CN104746029A - Preparation method for bound silicon rotary target material - Google Patents
Preparation method for bound silicon rotary target material Download PDFInfo
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- CN104746029A CN104746029A CN201510139806.3A CN201510139806A CN104746029A CN 104746029 A CN104746029 A CN 104746029A CN 201510139806 A CN201510139806 A CN 201510139806A CN 104746029 A CN104746029 A CN 104746029A
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- steel tube
- rotary target
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Abstract
The invention discloses a preparation method for a bound silicon rotary target material. The preparation method comprises the following steps: preparation for crystalline silicon tubes and a stainless steel tube, tube sleeving and binding, wherein 4 or 5 prepared crystalline silicon tubes are closely sleeved on the stainless steel tube, and an adhesive is coated at tube sleeving gaps between the crystalline silicon tubes and the stainless steel tube to bind, so that the crystalline silicon tubes and the stainless steel tube are integrated, and the connection is firm and without gaps. The method is lower in cost compared with an isostatic pressing method and a spraying method; the obtained target material is high in density and good in performance; the preparation method is simple in process, easy to operate, free from generating powder and pollution particulate matters in a vacuum environment, and safe and environmentally friendly.
Description
Technical field
The invention belongs to field of semiconductor materials, relate to a kind of preparation method of silicon rotary target material, particularly relate to a kind of preparation method binding formula silicon rotary target material.
Background technology
Silicon rotary target material is a kind of is raw-material drum type brake magnetic control target with silicon, and inner sleeve has stainless steel tube, is applied to the fields such as glass, semi-conductor, flat panel TV.Traditional rotary target material preparation has hot isostatic pressing method and spraying method, and hot isostatic pressing is that a kind of goods are sintered and the method for densification in high temperature, high-pressure closed vessel, but cost is higher; Spraying method can produce more spraying powder, and often sprays uneven, and the target density obtained is low, utilization ratio is low, poor performance, cannot meet the requirement of higher-end businesses for target quality.The domestic worker being engaged in silicon rotary target field is less, technology imperfection or shortage, needs exploitation novel method to improve the quality of rotary target material.
Summary of the invention
The object of the invention is to overcome cost in existing method high, obtain the defects such as target density is low and a kind of preparation method of novel binding formula silicon rotary target material be provided.
The technical solution used in the present invention there is provided a kind of preparation method binding formula silicon rotary target material for achieving the above object, comprises the following steps: the preparation of crystal silicone tube and stainless steel tube, sleeve pipe and binding.
Sleeve pipe process is under vacuum conditions, stainless steel tube overlaps 4 or 5 crystal silicone tubes and makes it arrange closely.
Binding procedure is under vacuum conditions, and the sleeve pipe gap place between stainless steel tube and silicone tube applies a kind of tamanori and binds, and makes them become as a whole, connects firmly seamless.
Especially, bind tamanori used and comprise synthetic resins, synthetic rubber, urethane, silicone.
The present invention proposes a kind of preparation method of novel silicon rotary target material, with tubular crystal silicon and stainless steel tube for raw material, adopts binding method by stainless steel tube and the obtained target of crystal silicone tube connection.Compared with the prior art, have the following advantages: cost is low; Obtained target silicon materials density is high, and performance is good; Preparation process is simple, and easy handling, carries out can not producing powder and particulate pollutant, safety and environmental protection in vacuum environment.
Accompanying drawing explanation
Fig. 1 is the process flow sheet that the present invention binds formula silicon rotary target material.
Fig. 2 binds formula silicon rotary target material schematic diagram in embodiment 1.
Fig. 3 binds formula silicon rotary target material schematic diagram in embodiment 2.
Shown by reference numeral: 1 crystal silicone tube, 2 stainless steel tubes, 3 sleeve pipe gaps.
Embodiment
The present invention is further illustrated below in conjunction with embodiment and accompanying drawing thereof.
