CN104730693B - Wide-spectrum and large-visual-field projection objective lens - Google Patents
Wide-spectrum and large-visual-field projection objective lens Download PDFInfo
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- CN104730693B CN104730693B CN201510185113.8A CN201510185113A CN104730693B CN 104730693 B CN104730693 B CN 104730693B CN 201510185113 A CN201510185113 A CN 201510185113A CN 104730693 B CN104730693 B CN 104730693B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/06—Panoramic objectives; So-called "sky lenses" including panoramic objectives having reflecting surfaces
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
Abstract
The invention discloses a wide-spectrum and large-visual-field projection objective lens. The projection objective lens sequentially comprises a first lens group, a second lens group and a third lens group from an object side to an image side. A diaphragm is disposed between the first lens group and the third lens group. The second lens group at least comprises two air lenses satisfying |(r21-r22)/(r21+r22)|＜0.6, |(Vd21-Vd22)|＞28 and |(nd21-nd22)|＞0.09, wherein the curvature radius, dispersion coefficient and d line refraction index of lens surfaces on two sides of the air lenses are respectively r21, r22, Vd21, Vd22, nd21 and nd22. The second lens group further at least comprises two positive lenses satisfying dn/dt＜0 under room temperature, wherein n is refraction index, t is temperature, and dn/dt is the refraction index temperature coefficient which indicates the optical material refraction index change along with temperature.
Description
Technical field
The present invention relates to a kind of a kind of big visual field of wide spectrum of the big visual field optical detection of projection objective, more particularly, to high accuracy
Projection objective, is applied to the research of the big visual field of high-resolution and the detection in the fields such as biology, heredity, medical treatment and medicine.
Background technology
It is applied to the development of the researchs such as biology, heredity, medical treatment and medicine and detection technique, the big visual field optical detection of high accuracy
The projection objective demand requiring increasingly strengthens.There is wide spectrum, high-resolution, the setting of the projection objective of the 3 kinds of performances in big visual field simultaneously
Meter and manufacture are very difficult, at present also rare precedent.
Content of the invention
For the deficiencies in the prior art, it is an object of the invention to provide a kind of wide spectrum big visual field projection objective, realize
The spherical aberration of projection objective, coma, astigmatism, the items aberration such as axial chromatic aberration and multiplying power chromatic aberration all obtains good school
Just, especially the second order spectrum of axial chromatic aberration is corrected good, can reduce the processing of camera lens again, the difficulty in test and dress school with become
This, have good image space telecentricity projection objective effect simultaneously, providing good condition for capture below.
The present invention employs the following technical solutions realization: a kind of wide spectrum big visual field projection objective, it is from thing side (p1) to picture
Side (p2) includes the first microscope group (g1), the second microscope group (g2), the 3rd microscope group (g3) successively；
In the second microscope group (g2), meet relational expression: vd=(nd-1)/(nf-nc), nd ＜ 1.65 and vd ＞ 62 is just
A minimum of two of lens, a minimum of one of the minus lenses of nd ＞ 1.50 and vd ＜ 55；Wherein, vd is abbe number, embodies optics
The constant of the degree of dispersion of material, nf is the f line refractive index of wavelength 486nm, and nd is the d line refractive index of wavelength 587nm, and nc is ripple
The c line refractive index of long 656nm；
In the 3rd microscope group (g3), containing the concave surface one facing each other for a pair, and the pair of concave surface one facing each other
Between at least contain minus lenses, and described minus lenses contain the concave surface two towards thing side；3rd microscope group (g3) also meets pass
It is formula: at least contain plus lens and minus lenses meet ndp ＞ ndn, at least contain plus lens and one negative thoroughly
Mirror meets vdp ＜ vdn；Wherein, ndp is the d line refractive index of described plus lens, and ndn is the d line refractive index of described minus lenses, vdp
For the abbe number of described plus lens, vdn is the abbe number of described minus lenses；
