CN104730697B - Wide-visual-field and high-resolution projection lens - Google Patents
Wide-visual-field and high-resolution projection lens Download PDFInfo
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- CN104730697B CN104730697B CN201510185293.XA CN201510185293A CN104730697B CN 104730697 B CN104730697 B CN 104730697B CN 201510185293 A CN201510185293 A CN 201510185293A CN 104730697 B CN104730697 B CN 104730697B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/06—Panoramic objectives; So-called "sky lenses" including panoramic objectives having reflecting surfaces
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
- G02B13/005—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having spherical lenses only
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
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Abstract
The invention discloses a wide-visual-field and high-resolution projection lens. The projection objective lens sequentially comprises a first lens group, a second lens group and a third lens group from an object side to an image side. A diaphragm is disposed between the first lens group and the third lens group. The second lens group at least comprises two air lenses satisfying |(r21-r22)/(r21+r22)|＜0.6, |(Vd21-Vd22)|＞28 and |(nd21-nd22)|＞0.09, wherein the curvature radius, dispersion coefficient and d line refraction index of lens surfaces on two sides of the air lenses are respectively r21, r22, Vd21, Vd22, nd21 and nd22. The second lens group further at least comprises two positive lenses satisfying dn/dt＜0 under room temperature, wherein n is refraction index, and t is temperature. The image side is provided with a concave spherical surface facing the object side, and the concave spherical surface satisfies alpha in＜NA/beta, and 0.8＜Lpout/Rim＜1.2.
Description
Technical field
The present invention relates to a kind of projection objective, more particularly to a kind of wide visual field high-resolution of the big visual field optical detection of high accuracy
Rate projection objective, is applied to the research and detection of the big visual field of high-resolution in the fields such as biology, heredity, medical treatment and medicine.
Background technology
It is applied to the researchs such as biology, heredity, medical treatment and medicine and the development of detection technique, the big visual field optical detection of high accuracy
The projection objective demand of requirement increasingly strengthens.Simultaneously there is wide spectrum, high-resolution, the projection objective of the 3 kinds of performances in big visual field to set
Meter and manufacture are very difficult, at present also rare precedent.
The content of the invention
For the deficiencies in the prior art, it is an object of the invention to provide a kind of wide visual field high-resolution projection objective, real
Spherical aberration, coma, the astigmatism of projection objective are showed, the items aberration such as axial chromatic aberration and multiplying power chromatic aberation all obtains good school
Just, it is especially good to the correction of the second order spectrum of axial chromatic aberration, can reduce the processing of camera lens again, test and fill school difficulty and into
This, while with good image space telecentricity projection objective effect, for capture below good condition is provided.
The present invention employs the following technical solutions realization：A kind of wide visual field high-resolution projection objective, it is from the object side to image side
Include the first microscope group, the second microscope group, the 3rd microscope group successively；
In the second microscope group, relational expression is met：The positive lens of Vd=(nd-1)/(nF-nC), nd ＜ 1.65 and Vd ＞ 62
A minimum of two, the negative lens of nd ＞ 1.50 and Vd ＜ 55 is a minimum of one；Wherein, Vd is abbe number, embodies optical material
Degree of dispersion constant, nF for wavelength 486nm F line refractive indexes, nd for wavelength 587nm d line refractive indexes, nC is wavelength
The C line refractive indexes of 656nm；
Meet relational expression between first microscope group, the second microscope group, each microscope group of the 3rd microscope group：0.3<f1/fa<2.8,0.25<f2/
fa<2.5,0.25<-f3/fa<5.5；Wherein, f1 is the combined focal length of the first microscope group, and f2 is the combined focal length of the second microscope group, f3
For the combined focal length of the 3rd microscope group, fa is the combined focal length of whole projection objective；
Wherein, it is provided with diaphragm between the first microscope group and the 3rd microscope group；
In the second microscope group, also at least relational expression is met containing two air-lens：|(r21-r22)/(r21+r22)|<
0.6, | (Vd21-Vd22) | ＞ 28, | (nd21-nd22) | ＞ 0.09；Wherein, r21, r22 are respectively the saturating of air-lens both sides
The radius of curvature on mirror surface, Vd21, Vd22 are respectively the abbe number of the lens of air-lens both sides, and nd21, nd22 are respectively
The d line refractive indexes of the lens of the both sides of air-lens；
And second microscope group at least meet at ambient temperature containing two positive lens：Dn/dt ＜ 0；Wherein, n is refractive index,
T is temperature, and dn/dt is the thermal refractive index coefficient that the refractive index of optical material is varied with temperature；
Image side has the concave spherical surface towards thing side, and meets：αin<NA/ β, 0.8<Lpout/Rim<1.2；Wherein, α in are
In the incidence angle of image side, NA is the object-side numerical aperture of projection objective to the chief ray of projection objective, and β is the times magnification of projection objective
Rate, it is projection objective image space distance of exit pupil to take on the occasion of, Lpout, the radius of curvature of Rim image planes concave spherical surfaces.
It is containing the concave surface one for facing each other for a pair and described in the 3rd microscope group as the further improvement of such scheme
At least contain a negative lens between the concave surface one for facing each other for a pair, and the negative lens contains the concave surface two towards thing side；
3rd microscope group also meets relational expression：At least ndp ＞ ndn are met containing a positive lens and a negative lens, at least containing one
Positive lens and a negative lens meet Vdp ＜ Vdn；Wherein, ndp is the d line refractive indexes of corresponding positive lens in the 3rd microscope group, ndn
For the d line refractive indexes of corresponding negative lens in the 3rd microscope group, Vdp is the abbe number of corresponding positive lens in the 3rd microscope group, and Vdn is
The abbe number of corresponding negative lens in three microscope groups.
As the further improvement of such scheme, in the first microscope group：At least containing a positive lens and a negative lens
Meet：Ndp ＞ ndn；At least meet containing a positive lens and a negative lens：Vdp ＜ Vdn；Wherein, ndp is the first microscope group
In corresponding positive lens d line refractive indexes, ndn is the d line refractive indexes of corresponding negative lens in the first microscope group, and Vdp is in the first microscope group
The abbe number of corresponding positive lens, Vdn is the abbe number of corresponding negative lens in the first microscope group.
As the further improvement of such scheme, 4<β<18,
Used as the further improvement of such scheme, all lens surfaces in the first microscope group, the second microscope group, the 3rd microscope group are
Sphere, do not contain it is aspherical, the second microscope group, the 3rd microscope group be do not contain cemented surface simple lens composition.
Used as the further improvement of such scheme, the lens total quantity of the wide visual field high-resolution projection objective is located at 12
To between 28.
Used as the further improvement of such scheme, the second microscope group includes at least two lens with negative power and wherein
At least one lens are biconcave lens；Also include that two lens of at least three lens with positive light coke and wherein at least are double
Convex lens.
Used as the further improvement of such scheme, the 3rd microscope group includes at least two lens with negative power；Also wrap
Include at least two lens with positive light coke and including at least one crescent lens.
Used as the further improvement of such scheme, from the object side to image side, the first microscope group includes successively the first lens, second saturating
Mirror, the 3rd lens, the 4th lens, wherein, the 3rd lens have negative power, and it is burnt that the second lens, the 4th lens are respectively provided with positive light
Degree.
