CN104733986A - Ultraviolet laser shell laser with independent intelligent temperature control function - Google Patents
Ultraviolet laser shell laser with independent intelligent temperature control function Download PDFInfo
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- CN104733986A CN104733986A CN201510148943.3A CN201510148943A CN104733986A CN 104733986 A CN104733986 A CN 104733986A CN 201510148943 A CN201510148943 A CN 201510148943A CN 104733986 A CN104733986 A CN 104733986A
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Abstract
The invention relates to an ultraviolet laser shell assembly with an independent intelligent temperature control function. The ultraviolet laser shell assembly with the independent intelligent temperature control function comprises a shell body, the interior space of the shell body is divided into three parts of a front cavity, a back cavity and a side cavity, a partition plate is arranged between the front cavity and the back cavity, the top surfaces of the front cavity, the back cavity and the side cavity are each provided with an opening, and each opening is correspondingly provided with a front cavity cover with a seal rubber ring, a back cavity cover with a seal rubber ring and a side cavity cover with a seal rubber ring in a matched mode; a first heat exchange module is installed in a first heat exchange module groove in the bottom of the back cavity, and the position, corresponding to the first heat exchange module, in the back cavity is used for installing a fundamental frequency laser of an ultraviolet laser; a second heat exchange module is installed in a second heat exchange module groove in the bottom of the front cavity, and the position, corresponding to the second heat exchange module, in the front cavity is used for installing a resonant cavity of the ultraviolet laser. The ultraviolet laser shell assembly with the independent intelligent temperature control function is ingenious in structure and reasonable in design, and independent intelligent temperature control can be performed on an optical module and an electricity module installed in the ultraviolet laser shell assembly to achieve constant temperature of each module in the laser and stabilize the output power and the optical quality of a laser.
Description
Technical field
The present invention relates to a kind of laser housing structure, specifically a kind of ultraviolet laser housing assembly with autonomous intelligence temperature controlling function, belongs to ultraviolet light generating means technical field.
Background technology
Laser is one of invention of great significance in modern science technology, and wherein, the using value of 355nm Ultra-Violet Laser in nonmetal and Precision Machining is especially outstanding.The whole world increases day by day to the demand of the cold light source laser of high-quality, and application constantly expands.Acquisition beam quality is excellent, and frequency is single, the Ultra-Violet Laser of the long-acting stable operation of energy, to precision machining industry and nonmetal processing industry, significant.From laser industry development and economic benefit, it is also trend of the times.
Ultra-Violet Laser belongs to short wavelength, cold light source, the effect of processing passes through short wavelength laser, directly by the molecule of material or Atomic absorption, interrupt the strand of material, make it come off, or change its molecule attribute, thus reach the different processing effect such as cutting, etching, mark, extremely low to the thermal impact of institute's rapidoprint.Being different from long wavelength laser makes material produce high temperature, and the process of entry material gasification, the material of laser facula annex, has stronger thermal impact.Nearly all material is all high to the absorptivity of Ultra-Violet Laser, compares with infrared laser, and it is unexpected that Ultra-Violet Laser removes copper material, and the material being applicable to processing is more extensive.355nm ultraviolet laser, output wave length, concentration of energy, Laser Focusing hot spot is minimum, and focus point may diminish to several micron number magnitude, and 355nm wavelength thermal effect is little in addition, mechanical deformation and the heat damage of machined material can be reduced to a great extent, at precise materials micro Process, ultra-violet curing, the fields such as photoetching have wide practical use.
Power stability, optical quality is high, and the processed edge of Ultra-Violet Laser could embody by ultraviolet laser that frequency is single completely, and the ultraviolet laser of bad greatly limit the application of Ultra-Violet Laser.The generation of Ultra-Violet Laser, mainly by infrared laser longer for wavelength, is obtained by the repeatedly non-linear conversion of frequency-doubling crystal.Absorb at interior nearly all material because 355nm laser can be included optics, easily damage optics; The conversion efficiency of nonlinear crystal, very easily by influence of temperature change, causes laser power unstable; In addition 808nm is had, the laser of the multi-wavelengths such as 1064nm, 532nm, 355nm in whole laser light path, if during the Laser output of 355nm wavelength, be doped with other more wavelength lasers, laser processing effect can be caused not good.So will obtain power stability, optical quality is high, the Ultra-Violet Laser that frequency is pure, very high to the requirement of the optics of ultraviolet laser, calorifics, the comprehensive Design such as electricity and machinery.
