CN104735916B - A kind of pair is waved spray equipment - Google Patents
A kind of pair is waved spray equipment Download PDFInfo
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- CN104735916B CN104735916B CN201310719740.6A CN201310719740A CN104735916B CN 104735916 B CN104735916 B CN 104735916B CN 201310719740 A CN201310719740 A CN 201310719740A CN 104735916 B CN104735916 B CN 104735916B
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- spray
- spray tube
- guide rail
- spill spin
- spin block
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Abstract
The present invention relates to etchings, the technical field of developing apparatus, it discloses a kind of pair and waves spray equipment, for etching machine or developing machine, symmetrically arranged spray unit is waved including upper and lower two groups, it includes the guide rail perpendicular to substrate direction of transfer to be etched that this, which waves spray unit, it is set up on guide rail and makees perpendicular to direction of transfer the spraying rack of oscillating rectilinear motion, and it is movably set in the multiple spray tubes in spraying rack and being spaced, it is both provided with spill spin block between each spray tube both ends and guide rail, it is rotatablely connected between one end and guide rail of the spill spin block, its other end is vertical with spray tube and axially position is connect.This pair waves in spray equipment, and spray tube activity is interspersed on spraying rack, keeps the installation and removal of spray tube simple and convenient；It is provided with spill spin block between spray tube and guide rail, makes spray tube under the action of spraying rack oscillating rectilinear motion, realizes rotation and the double acting of linear motion sprays, effectively eliminate pool effect, improve the precision and efficiency of etching.
Description
Technical field
The present invention relates to etching, the technical field of developing apparatus, more particularly to one kind in etching machine or developing machine
Double wave spray equipment.
Background technology
With the increasingly quickening that electronics industry develops, printed circuit board（PCB）Application field it is more and more extensive, this also phase
Require its relevant technique that can meet increasingly newer growth requirement with answering.
Etching (etching) is the skill for removing the substrate of printed circuit board using chemical reaction or physical shock effect
Art, etching technique can be divided into wet etching (wet etching) and dry ecthing (dry etching) two classes, usually signified etching
Also referred to as photochemical etching（photochemical etching）, refer to by expose plate-making, development after, will etching area guarantor
Cuticula removes, and contacts chemical solution in etching, has the function that dissolved corrosion, forms the concave-convex or molding effect of hollow out.
Spray is an important step in etching process, and uniform and stable to etch capabilities have strong influence.
The shortcomings that existing etching, the spraying rack spray equipment in developing machine mainly unidirectionally wave, generally existing
It is：Spray equipment makees unidirectional linear motion, and upper surface of base plate is caused to be easy to will produce hydrops, can not eliminate in substrate surface
Between pool effect, so-called pool effect refers to liquid medicine spray on substrate, and continuing the liquid medicine sprayed out can be original
Liquid medicine hydrops is hindered, and generation chemical reaction cannot be directly contacted with the layer to be etched of substrate surface；Existing etching, developing machine
In spraying rack spray equipment, it is not good enough that there is also rainfall distribution uniformities, and it is good to be susceptible to substrate surrounding etch effect, and in substrate
Between partly etch non-uniform phenomenon, therefore high, essence, thin circuit cannot be produced.
Spraying rack spray equipment in existing etching, developing machine, spray tube thereon are usually fixed installation, work as spray
When shower pipe is damaged, dismounting, replacement, repair are inconvenient；In addition, the spraying rack surrounding framework generally use in spray equipment is straight
It connects and is welded and fixed, insufficient strength is easily destroyed loosening, leads to non-uniform spraying, seriously affects etch effect.
Invention content
The purpose of the present invention is to provide a kind of pair to wave spray equipment, it is intended to solve in the prior art, etching, developing machine
In spraying rack spray equipment there are following defects：
1）Spray equipment makees unidirectional linear motion, causes upper surface of base plate to be easy to will produce hydrops, and then lead to base
Plate upper surface generates pool effect, seriously affects etching precision；
2）Spray tube in spray equipment is to be fixedly mounted, and when spray tube damages, dismounting is replaced, repaired very
It is inconvenient.