Used as the further improvement of such scheme, the openings of sizes of diaphragm can be adjusted.
Advantages of the present invention：1, while having wide spectrum, high-resolution, 3 kinds of big visual field characteristic, at present also rare precedent；2,
With good image space telecentricity projection objective effect, for later capture good condition is provided；3, the maximum light of projection objective
Learn bore and there was only 60% or so of image space full filed bore, considerably reduce the manufacturing cost and difficulty of projection objective.And it is general
The greatest optical bore of logical image space telecentricity projection objective is more than the 100% of image space full filed bore, and manufacturing cost is high and makes
Make difficulty big；4, eyeglass bore is little, not comprising aspherical lens, considerably reduces processing, detection and fill school difficulty and into
This.
Description of the drawings
Fig. 1 is the structural representation of the wide visual field high-resolution projection objective that the embodiment of the present invention 1 is provided.
Fig. 2 is the structural representation of air-lens.
Fig. 3 is axial chromatic aberration curve map at 0.7 aperture of wide visual field high-resolution projection objective in Fig. 1.
Fig. 4 is that wide visual field high-resolution projection objective is schemed in transmission function MTF of 480-730nm wave-length coverages in Fig. 1.
Fig. 5 is the structural representation of the wide visual field high-resolution projection objective that the embodiment of the present invention 2 is provided.
Fig. 6 is axial chromatic aberration curve map at 0.7 aperture of wide visual field high-resolution projection objective in Fig. 5.
Fig. 7 is that wide visual field high-resolution projection objective is schemed in transmission function MTF of 480-730nm wave-length coverages in Fig. 5.
Fig. 8 is the structural representation of the wide visual field high-resolution projection objective that the embodiment of the present invention 3 is provided.
Fig. 9 is axial chromatic aberration curve map at 0.7 aperture of wide visual field high-resolution projection objective in Fig. 8.
Figure 10 is that wide visual field high-resolution projection objective is schemed in transmission function MTF of 480-730nm wave-length coverages in Fig. 8.
Figure 11 is the structural representation of the wide visual field high-resolution projection objective that the embodiment of the present invention 4 is provided.
Figure 12 is axial chromatic aberration curve map at 0.7 aperture of wide visual field high-resolution projection objective in Fig. 4.
Figure 13 is that wide visual field high-resolution projection objective is schemed in transmission function MTF of 480-730nm wave-length coverages in Fig. 4.
Specific embodiment
In order that the objects, technical solutions and advantages of the present invention become more apparent, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that specific embodiment described herein is only to explain the present invention, and
It is not used in the restriction present invention.
Embodiment 1
Fig. 1 is referred to, it is the structural representation of the wide visual field high-resolution projection objective that the embodiment of the present invention 1 is provided.
Wide visual field high-resolution projection objective include successively from thing side P1 to image side P2 the first microscope group G1, equivalent parallel plate PLATE, the
Two microscope groups G2, the 3rd microscope group G3.Diaphragm AS is provided with the second microscope group G2, the openings of sizes of diaphragm AS can be adjusted, can adopted
With the adjustable diaphragm of openings of sizes.Equivalent parallel plate PLATE is between thing side P1 and image side P2.
From thing side P1 to image side P2, the first microscope group G1 can successively include the first lens L1, the second lens L2, the 3rd lens
L3, the 4th lens L4.Second microscope group G2 may include at least two lens with negative power and wherein at least one lens are
Biconcave lens；Two lens of at least three lens with positive light coke and wherein at least be may also include for biconvex lens.At this
In embodiment, from thing side P1 to image side P2, the second microscope group G2 includes successively the 5th lens L5, the 6th lens L6, the 7th lens
L7, the 8th lens L8, the 9th lens L9, the tenth lens L10, the 11st lens L11.3rd microscope group G3 may include have negative light burnt
At least two lens of degree；May also include at least two lens with positive light coke and including at least one crescent lens.
In the present embodiment, from thing side P1 to image side P2, the 3rd microscope group G3 includes successively the 12nd lens L12, the 13rd lens
L13, the 14th lens L14, the 15th lens L15, the 16th lens L16, the 17th lens L17.
Wherein, the first lens L1, the 3rd lens L3, the 6th lens L6, the 9th lens L9, the 13rd lens L13, the 14th
Lens L14, the 15th lens L15 are respectively provided with negative power.Second lens L2, the 4th lens L4, the 5th lens L5, the 7th lens
It is L7, the 8th lens L8, the tenth lens L10, the 11st lens L11, the 12nd lens L12, the 16th lens L16, the 17th saturating
Mirror L17 is respectively provided with positive light coke.
In the present embodiment, the component parameters of the first to the 17th lens L1~L17 are as shown in table 1.
The projection objective parameter of table 1
Meet relational expression between first microscope group G1, the second microscope group G2, each microscope group of the 3rd microscope group G3：0.3<f1/fa<2.8,
0.25<f2/fa<2.5,0.25<-f3/fa<5.5.Wherein, f1 is the combined focal length of the first microscope group G1, and f2 is the second microscope group G2
Combined focal length, f3 is the combined focal length of the 3rd microscope group G3, and fa is the combined focal length of whole projection objective.Such lens structure can
So that the spherical aberration of projection objective, coma, astigmatism, filed curvature and distortion, the items such as axial chromatic aberration and multiplying power chromatic aberation
Aberration is all rationally corrected.In the present embodiment, f1/fa=0.211, f2/fa=0.282 ,-f3/fa=0.150.
In the first microscope group G1, at least meet containing a positive lens and a negative lens：Ndp ＞ ndn, at least contain one
Individual positive lens and a negative lens meet：Vdp ＜ Vdn.Wherein, ndp is the d line refractive indexes of the positive lens, and ndn is described negative
The d line refractive indexes of lens, Vdp is the abbe number of the positive lens, and Vdn is the abbe number of the negative lens.First microscope group
The Main Function of G1 so designs is the primary and high-order spherical aberration for correcting projection objective, balance projection objective axial chromatic aberration two
Level spectrum aberration, the ratio chromatism, of auxiliary balance projection objective.
In the second microscope group G2, relational expression is met：1. Vd=(nd-1)/(nF-nC)；2. nd ＜ 1.65 and Vd ＞ 62
Positive lens is a minimum of two；3. the negative lens of nd ＞ 1.50 and Vd ＜ 55 is a minimum of one；4. two air-lens are at least contained
Meet relational expression：|(r21-r22)/(r21+r22)|<0.6, | (Vd21-Vd22) | ＞ 28, | (nd21-nd22) | ＞ 0.09；⑤
Second microscope group (G2) at least meets at ambient temperature containing two positive lens：Dn/dt ＜ 0.Wherein, Vd is abbe number, body
The constant of the degree of dispersion of existing optical material, nF is the F line refractive indexes of wavelength 486nm, and nd is the d line refractive indexes of wavelength 587nm,
NC is the C line refractive indexes of wavelength 656nm；R21, r22 are respectively the radius of curvature of the lens surface of air-lens both sides, Vd21,
Vd22 is respectively the abbe number of the lens of air-lens both sides, and nd21, nd22 are respectively the d of the lens of the both sides of air-lens
Line refractive index, n is refractive index, and t is temperature, and dn/dt is the thermal refractive index coefficient that the refractive index of optical material is varied with temperature.
