is new energy materials and devices field, particularly a kind of can widen infrared spectrum response and improve junction characteristic, containing Cd xthe CdTe thin film solar cell of Te film.
Background technology
At present, solar photovoltaic generating is as the renewable energy utilization form of clean and effective, and its core missions are still reduce cost of electricity-generating to make it suitable with conventional electric power generation cost, and then progressively substitute existing conventional power generation usage technology.Photovoltaic generation cost reduces to be depended on development high-efficiency and low-cost solar cell manufacturing technology and develops the relevant inversion of high-efficiency solar photovoltaic plant, interconnection technology.Although present stage, crystal-silicon solar cell occupied the market share of more than 80%, thin film solar cell energy consumption is low, the energy regenerating cycle is short, high, the easy realization of electricity and building is integrated and can flexibility and the advantage of wide application is fairly obvious under the low light level.
In thin film solar cell, the advantage of cadmium telluride film solar cells is remarkable especially.Through the development of more than two decades, small-area devices and large area Module Manufacture Technology have made great progress.First Solar company of the U.S. creates the record of small-area devices conversion efficiency 20.4%, but also differs far away apart from its theoretical conversion efficiencies 28%.The basic structure of cadmium telluride film solar cells is: n-CdS is as Window layer, and p-CdTe is as absorbed layer, and they form a n-p heterojunction; Metal electrode at the back side of p-CdTe layer, i.e. back electrode.At present, cadmium telluride film solar cells efficiency is lower two major reasons: one be cadmium telluride film solar cells absorbed layer---the energy gap of Cadimium telluride thin film is about 1.44eV, this makes photon energy in solar spectrum be longer than 860nm lower than 1.44eV(and wavelength) those infrared lights can not be absorbed by cadmium telluride, and photo-generated carrier can not be excited to form photogenerated current, result does not respond near infrared light; Need the semiconductor introducing narrow band gap as absorbed layer, to expanding its long-wave response for this reason.Two is that the cadmium telluride being difficult to seek the sufficiently high metal of a kind of work function and the doping of high p-type forms good ohmic contact, need the back contact making a highly doped or narrow band gap between p-type cadmium telluride and back electrode for this reason, to obtaining better junction characteristic, i.e. better rectification characteristic.For a long time, numerous researchers makes great efforts to make a breakthrough in above-mentioned two.
Summary of the invention
The object of the invention is to propose the method expanded long-wave response and contact with in back electrode acquisition good ohmic.The basic thought of the method is in CdTe film battery, prepare the adjustable Cd of band gap xte binary system film insert layer, it both can be used as a part for absorbed layer, and absorbing wavelength is greater than the infrared light of 860nm, increased the photo-generated carrier of battery and improved photogenerated current, also when its band gap is narrower as good back contact, cell integrated junction characteristic can be improved.
Cd xte film is a kind of binary compound departing from stoicheiometry, and identical with the element kind of CdTe thin film.The energy gap of Te is narrower, is about 0.33eV, and the more about 1.44eV of the energy gap of CdTe.Our research shows, modulation Cd xthe stoicheiometry of Te film, makes x change between 0 to 1, can make Cd xthe energy gap of Te film changes between 0.33 ~ 1.44eV.Our research also shows, in cadmium telluride film solar cells, introduces the Cd of different chemical proportioning in different positions xte film, can play different effects.
For realizing the object of the invention, the technical scheme that the present invention is made up of following measures realizes.(1) at TCO/CdS substrate (wherein, TCO is transparent conductive oxide film) upper deposition one deck Cd xte film, select x between 0.1 ~ 0.95, thickness range is 50nm ~ 1000nm, and then deposits CdTe thin film, finally deposits back contact and electrode, forms complete TCO/CdS/Cd xthe cadmium telluride film solar cells of Te/CdTe/ back contact/metal structure, as Fig. 1.(2) or, also can above-mentioned Cd xte thin film deposition between CdTe thin film and back contact, then deposits back electrode and finally forms TCO/CdS/CdTe/Cd later xthe cadmium telluride film solar cells of Te/ back contact/metal structure, as Fig. 2.(3) or, TCO/CdS/CdTe substrate deposits one deck Cd xte film, select x between 0 ~ 0.3, thickness is 20nm ~ 100nm, and then plated metal back electrode, and finally forms complete TCO/CdS/CdTe/Cd xthe cadmium telluride film solar cells of Te/ metal structure, Cd here xte is back contact, as Fig. 3.(4) or, TCO/CdS substrate first deposits certain thickness CdTe thin film, then deposits Cd xte film, then continues deposition CdTe thin film, finally deposits back contact and electrode, form complete TCO/CdS/CdTe/Cd xthe cadmium telluride film solar cells of Te/CdTe/ back contact/metal structure, as Fig. 4.(5) or, TCO/CdS substrate deposits the Cd that x gradually changes, energy gap width also gradually changes xte transition zone, the x of transition zone gradually changes between 0.1 ~ 0.95, and its thickness range between 100nm ~ 2000nm, and then deposits CdTe thin film, finally deposits back contact and electrode, forms complete TCO/CdS/ graded bandgap Cd xthe cadmium telluride film solar cells of Te/CdTe/ back contact/metal structure, as Fig. 5.Certainly, in a few class application such as (1), (2), (4) (5), the Cd of x between 0 ~ 0.3 can also be re-used xte film makes back contact.