Relational expression is met between first microscope group (g1), the second microscope group (g2), each microscope group of the 3rd microscope group (g3): 0.3 < f1/fa <
2.8,0.25 < f2/fa < 2.5,0.25 <-f3/fa < 5.5；Wherein, f1 is the combined focal length of the first microscope group (g1), and f2 is the second mirror
The combined focal length of group (g2), f3 is the combined focal length of the 3rd microscope group (g3), and fa is the combined focal length of whole projection objective；
Wherein, it is provided with diaphragm (as) between the first microscope group (g1) and the 3rd microscope group (g3)；
In the second microscope group (g2), also at least contain two air-lens and meet relational expression: | (r21-r22)/(r21+
R22) | < 0.6, | (vd21-vd22) | ＞ 28, | (nd21-nd22) | ＞ 0.09；Wherein, r21, r22 are respectively air-lens two
The radius of curvature of the lens surface of side, vd21, vd22 are respectively the abbe number of the lens of air-lens both sides, nd21, nd22
It is respectively the d line refractive index of the lens of both sides of air-lens；And second microscope group (g2) at least contain two plus lens in room temperature
Under the conditions of meet: dn/dt ＜ 0；Wherein, n is refractive index, and t is temperature, and dn/dt is that the refractive index of optical material varies with temperature
Thermal refractive index coefficient.
As the improvement further of such scheme, in the first microscope group (g1): at least contain plus lens and one negative
Lens meet: ndp ＞ ndn；At least contain plus lens and minus lenses meet: vdp ＜ vdn.
As the improvement further of such scheme, the lens total quantity of described wide spectrum big visual field projection objective arrives positioned at 12
Between 28.
As the improvement further of such scheme, the institute in the first microscope group (g1), the second microscope group (g2), the 3rd microscope group (g3)
There is lens surface to be sphere, do not contain aspheric surface, the second microscope group (g2), the 3rd microscope group (g3) are and do not contain the single saturating of cemented surface
Microscope group becomes.
As the improvement further of such scheme, from thing side (p1) to image side (p2), the second microscope group (g2) includes successively
Five lens (l5), the 6th lens (l6), the 7th lens (l7), the 8th lens (l8), the 9th lens (l9), the tenth lens (l10),
11st lens (l11)；Wherein, the 6th lens (l6) and the 9th lens (l9) are respectively provided with negative power, the 5th lens (l5),
Seven lens (l7), the 8th lens (l8), the tenth lens (l10) and the 11st lens (l11) are respectively provided with positive light coke.
Further, between the 6th lens (l6) of the second microscope group (g2) and the 7th lens (l7), the 8th lens (l8) with
Between 9th lens (l9), between the 9th lens (l9) and the tenth lens (l10), all there are described air-lens.
Further, from thing side (p1) to image side (p2), the 3rd microscope group (g3) include successively the 12nd lens (l12),
13 lens (l13), the 14th lens (l14), the 15th lens (l15), the 16th lens (l16), wherein, the 13rd lens
(l13) there is negative power, the 15th lens (l15), the 16th lens (l16) are respectively provided with positive light coke.
Preferably, there is, between the 12nd lens (l12) and the 14th lens (l14), the concave surface one facing each other for a pair,
Exist for the 13rd lens (l13) of minus lenses between this is to the concave surface one facing each other, the 13rd lens (l13) contain face
Concave surface two to thing side (p1).
Preferably, from thing side (p1) to image side (p2), the first microscope group (g1) includes the first lens (l1), the second lens successively
(l2), the 3rd lens (l3), the 4th lens (l4)；Wherein, the 3rd lens (l3) have negative power, the second lens (l2) and
Four lens (l4) are respectively provided with positive light coke.
The openings of sizes of the diaphragm of the present invention can be adjusted.
Advantages of the present invention:
1, there is wide spectrum, high-resolution, 3 kinds of big visual field characteristic simultaneously, at present also rare precedent；
2, the greatest optical bore of projection objective only has the 60% about of image space full filed bore, considerably reduces projection
The manufacturing cost of object lens and difficulty.And commonly the greatest optical bore of image space telecentricity projection objective is image space full filed bore
More than 100%, manufacturing cost is high and manufacture difficulty is big；
3, eyeglass bore is little, does not comprise aspherical lens, considerably reduces processing, the difficulty in detection and dress school with become
This.