The invention is realized in this way a kind of pair is waved spray equipment, it to be used for etching machine or developing machine, including upper and lower two
Group is symmetrically arranged to wave spray unit, and the spray unit that waves includes leading for the direction of transfer perpendicular to substrate to be etched
Rail is set up on the guide rail and makees the spraying rack of oscillating rectilinear motion perpendicular to the direction of transfer and activity is set
Multiple spray tubes in the spraying rack and spaced are placed in, are both provided between the both ends of the spray tube and the guide rail
Spill spin block is rotatablely connected between one end of the spill spin block and the guide rail, the other end of the spill spin block and the spray tube
Vertical and axially position connects.
Preferably, be fixedly installed locating rack on the guide rail, one end of the spill spin block by locating piece with it is described fixed
Position frame rotation connection.
Further, be horizontally set with jet pipe fixed plate on the spraying rack, the jet pipe fixed plate be located at the spray tube and
Between the spill spin block.
Preferably, the spray tube cooperatively forms axially position by axially position component with the spill spin block and connect, institute
It includes the jet pipe plug being connect with the spray tube, the switching being connect with the jet pipe plug axially position to state axially position component
Head, and socket the jet pipe plug and the adapter sheath body, the adapter pass through the jet pipe fixed plate and with institute
State the connection of spill spin block axially position.
Further, double spray equipments that wave further include for driving the driving group for waving spray unit movement
Part, the driving component are set to the homonymy of two spraying racks up and down, and are secured to connect respectively, and the driving component band
Dynamic two spraying racks up and down make staggered linear motion perpendicular to the direction of transfer.
Preferably, the driving component includes motor, and the main shaft by being stretched out on the motor, on the main shaft
Two groups of oppositely arranged eccentric wheels are fixedly connected with, eccentric bushing is arranged on the eccentric wheel, is fixedly connected on the eccentric bushing
There are pull rod, the pull rod to be fixedly connected with the spraying rack.
Further, multiple nozzles for spraying liquid are provided on the spray tube.
Further, inlet tube is additionally provided on the spray tube, the inlet tube is connected to the spray tube, and institute
State the inlet offered on inlet tube for inputting liquid.
Preferably, the spraying rack includes two side frames and two horizontal frames, and the side frame is fixedly connected with the horizontal frame.
Further, the reinforcing plate for increasing intensity is equipped on two side frame, and fixed between two side frame
It is connected with for increasing intensity stirrup.
Compared with prior art, proposed by the present invention pair is waved spray equipment, and spray tube activity is interspersed in perpendicular to transmission
Direction is made in the spraying rack of oscillating rectilinear motion, makes the installation and removal of spray tube simpler convenient in this way；Spray tube and
It is provided with spill spin block between guide rail, makes spray tube under the action of spraying rack oscillating rectilinear motion, realizes rotation and straight line
The double acting of movement sprays, and effectively eliminates pool effect, improves the precision and efficiency of etching.
Description of the drawings
Fig. 1 is double structural schematic diagrams for waving spray equipment provided in an embodiment of the present invention；
Fig. 2 is double partial cutaway schematics for waving spray equipment provided in an embodiment of the present invention；
Fig. 3 is double partial structural diagrams for waving spray equipment provided in an embodiment of the present invention；
Fig. 4 is the exploded perspective view of Fig. 3.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
The realization of the present invention is described in detail below in conjunction with specific embodiment.
As shown in figures 1-4, it is a preferred embodiment provided by the invention.
Provided in this embodiment pair is waved spray equipment, is mainly used in etching machine or developing machine comprising respectively
It is arranged two above and below substrate to be etched groups and waves spray unit 1, this two groups are waved spray unit and are arranged symmetrically in relation to each other,
And the upper and lower surface for being respectively aligned to substrate to be etched carries out spray etching.