Due to laser be integrate light, mechanical, electrical, the complex precise system of liquid, so the overall performance of the environmental stability of its internal module on laser has vital impact.Laser housing conventional at present is mainly made up of rectangular box and lid, and inside is provided with the cooling water channel system maintaining system heat balance.Its shortcoming is that structure is too simple, and only have the installation cavity that shared in housing, optical module, electrical module and cooling water channel system can not be isolated, after long-time use, easily there is seepage in cooling water channel system, affects the performance of optical module, electrical module, causes laser stability very poor.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, a kind of ultraviolet laser housing assembly is provided, its structure is ingenious, reasonable in design, autonomous intelligence temperature control can be carried out to the optical module installed therein and electrical module, the temperature of the inner each module of constant laser device, the power output of stabilized lasers and optical quality.
According to technical scheme provided by the invention: the ultraviolet laser housing assembly with autonomous intelligence temperature controlling function, comprise enclosure body, it is characterized in that: the inner space of described enclosure body is divided into ante-chamber, back cavity and chamber, side three part, dividing plate is provided with between ante-chamber and back cavity, the end face in ante-chamber, back cavity and chamber, side is equipped with opening, and correspondence is fitted with ante-chamber chamber lid, chamber, Gai Hece chamber, back cavity chamber lid respectively, ante-chamber chamber lid, chamber, Gai Hece chamber, back cavity chamber lid are all furnished with O-ring seal; Be provided with the first heat exchange module groove bottom described back cavity, be provided with the first heat exchange module in the first heat exchange module groove, in back cavity, the position of corresponding first heat exchange module is for installing the fundamental frequency lasers of ultraviolet laser; Be provided with the second heat exchange module groove bottom described ante-chamber, be provided with the second heat exchange module in the second heat exchange module groove, in ante-chamber, the position of corresponding second heat exchange module is for installing the resonant cavity of ultraviolet laser.
As a further improvement on the present invention, described first heat exchange module groove is arranged on back cavity bottom interior surface, laser TEC cooling piece and laser heat accumulation substrate has been stacked successively above the first heat exchange module, the bottom of laser TEC cooling piece and the top contact of the first heat exchange module, the top of laser TEC cooling piece contacts with the bottom of laser heat accumulation substrate, laser heat accumulation substrate is fixed on the bottom interior surface of back cavity, for installing fundamental frequency lasers on laser heat accumulation substrate; Described laser TEC cooling piece is electrically connected with TEC power supply temperature control drive plate.
As a further improvement on the present invention, described second heat exchange module groove is arranged on ante-chamber bottom outer surface, and the second heat exchange module groove is fitted with the second heat exchange module groove cover plate; Described ante-chamber bottom interior surface is installed with lbo crystal TEC cooling piece, described lbo crystal TEC cooling piece is fixed on ante-chamber bottom interior surface, for installing the lbo crystal in ultraviolet laser resonant cavity on lbo crystal TEC cooling piece; Described lbo crystal TEC cooling piece is electrically connected with TEC power supply temperature control drive plate.
As a further improvement on the present invention, described TEC power supply temperature control drive plate is arranged in chamber, side.
As a further improvement on the present invention, described first heat exchange module and the second heat exchange module are all that the arrival end of described water cooled pipeline connects into water nozzle primarily of water-cooled block and water cooled pipeline composition, and the port of export of water cooled pipeline connects faucet.
As a further improvement on the present invention, water nozzle is entered described in and faucet is all positioned at enclosure body afterbody.
As a further improvement on the present invention, in described ante-chamber, be provided with drier division board, for putting into drier in drier division board, to ensure that ante-chamber is inner dry.