Brief description
The structural representation of the wide spectrum big visual field projection objective that Fig. 1 provides for the embodiment of the present invention 1.
Fig. 2 is the structural representation of air-lens.
Fig. 3 is axial chromatic aberration curve chart at 0.7 aperture of wide spectrum big visual field projection objective in Fig. 1.
Fig. 4 is that in Fig. 1, wide spectrum big visual field projection objective is schemed in transmission function mtf of 480-730nm wave-length coverage.
The structural representation of the wide spectrum big visual field projection objective that Fig. 5 provides for the embodiment of the present invention 2.
Fig. 6 is axial chromatic aberration curve chart at 0.7 aperture of wide spectrum big visual field projection objective in Fig. 5.
Fig. 7 is that in Fig. 5, wide spectrum big visual field projection objective is schemed in transmission function mtf of 480-730nm wave-length coverage.
The structural representation of the wide spectrum big visual field projection objective that Fig. 8 provides for the embodiment of the present invention 3.
Fig. 9 is axial chromatic aberration curve chart at 0.7 aperture of wide spectrum big visual field projection objective in Fig. 8.
Figure 10 is that in Fig. 8, wide spectrum big visual field projection objective is schemed in transmission function mtf of 480-730nm wave-length coverage.
The structural representation of the wide spectrum big visual field projection objective that Figure 11 provides for the embodiment of the present invention 4.
Figure 12 is axial chromatic aberration curve chart at 0.7 aperture of wide spectrum big visual field projection objective in Fig. 4.
Figure 13 is that in Fig. 4, wide spectrum big visual field projection objective is schemed in transmission function mtf of 480-730nm wave-length coverage.
Specific embodiment
In order that the objects, technical solutions and advantages of the present invention become more apparent, below in conjunction with drawings and Examples, right
The present invention is further elaborated.It should be appreciated that specific embodiment described herein is only in order to explain the present invention, and
It is not used in the restriction present invention.
Embodiment 1
Refer to Fig. 1, the structural representation of its wide spectrum big visual field projection objective providing for the embodiment of the present invention 1.Wide
Spectrum big visual field projection objective includes the first microscope group g1, equivalent parallel plate plate, the second mirror successively from thing side p1 to image side p2
Group g2, the 3rd microscope group g3.It is provided with diaphragm as in the second microscope group g2, the openings of sizes of diaphragm as can be adjusted, can adopt and open
Mouth size adjustable diaphragm.
From thing side p1 to image side p2, the first microscope group g1 can include the first lens l1, the second lens l2, the 3rd lens successively
L3, the 4th lens l4；Second microscope group g2 can include the 5th lens l5, the 6th lens l6, the 7th lens l7, the 8th lens successively
L8, the 9th lens l9, the tenth lens l10, the 11st lens l11；3rd microscope group g3 can include successively the 12nd lens l12,
13 lens l13, the 14th lens l14, the 15th lens l15, the 16th lens l16, the 17th lens l17.
Wherein, the first lens l1, the 3rd lens l3, the 6th lens l6, the 9th lens l9, the 13rd lens l13, the 14th
Lens l14, the 15th lens l15 are respectively provided with negative power.Second lens l2, the 4th lens l4, the 5th lens l5, the 7th lens
L7, the 8th lens l8, the tenth lens l10, the 11st lens l11, the 12nd lens l12, the 16th lens l16, the 17th saturating
Mirror l17 is respectively provided with positive light coke.
In the present embodiment, the component parameters of the first to the 17th lens l1～l17 are as shown in table 1.