In the present embodiment, 11, spraying racks 12 of guide rail of spray unit 1 including a pair of parallel interval and multiple are waved
Spray tube 13, wherein guide rail 11 is vertical proximate matter, and perpendicular to the direction of transfer of substrate to be etched, spraying rack 12 is erected at
On guide rail 11, also, the spraying rack 12 can carry out oscillating rectilinear motion on guide rail 11 perpendicular to direction of transfer, in addition,
Multiple spray tubes 13 are arranged at intervals in spraying rack 12, and are provided with spill spin block between the both ends of each spray tube 13 and guide rail 11
14, one end of the spill spin block 14 is vertical with spray tube 13 and axially position is connect, between the other end and guide rail 11 of spill spin block 14
Rotation connection；When spraying rack 12 carries out oscillating rectilinear motion perpendicular to direction of transfer, spraying rack 12 can drive spray tube 13
Oscillating rectilinear motion is also being done on direction of transfer, at the same time, spill spin block 14 is vertical with spray tube 13 and axial fixed
Position connection one end driven on the direction of its oscillating rectilinear motion by spray tube 13, due to spill spin block 14 the other end with
It is rotatablely connected between guide rail 11, thus, spray tube 13 is synchronous to realize when doing oscillating rectilinear motion on direction of transfer
Axial rotation, that is to say, that when spraying rack 12 is moved along a straight line, spray tube 13 is driven to realize linear motion and rotation
Double acting work.
Using it is above-mentioned it is double wave spray equipment and apply to carry out spray etching in etching machine or developing machine, have following
Feature：
1）Due to being provided with spill spin block 14 between above-mentioned spray tube 13 and guide rail 11, in above-mentioned spraying rack 12 perpendicular to transmission
When direction carries out oscillating rectilinear motion, by the cooperation of spraying rack 12 and spill spin block 14 and guide rail 11, spray tube is realized
The double acting works of 13 linear motions and rotation, in this way, the double of spray tube 13 wave spray to enable liquid to be equably sprayed to be etched
The surface of substrate, while the rotary spray of spray tube 13 effectively eliminates the liquid accumulated on substrate, to make substrate to be etched
Surface obtain fresh liquor, the uniformity and etch capabilities of etching greatly improved in this way, effectively reduce pond effect
It answers, significantly improves fine rule road, the precision of high-density line and the uniformity；
2）Above-mentioned spray tube 13 is that activity is interspersed in spraying rack 12, thus, the installation and removal of spray tube 13 are very square
Just quick, it is time saving and energy saving.
In order to coordinate the installation of above-mentioned spill spin block 14 and above-mentioned guide rail 11, locating rack 15 is fixedly installed on guide rail 11,
Herein, which is fixed with guide rail 11 in the form of welding, certainly, can also use others in other embodiments
Mode is fixedly connected, or by locating rack 15 and 11 integrated setting of guide rail；Through-hole 141 is offered on above-mentioned spill spin block 14, it is fixed
Position frame 15 on offer the mounting hole 151 coordinated with through-hole 141, by through-hole 141 and mounting hole 151 activity plug positioning
Part 19 makes spill spin block 14 be formed with locating rack 15 and is rotatablely connected, and herein, locating piece 19 is using screw, in this way, spill spin block 14
Can be dynamic for shaft rotation with locating piece 19, certainly, in other embodiments, spill spin block 14 can also use other modes and positioning
Frame 15 constitutes rotation connection.
In the present embodiment, the both ends in above-mentioned spraying rack 12 have been horizontally set with jet pipe fixed plate 125, the jet pipe fixed plate 125
It is between the end of above-mentioned spray tube 13 and above-mentioned spill spin block 14 and parallel with above-mentioned guide rail 11；In spraying rack 12 perpendicular to upper
When stating direction of transfer and carrying out oscillating rectilinear motion, jet pipe fixed plate 125 will drive spray tube 13 and above-mentioned spill spin block 14
One end perpendicular to above-mentioned direction of transfer along moving along a straight line, at the same time, due to the other end and the locating rack 15 of spill spin block 14
Rotation connection, thus, spill spin block 14 will be with above-mentioned locating piece 19 for rotation center, and with a length of rotation of plate of spill spin block 14 itself
Radius is rotated, and since spill spin block 14 and the end of spray tube 13 are axially located by connecting, and then realizes spray tube 13
Axial-rotation, in this way, the axial rotation of spray tube 13 and the double acting of linear motion have synthesized swing, herein, the angle of swing
Ranging from ± 15 °, certainly, in other embodiments, according to actual conditions and demand, the swing angle range of spray tube 13 also may be used
To be designed as other sharp angle ranges, realized by changing the length of locating rack 15.
