CN104733986B - Ultraviolet laser housing assembly with autonomous intelligence temperature controlling function - Google Patents
Ultraviolet laser housing assembly with autonomous intelligence temperature controlling function Download PDFInfo
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- CN104733986B CN104733986B CN201510148943.3A CN201510148943A CN104733986B CN 104733986 B CN104733986 B CN 104733986B CN 201510148943 A CN201510148943 A CN 201510148943A CN 104733986 B CN104733986 B CN 104733986B
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Abstract
The present invention relates to the ultraviolet laser housing assembly with autonomous intelligence temperature controlling function, including enclosure body, the inner space of enclosure body is divided into ante-chamber, back cavity and side chamber three parts, dividing plate is provided between ante-chamber and back cavity, the top surface of ante-chamber, back cavity and side chamber is equipped with opening, and corresponds to be fitted with the ante-chamber chamber lid with O-ring seal, back cavity chamber lid and side chamber chamber lid respectively；First heat exchange module is installed, the opening position that the first heat exchange module is corresponded in back cavity is used for the fundamental frequency lasers for installing ultraviolet laser in the first heat exchange module groove of back cavity bottom；Second heat exchange module is installed, the opening position that the second heat exchange module is corresponded in ante-chamber is used for the resonator for installing ultraviolet laser in the second heat exchange module groove of ante-chamber bottom.Clever structure of the present invention, it is reasonable in design, can be to carrying out autonomous intelligence temperature control, the temperature of each module in constant laser device inside, the power output and optical quality of stabilized lasers installed in its internal optical module and electrical module.
Description
Technical field
It is specifically a kind of ultraviolet with autonomous intelligence temperature controlling function the present invention relates to a kind of laser housing structure
Laser housing assembly, belong to ultraviolet light generating apparatus technical field.
Background technology
Laser is one of invention of great significance in modern science technology, wherein, 355nm Ultra-Violet Lasers are nonmetallic and accurate
Application value in processing is especially prominent.The whole world increasingly increases the demand of high-quality cold light source laser, and application field is continuous
Expand.Acquisition beam quality is excellent, and frequency is single, the Ultra-Violet Laser of the long-acting stable operation of energy, to precision machining industry and Fei Jin
Belong to processing industry, it is significant.From laser industry development and economic benefit, and trend of the times.
Ultra-Violet Laser belongs to short wavelength, and cold light source, the effect of processing is by short wavelength laser, directly by the molecule of material
Or Atomic absorption, the strand of material is interrupted, it is come off, or change its molecule attribute, so as to reach cutting, etching, mark
Etc. different processing effects, the heat affecting to institute's rapidoprint is extremely low.Material is set to produce high temperature, top layer different from long wavelength laser
The process of gasification substance, the material of laser facula annex, have stronger heat affecting.Suction of nearly all material to Ultra-Violet Laser
Yield is all high, compares with infrared laser, and Ultra-Violet Laser is unexpected except copper material, is adapted to the material of processing more extensive.355nm is purple
Outer laser, output wave length, energy are concentrated, and Laser Focusing hot spot is minimum, and focus point may diminish to the several microns of orders of magnitude, add
355nm wavelength fuel factors it is small, the mechanically deform and heat damage of machined material can be largely reduced, in precise materials
The fields such as micro Process, ultra-violet curing, photoetching have wide practical use.
Power stability, optical quality is high, and the single ultraviolet laser of frequency could be complete by the processed edge of Ultra-Violet Laser
Embody, poor quality ultraviolet laser greatly limit the application of Ultra-Violet Laser.The generation of Ultra-Violet Laser, mainly will
Longer wavelengths of infrared laser, obtained by the multiple non-linear conversion of frequency-doubling crystal.Because 355nm laser can be included light
Nearly all material absorption including device is learned, easily damages optics；The conversion efficiency of nonlinear crystal is easily by temperature
Change influences, and causes laser power unstable；In addition there are 808nm, 1064nm, 532nm, 355nm in whole laser light path
Deng the laser of multi-wavelength, if during the laser output of 355nm wavelength, being doped with other more wavelength lasers, causing to swash
Light device processing effect is bad.So to obtain power stability, optical quality is high, the pure Ultra-Violet Laser of frequency, to Ultra-Violet Laser
The requirement of the comprehensive Designs such as optics, calorifics, electricity and the machinery of device is very high.