Table 1 projection objective parameter
Relational expression is met between first microscope group g1, the second microscope group g2, each microscope group of the 3rd microscope group g3: 0.3 < f1/fa < 2.8,
0.25 < f2/fa < 2.5,0.25 <-f3/fa < 5.5.Wherein, f1 is the combined focal length of the first microscope group g1, and f2 is the second microscope group g2
Combined focal length, f3 is the combined focal length of the 3rd microscope group g3, and fa is the combined focal length of whole projection objective.Such lens structure can
So that the spherical aberration of projection objective, coma, astigmatism, filed curvature and distortion, the items such as axial chromatic aberration and multiplying power chromatic aberration
Aberration is all rationally corrected.In the present embodiment, f1/fa=0.211, f2/fa=0.282 ,-f3/fa=0.150.
In the first microscope group g1, at least contain plus lens and minus lenses meet: ndp ＞ ndn, at least contain one
Individual plus lens and minus lenses meet: vdp ＜ vdn.Wherein, ndp is the d line refractive index of described plus lens, and ndn is described negative
The d line refractive index of lens, vdp is the abbe number of described plus lens, and vdn is the abbe number of described minus lenses.First microscope group
The Main Function of g1 so design is primary and the high-order spherical aberration of correction projection objective, the two of the axial chromatic aberration of balance projection objective
Level spectrum aberration, the ratio chromatism, of auxiliary balance projection objective.
In the second microscope group g2, meet relational expression: 1. vd=(nd-1)/(nf-nc)；2. nd ＜ 1.65 and vd ＞ 62
A minimum of two of plus lens；3. a minimum of of the minus lenses of nd ＞ 1.50 and vd ＜ 55；4. two air-lens are at least contained
Meet relational expression: | (r21-r22)/(r21+r22) | < 0.6, | (vd21-vd22) | ＞ 28, | (nd21-nd22) | ＞ 0.09；⑤
Second microscope group (g2) at least contains two plus lens and meets at ambient temperature: dn/dt ＜ 0.Wherein, vd is abbe number, body
The constant of the degree of dispersion of existing optical material, nf is the f line refractive index of wavelength 486nm, and nd is the d line refractive index of wavelength 587nm,
Nc is the c line refractive index of wavelength 656nm；The radius of curvature of r21, r22 respectively lens surface of air-lens both sides, vd21,
Vd22 is respectively the abbe number of the lens of air-lens both sides, and nd21, nd22 are respectively the d of the lens of both sides of air-lens
Line refractive index, n is refractive index, and t is temperature, and dn/dt is the thermal refractive index coefficient that varies with temperature of refractive index of optical material.
For air-lens, in the lens group constituting camera lens, the air being clipped in the middle by two neighboring glass lens is empty
Between (air space) l can regard lens as refractive index 1.0 as, the air space designing in view of this consideration can be described as air
Lens, air-lens l as shown in Figure 2.Air-lens l before and after index of refraction relationship be respectively with adjacent glass lens lx,
Ly is contrary, and therefore convex surface has concavees lens effect, and concave surface has the effect of convex lenss.Referring to Fig. 1, in this embodiment party
4. article in formula, between lens l6, l7 of the second microscope group l2, between lens l8, l9, all exist between lens l9, l10 and meet the
That is: | (r21-r22)/(r21+r22) | < 0.6, | (vd21-vd22) | ＞ 28, | (nd21-nd22) | the air-lens of ＞ 0.09.
As relational expression, the value of calculation of | (r21-r22)/(r21+r22) | is respectively 0.211,0.282 and 0.150, meets relational expression |
(r21-r22)/(r21+r22)|<0.6.Main Function is primary and high-order spherical aberration and the coma of correction projection objective, school simultaneously
The axial chromatic aberration of orthographic projection object lens is simultaneously effectively reduced its second order spectrum aberration；It is effectively reduced Po Zi to cut down (petzval) and make
The curvature of the image obtaining projection objective can obtain well-corrected.
The of second microscope group l2 be 5. article i.e.: the second microscope group g2 at least contains two plus lens and meets at ambient temperature: dn/
Dt ＜ 0.Different from dn/dt ＞ 0 characteristic of general optical glass material, when having plus lens to meet dn/dt ＜ 0, with other one
As the thermal refractive index coefficient of optical glass lens characteristic contrary, cancel each other it is possible to improve the heat of projection objective
Stability, makes projection objective in variation of ambient temperature, and its image planes position and image quality keep stable.