For air-lens, in the lens group for constituting camera lens, the air being clipped in the middle by two neighboring glass lens is empty
Between (air space) L can regard as the lens of refractive index 1.0, the air space for designing in view of this consideration can be described as air
Lens, air-lens L as shown in Figure 2.Air-lens L before and after index of refraction relationship be respectively with adjacent glass lens Lx,
Ly is contrary, therefore convex surface has concavees lens effect, and concave surface has the effect of convex lens.Referring to Fig. 1, in this embodiment party
4. article in formula, between lens L6, L7 of the second microscope group L2, between lens L8, L9, exist between lens L9, L10 and meet the
I.e.：|(r21-r22)/(r21+r22)|<0.6, | (Vd21-Vd22) | ＞ 28, | (nd21-nd22) | the air-lens of ＞ 0.09.
Calculated value such as relational expression | (r21-r22)/(r21+r22) | is respectively 0.211,0.282 and 0.150, meets relational expression |
(r21-r22)/(r21+r22)|<0.6.Main Function is the primary and high-order spherical aberration and coma for correcting projection objective, while school
The axial chromatic aberration of orthographic projection object lens is simultaneously effectively reduced its second order spectrum aberration；It is effectively reduced Po Zi to cut down (Petzval) and make
Obtaining the curvature of the image of projection objective can obtain well-corrected.
5. the of second microscope group L2 article be：Second microscope group G2 at least meets at ambient temperature containing two positive lens：dn/
Dt ＜ 0.It is different from the characteristics of dn/dt ＞ 0 of general optical glass material, when having positive lens to meet dn/dt ＜ 0, with other one
As optical glass lens thermal refractive index coefficient characteristic conversely, cancelling each other, it is possible to improve the heat of projection objective
Stability, makes projection objective in variation of ambient temperature, and its image planes position and image quality keep stable.
In the 3rd microscope group G3, containing the concave surface one for facing each other for a pair, and the pair of concave surface one for facing each other it
Between at least contain a negative lens, and the negative lens contains the concave surface two towards thing side P1.3rd microscope group G3 also meets relation
Formula：At least ndp ＞ ndn are met containing a positive lens and a negative lens, at least containing a positive lens and a negative lens
Meet Vdp ＜ Vdn.The Main Function of the 3rd microscope group G3 so design is to balance the primary and senior astigmatism of projection objective and help
In the second order spectrum aberration for reducing axial chromatic aberration, the ratio chromatism, of projection objective is balanced.In the present embodiment, the 13rd lens
The concave surface one that presence is faced each other for a pair between L13 and the 15th lens L15, i.e., the 13rd lens L13 is towards the 15th lens
The curved surface of L15 is concave surface, and the 15th lens L15 is also concave surface towards the curved surface of the 13rd lens L13.At this to facing each other
The 14th lens L14 of negative lens is existed between concave surface one, the 14th lens L14 contains the concave surface two towards thing side P1, i.e.,
14th lens L14 is also concave surface towards the curved surface of thing side P1.
In order to eliminate the internal stress of optical mirror slip, thermal stress and aging, and its harmful effect caused to optical imagery,
The stability of projection objective is kept, all lens surfaces in the first microscope group G1, the second microscope group G2, the 3rd microscope group G3 are sphere,
Do not contain it is aspherical, the second microscope group G2, the 3rd microscope group G3 be do not contain cemented surface simple lens composition.In addition, not comprising non-
Spheric glass, can be greatly lowered the difficulty and cost in processing, detection and dress school.
In order to good image space telecentricity projection objective effect can be obtained, good condition is provided for later capture, as
Side P2 has the concave spherical surface towards thing side P1, and meets：αin<NA/ β, 0.8<Lpout/Rim<1.2；Wherein, α in are projection thing
In the incidence angle of image side P2, NA is the object-side numerical aperture of projection objective to the chief ray of mirror, and β is the enlargement ratio of projection objective,
Lpout be projection objective image space distance of exit pupil, the radius of curvature of Rim image planes concave spherical surfaces.
In the present embodiment, the parameter value of projection objective：β=10；NA=0.35；Hy=21.2；Spectral region：470-
750nm.Wherein, β is to project multiplying power, 4<β<18；NA is thing side opening number；Hy is high for maximum thing.
Equivalent parallel plate is provided between the first microscope group G1 and the 3rd microscope group G3 (in the present embodiment, equivalent flat
Row flat board is located between the first microscope group G1 and the second microscope group G2), equivalent parallel plate meets：Tpl ＞ 0.6Dop.Wherein, Tpl is
Equivalent parallel plate thickness, Dop for equivalent parallel plate maximum clear aperture, equivalent parallel plate be with fractional transmission and
Part reflection divided beams device, its Main Function be available with equivalent parallel plate partially transmitted and partially reflect point
Light function, realizes various coaxially falling to penetrating illumination.
For the reasonable control cost of wide visual field high-resolution projection objective, and optimal cost performance is obtained, the wide visual field
The lens total quantity of high-resolution projection objective is located between 12 to 28.
In a word, in the present embodiment, three lens cluster finally guarantees and realizes projection thing using such lens structure
The spherical aberration of mirror, coma, astigmatism, filed curvature and distortion, the items aberration such as axial chromatic aberration and multiplying power chromatic aberation is all obtained
Well-corrected, at the same can with the greatest optical bore of effective control camera lens, reduce camera lens processing, test and fill school difficulty and
Cost.
The wide visual field high-resolution projection objective of present embodiment, the axial chromatic aberration of wide visual field high-resolution projection objective is such as
Shown in Fig. 3, axial chromatic aberration is effectively corrected in the range of broad band, cover 480-730nm wave-length coverages.Can be with from figure
Find out, the present invention can effectively obtain high imaging quality.The projection objective of wide visual field high-resolution projection objective is in 480-
The transmission function MTF figure of 730nm wave-length coverages is as shown in Figure 4.Wave aberration WFE (RMS) of the analysis of specialty optics design software
As a result show：Less than the 1/14 of all its wavelength of wave aberration WFE (RMS) of each wavelength, as shown in table 2.
The wave aberration of each wavelength of table 2
| Wavelength (nm) | Title | Wave aberration (RMS) |
| 486.13 | F lines | 1/14λ |
| 546.07 | E lines | 1/19λ |
| 587.56 | D lines | 1/21λ |
| 656.27 | C lines | 1/19λ |
| 706.52 | R lines | 1/16λ |
| 730 | --- | 1/15λ |
| 480-730 | Wave-length coverage | 1/15λ |
Embodiment 2
Fig. 5 is referred to, it is the structural representation of the wide visual field high-resolution projection objective that the embodiment of the present invention 2 is provided.
Wide visual field high-resolution projection objective includes successively the first microscope group G1, the second microscope group G2, the 3rd microscope group from thing side P1 to image side P2
G3.Diaphragm AS is provided with the second microscope group G2, the openings of sizes of diaphragm AS can be adjusted, openings of sizes adjustable optical can be adopted
Door screen.