Axially position component 18 is provided between the end of above-mentioned spray tube 13 and above-mentioned spill spin block 14, the two passes through the axis
Axially position is formed to the connection of positioning component 18；Herein, axially position component 18 includes jet pipe plug 181, adapter
182, sheath body 183 and titanium set 184, wherein jet pipe plug 181 is fixedly connected with the end of above-mentioned spray tube 13, and the jet pipe
There is locating slot on plug 181, on adapter 182 there is boss, the adapter 182 to make by the cooperation of boss and locating slot
Jet pipe plug 181 forms axially position with adapter 182 and connect, and sheath body 183 is then set in jet pipe plug 181 and adapter
On 182, herein, the male and fomale(M＆F) that the periphery of sheath body 183 has turn anti-skidding, this male and fomale(M＆F) does not draw in Fig. 1 and Fig. 3, only exists
Illustrate in Fig. 4；Meanwhile one end of adapter 182 also extends through above-mentioned jet pipe fixed plate 125, and stretch under above-mentioned spill spin block 14
It holds, circular hole is opened up on the horizontal frame 123 of above-mentioned spraying rack 12, titanium set 184 is arranged in circular hole, titanium set 184 passes through spill spin block 14
It stretches into adapter 182 after lower end and fixed plate 125, is connect in this way, spray tube 13 is formed axially position with spill spin block 14,
Certainly, in other embodiments, according to actual conditions and demand, axially position component 18 may be the structure of other forms,
Alternatively, axially position company can also be formed between the end of above-mentioned spray tube 13 and above-mentioned spill spin block 14 in other way
It connects.
Above-mentioned spraying rack is both provided with pulley 124 on the outside of 12 both ends, which is erected at above-mentioned by pulley 124
On guide rail 11, and oscillating rectilinear motion is carried out perpendicular to above-mentioned direction of transfer on above-mentioned guide rail 11, certainly, in other implementations
In example, spraying rack 12 can also be erected at using other modes activity on above-mentioned guide rail 11.
In the present embodiment, it further includes drive component 16 that above-mentioned pair, which is waved spray equipment, and the drive component 16 is for driving
Above-mentioned spraying rack 12 carries out oscillating rectilinear motion perpendicular to above-mentioned direction of transfer, which is arranged sprays at upper and lower two
The homonymy of frame 12 is drenched, and is fixedly connected respectively with two spraying racks 12；When the drive component 16 starts work, can drive simultaneously
Spraying rack 12 above and below substrate to be etched carries out oscillating rectilinear motion perpendicular to above-mentioned direction of transfer, also,
The movement of two spraying racks 12 is moved in staggered tandem.
Above-mentioned drive component 16 includes 161, one, motor, 162, two, main shaft, 163, two eccentric bushings of eccentric wheel
164 and two pull rods 165, wherein the upper end of main shaft 162 is fixedly connected with the output shaft of motor 161, two eccentric wheels
163 intervals are fixed on main shaft 162, and corresponding two above-mentioned spraying racks 12 up and down respectively；In order to realize above-mentioned two spraying rack
12 staggered movement, two 163 mutually opposing settings of eccentric wheel, in addition, two eccentric bushings 164 are respectively sleeved at two bias
On wheel 163, one end of two pull rods 165 is corresponding with two eccentric wheels 163 respectively to be fixedly connected, the other end of two pull rods 165
It is fixedly connected respectively with two spraying racks 12；When motor 161 starts work, main shaft 162 is driven to rotate, 162 band of main shaft
The eccentric wheel 163 for moving two mutually opposing settings rotates, the rotation of eccentric wheel 163 then drive corresponding eccentric bushing 164 perpendicular to
Above-mentioned direction of transfer carries out oscillating rectilinear motion, and in turn, eccentric bushing 164 drives corresponding pull rod 165 to carry out reciprocating straight line
Movement, pull rod 165 then drive corresponding spraying rack 12 to carry out and the oscillating rectilinear motion in the same direction of eccentric bushing 164, herein, spray
The linear motion range of frame 12 is that ± 20mm according to actual conditions or specific requirements, may be designed in other distances certainly
Range；In addition, in other embodiments, the drive component of other forms can also be used, here and be not especially limited.