As a further improvement on the present invention, anti-torsion lower margin is provided with bottom described enclosure body.
compared with prior art, tool has the following advantages in the present invention:structure of the present invention is ingenious, reasonable in design, can carry out autonomous intelligence temperature control to the optical module installed therein and electrical module, the temperature of the inner each module of constant laser device, the power output of stabilized lasers and optical quality.
Accompanying drawing explanation
Fig. 1 is the structural representation of the embodiment of the present invention.
Fig. 2 be Fig. 1 look up an innings cutaway view.
Description of reference numerals: 1-enclosure body, 2-enters water nozzle, 3-faucet, 4-back cavity, 5-first heat exchange module, 6-laser heat accumulation substrate, chamber, 7-side, 8-TEC power supply temperature control drive plate, 9-ante-chamber, 10-drier division board, 11-LBO crystal TEC cooling piece, the anti-torsion lower margin of 12-, 13-ante-chamber chamber is covered, 14-second heat exchange module, 15-second heat exchange module groove cover plate, chamber, chamber, 16-side is covered, 17-first heat exchange module groove, 18-LBO crystal, 19-second heat exchange module groove, 20-back cavity chamber is covered.
Embodiment
Below in conjunction with concrete drawings and Examples, the invention will be further described.
As shown in the figure: embodiment provides a kind of ultraviolet laser housing assembly with autonomous intelligence temperature controlling function, it comprises enclosure body 1, the inner space of enclosure body 1 is divided into ante-chamber 9, back cavity 4 and chamber, side 7 three part, dividing plate is provided with between ante-chamber 9 and back cavity 4, the end face in ante-chamber 9, back cavity 4 and chamber, side 7 is equipped with opening, and correspondence is fitted with ante-chamber chamber lid 13, back cavity chamber lid 20 and chamber, chamber, side lid 16 respectively, ante-chamber chamber lid 13, back cavity chamber lid 20 and chamber, chamber, side lid 16 are all furnished with O-ring seal; Like this, just define dust-proof, the damp proof environment of vacuum in enclosure body 1, wherein ante-chamber 9 has seven faces, the overall mechanical machine-shaping in six faces wherein, drier division board 10 is provided with, for putting into drier in drier division board 10, to ensure that ante-chamber 9 is inner dry in ante-chamber 9.Enclosure body 1 is provided with three and with the anti-torsion lower margin 12 of fixed laser, is out of shape to prevent enclosure body 1 for supporting.
As shown in Figure 1 and Figure 2, be provided with bottom described back cavity 4 in first heat exchange module groove 17, first heat exchange module groove 17 and be provided with the first heat exchange module 5, in back cavity 4, the position of corresponding first heat exchange module 5 is for installing the fundamental frequency lasers of ultraviolet laser; Be provided with bottom described ante-chamber 9 in second heat exchange module groove 19, second heat exchange module groove 19 and be provided with the second heat exchange module 14, in ante-chamber 9, the position of corresponding second heat exchange module 14 is for installing the resonant cavity of ultraviolet laser.
As shown in Figure 1 and Figure 2, in the embodiment of the present invention, described first heat exchange module groove 17 is arranged on back cavity 4 bottom interior surface, laser TEC cooling piece 18 and laser heat accumulation substrate 6 has been stacked successively above the first heat exchange module 5, the bottom of laser TEC cooling piece 18 and the top contact of the first heat exchange module 5, the top of laser TEC cooling piece 18 contacts with the bottom of laser heat accumulation substrate 6, laser heat accumulation substrate 6 is fixed on the bottom interior surface of back cavity 4, for installing fundamental frequency lasers on laser heat accumulation substrate 6; Described laser TEC cooling piece 18 is electrically connected with TEC power supply temperature control drive plate 8, and described TEC power supply temperature control drive plate 8 is arranged in chamber, side 7.
As shown in Figure 1 and Figure 2, in the embodiment of the present invention, described second heat exchange module groove 19 is arranged on ante-chamber 9 bottom outer surface, and the second heat exchange module groove 19 is fitted with the second heat exchange module groove cover plate 15; Described ante-chamber 9 bottom interior surface is installed with lbo crystal TEC cooling piece 11, and described lbo crystal TEC cooling piece 11 is fixed on ante-chamber 9 bottom interior surface, for installing the lbo crystal in ultraviolet laser resonant cavity on lbo crystal TEC cooling piece 11; Described lbo crystal TEC cooling piece 11 is electrically connected with TEC power supply temperature control drive plate 8.