In the 3rd microscope group g3, containing the concave surface one facing each other for a pair, and the pair of concave surface one facing each other it
Between at least contain minus lenses, and described minus lenses contain the concave surface two towards thing side p1.3rd microscope group g3 also meets relation
Formula: at least contain plus lens and minus lenses meet ndp ＞ ndn, at least contain plus lens and minus lenses
Meet vdp ＜ vdn.The Main Function of the 3rd microscope group g3 so design is the primary and senior astigmatism of balance projection objective and helps
In the second order spectrum aberration reducing axial chromatic aberration, the ratio chromatism, of balance projection objective.In the present embodiment, the 13rd lens
There is, between l13 and the 15th lens l15, the concave surface one facing each other for a pair, that is, the 13rd lens l13 is towards the 15th lens
The curved surface of l15 is concave surface, and the 15th lens l15 is also concave surface towards the curved surface of the 13rd lens l13.At this to facing each other
The 14th lens l14 of minus lenses is existed for, the 14th lens l14 contains the concave surface two towards thing side p1, that is, between concave surface one
14th lens l14 is also concave surface towards the curved surface of thing side p1.
In order to eliminate the internal stress of optical glass, thermal stress and aging, and its harmful effect that optical imagery is caused,
Keep the stability of projection objective, all lens surfaces in the first microscope group g1, the second microscope group g2, the 3rd microscope group g3 are sphere,
Do not contain aspheric surface, the second microscope group g2, the 3rd microscope group g3 are the simple lens composition not containing cemented surface.In addition, not comprising non-
Spherical lenses, can be greatly lowered processing, the difficulty in detection and dress school and cost.
In order to obtain good image space telecentricity projection objective effect, the capture being later provides good condition, as
Side p2 has the concave spherical surface towards thing side p1, and meets: α in < na/ β, and 0.8 < lpout/rim < 1.2；Wherein, α in is projection thing
In the angle of incidence of image side p2, na is the object-side numerical aperture of projection objective to the chief ray of mirror, and β is the enlargement ratio of projection objective,
Lpout is projection objective image space distance of exit pupil, the radius of curvature of rim image planes concave spherical surface.
In the present embodiment, the parameter value of projection objective: β=10；Na=0.35；Hy=21.2；Spectral region: 470-
750nm.Wherein, β is projection multiplying power, 4 < β < 18；Na is thing side opening number；Hy is that maximum thing is high.
It is provided with equivalent parallel plate (in the present embodiment, equivalent flat between the first microscope group g1 and the 3rd microscope group g3
Row flat board is located between the first microscope group g1 and the second microscope group g2), equivalent parallel plate meets: tpl ＞ 0.6dop.Wherein, tpl is
Equivalent parallel plate thickness, dop be equivalent parallel plate maximum clear aperture, equivalent parallel plate be have fractional transmission with
Part reflection divided beams device, its Main Function be available with equivalent parallel plate partially transmitted and partially reflect point
Light function, realizes various coaxially falling to penetrating illumination.
For the reasonable control cost of wide spectrum big visual field projection objective, and obtain optimal cost performance, described wide spectrum is big
The lens total quantity of visual field projection objective is located between 12 to 28.
In a word, in the present embodiment, three lens cluster is finally guaranteed using such lens structure and achieves projection thing
The spherical aberration of mirror, coma, astigmatism, filed curvature and distortion, the items aberration such as axial chromatic aberration and multiplying power chromatic aberration all obtains
Well-corrected, simultaneously can with the greatest optical bore of effective control camera lens, reduce camera lens processing, test and dress school difficulty and
Cost.
