CN104787812A - Waste liquor recovery system - Google Patents
Waste liquor recovery system Download PDFInfo
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- CN104787812A CN104787812A CN201410022527.4A CN201410022527A CN104787812A CN 104787812 A CN104787812 A CN 104787812A CN 201410022527 A CN201410022527 A CN 201410022527A CN 104787812 A CN104787812 A CN 104787812A
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Abstract
The invention provides a waste liquor recovery system which comprises a waste liquor transmission device, a control device, a monitoring device and at least two waste liquor receiving device. The waste liquor transmission device comprises a main pipeline connected with a waste liquor output device and at least two branch pipelines which are communicated with the main pipeline. The monitoring device used for monitoring whether the waste liquor transmission device is abnormal is arranged on the main pipeline. The control device, which is used for controlling the main pipeline to transmit waste liquor into the other branch pipeline after the monitoring device has monitored that the current branch pipeline for transmission of waste liquor is abnormal, is connected with the monitoring device. Each of the waste liquor receiving devices used for receiving waste liquor is respectively corresponding to one of the branch pipelines. According to the invention, recovery of waste liquor is realized. In addition, the branch pipelines for transmission of waste liquor are monitored through the monitoring device. When one branch pipeline is abnormal, a standby branch pipeline is utilized for transmission of waste liquor. Thus, adverse effects of waste liquor on the environment are reduced.
Description
Technical field
The present invention relates to semi-conductor industry factory effluent recovery technology, particularly relate to a kind of Mead-Bauer recovery system.
Background technology
Existing semiconductor devices factory building, in order to the carrying out of auxiliary combination reaction program, generally must apply a large amount of chemical solutions unavoidably.In semi-conductor generative process, the chemical waste fluid that these chemical liquids dissolved are inherently some under remnants after using, producing the industrial production waste liquid with features such as quantity discharged is large, pollutant kind is various, complicated components, is the trade effluent that a kind of intractability is larger.
Because semi-conductor industry is produced in waste liquid containing a large amount of toxic substances, if industrial production waste liquid is arbitrarily toppled over and is not processed, directly enter in surface water body, not only polluted surface water resources, and destroy the detrimentally affects such as ecotope, therefore, generate industrial effluent to semi-conductor to reclaim and be subject to extensive concern as an important research topic.
Summary of the invention
The invention provides a kind of Mead-Bauer recovery system, for reclaiming waste liquid, reducing waste liquid to the detrimentally affect of environment.
A kind of Mead-Bauer recovery system provided by the invention, comprising: waste liquid transmitting device, control device, monitoring device and at least 2 waste liquid receiving traps;
Wherein, described waste liquid transmitting device comprises: the main pipeline be connected with waste liquid take-off equipment, at least 2 small transfer lines be communicated with described main pipeline;
Whether occur that abnormal described monitoring device is arranged on described main pipeline for monitoring described waste liquid transmitting device;
Small transfer line for monitoring current transmission waste liquid at described monitoring device occur abnormal after, control the described control device that waste liquid is transferred in another small transfer line by described main pipeline and be connected with described monitoring device;
For receiving an each described waste liquid receiving trap corresponding described small transfer line respectively of waste liquid.
Mead-Bauer recovery system provided by the invention, comprises waste liquid transmitting device, control device, monitoring device and at least 2 waste liquid receiving traps; Wherein, described waste liquid transmitting device comprises: the main pipeline be connected with waste liquid take-off equipment, at least 2 small transfer lines be communicated with described main pipeline; Whether occur that abnormal described monitoring device is arranged on described main pipeline for monitoring described waste liquid transmitting device; Small transfer line for monitoring current transmission waste liquid at described monitoring device occur abnormal after, control the described control device that waste liquid is transferred in another small transfer line by described main pipeline and be connected with described monitoring device; For receiving an each described waste liquid receiving trap corresponding described small transfer line respectively of waste liquid.The present invention not only achieves the recovery to waste liquid, and is detected by the small transfer line of monitoring device to transmission waste liquid, when this small transfer line occurs utilizing small transfer line transmission waste liquid for subsequent use extremely, reduces waste liquid to the detrimentally affect of environment.