As shown in Figure 1 and Figure 2, in the embodiment of the present invention, described first heat exchange module 5 and the second heat exchange module 14 can adopt conventional products of the prior art, embodiment provides a kind of heat exchange module structure formed primarily of water-cooled block and water cooled pipeline, the arrival end of described water cooled pipeline connects into water nozzle 2, the port of export connection faucet 3 of water cooled pipeline, enters water nozzle 2 and faucet 3 is all positioned at enclosure body 1 afterbody.During work, recirculated water sends into each heat exchange module from entering water nozzle 2, for giving enclosure body 1, optical module and electrical module temperature control, guarantees optical module and the work of electrical module normal table, long stable effect exports high-quality Ultra-Violet Laser, and recirculated water finally exports from faucet 3.
During concrete installation application, the fundamental frequency light path of laser is arranged in back cavity 4, fundamental frequency light path caloric value is larger, its heat produced can be passed out by the first heat exchange module 5 fast by laser TEC cooling piece 18 and laser heat accumulation substrate 6, keep temperature constant, and the simple and good leak tightness of the component structure in fundamental frequency light path, the Performance Ratio in protection against the tide is damp proof is better.The resonant cavity of laser is arranged in ante-chamber 9, resonator components and parts are many and complicated, and need to transmit light path, good seal cannot be kept, ante-chamber 9 and back cavity 4 separate by the present invention, and by providing the second heat exchange module 14 of cooling constant temperature to be arranged on outside to ante-chamber 9, ante-chamber 9 inner drying can be ensured, guarantee overall laser stable performance; And because the caloric value of components and parts in resonant cavity is little, the second heat exchange module 14 is arranged on outside also can meet constant temperature requirement.
Claims (8)
1. there is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function, comprise enclosure body (1), it is characterized in that: the inner space of described enclosure body (1) is divided into ante-chamber (9), back cavity (4) and chamber, side (7) three part, dividing plate is provided with between ante-chamber (9) and back cavity (4), ante-chamber (9), the end face of back cavity (4) and chamber, side (7) is equipped with opening, and correspondence is fitted with ante-chamber chamber lid (13) respectively, back cavity chamber lid (20) and chamber, chamber, side lid (16), ante-chamber chamber lid (13), back cavity chamber lid (20) and chamber, chamber, side lid (16) are all furnished with O-ring seal, described back cavity (4) bottom is provided with the first heat exchange module groove (17), be provided with the first heat exchange module (5) in first heat exchange module groove (17), in back cavity (4), the position of corresponding first heat exchange module (5) is for installing the fundamental frequency lasers of ultraviolet laser, described ante-chamber (9) bottom is provided with the second heat exchange module groove (19), be provided with the second heat exchange module (14) in second heat exchange module groove (19), in ante-chamber (9), the position of corresponding second heat exchange module (14) is for installing the resonant cavity of ultraviolet laser.
2. there is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function as claimed in claim 1, it is characterized in that: described first heat exchange module groove (17) is arranged on back cavity (4) bottom interior surface, laser TEC cooling piece (18) and laser heat accumulation substrate (6) has been stacked successively in the first heat exchange module (5) top, the bottom of laser TEC cooling piece (18) and the top contact of the first heat exchange module (5), the top of laser TEC cooling piece (18) contacts with the bottom of laser heat accumulation substrate (6), laser heat accumulation substrate (6) is fixed on the bottom interior surface of back cavity (4), for installing fundamental frequency lasers on laser heat accumulation substrate (6), described laser TEC cooling piece (18) is electrically connected with TEC power supply temperature control drive plate (8).