The wide spectrum big visual field projection objective of present embodiment, axial chromatic aberration such as Fig. 3 of wide spectrum big visual field projection objective
Shown, effectively correct axial chromatic aberration in the range of broad band, cover 480-730nm wave-length coverage.Can from figure
Go out, the present invention can effectively obtain high imaging quality.The projection objective of wide spectrum big visual field projection objective is in 480-730nm ripple
The transmission function mtf figure of long scope is as shown in Figure 4.Wave aberration wfe (rms) the result table of the analysis of specialty optics design software
Bright: less than the 1/14 of wave aberration wfe (rms) its wavelength all of each wavelength, as shown in table 2.
The wave aberration of each wavelength of table 2
| Wavelength (nm) | Title | Wave aberration (rms) |
| 486.13 | F line | 1/14λ |
| 546.07 | E line | 1/19λ |
| 587.56 | D line | 1/21λ |
| 656.27 | C line | 1/19λ |
| 706.52 | R line | 1/16λ |
| 730 | --- | 1/15λ |
| 480-730 | Wave-length coverage | 1/15λ |
Embodiment 2
Refer to Fig. 5, the structural representation of its wide spectrum big visual field projection objective providing for the embodiment of the present invention 2.Wide
Spectrum big visual field projection objective includes the first microscope group g1, the second microscope group g2, the 3rd microscope group g3 successively from thing side p1 to image side p2.?
It is provided with diaphragm as in second microscope group g2, the openings of sizes of diaphragm as can be adjusted, the adjustable diaphragm of openings of sizes can be adopted.
From thing side p1 to image side p2, the first microscope group g1 can include the first lens l1, the second lens l2, the 3rd lens successively
L3, the 4th lens l4；Second microscope group g2 can include the 5th lens l5, the 6th lens l6, the 7th lens l7, the 8th lens successively
L8, the 9th lens l9, the tenth lens l10, the 11st lens l11；3rd microscope group g3 can include successively the 12nd lens l12,
13 lens l13, the 14th lens l14, the 15th lens l15, the 16th lens l16.
Wherein, the 3rd lens l3, the 6th lens (l6), the 9th lens l9, the 12nd lens l12, the 13rd lens l13 are equal
There is negative power.Second lens l2, the 4th lens l4, the 5th lens l5, the 7th lens l7, the 8th lens l8, the tenth lens
L10, the 11st lens l11, the 15th lens l15, the 16th lens l16 are respectively provided with positive light coke.
In the present embodiment, the component parameters of the first to the 16th lens l1～l16 are as shown in table 3.
Table 3 projection objective parameter
Relational expression is met between first microscope group g1, the second microscope group g2, each microscope group of the 3rd microscope group g3: 0.3 < f1/fa < 2.8,
0.25 < f2/fa < 2.5,0.25 <-f3/fa < 5.5.Wherein, f1 is the combined focal length of the first microscope group g1, and f2 is the second microscope group g2
Combined focal length, f3 is the combined focal length of the 3rd microscope group g3, and fa is the combined focal length of whole projection objective.Such lens structure can
So that the spherical aberration of projection objective, coma, astigmatism, filed curvature and distortion, the items such as axial chromatic aberration and multiplying power chromatic aberration
Aberration is all rationally corrected.In the present embodiment, f1=238.02, f2=198.01, f3=-450.5, fa=219.8,
F1/fa=0.82, f2/fa=0.92 ,-f3/fa=1.68.
In the first microscope group g1, at least contain plus lens and minus lenses meet: ndp ＞ ndn, at least contain one
Individual plus lens and minus lenses meet: vdp ＜ vdn.Wherein, ndp is the d line refractive index of described plus lens, and ndn is described negative
The d line refractive index of lens, vdp is the abbe number of described plus lens, and vdn is the abbe number of described minus lenses.First microscope group
The Main Function of g1 so design is primary and the high-order spherical aberration of correction projection objective, the two of the axial chromatic aberration of balance projection objective
Level spectrum aberration, the ratio chromatism, of auxiliary balance projection objective.