From thing side P1 to image side P2, the first microscope group G1 can successively include the first lens L1, the second lens L2, the 3rd lens
L3, the 4th lens L4；Second microscope group G2 can successively include the 5th lens L5, the 6th lens L6, the 7th lens L7, the 8th lens
L8, the 9th lens L9, the tenth lens L10, the 11st lens L11；3rd microscope group G3 can include successively the 12nd lens L12,
13 lens L13, the 14th lens L14, the 15th lens L15, the 16th lens L16.
Wherein, the 3rd lens L3, the 6th lens (L6), the 9th lens L9, the 12nd lens L12, the 13rd lens L13 are equal
With negative power.Second lens L2, the 4th lens L4, the 5th lens L5, the 7th lens L7, the 8th lens L8, the tenth lens
L10, the 11st lens L11, the 15th lens L15, the 16th lens L16 are respectively provided with positive light coke.
In the present embodiment, the component parameters of the first to the 16th lens L1~L16 are as shown in table 3.
The projection objective parameter of table 3
Meet relational expression between first microscope group G1, the second microscope group G2, each microscope group of the 3rd microscope group G3：0.3<f1/fa<2.8,
0.25<f2/fa<2.5,0.25<-f3/fa<5.5.Wherein, f1 is the combined focal length of the first microscope group G1, and f2 is the second microscope group G2
Combined focal length, f3 is the combined focal length of the 3rd microscope group G3, and fa is the combined focal length of whole projection objective.Such lens structure can
So that the spherical aberration of projection objective, coma, astigmatism, filed curvature and distortion, the items such as axial chromatic aberration and multiplying power chromatic aberation
Aberration is all rationally corrected.In the present embodiment, f1=238.02, f2=198.01, f3=-450.5, fa=219.8,
F1/fa=0.82, f2/fa=0.92 ,-f3/fa=1.68.
In the first microscope group G1, at least meet containing a positive lens and a negative lens：Ndp ＞ ndn, at least contain one
Individual positive lens and a negative lens meet：Vdp ＜ Vdn.Wherein, ndp is the d line refractive indexes of the positive lens, and ndn is described negative
The d line refractive indexes of lens, Vdp is the abbe number of the positive lens, and Vdn is the abbe number of the negative lens.First microscope group
The Main Function of G1 so designs is the primary and high-order spherical aberration for correcting projection objective, balance projection objective axial chromatic aberration two
Level spectrum aberration, the ratio chromatism, of auxiliary balance projection objective.
In the second microscope group G2, relational expression is met：1. Vd=(nd-1)/(nF-nC)；2. nd ＜ 1.65 and Vd ＞ 62
Positive lens is a minimum of two；3. the negative lens of nd ＞ 1.50 and Vd ＜ 55 is a minimum of one；4. two air-lens are at least contained
Meet relational expression：|(r21-r22)/(r21+r22)|<0.6, | (Vd21-Vd22) | ＞ 28, | (nd21-nd22) | ＞ 0.09；⑤
Second microscope group (G2) at least meets at ambient temperature containing two positive lens：Dn/dt ＜ 0.Wherein, Vd is abbe number, body
The constant of the degree of dispersion of existing optical material, nF is the F line refractive indexes of wavelength 486nm, and nd is the d line refractive indexes of wavelength 587nm,
NC is the C line refractive indexes of wavelength 656nm；
R21, r22 are respectively the radius of curvature of the lens surface of air-lens both sides,
Vd21, Vd22 are respectively the abbe number of the lens of air-lens both sides,
Nd21, nd22 are respectively the d line refractive indexes of the lens of the both sides of air-lens, and n is refractive index, and t is temperature, dn/
The thermal refractive index coefficient that dt is varied with temperature for the refractive index of optical material.
In the present embodiment, between lens L6, L7 of the second microscope group L2, between lens L8, L9, between lens L9, L10
Exist and meet the and 4. article be：|(r21-r22)/(r21+r22)|<0.6, | (Vd21-Vd22) | ＞ 28, | (nd21-nd22) |
The air-lens of ＞ 0.09.Calculated value such as relational expression | (r21-r22)/(r21+r22) | is respectively 0.203,0.035 He
0.184, | (r21-r22)/(r21+r22) | that meet relational expression<0.6.Main Function is to correct the primary of projection objective and senior
Spherical aberration and coma, while correcting the axial chromatic aberration of projection objective and being effectively reduced its second order spectrum aberration；It is effectively reduced amber
Hereby cut down (Petzval) and allow the curvature of the image of projection objective to obtain well-corrected.
5. the of second microscope group L2 article be：Second microscope group G2 at least meets at ambient temperature containing two positive lens：dn/
Dt ＜ 0.It is different from the characteristics of dn/dt ＞ 0 of general optical glass material, when having positive lens to meet dn/dt ＜ 0, with other one
As optical glass lens thermal refractive index coefficient characteristic conversely, cancelling each other, it is possible to improve the heat of projection objective
Stability, makes projection objective in variation of ambient temperature, and its image planes position and image quality keep stable.
In the 3rd microscope group G3, containing the concave surface one for facing each other for a pair, and the pair of concave surface one for facing each other it
Between at least contain a negative lens, and the negative lens contains the concave surface two towards thing side P1.3rd microscope group G3 also meets relation
Formula：At least ndp ＞ ndn are met containing a positive lens and a negative lens, at least containing a positive lens and a negative lens
Meet Vdp ＜ Vdn.The Main Function of the 3rd microscope group G3 so design is to balance the primary and senior astigmatism of projection objective and help
In the second order spectrum aberration for reducing axial chromatic aberration, the ratio chromatism, of projection objective is balanced.In the present embodiment, the 12nd lens
The concave surface one that presence is faced each other for a pair between L12 and the 14th lens L14, i.e., the 12nd lens L12 is towards the 14th lens
The curved surface of L14 is concave surface, and the 14th lens L14 is also concave surface towards the curved surface of the 12nd lens L12.At this to facing each other
The 13rd lens L13 of negative lens is existed between concave surface one, the 13rd lens L13 contains the concave surface two towards thing side P1, i.e.,
13rd lens L13 is also concave surface towards the curved surface of thing side P1.
In order to eliminate the internal stress of optical mirror slip, thermal stress and aging, and its harmful effect caused to optical imagery,
The stability of projection objective is kept, all lens surfaces in the first microscope group G1, the second microscope group G2, the 3rd microscope group G3 are sphere,
Do not contain it is aspherical, the second microscope group G2, the 3rd microscope group G3 be do not contain cemented surface simple lens composition.In addition, not comprising non-
Spheric glass, can be greatly lowered the difficulty and cost in processing, detection and dress school.
For the reasonable control cost of wide visual field high-resolution projection objective, and optimal cost performance is obtained, the wide visual field
The lens total quantity of high-resolution projection objective is located between 12 to 28.
In a word, in the present embodiment, three lens cluster finally guarantees and realizes projection thing using such lens structure
The spherical aberration of mirror, coma, astigmatism, filed curvature and distortion, the items aberration such as axial chromatic aberration and multiplying power chromatic aberation is all obtained
Well-corrected, at the same can with the greatest optical bore of effective control camera lens, reduce camera lens processing, test and fill school difficulty and
Cost.