Accompanying drawing explanation
The structural representation of a kind of Mead-Bauer recovery system that Fig. 1 provides for the embodiment of the present invention;
The structural representation of a kind of monitoring device that Fig. 2 provides for the embodiment of the present invention;
The structural representation of the another kind of Mead-Bauer recovery system that Fig. 3 provides for the embodiment of the present invention.
Embodiment
For making the object of the embodiment of the present invention, technical scheme and advantage clearly, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is the present invention's part embodiment, instead of whole embodiments.
Embodiment one
The structural representation of the Mead-Bauer recovery system that Fig. 1 provides for the embodiment of the present invention one, as shown in Figure 1, this Mead-Bauer recovery system comprises: waste liquid transmitting device, and this waste liquid transmitting device comprises: the main pipeline 11 be connected with waste liquid take-off equipment, at least 2 small transfer lines be communicated with described main pipeline 11.For main pipeline 11 arranges 2 small transfer lines be communicated with in the present embodiment, be respectively small transfer line 12 and small transfer line 13.
In addition, this Mead-Bauer recovery system also comprises: control device 2, monitoring device 3 and at least 2 waste liquid receiving traps 4 and 5.
Whether occur that abnormal monitoring device 3 is arranged on main pipeline 11 for monitoring waste liquid transmitting device; Small transfer line 12 for monitoring current transmission waste liquid at monitoring device 3 occurs extremely, controls the waste liquid in main pipeline 11 to be switched to the control device 2 being undertaken transmitting by another small transfer line 13 and is connected with monitoring device 3; For receiving waste liquid receiving trap 4 and waste liquid receiving trap 5 corresponding small transfer line 12 and the small transfer line 13 respectively of waste liquid.
Concrete, the waste liquid that Mead-Bauer recovery system discharges for receiving waste liquid take-off equipment, as the waste liquid of semiconductor production equipment discharge.Wherein, waste liquid transmitting device is connected with waste liquid take-off equipment by main pipeline 11, receives the waste liquid of discharge from waste liquid take-off equipment.Main pipeline 11 chooses one for carrying waste liquid in waste liquid receiving trap from the small transfer line be communicated with self.In the present embodiment, main pipeline 11 is communicated with small transfer line 13 with small transfer line 12, is input to by waste liquid in other in small transfer line 12, is transported in the waste liquid receiving trap 4 corresponding with small transfer line 12 by waste liquid by small transfer line 12.
Transmit in the process of waste liquid at small transfer line 12 to waste liquid receiving trap 4 in the present embodiment, another small transfer line 13 is in closing condition.And when small transfer line 12 occurs abnormal, controlling main pipeline 11 by control device 2 is transferred in small transfer line 13 by waste liquid, by small transfer line 13, waste liquid is transported in waste liquid receiving trap 5.Correspondingly, small transfer line 12 is closed by control device 2.Like this when the small transfer line 12 transmitting waste liquid occurs extremely, utilize small transfer line 13 for subsequent use to transmit waste liquid, ensure that the normal recovery of waste liquid, reduce waste liquid to the detrimentally affect of environment.
In order to the small transfer line 12 monitoring current transmission waste liquid at monitoring device 3 occurs extremely, controlling main pipeline by control device 2 is transferred in small transfer line 13 by waste liquid, the present embodiment needs the connectivity part at main pipeline 11 and small transfer line 12 and small transfer line 13, arranges a small transfer line shifter 6.When small transfer line 12 occurs extremely, control small transfer line shifter 6 by control device 2 and open small transfer line 13, close small transfer line 12, in such main pipeline 11, waste liquid will be transferred in small transfer line 13.This small transfer line shifter 6 can be an electric two-way switch.
In order to exception appears in the small transfer line 12 realizing transmitting waste liquid, utilize small transfer line 13 for subsequent use to transmit waste liquid, on main pipeline 11, arrange a monitoring device 3 in the present embodiment, whether the small transfer line 12 of being monitored current transmission waste liquid by this monitoring device 3 there is exception.
Fig. 2 is the structural representation of a kind of monitoring device that the embodiment of the present invention is mentioned.This monitoring device 3 comprises: subsidiary conduit 31 and liquid detecting head 32.