As Fig. 1,2 illustrated embodiments 1, concrete steps are as follows: preparation is highly 35 centimetres, diameter is the crystal silicone tube 1 of 10 centimetres and supporting stainless steel tube 2; The crystal silicone tube 1 of 4 same sizes is placed on stainless steel tube 2, close-packed arrays; Between crystal silicone tube 1 and stainless steel tube 2, form a set of pipe seam gap 3, bind with epoxy resin binder, make them become as a whole, connect firmly seamless, shear the remaining stainless steel tube in two and obtain this binding formula silicon rotary target material.
As Fig. 1,3 illustrated embodiments 2, concrete steps are as follows: preparation is highly 25 centimetres, diameter is the crystal silicone tube 1 of 15 centimetres and supporting stainless steel tube 2; The crystal silicone tube 1 of 5 same sizes is placed on stainless steel tube 2, close-packed arrays; Between crystal silicone tube 1 and stainless steel tube 2, form a set of pipe seam gap 3, bind with polyurethane binder, make them become as a whole, connect firmly seamless, shear the remaining stainless steel tube in two and obtain this binding formula silicon rotary target material.
Claims (4)
1. bind a preparation method for formula silicon rotary target material, it is characterized in that comprising the following steps: the preparation of crystal silicone tube and stainless steel tube, sleeve pipe and binding.
2. a kind of preparation method binding formula silicon rotary target material according to claim 1, is characterized in that sleeve pipe process is under vacuum conditions, stainless steel tube overlaps 4 or 5 crystal silicone tubes and makes it arrange closely.
3. a kind of preparation method binding formula silicon rotary target material according to claim 1, it is characterized in that binding procedure is under vacuum conditions, sleeve pipe gap place between stainless steel tube and silicone tube applies a kind of tamanori and binds, and makes them become as a whole, connects firmly seamless.
4. a kind of preparation method binding formula silicon rotary target material according to claim 3, is characterized in that tamanori used comprises synthetic resins, synthetic rubber, urethane, silicone.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510139806.3A CN104746029A (en) | 2015-03-27 | 2015-03-27 | Preparation method for bound silicon rotary target material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510139806.3A CN104746029A (en) | 2015-03-27 | 2015-03-27 | Preparation method for bound silicon rotary target material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104746029A true CN104746029A (en) | 2015-07-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201510139806.3A Pending CN104746029A (en) | 2015-03-27 | 2015-03-27 | Preparation method for bound silicon rotary target material |
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| CN (1) | CN104746029A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108570652A (en) * | 2018-07-24 | 2018-09-25 | 江苏迪丞光电材料有限公司 | A kind of rotary target material and preparation method thereof bearing high power sputtering |
| CN113308672A (en) * | 2021-04-15 | 2021-08-27 | 基迈克材料科技（苏州）有限公司 | ZnSn alloy target material and preparation method thereof |
| CN113354393A (en) * | 2021-07-13 | 2021-09-07 | 江苏迪丞光电材料有限公司 | Preparation method for preparing IGZO (indium gallium zinc oxide) rotary target material by gel casting |
-
2015
- 2015-03-27 CN CN201510139806.3A patent/CN104746029A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108570652A (en) * | 2018-07-24 | 2018-09-25 | 江苏迪丞光电材料有限公司 | A kind of rotary target material and preparation method thereof bearing high power sputtering |
| CN108570652B (en) * | 2018-07-24 | 2019-04-12 | 江苏迪丞光电材料有限公司 | A kind of rotary target material and preparation method thereof bearing high power sputtering |
| CN113308672A (en) * | 2021-04-15 | 2021-08-27 | 基迈克材料科技（苏州）有限公司 | ZnSn alloy target material and preparation method thereof |
| CN113354393A (en) * | 2021-07-13 | 2021-09-07 | 江苏迪丞光电材料有限公司 | Preparation method for preparing IGZO (indium gallium zinc oxide) rotary target material by gel casting |
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Legal Events
| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150701 |
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| WD01 | Invention patent application deemed withdrawn after publication |