3. there is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function as claimed in claim 1, it is characterized in that: described second heat exchange module groove (19) is arranged on ante-chamber (9) bottom outer surface, and the second heat exchange module groove (19) is fitted with the second heat exchange module groove cover plate (15); Described ante-chamber (9) bottom interior surface is installed with lbo crystal TEC cooling piece (11), described lbo crystal TEC cooling piece (11) is fixed on ante-chamber (9) bottom interior surface, for installing the lbo crystal in ultraviolet laser resonant cavity on lbo crystal TEC cooling piece (11); Described lbo crystal TEC cooling piece (11) is electrically connected with TEC power supply temperature control drive plate (8).
4. there is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function as claimed in claim 2 or claim 3, it is characterized in that: described TEC power supply temperature control drive plate (8) is arranged in chamber, side (7).
5. there is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function as claimed in claim 1, it is characterized in that: described first heat exchange module (5) and the second heat exchange module (14) are all primarily of water-cooled block and water cooled pipeline composition, the arrival end of described water cooled pipeline connects into water nozzle (2), and the port of export of water cooled pipeline connects faucet (3).
6. there is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function as claimed in claim 5, it is characterized in that: described in enter water nozzle (2) and faucet (3) is all positioned at enclosure body (1) afterbody.
7. there is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function as claimed in claim 1, it is characterized in that: in described ante-chamber (9), be provided with drier division board (10), for putting into drier in drier division board (10), to ensure that ante-chamber (9) is inner dry.
8. there is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function as claimed in claim 1, it is characterized in that: described enclosure body (1) bottom is provided with anti-torsion lower margin (12).
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CN201510148943.3A CN104733986B (en) | 2015-03-31 | 2015-03-31 | Ultraviolet laser housing assembly with autonomous intelligence temperature controlling function |
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CN201510148943.3A CN104733986B (en) | 2015-03-31 | 2015-03-31 | Ultraviolet laser housing assembly with autonomous intelligence temperature controlling function |
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CN104733986B CN104733986B (en) | 2018-01-16 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109755852A (en) * | 2017-11-07 | 2019-05-14 | 核工业理化工程研究院 | Based on the controllable Solid State Laser output-controlling device of multimode and control method |
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US20040101017A1 (en) * | 2002-11-21 | 2004-05-27 | Herron Michael Alan | Laser housing having integral mounts and method of manufacturing same |
CN101189766A (en) * | 2005-06-02 | 2008-05-28 | 三菱电机株式会社 | Solid-state laser device |
CN202025979U (en) * | 2011-04-13 | 2011-11-02 | 石家庄经济学院 | LD (laser diode) pump full-solid state green-light laser |
CN204103242U (en) * | 2014-09-17 | 2015-01-14 | 南京中科神光科技有限公司 | A kind of high power single longitudinal mode ultraviolet all-solid-state laser |
CN104396100A (en) * | 2012-03-30 | 2015-03-04 | 相干公司 | Compact co2 slab-laser |
CN204633116U (en) * | 2015-03-31 | 2015-09-09 | 无锡庆源激光科技有限公司 | There is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function |
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2015
- 2015-03-31 CN CN201510148943.3A patent/CN104733986B/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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US20040101017A1 (en) * | 2002-11-21 | 2004-05-27 | Herron Michael Alan | Laser housing having integral mounts and method of manufacturing same |
CN101189766A (en) * | 2005-06-02 | 2008-05-28 | 三菱电机株式会社 | Solid-state laser device |
CN202025979U (en) * | 2011-04-13 | 2011-11-02 | 石家庄经济学院 | LD (laser diode) pump full-solid state green-light laser |
CN104396100A (en) * | 2012-03-30 | 2015-03-04 | 相干公司 | Compact co2 slab-laser |
CN204103242U (en) * | 2014-09-17 | 2015-01-14 | 南京中科神光科技有限公司 | A kind of high power single longitudinal mode ultraviolet all-solid-state laser |
CN204633116U (en) * | 2015-03-31 | 2015-09-09 | 无锡庆源激光科技有限公司 | There is the ultraviolet laser housing assembly of autonomous intelligence temperature controlling function |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109755852A (en) * | 2017-11-07 | 2019-05-14 | 核工业理化工程研究院 | Based on the controllable Solid State Laser output-controlling device of multimode and control method |
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