Subsidiary conduit 31, for occurring at the small transfer line 12 of current transmission waste liquid extremely, receives the waste liquid that main pipeline 11 refluxes.Whether the waste liquid that liquid detecting head 32 monitoring is back to subsidiary conduit 31 exceeds default liquid level line.
Particularly, at least one end of subsidiary conduit 31 is communicated with main pipeline 11.Preferably, subsidiary conduit 31 and main pipeline 11 be arranged in parallel, and the two ends of subsidiary conduit 31 are communicated with main pipeline 11, form a loop checking installation.Preferably, in order to make to be back to the flowing in subsidiary conduit 31, the two ends of the subsidiary conduit 31 be communicated with main pipeline 11 can be designed to arc-shaped bend end.Occur extremely at small transfer line 12, because waste liquid cannot output in waste liquid receiving trap 4, constantly will be gathered in main pipeline 11 from lower to upper like this, progress in subsidiary conduit 31.
In the present embodiment, a liquid detecting head 32 is set in subsidiary conduit 31, is detected the liquid level of the liquid entered in subsidiary conduit 31 by this detector liquid 32.In the present embodiment, for subsidiary conduit 31 arranges a default liquid level line, this liquid detecting head 32 is arranged near this liquid level line preset.Waste liquid in subsidiary conduit 31 constantly rises, after the liquid level of waste liquid rises to default liquid level line, liquid detecting head 32 can monitor waste liquid, and now this liquid detecting head 32 can judge that exception appears in the small transfer line 12 of current transmission waste liquid, can not normally to waste liquid receiving trap conveying waste liquid.
Alternatively, monitoring device 3 is a flow velocity monitoring sensor, and the flow velocity monitoring waste liquid in main pipeline 11 in Preset Time is lower than the threshold value preset, or to monitor flow velocity be zero, monitoring device 3 can judge that exception appears in small transfer line 12, can not normally to waste liquid receiving trap conveying waste liquid.
Alternatively, be communicated with main pipeline 11 close to the lower end of small transfer line in subsidiary conduit 31, and subsidiary conduit 32 is away from the upper end open of small transfer line, contacts with air.Subsidiary conduit 31, along main pipeline 11 direction, extends to the direction away from small transfer line.In order to ensure that waste liquid does not overflow subsidiary conduit 31, the length of subsidiary conduit 31 connects time of small transfer line 13 according to control device 2 and waste liquid flow velocity is arranged.
Control device 2 is programmable logic controller (Programmable Logic Controller, be called for short PLC), this control device 2 is connected with monitoring device 3, when monitoring device 3 monitors small transfer line appearance exception, send Indication message to control device 2, be switched in another small transfer line 13 from the small transfer line 12 carrying waste liquid by the waste liquid of control device 2 by transmission in main pipeline 11.
Waste liquid receiving trap 4 and waste liquid receiving trap 5 can be the groove tank of splendid attire waste liquid, or splendid attire crosses empty bucket or other corresponding grooves of corresponding chemical product.The present embodiment crosses the empty bucket of chemical with splendid attire, and waste liquid receiving trap 4 is placed on the below of small transfer line 12 output terminal, and waste liquid receiving trap 5 is placed on the below of small transfer line 13 output terminal.
Need to illustrate herein, for occurring extremely at the small transfer line of current transmission waste liquid, receiving the method to set up of subsidiary conduit and the form of subsidiary conduit of the waste liquid of main pipeline backflow, being only example herein, restriction condition of the present invention can not be become.
For main pipeline is provided with 2 small transfer lines in the present embodiment, but those skilled in the art it will be appreciated that, the number of small transfer line the technical scheme that 4 small transfer lines are communicated with main pipeline can be realized, so can not become restriction condition of the present invention by the mode of right-angled intersection.