The wide visual field high-resolution projection objective of present embodiment, the axial chromatic aberration of wide visual field high-resolution projection objective is such as
Shown in Fig. 6, axial chromatic aberration is effectively corrected in the range of broad band, cover 480-730nm wave-length coverages.Can be with from figure
Find out, the present invention can effectively obtain high imaging quality.The projection objective of wide visual field high-resolution projection objective is in 480-
The transmission function MTF figure of 730nm wave-length coverages is as shown in Figure 7.Wave aberration WFE (RMS) of the analysis of specialty optics design software
As a result show：Less than the 1/15 of all wavelength of wave aberration WFE (RMS) of 480-730nm wave-length coverages, as shown in table 4.
The wave aberration of each wavelength of table 4
| Wavelength (nm) | Title | Wave aberration (RMS) | Wave aberration (RMS) |
| 486.13 | F lines | 1/10λ | 0.097λ |
| 546.07 | E lines | 1/20λ | 0.049λ |
| 587.56 | D lines | 1/17λ | 0.06λ |
| 656.27 | C lines | 1/14λ | 0.072λ |
| 706.52 | R lines | 1/12λ | 0.084λ |
| 730 | --- | 1/11λ | 0.088λ |
| 480-730 | Wave-length coverage | 1/15λ | 0.065λ |
Embodiment 3
Fig. 8 is referred to, it is the structural representation of the wide visual field high-resolution projection objective that the embodiment of the present invention 3 is provided.
Wide visual field high-resolution projection objective includes successively the first microscope group G1, the second microscope group G2, the 3rd microscope group from thing side P1 to image side P2
G3.Diaphragm AS is provided with the second microscope group G2, the openings of sizes of diaphragm AS can be adjusted, openings of sizes adjustable optical can be adopted
Door screen.
From thing side P1 to image side P2, the first microscope group G1 can successively include the first lens L1, the second lens L2, the 3rd lens
L3, the 4th lens L4.Second microscope group G2 may include at least two lens with negative power and wherein at least one lens are
Biconcave lens；Two lens of at least three lens with positive light coke and wherein at least be may also include for biconvex lens.At this
In embodiment, from thing side P1 to image side P2, the second microscope group G2 includes successively the 5th lens L5, the 6th lens L6, the 7th lens
L7, the 8th lens L8, the 9th lens L9, the tenth lens L10, the 11st lens L11.3rd microscope group G3 may include have negative light burnt
At least two lens of degree；May also include at least two lens with positive light coke and including at least one crescent lens.
In the present embodiment, from thing side P1 to image side P2, the 3rd microscope group G3 includes successively the 12nd lens L12, the 13rd lens
L13, the 14th lens L14, the 15th lens L15, the 16th lens L16.
Wherein, the 3rd lens L3, the 6th lens (L6), the 9th lens L9, the 12nd lens L12, the 13rd lens L13 are equal
With negative power.Second lens L2, the 4th lens L4, the 5th lens L5, the 7th lens L7, the 8th lens L8, the tenth lens
L10, the 11st lens L11, the 15th lens L15, the 16th lens L16 are respectively provided with positive light coke.
In the present embodiment, the component parameters of the first to the 16th lens L1~L16 are as shown in table 5.
The projection objective parameter of table 5
Meet relational expression between first microscope group G1, the second microscope group G2, each microscope group of the 3rd microscope group G3：0.3<f1/fa<2.8,
0.25<f2/fa<2.5,0.25<-f3/fa<5.5.Wherein, f1 is the combined focal length of the first microscope group G1, and f2 is the second microscope group G2
Combined focal length, f3 is the combined focal length of the 3rd microscope group G3, and fa is the combined focal length of whole projection objective.Such lens structure can
So that the spherical aberration of projection objective, coma, astigmatism, filed curvature and distortion, the items such as axial chromatic aberration and multiplying power chromatic aberation
Aberration is all rationally corrected.In the present embodiment, f1/fa=0.82, f2/fa=0.82 ,-f3/fa=2.06.
In the first microscope group G1, at least meet containing a positive lens and a negative lens：Ndp ＞ ndn, at least contain one
Individual positive lens and a negative lens meet：Vdp ＜ Vdn.Wherein, ndp is the d line refractive indexes of the positive lens, and ndn is described negative
The d line refractive indexes of lens, Vdp is the abbe number of the positive lens, and Vdn is the abbe number of the negative lens.First microscope group
The Main Function of G1 so designs is the primary and high-order spherical aberration for correcting projection objective, balance projection objective axial chromatic aberration two
Level spectrum aberration, the ratio chromatism, of auxiliary balance projection objective.
In the second microscope group G2, relational expression is met：1. Vd=(nd-1)/(nF-nC)；2. nd ＜ 1.65 and Vd ＞ 62
Positive lens is a minimum of two；3. the negative lens of nd ＞ 1.50 and Vd ＜ 55 is a minimum of one；4. two air-lens are at least contained
Meet relational expression：|(r21-r22)/(r21+r22)|<0.6, | (Vd21-Vd22) | ＞ 28, | (nd21-nd22) | ＞ 0.09；⑤
Second microscope group (G2) at least meets at ambient temperature containing two positive lens：Dn/dt ＜ 0.Wherein, Vd is abbe number, body
The constant of the degree of dispersion of existing optical material, nF is the F line refractive indexes of wavelength 486nm, and nd is the d line refractive indexes of wavelength 587nm,
NC is the C line refractive indexes of wavelength 656nm；R21, r22 are respectively the radius of curvature of the lens surface of air-lens both sides, Vd21,
Vd22 is respectively the abbe number of the lens of air-lens both sides, and nd21, nd22 are respectively the d of the lens of the both sides of air-lens
Line refractive index, n is refractive index, and t is temperature, and dn/dt is the thermal refractive index coefficient that the refractive index of optical material is varied with temperature.
In the present embodiment, between lens L6, L7 of the second microscope group L2, between lens L8, L9, between lens L9, L10
Exist and meet the and 4. article be：|(r21-r22)/(r21+r22)|<0.6, | (Vd21-Vd22) | ＞ 28, | (nd21-nd22) |
The air-lens of ＞ 0.09.Calculated value such as relational expression | (r21-r22)/(r21+r22) | is respectively 0.247,0.054 He
0.166, | (r21-r22)/(r21+r22) | that meet relational expression<0.6.Main Function is to correct the primary of projection objective and senior
Spherical aberration and coma, while correcting the axial chromatic aberration of projection objective and being effectively reduced its second order spectrum aberration；It is effectively reduced amber
Hereby cut down (Petzval) and allow the curvature of the image of projection objective to obtain well-corrected.
5. the of second microscope group L2 article be：Second microscope group G2 at least meets at ambient temperature containing two positive lens：dn/
Dt ＜ 0.It is different from the characteristics of dn/dt ＞ 0 of general optical glass material, when having positive lens to meet dn/dt ＜ 0, with other one
As optical glass lens thermal refractive index coefficient characteristic conversely, cancelling each other, it is possible to improve the heat of projection objective
Stability, makes projection objective in variation of ambient temperature, and its image planes position and image quality keep stable.