Because laser is to integrate light, mechanical, electrical, liquid complex precise system, so the environment of its internal module is steady
The qualitative overall performance on laser has vital influence.Currently used laser housing mainly by rectangular box and
Lid forms, and inside is provided with the cooling water channel system for maintaining system heat balance.Its shortcoming is that structure is excessively simple, in housing only
One shared installation cavity, optical module, electrical module can not isolate with cooling water channel system, after long-time use, cooling water
Seepage easily occurs for road system, influences the performance of optical module, electrical module, causes laser stability very poor.
The content of the invention
It is an object of the invention to overcome the deficiencies in the prior art, there is provided a kind of ultraviolet laser housing assembly,
Its clever structure, it is reasonable in design, can be constant to carrying out autonomous intelligence temperature control installed in its internal optical module and electrical module
The temperature of each module, the power output and optical quality of stabilized lasers inside laser.
According to technical scheme provided by the invention：Ultraviolet laser housing assembly with autonomous intelligence temperature controlling function, bag
Include enclosure body, it is characterised in that：The inner space of the enclosure body is divided into ante-chamber, back cavity and side chamber three parts, ante-chamber
Be provided with dividing plate between back cavity, the top surface of ante-chamber, back cavity and side chamber is equipped with opening, and correspond to respectively be fitted with ante-chamber chamber lid,
Back cavity chamber lid and side chamber chamber lid, ante-chamber chamber lid, back cavity chamber lid and side chamber chamber lid are provided with O-ring seal；The back cavity bottom is provided with
First heat exchange module groove, is provided with the first heat exchange module in the first heat exchange module groove, corresponding first heat exchange in back cavity
The opening position of module is used for the fundamental frequency lasers for installing ultraviolet laser；The ante-chamber bottom is provided with the second heat exchange module groove,
Second heat exchange module is installed, the opening position that the second heat exchange module is corresponded in ante-chamber is used to pacify in the second heat exchange module groove
Fill the resonator of ultraviolet laser.
As a further improvement on the present invention, the first heat exchange module groove is arranged on back cavity bottom interior surface,
Laser TEC cooling pieces and laser heat accumulation substrate are stacked with successively above first heat exchange module, laser TEC cooling pieces
Bottom and the top contact of the first heat exchange module, the top and the bottom of laser heat accumulation substrate of laser TEC cooling pieces connect
Touch, laser heat accumulation substrate is fixed on the bottom interior surface of back cavity, is used to install fundamental frequency lasers on laser heat accumulation substrate；
The laser TEC cooling pieces electrically connect with TEC power supply temperature control driving plates.
As a further improvement on the present invention, the second heat exchange module groove is arranged on ante-chamber bottom outer surface, the
Two heat exchange module grooves are fitted with the second heat exchange module tank cover plate；LBO crystalline substances are installed with the ante-chamber bottom interior surface
Body TEC cooling pieces, the lbo crystal TEC cooling pieces are fixed on ante-chamber bottom interior surface, are used on lbo crystal TEC cooling pieces
Lbo crystal in ultraviolet laser resonator is installed；The lbo crystal TEC cooling pieces are electrically connected with TEC power supply temperature control driving plates
Connect.
As a further improvement on the present invention, the TEC power supplys temperature control driving plate is arranged in side chamber.
As a further improvement on the present invention, first heat exchange module and the second heat exchange module are mainly by water
Cold piece and water cooled pipeline composition, the arrival end of the water cooled pipeline are connected into water nozzle, the port of export connection faucet of water cooled pipeline.
As a further improvement on the present invention, it is described enter water nozzle and faucet be respectively positioned on enclosure body afterbody.
As a further improvement on the present invention, drier division board is provided with the ante-chamber, be used in drier division board
Drier is put into, to ensure that ante-chamber is internally dry.
As a further improvement on the present invention, the enclosure body bottom is provided with anti-torsion lower margin.