In the present embodiment, Mead-Bauer recovery system comprises waste liquid transmitting device, control device, monitoring device and at least 2 waste liquid receiving traps; Wherein, described waste liquid transmitting device comprises: the main pipeline be connected with waste liquid take-off equipment, at least 2 small transfer lines be communicated with described main pipeline; Whether occur that abnormal described monitoring device is arranged on described main pipeline for monitoring described waste liquid transmitting device; Small transfer line for monitoring current transmission waste liquid at described monitoring device occur abnormal after, control the described control device that waste liquid is transferred in another small transfer line by described main pipeline and be connected with described monitoring device; For receiving an each described waste liquid receiving trap corresponding described small transfer line respectively of waste liquid.The present invention not only achieves the recovery to waste liquid, and is detected by the small transfer line of monitoring device to transmission waste liquid, when this small transfer line occurs utilizing small transfer line transmission waste liquid for subsequent use extremely, reduces waste liquid to the detrimentally affect of environment.
Embodiment two
The structural representation of the Mead-Bauer recovery system that Fig. 3 provides for the embodiment of the present invention two, as shown in Figure 3, this Mead-Bauer recovery system comprises: waste liquid transmitting device, this waste liquid transmitting device comprises the main pipeline 11 be connected with waste liquid take-off equipment, 2 small transfer lines be communicated with main pipeline 11, is respectively small transfer line 12 and small transfer line 13.
In addition, this Mead-Bauer recovery system also comprises: control device 2, monitoring device 3 and waste liquid receiving trap 4, waste liquid receiving trap 5, valve 6, roller 7, leakage-proof disc 8, warning device 9 and cabinet 10.
Whether occur that abnormal monitoring device 3 is arranged on main pipeline 11 for monitoring waste liquid transmitting device, small transfer line 12 for monitoring current transmission waste liquid at monitoring device 3 occurs extremely, control that the waste liquid in main pipeline 11 is switched to the control device 2 being undertaken transmitting by another small transfer line 13 to be connected with monitoring device 3, for receiving waste liquid receiving trap 4 and waste liquid receiving trap 5 corresponding small transfer line 12 and the small transfer line 13 respectively of waste liquid.
Concrete, waste liquid transmitting device is connected with waste liquid take-off equipment by main pipeline 11, receives the waste liquid of discharge from waste liquid take-off equipment.Main pipeline 11 chooses one for carrying waste liquid in waste liquid receiving trap from the small transfer line be communicated with self.In the present embodiment, main pipeline 11 is communicated with small transfer line 13 with small transfer line 12, is input to by waste liquid in other in small transfer line 12, is transported in the waste liquid receiving trap 4 corresponding with small transfer line 12 by waste liquid by small transfer line 12.
Each small transfer line is provided with a valve 6 in the present embodiment, control device 2 controls the break-make of corresponding small transfer line by controlling this valve 6.Transmit in the process of waste liquid at small transfer line 12 to waste liquid receiving trap 4, the valve 6 namely on small transfer line 12 is in opened condition, and the valve 6 of another small transfer line 13 is in closing condition, thus the waste liquid in main pipeline 11 can not be flowed in small transfer line 13.
When small transfer line 12 occurs abnormal, controlled the waste liquid in main pipeline 11 to be transferred in small transfer line 13 by control device 2.Particularly, control device 2 cuts out the valve 6 on small transfer line 12, opens the valve 6 on small transfer line 13.The small transfer line 12 so transmitting waste liquid occurs extremely, and main pipeline 11 transmits waste liquid by utilizing small transfer line 13 for subsequent use to waste liquid receiving trap 5, ensure that the normal recovery of waste liquid, reduces waste liquid to the detrimentally affect of environment.
In order to the small transfer line 12 realizing transmitting waste liquid occurs extremely, utilize small transfer line 13 for subsequent use to transmit waste liquid, on main pipeline 11, arrange a monitoring device 3 in the present embodiment, whether the small transfer line 12 of being monitored current transmission waste liquid by this monitoring device 3 there is exception.
Wherein monitoring device 3 comprises: subsidiary conduit 31 and liquid detecting head 32.Subsidiary conduit 31, for occurring at the small transfer line 12 of current transmission waste liquid extremely, receives the waste liquid that main pipeline 11 refluxes.Whether the waste liquid that liquid detecting head 32 monitoring is back to subsidiary conduit 31 exceeds default liquid level line.
Subsidiary conduit 31 and main pipeline 11 be arranged in parallel, and the two ends of subsidiary conduit 31 are communicated with main pipeline 11, form a loop checking installation.Occur extremely at small transfer line 12, because waste liquid cannot output in waste liquid receiving trap 4, constantly will be gathered in main pipeline 11 from lower to upper like this, progress in subsidiary conduit 31.