In the 3rd microscope group G3, containing the concave surface one for facing each other for a pair, and the pair of concave surface one for facing each other it
Between at least contain a negative lens, and the negative lens contains the concave surface two towards thing side P1.3rd microscope group G3 also meets relation
Formula：At least ndp ＞ ndn are met containing a positive lens and a negative lens, at least containing a positive lens and a negative lens
Meet Vdp ＜ Vdn.The Main Function of the 3rd microscope group G3 so design is to balance the primary and senior astigmatism of projection objective and help
In the second order spectrum aberration for reducing axial chromatic aberration, the ratio chromatism, of projection objective is balanced.In the present embodiment, the 12nd lens
The concave surface one that presence is faced each other for a pair between L12 and the 14th lens L14, i.e., the 12nd lens L12 is towards the 14th lens
The curved surface of L14 is concave surface, and the 14th lens L14 is also concave surface towards the curved surface of the 12nd lens L12.At this to facing each other
The 13rd lens L13 of negative lens is existed between concave surface one, the 13rd lens L13 contains the concave surface two towards thing side P1, i.e.,
13rd lens L13 is also concave surface towards the curved surface of thing side P1.
In order to eliminate the internal stress of optical mirror slip, thermal stress and aging, and its harmful effect caused to optical imagery,
The stability of projection objective is kept, all lens surfaces in the first microscope group G1, the second microscope group G2, the 3rd microscope group G3 are sphere,
Do not contain it is aspherical, the second microscope group G2, the 3rd microscope group G3 be do not contain cemented surface simple lens composition.In addition, not comprising non-
Spheric glass, can be greatly lowered the difficulty and cost in processing, detection and dress school.
In order to good image space telecentricity projection objective effect can be obtained, good condition is provided for later capture, as
Side P2 has the concave spherical surface towards thing side P1, and meets：αin<NA/ β, 0.8<Lpout/Rim<1.2；Wherein, α in are projection thing
In the incidence angle of image side P2, NA is the object-side numerical aperture of projection objective to the chief ray of mirror, and β is the enlargement ratio of projection objective,
Lpout be projection objective image space distance of exit pupil, the radius of curvature of Rim image planes concave spherical surfaces.
In the present embodiment, the parameter value of projection objective：β=10；NA=0.35；Hy=21.2；Spectral region：470-
750nm.Wherein, β is to project multiplying power, 4<β<18；NA is thing side opening number；Hy is high for maximum thing.
For the reasonable control cost of wide visual field high-resolution projection objective, and optimal cost performance is obtained, the wide visual field
The lens total quantity of high-resolution projection objective is located between 12 to 28.
In a word, in the present embodiment, three lens cluster finally guarantees and realizes projection thing using such lens structure
The spherical aberration of mirror, coma, astigmatism, filed curvature and distortion, the items aberration such as axial chromatic aberration and multiplying power chromatic aberation is all obtained
Well-corrected, at the same can with the greatest optical bore of effective control camera lens, reduce camera lens processing, test and fill school difficulty and
Cost.
The wide visual field high-resolution projection objective of present embodiment, the axial chromatic aberration of wide visual field high-resolution projection objective is such as
Shown in Fig. 9, axial chromatic aberration is effectively corrected in the range of broad band, cover 480-730nm wave-length coverages.Can be with from figure
Find out, the present invention can effectively obtain high imaging quality.The projection objective of wide visual field high-resolution projection objective is in 480-
The transmission function MTF figure of 730nm wave-length coverages is as shown in Figure 10.Wave aberration WFE (RMS) of the analysis of specialty optics design software
As a result show：Less than the 1/14 of all its wavelength of wave aberration WFE (RMS) of each wavelength, as shown in table 6.
The wave aberration of each wavelength of table 6.
| Wavelength (nm) | Title | Wave aberration (RMS) | Wave aberration (RMS) |
| 486.13 | F lines | 1/9λ | 0.11λ |
| 546.07 | E lines | 1/19λ | 0.053λ |
| 587.56 | D lines | 1/18λ | 0.055λ |
| 656.27 | C lines | 1/14λ | 0.073λ |
| 706.52 | R lines | 1/11λ | 0.09λ |
| 730 | --- | 1/10λ | 0.1λ |
| 480-730 | Wave-length coverage | 1/14λ | 0.072λ |
Embodiment 4
Figure 11 is referred to, it is the structural representation of the wide visual field high-resolution projection objective that the embodiment of the present invention 4 is provided.
Wide visual field high-resolution projection objective include successively from thing side P1 to image side P2 the first microscope group G1, equivalent parallel plate PLATE, the
Two microscope groups G2, the 3rd microscope group G3.Diaphragm AS is provided with the second microscope group G2, the openings of sizes of diaphragm AS can be adjusted, can adopted
With the adjustable diaphragm of openings of sizes.
From thing side P1 to image side P2, the first microscope group G1 can successively include the first lens L1, the second lens L2, the 3rd lens
L3, the 4th lens L4；Second microscope group G2 can successively include the 5th lens L5, the 6th lens L6, the 7th lens L7, the 8th lens
L8, the 9th lens L9, the tenth lens L10, the 11st lens L11；3rd microscope group G3 can include successively the 12nd lens L12,
13 lens L13, the 14th lens L14, the 15th lens L15, the 16th lens L16, the 17th lens L17.
Wherein, the first lens L1, the 3rd lens L3, the 6th lens (L6), the 9th lens L9, the 13rd lens L13, the tenth
Four lens L14, the 15th lens L15 are respectively provided with negative power.It is second lens L2, the 4th lens L4, the 5th lens L5, the 7th saturating
Mirror L7, the 8th lens L8, the tenth lens L10, the 11st lens L11, the 12nd lens L12, the 16th lens L16, the 17th
Lens L17 is respectively provided with positive light coke.
In the present embodiment, the component parameters of the first to the 17th lens L1~L17 are as shown in table 7.
The projection objective parameter of table 7
Meet relational expression between first microscope group G1, the second microscope group G2, each microscope group of the 3rd microscope group G3：0.3<f1/fa<2.8,
0.25<f2/fa<2.5,0.25<-f3/fa<5.5.Wherein, f1 is the combined focal length of the first microscope group G1, and f2 is the second microscope group G2
Combined focal length, f3 is the combined focal length of the 3rd microscope group G3, and fa is the combined focal length of whole projection objective.Such lens structure can
So that the spherical aberration of projection objective, coma, astigmatism, filed curvature and distortion, the items such as axial chromatic aberration and multiplying power chromatic aberation
Aberration is all rationally corrected.In the present embodiment, f1/fa=1.18, f2/fa=0.90 ,-f3/fa=2.02.
In the first microscope group G1, at least meet containing a positive lens and a negative lens：Ndp ＞ ndn, at least contain one
Individual positive lens and a negative lens meet：Vdp ＜ Vdn.Wherein, ndp is the d line refractive indexes of the positive lens, and ndn is described negative
The d line refractive indexes of lens, Vdp is the abbe number of the positive lens, and Vdn is the abbe number of the negative lens.First microscope group
The Main Function of G1 so designs is the primary and high-order spherical aberration for correcting projection objective, balance projection objective axial chromatic aberration two
Level spectrum aberration, the ratio chromatism, of auxiliary balance projection objective.