The present invention compared with prior art, has the following advantages that：Clever structure of the present invention, it is reasonable in design, can to installed in
Its internal optical module and electrical module carry out autonomous intelligence temperature control, and the temperature of each module in constant laser device inside is stable to swash
The power output and optical quality of light.
Brief description of the drawings
Fig. 1 is the structural representation of the embodiment of the present invention.
Fig. 2 looks up an innings sectional view for Fig. 1's.
Description of reference numerals：1- enclosure bodies, 2- enter water nozzle, 3- faucets, 4- back cavities, the heat exchange modules of 5- first, 6-
Laser heat accumulation substrate, 7- side chambers, 8-TEC power supply temperature controls driving plate, 9- ante-chambers, 10- drier division board, 11-LBO crystal
The anti-torsion lower margin of TEC cooling pieces, 12-, 13- ante-chambers chamber lid, the heat exchange modules of 14- second, 15- the second heat exchange module groove lids
Plate, 16- side chambers chamber lid, the first heat exchange modules of 17- groove, 18-LBO crystal, the second heat exchange modules of 19- groove, 20- back cavity chambers
Lid.
Embodiment
With reference to specific drawings and examples, the invention will be further described.
As shown in the figure：Embodiment provides a kind of ultraviolet laser housing assembly with autonomous intelligence temperature controlling function, its
Including enclosure body 1, the inner space of enclosure body 1 is divided into ante-chamber 9, back cavity 4 and the three parts of side chamber 7, ante-chamber 9 and back cavity 4
Between be provided with dividing plate, the top surface of ante-chamber 9, back cavity 4 and side chamber 7 is equipped with opening, and correspond to respectively be fitted with ante-chamber chamber lid 13, after
Chamber chamber lid 20 and side chamber chamber lid 16, ante-chamber chamber lid 13, back cavity chamber lid 20 and side chamber chamber lid 16 are provided with O-ring seal；So, shell
The environment that vacuum is dust-proof, damp proof is formed in body body 1, wherein ante-chamber 9 there are seven faces, and the overall machinery in six faces therein adds
Work is molded, and drier division board 10 is provided with ante-chamber 9, is used to be put into drier in drier division board 10, to ensure in ante-chamber 9
Dry in portion.Enclosure body 1 is provided with three and is used to support the anti-torsion lower margin 12 with fixed laser, to prevent enclosure body 1 from becoming
Shape.
As shown in Figure 1 and Figure 2, the bottom of back cavity 4 is provided with the first heat exchange module groove 17, the first heat exchange module groove 17
First heat exchange module 5 is inside installed, the opening position that the first heat exchange module 5 is corresponded in back cavity 4 is used to install ultraviolet laser
Fundamental frequency lasers；The bottom of ante-chamber 9 is provided with the second heat exchange module groove 19, and is provided with the second heat exchange module groove 19
Two heat exchange modules 14, the opening position of corresponding second heat exchange module 14 is used for the resonator for installing ultraviolet laser in ante-chamber 9.
As shown in Figure 1 and Figure 2, in the embodiment of the present invention, the first heat exchange module groove 17 is arranged in the bottom of back cavity 4
On surface, laser TEC cooling pieces 18 and laser heat accumulation substrate 6, laser are stacked with successively above the first heat exchange module 5
The bottom of device TEC cooling pieces 18 and the top contact of the first heat exchange module 5, the top of laser TEC cooling pieces 18 and laser
The bottom contact of device heat accumulation substrate 6, laser heat accumulation substrate 6 are fixed on the bottom interior surface of back cavity 4, laser heat accumulation substrate
It is used to fundamental frequency lasers are installed on 6；The laser TEC cooling pieces 18 electrically connect with TEC power supply temperature controls driving plate 8, the TEC
Power supply temperature control driving plate 8 is arranged in side chamber 7.
As shown in Figure 1 and Figure 2, in the embodiment of the present invention, the second heat exchange module groove 19 is arranged on outside the bottom of ante-chamber 9
On surface, the second heat exchange module groove 19 is fitted with the second heat exchange module tank cover plate 15；It is solid on the bottom interior surface of ante-chamber 9
Dingan County is equipped with lbo crystal TEC cooling pieces 11, and the lbo crystal TEC cooling pieces 11 are fixed on the bottom interior surface of ante-chamber 9, LBO
It is used to the lbo crystal in ultraviolet laser resonator be installed on crystal TEC cooling pieces 11；The lbo crystal TEC cooling pieces 11 with
TEC power supply temperature controls driving plate 8 electrically connects.