Can prepare by methods such as vacuum evaporation, magnetron sputtering, close spaced sublimation, electro-deposition.Cd xafter the preparation of Te layer, also can carry out annealing in process under certain atmosphere and temperature.
Accompanying drawing explanation
Fig. 1 is TCO/CdS/Cd xthe cadmium telluride film solar cells of Te/CdTe/ back contact/metal structure.
Fig. 2 is TCO/CdS/CdTe/Cd xthe cadmium telluride film solar cells of Te/ back contact/metal structure.
Fig. 3 is TCO/CdS/CdTe/Cd xthe cadmium telluride film solar cells of Te/ metal structure.
Fig. 4 is TCO/CdS/CdTe/Cd xthe cadmium telluride film solar cells of Te/CdTe/ back contact/metal structure.
Fig. 5 is TCO/CdS/ graded bandgap Cd xthe cadmium telluride film solar cells of Te/CdTe/ back contact/metal structure.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described, but content of the present invention is not limited only to the content that relates in embodiment.
embodiment one:
There is Cd xthe first CdTe thin film solar battery structure of Te absorbed layer as shown in Figure 1, Cd xte absorbed layer is in the centre of CdS film and CdTe thin film.At SnO 2in the substrate of/CdS room temperature, first by coevaporation together with CdTe with Te to formation Cd xte film, x is between 0 ~ 1, and thickness is 50nm ~ 200nm.By the Cd that evaporation obtains xte film takes out, and 150 DEG C ~ 250 DEG C annealing in drying nitrogen, are incubated 10 minutes, then naturally cool to room temperature.By close spaced sublimation method at Cd xte film prepares CdTe thin film, thickness 3 μm ~ 5 μm, then carry out annealing and surface treatment.By ZnTe and Cu coevaporation to substrate, form ZnTe:Cu back contact, thickness is 50nm ~ 100nm; Then 150 DEG C ~ 200 DEG C heat treatments are carried out at annealing furnace nitrogen atmosphere.Finally make back electrode with the gold-plated film 200nm of vacuum evaporation.Had thus cd xthe CdTe thin film solar cell of Te absorbed layer.
embodiment two:
There is Cd xthe second CdTe thin film solar battery structure of Te film as shown in Figure 2, Cd xte absorbed layer is between CdTe thin film and back contact.At SnO 2one deck CdTe thin film is first prepared in/CdS substrate, thickness 1 μm ~ 3 μm, then carry out annealing and surface treatment; One deck Cd is prepared by cosputtering method xte film, x is between 0 ~ 1, and thickness is 200nm ~ 500nm.By Cd xte film takes out, and 150 DEG C ~ 250 DEG C annealing in drying nitrogen, are incubated 10 minutes, then naturally cool to room temperature.At Cd xte film continues plating one deck Cu film, thickness 50nm, then 170 DEG C of annealing, last gold-plated 200nm.Obtain having of another kind of structure thus cd xthe CdTe thin film solar cell of Te absorbed layer.
embodiment three:
There is Cd xthe third CdTe thin film solar battery structure of Te film as shown in Figure 3, Cd xte absorbed layer is between CdTe thin film and back electrode.At SnO 2one deck CdTe thin film is first prepared in/CdS substrate, thickness 1 μm ~ 3 μm, then carry out annealing and surface treatment; One deck Cd is prepared by cosputtering method xte film, x is between 0 ~ 0.3, and thickness is 50nm ~ 200nm.By Cd xte film takes out, and 150 DEG C ~ 250 DEG C annealing in drying nitrogen, are incubated 10 minutes, then naturally cool to room temperature.At Cd xte film continues plating 200nm gold thin film and do back electrode.Had thus cd xthe third structure of CdTe thin film solar cell of Te absorbed layer.In such an embodiment, due to Cd xthe x value of Te is smaller, and the conductivity of film is higher, so it can also make the back contact of CdTe battery except absorbing infrared light.
embodiment four:
There is Cd x4th kind of CdTe thin film solar battery structure of Te film as shown in Figure 4, Cd xte absorbed layer is between two-layer CdTe thin film.At SnO 2one deck CdTe thin film is first prepared in/CdS substrate, and thickness 1 μm ~ 2 μm, then prepares one deck Cd by coevaporation method xte film, x is between 0 ~ 1, and thickness is 100nm ~ 300nm, finally deposits one deck CdTe thin film again, thickness 1 μm ~ 2 μm.CdTe thin film continues plating one deck Cu film, thickness 50nm, then 170 DEG C of annealing, last gold-plated 200nm.Had thus cd xcdTe thin film solar cell the 4th kind of structure of Te absorbed layer.