In the second microscope group G2, relational expression is met：1. Vd=(nd-1)/(nF-nC)；2. nd ＜ 1.65 and Vd ＞ 62
Positive lens is a minimum of two；3. the negative lens of nd ＞ 1.50 and Vd ＜ 55 is a minimum of one；4. two air-lens are at least contained
Meet relational expression：|(r21-r22)/(r21+r22)|<0.6, | (Vd21-Vd22) | ＞ 28, | (nd21-nd22) | ＞ 0.09；⑤
Second microscope group (G2) at least meets at ambient temperature containing two positive lens：Dn/dt ＜ 0.Wherein, Vd is abbe number, body
The constant of the degree of dispersion of existing optical material, nF is the F line refractive indexes of wavelength 486nm, and nd is the d line refractive indexes of wavelength 587nm,
NC is the C line refractive indexes of wavelength 656nm；R21, r22 are respectively the radius of curvature of the lens surface of air-lens both sides, Vd21,
Vd22 is respectively the abbe number of the lens of air-lens both sides, and nd21, nd22 are respectively the d of the lens of the both sides of air-lens
Line refractive index, n is refractive index, and t is temperature, and dn/dt is the thermal refractive index coefficient that the refractive index of optical material is varied with temperature.
In the present embodiment, between lens L6, L7 of the second microscope group L2, between lens L8, L9, between lens L9, L10
Exist and meet the and 4. article be：|(r21-r22)/(r21+r22)|<0.6, | (Vd21-Vd22) | ＞ 28, | (nd21-nd22) |
The air-lens of ＞ 0.09.Calculated value such as relational expression | (r21-r22)/(r21+r22) | is respectively 0.220,0.264 He
0.166, | (r21-r22)/(r21+r22) | that meet relational expression<0.6.Main Function is to correct the primary of projection objective and senior
Spherical aberration and coma, while correcting the axial chromatic aberration of projection objective and being effectively reduced its second order spectrum aberration；It is effectively reduced amber
Hereby cut down (Petzval) and allow the curvature of the image of projection objective to obtain well-corrected.
5. the of second microscope group L2 article be：Second microscope group G2 at least meets at ambient temperature containing two positive lens：dn/
Dt ＜ 0.It is different from the characteristics of dn/dt ＞ 0 of general optical glass material, when having positive lens to meet dn/dt ＜ 0, with other one
As optical glass lens thermal refractive index coefficient characteristic conversely, cancelling each other, it is possible to improve the heat of projection objective
Stability, makes projection objective in variation of ambient temperature, and its image planes position and image quality keep stable.
In the 3rd microscope group G3, containing the concave surface one for facing each other for a pair, and the pair of concave surface one for facing each other it
Between at least contain a negative lens, and the negative lens contains the concave surface two towards thing side P1.3rd microscope group G3 also meets relation
Formula：At least ndp ＞ ndn are met containing a positive lens and a negative lens, at least containing a positive lens and a negative lens
Meet Vdp ＜ Vdn.The Main Function of the 3rd microscope group G3 so design is to balance the primary and senior astigmatism of projection objective and help
In the second order spectrum aberration for reducing axial chromatic aberration, the ratio chromatism, of projection objective is balanced.In the present embodiment, the 13rd lens
The concave surface one that presence is faced each other for a pair between L13 and the 15th lens L15, i.e., the 13rd lens L13 is towards the 15th lens
The curved surface of L15 is concave surface, and the 15th lens L15 is also concave surface towards the curved surface of the 13rd lens L13.At this to facing each other
The 14th lens L14 of negative lens is existed between concave surface one, the 14th lens L14 contains the concave surface two towards thing side P1, i.e.,
14th lens L14 is also concave surface towards the curved surface of thing side P1.
In order to eliminate the internal stress of optical mirror slip, thermal stress and aging, and its harmful effect caused to optical imagery,
The stability of projection objective is kept, all lens surfaces in the first microscope group G1, the second microscope group G2, the 3rd microscope group G3 are sphere,
Do not contain it is aspherical, the second microscope group G2, the 3rd microscope group G3 be do not contain cemented surface simple lens composition.In addition, not comprising non-
Spheric glass, can be greatly lowered the difficulty and cost in processing, detection and dress school.
Equivalent parallel plate is provided between the first microscope group G1 and the 3rd microscope group G3 (in the present embodiment, equivalent flat
Row flat board is located between the first microscope group G1 and the second microscope group G2), equivalent parallel plate meets：Tpl ＞ 0.6Dop.Wherein, Tpl is
Equivalent parallel plate thickness, Dop is the maximum clear aperture of equivalent parallel plate, and it is thin that equivalent parallel plate contains one or more layers
Film is that, with the divided beams device for partially transmitted and partially reflecting, its Main Function is available with the part of equivalent parallel plate
Transmission and the light splitting function of part reflection, realize various coaxially falling to penetrating illumination.
For the reasonable control cost of wide visual field high-resolution projection objective, and optimal cost performance is obtained, the wide visual field
The lens total quantity of high-resolution projection objective is located between 12 to 28.
In a word, in the present embodiment, three lens cluster finally guarantees and realizes projection thing using such lens structure
The spherical aberration of mirror, coma, astigmatism, filed curvature and distortion, the items aberration such as axial chromatic aberration and multiplying power chromatic aberation is all obtained
Well-corrected, at the same can with the greatest optical bore of effective control camera lens, reduce camera lens processing, test and fill school difficulty and
Cost.
The wide visual field high-resolution projection objective of present embodiment, the axial chromatic aberration of wide visual field high-resolution projection objective is such as
Shown in Figure 12, axial chromatic aberration is effectively corrected in the range of broad band, cover 480-730nm wave-length coverages.Can from figure
To find out, the present invention can effectively obtain high imaging quality.The projection objective of wide visual field high-resolution projection objective is in 480-
The transmission function MTF figure of 730nm wave-length coverages is as shown in figure 13.Wave aberration WFE (RMS) of the analysis of specialty optics design software
As a result show：Less than the 1/14 of all its wavelength of wave aberration WFE (RMS) of each wavelength, as shown in table 8.
The wave aberration of each wavelength of table 8..
| Wavelength (nm) | Title | Wave aberration (RMS) | Wave aberration (RMS) |
| 486.13 | F lines | 1/13λ | 0.078λ |
| 546.07 | E lines | 1/18λ | 0.056λ |
| 587.56 | D lines | 1/18λ | 0.055λ |
| 656.27 | C lines | 1/14λ | 0.069λ |
| 706.52 | R lines | 1/12λ | 0.084λ |
| 730 | --- | 1/11λ | 0.091λ |
| 480-730 | Wave-length coverage | 1/14λ | 0.071λ |
In sum, the present invention has wide spectrum, high-resolution, 3 kinds of big visual field characteristic simultaneously, at present also rare precedent；Tool
There is good image space telecentricity projection objective effect, for later capture good condition is provided；The greatest optical mouth of projection objective
Footpath only has 60% or so of image space full filed bore, considerably reduces the manufacturing cost and difficulty of projection objective.And common picture
The greatest optical bore of Fang Yuanxin projection objectives is more than the 100% of image space full filed bore, and manufacturing cost is high and manufactures difficult
Degree is big；Eyeglass bore is little, not comprising aspherical lens, considerably reduces the difficulty and cost in processing, detection and dress school；Can be with
Using the light splitting function of partially transmitted and partially reflecting of equivalent parallel plate, realize various coaxially falling to penetrating illumination.
Presently preferred embodiments of the present invention is the foregoing is only, not to limit the present invention, all essences in the present invention
Any modification, equivalent and improvement made within god and principle etc., should be included within the scope of the present invention.