As shown in Figure 1 and Figure 2, in the embodiment of the present invention, the heat exchange module 14 of the first heat exchange module 5 and second can
To use conventional products of the prior art, embodiment provides a kind of heat exchange being mainly made up of water-cooled block and water cooled pipeline
Modular structure, the arrival end of the water cooled pipeline are connected into water nozzle 2, the port of export connection faucet 3 of water cooled pipeline, enter water nozzle 2
The afterbody of enclosure body 1 is respectively positioned on faucet 3.During work, recirculated water is sent into each heat exchange module from water nozzle 2 is entered, for shell
Body body 1, optical module and electrical module temperature control, it is ensured that optical module and the work of electrical module normal table, long stable effect are defeated
Go out high-quality Ultra-Violet Laser, recirculated water finally exports from faucet 3.
During specific installation application, the fundamental frequency light path of laser is arranged in back cavity 4, and fundamental frequency light path caloric value is larger, and it is produced
Raw heat can quickly be transmitted by laser TEC cooling pieces 18 and laser heat accumulation substrate 6 by the first heat exchange module 5
Go out, keeping temperature is constant, and the component structure in fundamental frequency light path is simple and good leak tightness, in the performance of moistureproof damp proof aspect
It is relatively good.The resonator of laser is arranged in ante-chamber 9, and resonator component is more and complicated, and needs to transmit light path, can not
Good seal is kept, the present invention separates ante-chamber 9 and back cavity 4, and the second heat that cooling constant temperature is provided to ante-chamber 9 is handed over
Mold changing block 14 is arranged on outside, can ensure to dry in ante-chamber 9, it is ensured that laser overall performance is stable；And due to resonator
The caloric value of middle component is little, and the second heat exchange module 14, which is arranged on outside, can also meet constant temperature requirement.
Claims (6)
1. the ultraviolet laser housing assembly with autonomous intelligence temperature controlling function, including enclosure body（1）, it is characterised in that：Institute
State enclosure body（1）Inner space be divided into ante-chamber（9）, back cavity（4）And side chamber（7）Three parts, ante-chamber（9）With back cavity（4）
Between be provided with dividing plate, ante-chamber（9）, back cavity（4）And side chamber（7）Top surface be equipped with opening, and correspond to be fitted with ante-chamber chamber respectively
Lid（13）, back cavity chamber lid（20）With side chamber chamber lid（16）, ante-chamber chamber lid（13）, back cavity chamber lid（20）With side chamber chamber lid（16）Match somebody with somebody
There is O-ring seal；The back cavity（4）Bottom is provided with the first heat exchange module groove（17）, the first heat exchange module groove（17）Interior installation
There is the first heat exchange module（5）, back cavity（4）The interior heat exchange module of correspondence first（5）Opening position be used for ultraviolet laser is installed
Fundamental frequency lasers；The ante-chamber（9）Bottom is provided with the second heat exchange module groove（19）, the second heat exchange module groove（19）Interior peace
Equipped with the second heat exchange module（14）, ante-chamber（9）The interior heat exchange module of correspondence second（14）Opening position be used for install it is ultraviolet swash
The resonator of light device;The first heat exchange module groove（17）It is arranged on back cavity（4）On bottom interior surface, in the first heat exchange
Module（5）Top is stacked with laser TEC cooling pieces successively（18）With laser heat accumulation substrate（6）, laser TEC cooling pieces
（18）Bottom and the first heat exchange module（5）Top contact, laser TEC cooling pieces（18）Top and laser heat accumulation
Substrate（6）Bottom contact, laser heat accumulation substrate（6）It is fixed on back cavity（4）Bottom interior surface on, laser heat accumulation substrate
（6）It is upper to be used to fundamental frequency lasers are installed；The laser TEC cooling pieces（18）With TEC power supply temperature control driving plates（8）Electrical connection;
The second heat exchange module groove（19）It is arranged on ante-chamber（9）On bottom outer surface, the second heat exchange module groove（19）It is fitted with
Second heat exchange module tank cover plate（15）；The ante-chamber（9）Lbo crystal TEC cooling pieces are installed with bottom interior surface
（11）, the lbo crystal TEC cooling pieces（11）It is fixed on ante-chamber（9）On bottom interior surface, lbo crystal TEC cooling pieces（11）On
For installing the lbo crystal in ultraviolet laser resonator；The lbo crystal TEC cooling pieces（11）Driven with TEC power supplys temperature control
Plate（8）Electrical connection.