In the present embodiment, a liquid detecting head 32 is set in subsidiary conduit 31, is detected the liquid level of the liquid be back in subsidiary conduit 31 by this detector liquid 32.In the present embodiment, for subsidiary conduit 31 arranges a default liquid level line, this liquid detecting head 32 is arranged near this liquid level line preset.Waste liquid in subsidiary conduit 31 constantly rises, after the liquid level of waste liquid rises to default liquid level line, liquid detecting head 32 can monitor waste liquid, and now this liquid detecting head 32 can judge that exception appears in the small transfer line 12 of current transmission waste liquid, can not normally to waste liquid receiving trap conveying waste liquid.
Control device 2 is PLC, is connected with monitoring device 3, when monitoring device 3 monitor the small transfer line 12 transmitting waste liquid occur abnormal time, send Indication message to control device 2, by control device 2, the waste liquid transmitted in main pipeline be switched in small transfer line 13.After control device 2 receives Indication message, the valve 6 on small transfer line 13 being opened, close the valve 6 on small transfer line 12, transmitting with regard to achieving the waste liquid in main pipeline 11 to be switched in small transfer line 13 like this.
Waste liquid receiving trap 4 and waste liquid receiving trap 5 can be the groove tank of splendid attire waste liquid, or splendid attire crosses empty bucket or other corresponding grooves of corresponding chemical product.Waste liquid receiving trap 4 is placed on the below of small transfer line 12 output terminal, and waste liquid receiving trap 5 is placed on the below of small transfer line 13 output terminal.
For the ease of mobile waste liquid receiving trap 4 and 5, respectively at least one roller 7 is set in waste liquid receiving trap 4 and 5 bottom outside, moves waste liquid receiving trap 4 and 5 easily by the slip of roller 7.
Further, below roller 7, be provided with leakage-proof disc 8, collected the waste liquid gone out by spill and leakage in waste liquid receiving trap 4 and 5 by this leakage-proof disc 8.Preferably, leakage-proof disc 8 is drawer type leakage-proof disc, thus can take out leakage-proof disc 8, is convenient to clear up the waste liquid in leakage-proof disc 8 and other waste product rubbish.
Further, a warning device 9 be connected with control device 2 is set, prompting message is sent after transmission, to remind operator to occurring that abnormal small transfer line is safeguarded or clears up for controlling the waste liquid in main pipeline 11 to be switched at control device 2 in small transfer line 13.
Further, the Mead-Bauer recovery system provided for the present embodiment arranges a cabinet 10, and this cabinet 10 for placing Mead-Bauer recovery system, thus is convenient to the movement of this Mead-Bauer recovery system.
Further, in order to close small transfer line when emergency situation, in the present embodiment, can also a manual ball valve being set on each small transfer line, having operator's means to close small transfer line.Such as, valve 6 break down cannot by control device 2 control close time, operator can be had to carry out the corresponding small transfer line of wall built-up by this manual ball valve.
Need to illustrate herein, for occurring extremely at the small transfer line of current transmission waste liquid, receiving the method to set up of subsidiary conduit and the form of subsidiary conduit of the waste liquid of main pipeline backflow, being only example herein, restriction condition of the present invention can not be become.
In the present embodiment, Mead-Bauer recovery system comprises waste liquid transmitting device, control device, monitoring device and at least 2 waste liquid receiving traps; Wherein, described waste liquid transmitting device comprises: the main pipeline be connected with waste liquid take-off equipment, at least 2 small transfer lines be communicated with described main pipeline; Whether occur that abnormal described monitoring device is arranged on described main pipeline for monitoring described waste liquid transmitting device; Small transfer line for monitoring current transmission waste liquid at described monitoring device occur abnormal after, control the described control device that waste liquid is transferred in another small transfer line by described main pipeline and be connected with described monitoring device; For receiving an each described waste liquid receiving trap corresponding described small transfer line respectively of waste liquid.The present embodiment not only achieves the recovery to waste liquid, and is detected by the small transfer line of monitoring device to transmission waste liquid, when this small transfer line occurs utilizing small transfer line transmission waste liquid for subsequent use extremely, reduces waste liquid to the detrimentally affect of environment.