In the second microscope group g2, meet relational expression: 1. vd=(nd-1)/(nf-nc)；2. nd ＜ 1.65 and vd ＞ 62
A minimum of two of plus lens；3. a minimum of of the minus lenses of nd ＞ 1.50 and vd ＜ 55；4. two air-lens are at least contained
Meet relational expression: | (r21-r22)/(r21+r22) | < 0.6, | (vd21-vd22) | ＞ 28, | (nd21-nd22) | ＞ 0.09；⑤
Second microscope group (g2) at least contains two plus lens and meets at ambient temperature: dn/dt ＜ 0.Wherein, vd is abbe number, body
The constant of the degree of dispersion of existing optical material, nf is the f line refractive index of wavelength 486nm, and nd is the d line refractive index of wavelength 587nm,
Nc is the c line refractive index of wavelength 656nm；
R21, r22 are respectively the radius of curvature of the lens surface of air-lens both sides,
Vd21, vd22 are respectively the abbe number of the lens of air-lens both sides,
Nd21, nd22 are respectively the d line refractive index of the lens of both sides of air-lens, and n is refractive index, and t is temperature, dn/
Dt is the thermal refractive index coefficient that varies with temperature of refractive index of optical material.
In the present embodiment, between lens l6, l7 of the second microscope group l2, between lens l8, l9, between lens l9, l10
All exist and meet the 4. article i.e.: | (r21-r22)/(r21+r22) | < 0.6, | (vd21-vd22) | ＞ 28, | (nd21-nd22) |
The air-lens of ＞ 0.09.As relational expression, the value of calculation of | (r21-r22)/(r21+r22) | is respectively 0.203,0.035 He
0.184, | (r21-r22)/(r21+r22) | < 0.6 that meet relational expression.Main Function is the correction primary of projection objective and senior
Spherical aberration and coma, correct the axial chromatic aberration of projection objective simultaneously and are effectively reduced its second order spectrum aberration；It is effectively reduced amber
Hereby cut down (petzval) and allow the curvature of the image of projection objective to obtain well-corrected.
The of second microscope group l2 be 5. article i.e.: the second microscope group g2 at least contains two plus lens and meets at ambient temperature: dn/
Dt ＜ 0.Different from dn/dt ＞ 0 characteristic of general optical glass material, when having plus lens to meet dn/dt ＜ 0, with other one
As the thermal refractive index coefficient of optical glass lens characteristic contrary, cancel each other it is possible to improve the heat of projection objective
Stability, makes projection objective in variation of ambient temperature, and its image planes position and image quality keep stable.
In the 3rd microscope group g3, containing the concave surface one facing each other for a pair, and the pair of concave surface one facing each other it
Between at least contain minus lenses, and described minus lenses contain the concave surface two towards thing side p1.3rd microscope group g3 also meets relation
Formula: at least contain plus lens and minus lenses meet ndp ＞ ndn, at least contain plus lens and minus lenses
Meet vdp ＜ vdn.The Main Function of the 3rd microscope group g3 so design is the primary and senior astigmatism of balance projection objective and helps
In the second order spectrum aberration reducing axial chromatic aberration, the ratio chromatism, of balance projection objective.In the present embodiment, the 12nd lens
There is, between l12 and the 14th lens l14, the concave surface one facing each other for a pair, that is, the 12nd lens l13 is towards the 14th lens
The curved surface of l14 is concave surface, and the 14th lens l14 is also concave surface towards the curved surface of the 12nd lens l12.At this to facing each other
The 13rd lens l13 of minus lenses is existed for, the 13rd lens l13 contains the concave surface two towards thing side p1, that is, between concave surface one
13rd lens l13 is also concave surface towards the curved surface of thing side p1.
In order to eliminate the internal stress of optical glass, thermal stress and aging, and its harmful effect that optical imagery is caused,
Keep the stability of projection objective, all lens surfaces in the first microscope group g1, the second microscope group g2, the 3rd microscope group g3 are sphere,
Do not contain aspheric surface, the second microscope group g2, the 3rd microscope group g3 are the simple lens composition not containing cemented surface.In addition, not comprising non-
Spherical lenses, can be greatly lowered processing, the difficulty in detection and dress school and cost.