Claims (9)

1. one kind has Cd xthe CdTe thin film solar cell of Te insert layer, is characterized in that having one of following five kinds of structures: (1) TCO/CdS/Cd xte/CdTe/ back contact/metal; (2) TCO/CdS/CdTe/Cd xte/ back contact/metal; (3) TCO/CdS/CdTe/Cd xte/ metal; (4) TCO/CdS/CdTe/Cd xte/CdTe/ back contact/metal; (5) TCO/CdS/ graded bandgap Cd xte/CdTe/ back contact/metal.
2. structure as claimed in claim 1 is TCO/CdS/Cd xthe CdTe thin film solar cell of Te/CdTe/ back contact/metal, is characterized in that first depositing one deck Cd on TCO/CdS substrate xte film, then sequential aggradation CdTe thin film, back contact and metal electrode.
3. structure as claimed in claim 1 is TCO/CdS/CdTe/Cd xthe CdTe thin film solar cell of Te/ back contact/metal, is characterized in that at TCO/CdS/CdTe deposited on substrates Cd xte film, then sequential aggradation back contact and metal electrode.
4. structure as claimed in claim 1 is TCO/CdS/CdTe/Cd xthe CdTe thin film solar cell of Te/ metal, is characterized in that at TCO/CdS/CdTe deposited on substrates one deck Cd xte film (x is between 0 ~ 0.3), then deposit metal electrodes.
5. structure as claimed in claim 1 is TCO/CdS/CdTe/Cd xthe CdTe thin film solar cell of Te/CdTe/ back contact/metal, is characterized in that first depositing one deck CdTe thin film on TCO/CdS substrate, then deposits one deck Cd xte film, then sequential aggradation CdTe thin film, back contact and metal electrode.
6. structure as claimed in claim 1 is TCO/CdS/ gradual change Cd xthe CdTe thin film solar cell of Te/CdTe/ back contact/metal, is characterized in that the Cd first depositing the gradual change of one deck x value on TCO/CdS substrate xte film, then sequential aggradation CdTe thin film, back contact and metal electrode.
7. CdTe thin film solar battery structure as claimed in claim 1, is characterized in that Cd xthe x of Te film changes between 0 ~ 0.95, and the band gap of respective films changes between 0.33eV ~ 1.44eV.
8. CdTe thin film solar battery structure as claimed in claim 1, is characterized in that Cd xthe thickness of Te film is at 50nm ~ 2000nm.
9. CdTe thin film solar battery structure as claimed in claim 1, is characterized in that Cd xthe heat-treat condition of Te film is drying nitrogen, 150 DEG C ~ 250 DEG C annealing, is incubated 10 ~ 30 minutes.
CN201510183116.8A 2015-04-17 2015-04-17 CdTe thin film solar battery with CdxTe insertion layer Pending CN104810424A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107564977A (en) * 2017-08-31 2018-01-09 成都中建材光电材料有限公司 A kind of Window layer, CdTe thin film solar cell module and preparation method thereof
CN115377237A (en) * 2022-08-30 2022-11-22 四川大学 Aluminum antimonide thin film solar cell

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110139247A1 (en) * 2009-12-16 2011-06-16 Primestar Solar, Inc. Graded alloy telluride layer in cadmium telluride thin film photovoltaic devices and methods of manufacturing the same
CN102254966A (en) * 2011-06-23 2011-11-23 上海太阳能电池研究与发展中心 CdZnTe (cadmium zinc telluride) thin film solar cell with gradient band gap structure
CN104851931A (en) * 2015-04-14 2015-08-19 湖南共创光伏科技有限公司 Cadmium telluride thin-film solar cell with gradient structure and manufacture method thereof
CN105144393A (en) * 2012-12-13 2015-12-09 丹尼尔·斯科特·马沙尔 Magnetically polarized photonic device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110139247A1 (en) * 2009-12-16 2011-06-16 Primestar Solar, Inc. Graded alloy telluride layer in cadmium telluride thin film photovoltaic devices and methods of manufacturing the same
CN102254966A (en) * 2011-06-23 2011-11-23 上海太阳能电池研究与发展中心 CdZnTe (cadmium zinc telluride) thin film solar cell with gradient band gap structure
CN105144393A (en) * 2012-12-13 2015-12-09 丹尼尔·斯科特·马沙尔 Magnetically polarized photonic device
CN104851931A (en) * 2015-04-14 2015-08-19 湖南共创光伏科技有限公司 Cadmium telluride thin-film solar cell with gradient structure and manufacture method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107564977A (en) * 2017-08-31 2018-01-09 成都中建材光电材料有限公司 A kind of Window layer, CdTe thin film solar cell module and preparation method thereof
CN115377237A (en) * 2022-08-30 2022-11-22 四川大学 Aluminum antimonide thin film solar cell
CN115377237B (en) * 2022-08-30 2024-01-30 四川大学 Aluminum antimonide thin film solar cell

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