In the present embodiment, multiple nozzles 132 are both provided on above-mentioned each spray tube 13, and between each nozzle 132 etc.
It is evenly arranged on spray tube 13 away from ground, each nozzle 132 is aligned along substrate surface to be etched, and is sprayed liquid and be etched.
Be both provided with one-to-one inlet tube 17 on above-mentioned each spray tube 13, the both ends of each inlet tube 17 respectively with
Corresponding spray tube 13 is connected to, also, is further opened with the inlet being connected to external infusion pipeline in 17 middle section of inlet tube
171, external infusion pipeline by the fluid injection into inlet tube 17 of inlet 171, inlet tube 17 again by the liquid in it by its two
In end injection spray tube 13, in this way, the uniform of inlet hydraulic in spray tube 13 has been effectively ensured, the spray of nozzle 132 is also improved
Uniformity, improve etching precision, certainly, in other embodiments, multiple inlet tubes 17 can be set on spray tube 13, or
Multiple interfaces being connected to spray tube 13 are arranged in person on inlet tube 17, and its purpose is to ensure the uniform of inlet hydraulic.
In the present embodiment, above-mentioned spraying rack 12 includes two side frames 122 and two horizontal frames 123, wherein side frame 122 and horizontal frame 123
Vertically, and two side frames 122 and two horizontal frames 123 are end to end, after side frame 122 is fixedly connected by welding with horizontal frame 123,
It is reinforced again by fastener, herein, fastener is welded and fixed using titanium screw compared to traditional, using titanium screw
Side frame 122 and horizontal frame 123 are reinforced again, effectively increase the integral strength of spraying rack 12, certainly, in other embodiment
In, according to actual conditions, side frame 122 can also use other fasteners or others to be fixedly connected with mode with horizontal frame 123, separately
Outside, spraying rack 12 can also use the structure of other forms.
It is both provided with reinforcing plate 1221 on two above-mentioned side frames 122, moreover, horizontal between two side frames 122 be also horizontally set with reinforcement
Stick 1222, herein, stirrup 1222 is using stud, and certainly, stirrup 1222 can also use other materials；By
Reinforcing plate 1221 and stirrup 1222 are set on two side frames 122, effectively increase the integral strength of spraying rack 12, is avoided because of spray
The leaching loosening of frame 12 causes above-mentioned spray tube 13 to move shakiness, and causes the influence of non-uniform spraying；In other embodiments, it sprays
Frame 12 can also be reinforced by the way of.
In addition, in the present embodiment, above-mentioned spray tube 13 is using straight hollow tube, certainly, in other embodiment
In, above-mentioned spray tube 13 can also use hollow tube of other shapes, such as wave bending hollow tube etc..
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
All any modification, equivalent and improvement etc., should all be included in the protection scope of the present invention made by within refreshing and principle.
Claims (7)
1. a kind of pair is waved spray equipment, it to be used for etching machine or developing machine, which is characterized in that be symmetrical arranged including upper and lower two groups
Wave spray unit, the spray unit that waves includes the guide rail perpendicular to the direction of transfer of substrate to be etched, is set up in institute
The spraying rack for making oscillating rectilinear motion on guide rail and perpendicular to the direction of transfer is stated, and is movably set in the spraying rack
In and spaced multiple spray tubes, spill spin block, the rotation are both provided between the both ends of the spray tube and the guide rail
It is rotatablely connected between one end of switch block and the guide rail, the other end of the spill spin block is vertical with the spray tube and axially position
It connects, is additionally provided with inlet tube on the spray tube, the inlet tube is connected to the spray tube, and is opened up on the inlet tube
It is useful for the inlet of input liquid；Liquid in it is injected spray tube by the inlet tube by its both ends.
2. as described in claim 1 pair is waved spray equipment, which is characterized in that it is fixedly installed locating rack on the guide rail,
One end of the spill spin block is rotatablely connected by locating piece and the locating rack.
3. as claimed in claim 1 or 2 pair is waved spray equipment, which is characterized in that it is solid to be horizontally set with jet pipe on the spraying rack
Fixed board, the jet pipe fixed plate is between the spray tube and the spill spin block.