2. there is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function as claimed in claim 1, it is characterised in that：Institute
State TEC power supply temperature control driving plates（8）Installed in side chamber（7）It is interior.
3. there is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function as claimed in claim 1, it is characterised in that：Institute
State the first heat exchange module（5）With the second heat exchange module（14）It is mainly to be made up of water-cooled block and water cooled pipeline, the water
The arrival end of cold pipeline is connected into water nozzle（2）, the port of export connection faucet of water cooled pipeline（3）.
4. there is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function as claimed in claim 3, it is characterised in that：Institute
State into water nozzle（2）And faucet（3）It is respectively positioned on enclosure body（1）Afterbody.
5. there is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function as claimed in claim 1, it is characterised in that：Institute
State ante-chamber（9）It is interior to be provided with drier division board（10）, drier division board（10）It is interior to be used to be put into drier, to ensure ante-chamber
（9）It is internally dry.
6. there is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function as claimed in claim 1, it is characterised in that：Institute
State enclosure body（1）Bottom is provided with anti-torsion lower margin（12）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510148943.3A CN104733986B (en) | 2015-03-31 | 2015-03-31 | Ultraviolet laser housing assembly with autonomous intelligence temperature controlling function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510148943.3A CN104733986B (en) | 2015-03-31 | 2015-03-31 | Ultraviolet laser housing assembly with autonomous intelligence temperature controlling function |
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| Publication Number | Publication Date |
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| CN104733986A CN104733986A (en) | 2015-06-24 |
| CN104733986B true CN104733986B (en) | 2018-01-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510148943.3A Active CN104733986B (en) | 2015-03-31 | 2015-03-31 | Ultraviolet laser housing assembly with autonomous intelligence temperature controlling function |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109755852A (en) * | 2017-11-07 | 2019-05-14 | 核工业理化工程研究院 | Based on the controllable Solid State Laser output-controlling device of multimode and control method |
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|---|---|---|---|---|
| CN101189766A (en) * | 2005-06-02 | 2008-05-28 | 三菱电机株式会社 | Solid-state laser device |
| CN202025979U (en) * | 2011-04-13 | 2011-11-02 | 石家庄经济学院 | LD (laser diode) pump full-solid state green-light laser |
| CN204103242U (en) * | 2014-09-17 | 2015-01-14 | 南京中科神光科技有限公司 | A kind of high power single longitudinal mode ultraviolet all-solid-state laser |
| CN104396100A (en) * | 2012-03-30 | 2015-03-04 | 相干公司 | Compact co2 slab-laser |
| CN204633116U (en) * | 2015-03-31 | 2015-09-09 | 无锡庆源激光科技有限公司 | There is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6807219B2 (en) * | 2002-11-21 | 2004-10-19 | Honeywell Federal Manufacturing & Technologies | Laser housing having integral mounts and method of manufacturing same |
-
2015
- 2015-03-31 CN CN201510148943.3A patent/CN104733986B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101189766A (en) * | 2005-06-02 | 2008-05-28 | 三菱电机株式会社 | Solid-state laser device |
| CN202025979U (en) * | 2011-04-13 | 2011-11-02 | 石家庄经济学院 | LD (laser diode) pump full-solid state green-light laser |
| CN104396100A (en) * | 2012-03-30 | 2015-03-04 | 相干公司 | Compact co2 slab-laser |
| CN204103242U (en) * | 2014-09-17 | 2015-01-14 | 南京中科神光科技有限公司 | A kind of high power single longitudinal mode ultraviolet all-solid-state laser |
| CN204633116U (en) * | 2015-03-31 | 2015-09-09 | 无锡庆源激光科技有限公司 | There is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function |
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