Claims (10)
1. a kind of wide visual field high-resolution projection objective, its from thing side (P1) to image side (P2) include successively the first microscope group (G1),
Second microscope group (G2), the 3rd microscope group (G3)；Wherein,
In the second microscope group (G2), relational expression is met：The positive lens of Vd=(nd-1)/(nF-nC), nd ＜ 1.65 and Vd ＞ 62
A minimum of two, the negative lens of nd ＞ 1.50 and Vd ＜ 55 is a minimum of one；Wherein, Vd is abbe number, embodies optical material
Degree of dispersion constant, nF for wavelength 486nm F line refractive indexes, nd for wavelength 587nm d line refractive indexes, nC is wavelength
The C line refractive indexes of 656nm；
Meet relational expression between first microscope group (G1), the second microscope group (G2), each microscope group of the 3rd microscope group (G3)：0.3<f1/fa<2.8,
0.25<f2/fa<2.5,0.25<-f3/fa<5.5；Wherein, f1 is the combined focal length of the first microscope group (G1), and f2 is the second microscope group
(G2) combined focal length, f3 is the combined focal length of the 3rd microscope group (G3), and fa is the combined focal length of whole projection objective；
It is characterized in that：
Diaphragm (AS) is provided between the first microscope group (G1) and the 3rd microscope group (G3)；In the second microscope group (G2), at least contain
Two air-lens meet relational expression：|(r21-r22)/(r21+r22)|<0.6, | (Vd21-Vd22) | ＞ 28, | (nd21-
Nd22) | ＞ 0.09；Wherein, r21, r22 are respectively the radius of curvature of the lens surface of air-lens both sides, Vd21, Vd22 difference
For the abbe number of the lens of air-lens both sides, nd21, nd22 are respectively the d lines refraction of the lens of the both sides of air-lens
Rate；And second microscope group (G2) at least meet at ambient temperature containing two positive lens：Dn/dt ＜ 0；Wherein, n is refractive index, t
For the thermal refractive index coefficient that temperature, dn/dt are varied with temperature for the refractive index of optical material；
Image side (P2) has the concave spherical surface towards thing side (P1), and meets：αin<NA/ β, 0.8<Lpout/Rim<1.2；Wherein, α
In is the incidence angle of the chief ray in image side (P2) of projection objective, and NA is the object-side numerical aperture of projection objective, and β is projection objective
Enlargement ratio, it is projection objective image space distance of exit pupil to take on the occasion of, Lpout, the radius of curvature of Rim image planes concave spherical surfaces.
2. wide visual field high-resolution projection objective as claimed in claim 1, it is characterised in that：In the 3rd microscope group (G3), contain
There is the concave surface one for facing each other for a pair, and at least contain a negative lens, and institute between the pair of concave surface one for facing each other
State negative lens and contain concave surface two towards thing side；3rd microscope group (G3) also meets relational expression：At least contain a positive lens and
Individual negative lens meets ndp ＞ ndn, at least meets Vdp ＜ Vdn containing a positive lens and a negative lens；Wherein, ndp is
The d line refractive indexes of corresponding positive lens in three microscope groups (G3), ndn is the d line refractive indexes of corresponding negative lens in the 3rd microscope group (G3),
Vdp is the abbe number of corresponding positive lens in the 3rd microscope group (G3), and Vdn is the dispersion system of corresponding negative lens in the 3rd microscope group (G3)
Number.
3. wide visual field high-resolution projection objective as claimed in claim 1, it is characterised in that：In the first microscope group (G1)：Extremely
Meet containing a positive lens and a negative lens less：Ndp ＞ ndn；At least meet containing a positive lens and a negative lens：
Vdp ＜ Vdn；Wherein, ndp is the d line refractive indexes of corresponding positive lens in the first microscope group (G1), and ndn is phase in the first microscope group (G1)
The d line refractive indexes of negative lens are answered, Vdp is the abbe number of corresponding positive lens in the first microscope group (G1), and Vdn is the first microscope group (G1)
In corresponding negative lens abbe number.
4. wide visual field high-resolution projection objective as claimed in claim 1, it is characterised in that：4<β<18.
5. the wide visual field high-resolution projection objective as described in any one in Claims 1-4, it is characterised in that：First mirror
All lens surfaces in group (G1), the second microscope group (G2), the 3rd microscope group (G3) are sphere, do not contain aspherical, the second microscope group
(G2), the 3rd microscope group (G3) is the simple lens composition for not containing cemented surface.
6. the wide visual field high-resolution projection objective as described in any one in Claims 1-4, it is characterised in that：The width
The lens total quantity of visual field high-resolution projection objective is located between 12 to 28.
7. the wide visual field high-resolution projection objective as described in any one in Claims 1-4, it is characterised in that：Second mirror
Group (G2) includes at least two lens with negative power and wherein at least one lens are biconcave lens；Also include having just
Two lens of at least three lens and wherein at least of focal power are biconvex lens.
8. the wide visual field high-resolution projection objective as described in any one in Claims 1-4, it is characterised in that：3rd mirror
Group (G3) includes at least two lens with negative power；Also include at least two lens with positive light coke and including to
Few crescent lens.
9. the wide visual field high-resolution projection objective as described in any one in Claims 1-4, it is characterised in that：From thing side
(P1) to image side (P2), the first microscope group (G1) include successively the first lens (L1), the second lens (L2), the 3rd lens (L3), the
Four lens (L4), wherein, the 3rd lens (L3) have negative power, and the second lens (L2), the 4th lens (L4) are respectively provided with positive light
Focal power.
10. wide visual field high-resolution projection objective as claimed in claim 1, it is characterised in that：The openings of sizes of diaphragm can be adjusted
Section.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510185293.XA CN104730697B (en) | 2015-04-17 | 2015-04-17 | Wide-visual-field and high-resolution projection lens |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510185293.XA CN104730697B (en) | 2015-04-17 | 2015-04-17 | Wide-visual-field and high-resolution projection lens |
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| Publication Number | Publication Date |
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| CN104730697A CN104730697A (en) | 2015-06-24 |
| CN104730697B true CN104730697B (en) | 2017-05-17 |
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| CN201510185293.XA Active CN104730697B (en) | 2015-04-17 | 2015-04-17 | Wide-visual-field and high-resolution projection lens |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107462978B (en) * | 2017-09-26 | 2020-02-14 | 张家港中贺自动化科技有限公司 | Large-view-field high-resolution objective lens |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0764865B1 (en) * | 1995-09-21 | 2003-07-30 | U.S. Precision Lens Inc. | Projection television lens system |
| JP3588283B2 (en) * | 1999-09-24 | 2004-11-10 | 松下電器産業株式会社 | Projection lens and projector using it |
| US8867140B2 (en) * | 2011-08-22 | 2014-10-21 | Bae Systems Information And Electronic Systems Integration Inc. | Low distortion athermalized imaging lens |
| JP2015004717A (en) * | 2013-06-19 | 2015-01-08 | リコーイメージング株式会社 | Single focus lens system |
| CN104062748B (en) * | 2014-07-17 | 2016-04-13 | 张家港中贺自动化科技有限公司 | A kind of multiplying power control method of wide spectrum projection optical system |
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