4. as claimed in claim 3 pair is waved spray equipment, which is characterized in that the spray tube passes through axis with the spill spin block
Axially position connection is cooperatively formed to positioning component, the axially position component includes that the jet pipe being connect with the spray tube blocks up
The sheath body of head, the adapter being connect with the jet pipe plug axially position, and socket the jet pipe plug and the adapter,
The adapter passes through the jet pipe fixed plate and is connect with the spill spin block axially position.
5. waving spray equipment as claim 1~2 any one of them is double, which is characterized in that described pair is waved spray equipment
Further include for driving the drive component for waving spray unit movement, the driving component to be set to upper and lower two spraying racks
Homonymy, and be secured to connect respectively, and the driving component drives two spraying racks up and down perpendicular to the sender
To making staggered linear motion.
6. as claimed in claim 5 pair is waved spray equipment, which is characterized in that the driving component includes motor, and
By the main shaft stretched out on the motor, two groups of oppositely arranged eccentric wheels, the eccentric wheel are fixedly connected on the main shaft
On be arranged with eccentric bushing, pull rod is fixedly connected on the eccentric bushing, the pull rod is fixedly connected with the spraying rack.
7. as described in claim 1 pair is waved spray equipment, which is characterized in that be provided on the spray tube multiple for spraying
Drench the nozzle of liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310719740.6A CN104735916B (en) | 2013-12-23 | 2013-12-23 | A kind of pair is waved spray equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310719740.6A CN104735916B (en) | 2013-12-23 | 2013-12-23 | A kind of pair is waved spray equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104735916A CN104735916A (en) | 2015-06-24 |
| CN104735916B true CN104735916B (en) | 2018-08-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310719740.6A Active CN104735916B (en) | 2013-12-23 | 2013-12-23 | A kind of pair is waved spray equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105344538B (en) * | 2015-12-10 | 2018-02-16 | 东莞精准通检测认证股份有限公司 | A kind of product waterproof property detects shower nozzle |
| CN105562241B (en) * | 2015-12-10 | 2018-05-29 | 新昌县以琳环保科技有限公司 | Product waterproof property detects nozzle |
| CN109225713A (en) * | 2017-04-28 | 2019-01-18 | 均豪精密工业股份有限公司 | Platform-type flusher |
| CN107552254A (en) * | 2017-08-08 | 2018-01-09 | 武汉华星光电半导体显示技术有限公司 | A kind of developing apparatus and developing method |
| CN107390401A (en) * | 2017-09-01 | 2017-11-24 | 武汉华星光电技术有限公司 | A kind of developing apparatus and its swinging spray device |
| CN107952607B (en) * | 2017-12-29 | 2020-05-12 | 旭威电子（重庆）有限公司 | Microphone casing painting device |
| CN109701980B (en) * | 2019-02-26 | 2021-02-19 | 成都慧晶机械设备有限公司 | Spray head steering mechanism and rubber cylinder cleaning equipment applying same |
| CN111083875A (en) * | 2019-12-31 | 2020-04-28 | 东莞宇宙电路板设备有限公司 | Even liquid processing apparatus of printed circuit board |
| CN112317153A (en) * | 2020-10-14 | 2021-02-05 | 苏州市水利设计研究院有限公司 | Intelligent construction surrounding barrier water sprinkling system |
| CN113225926B (en) * | 2021-03-30 | 2022-05-03 | 广东兴达鸿业电子有限公司 | PCB board production is with two etching equipment that sway |
| CN113005455A (en) * | 2021-04-21 | 2021-06-22 | 昆山一鼎工业科技有限公司 | Online reciprocating type etching spray set |
| CN114542400B (en) * | 2022-03-01 | 2024-07-26 | 常州合欣达旭新能源科技发展有限公司 | Rainwater erosion test equipment for wind power blade |
| CN116133256B (en) * | 2022-12-23 | 2023-08-25 | 广州市巨龙印制板设备有限公司 | Swing demolding equipment |
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| TW200305357A (en) * | 2003-06-24 | 2003-10-16 | Chen Shin Technology Corp | Three-dimensional swinging spray device of acid cleaning machine in PCB process |
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