Last it is noted that above each embodiment is only in order to illustrate technical scheme of the present invention, be not intended to limit; Although with reference to foregoing embodiments to invention has been detailed description, those of ordinary skill in the art is to be understood that: it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein some or all of technical characteristic; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the scope of various embodiments of the present invention technical scheme.
Claims (10)
1. a Mead-Bauer recovery system, is characterized in that, comprising: waste liquid transmitting device, control device, monitoring device and at least 2 waste liquid receiving traps;
Wherein, described waste liquid transmitting device comprises: the main pipeline be connected with waste liquid take-off equipment, at least 2 small transfer lines be communicated with described main pipeline;
Whether occur that abnormal described monitoring device is arranged on described main pipeline for monitoring described waste liquid transmitting device;
Small transfer line for monitoring current transmission waste liquid at described monitoring device occurs extremely, controls the waste liquid in described main pipeline to be switched to the described control device being undertaken transmitting by another small transfer line and is connected with described monitoring device;
For receiving an each described waste liquid receiving trap corresponding described small transfer line respectively of waste liquid.
2. Mead-Bauer recovery system according to claim 1, it is characterized in that, described monitoring device comprises: for occurring extremely at the small transfer line of described current transmission waste liquid, receives the subsidiary conduit of the waste liquid of described main pipeline backflow and whether exceeds the liquid detecting head of default liquid level line for monitoring the waste liquid being back to described subsidiary conduit;
At least one end of described subsidiary conduit is communicated with described main pipeline, and described liquid detecting head is arranged in described subsidiary conduit.
3. Mead-Bauer recovery system according to claim 2, is characterized in that, the two ends of described subsidiary conduit are communicated with described main pipeline and form loop.
4. Mead-Bauer recovery system according to claim 1, is characterized in that, described monitoring device is the flow rate sensor for monitoring waste liquid flow velocity in described main pipeline, and described flow rate sensor is arranged on inside described main pipeline.
5. the Mead-Bauer recovery system according to any one of claim 1-4, is characterized in that, each described small transfer line is provided with valve, and described control device is by controlling the break-make of described small transfer line corresponding to described Valve controlling.
6. the Mead-Bauer recovery system according to any one of claim 1-4, is characterized in that, each described waste liquid receiving trap arranges bottom outside and is provided with at least one for moving the roller of described waste liquid receiving trap.
7. Mead-Bauer recovery system according to claim 6, is characterized in that, is provided with the leakage-proof disc for receiving the waste liquid overflowed in described waste liquid receiving trap below described each roller.
8. Mead-Bauer recovery system according to claim 7, is characterized in that, described leakage-proof disc is pullable leakage-proof disc.
9. Mead-Bauer recovery system according to claim 8, it is characterized in that, also comprise: send prompting message warning device for controlling at described control device after waste liquid is transferred in another small transfer line by described main pipeline, described warning device is connected with described control device.
10. Mead-Bauer recovery system according to claim 9, is characterized in that, also comprises: for placing the cabinet of described Mead-Bauer recovery system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410022527.4A CN104787812B (en) | 2014-01-17 | 2014-01-17 | Waste liquor recovery system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410022527.4A CN104787812B (en) | 2014-01-17 | 2014-01-17 | Waste liquor recovery system |
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| Publication Number | Publication Date |
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| CN104787812A true CN104787812A (en) | 2015-07-22 |
| CN104787812B CN104787812B (en) | 2017-02-08 |
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| CN201410022527.4A Active CN104787812B (en) | 2014-01-17 | 2014-01-17 | Waste liquor recovery system |
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| CN104787812B (en) | 2017-02-08 |
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Effective date of registration: 20220718 Address after: 518116 founder Microelectronics Industrial Park, No. 5, Baolong seventh Road, Baolong Industrial City, Longgang District, Shenzhen, Guangdong Province Patentee after: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. Address before: 100871, Beijing, Haidian District, Cheng Fu Road, No. 298, Zhongguancun Fangzheng building, 9 floor Patentee before: PEKING UNIVERSITY FOUNDER GROUP Co.,Ltd. Patentee before: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. |