For the reasonable control cost of wide spectrum big visual field projection objective, and obtain optimal cost performance, described wide spectrum is big
The lens total quantity of visual field projection objective is located between 12 to 28.
In a word, in the present embodiment, three lens cluster is finally guaranteed using such lens structure and achieves projection thing
The spherical aberration of mirror, coma, astigmatism, filed curvature and distortion, the items aberration such as axial chromatic aberration and multiplying power chromatic aberration all obtains
Well-corrected, simultaneously can with the greatest optical bore of effective control camera lens, reduce camera lens processing, test and dress school difficulty and
Cost.
The wide spectrum big visual field projection objective of present embodiment, axial chromatic aberration such as Fig. 6 of wide spectrum big visual field projection objective
Shown, effectively correct axial chromatic aberration in the range of broad band, cover 480-730nm wave-length coverage.Can from figure
Go out, the present invention can effectively obtain high imaging quality.The projection objective of wide spectrum big visual field projection objective is in 480-730nm ripple
The transmission function mtf figure of long scope is as shown in Figure 7.Wave aberration wfe (rms) the result table of the analysis of specialty optics design software
Bright: less than the 1/15 of all wavelength of wave aberration wfe (rms) of 480-730nm wave-length coverage, as shown in table 4.
The wave aberration of each wavelength of table 4
| Wavelength (nm) | Title | Wave aberration (rms) | Wave aberration (rms) |
| 486.13 | F line | 1/10λ | 0.097λ |
| 546.07 | E line | 1/20λ | 0.049λ |
| 587.56 | D line | 1/17λ | 0.06λ |
| 656.27 | C line | 1/14λ | 0.072λ |
| 706.52 | R line | 1/12λ | 0.084λ |
| 730 | --- | 1/11λ | 0.088λ |
| 480-730 | Wave-length coverage | 1/15λ | 0.065λ |
Embodiment 3
Refer to Fig. 8, the structural representation of its wide spectrum big visual field projection objective providing for the embodiment of the present invention 3.Wide
Spectrum big visual field projection objective includes the first microscope group g1, the second microscope group g2, the 3rd microscope group g3 successively from thing side p1 to image side p2.?
It is provided with diaphragm as in second microscope group g2, the openings of sizes of diaphragm as can be adjusted, the adjustable diaphragm of openings of sizes can be adopted.
From thing side p1 to image side p2, the first microscope group g1 can include the first lens l1, the second lens l2, the 3rd lens successively
L3, the 4th lens l4；Second microscope group g2 can include the 5th lens l5, the 6th lens l6, the 7th lens l7, the 8th lens successively
L8, the 9th lens l9, the tenth lens l10, the 11st lens l11；3rd microscope group g3 can include successively the 12nd lens l12,
13 lens l13, the 14th lens l14, the 15th lens l15, the 16th lens l16.
Wherein, the 3rd lens l3, the 6th lens (l6), the 9th lens l9, the 12nd lens l12, the 13rd lens l13 are equal
There is negative power.Second lens l2, the 4th lens l4, the 5th lens l5, the 7th lens l7, the 8th lens l8, the tenth lens
L10, the 11st lens l11, the 15th lens l15, the 16th lens l16 are respectively provided with positive light coke.
In the present embodiment, the component parameters of the first to the 16th lens l1～l16 are as shown in table 5.
Table 5 projection objective parameter
Relational expression is met between first microscope group g1, the second microscope group g2, each microscope group of the 3rd microscope group g3: 0.3 < f1/fa < 2.8,
0.25 < f2/fa < 2.5,0.25 <-f3/fa < 5.5.Wherein, f1 is the combined focal length of the first microscope group g1, and f2 is the second microscope group g2
Combined focal length, f3 is the combined focal length of the 3rd microscope group g3, and fa is the combined focal length of whole projection objective.Such lens structure can
So that the spherical aberration of projection objective, coma, astigmatism, filed curvature and distortion, the items such as axial chromatic aberration and multiplying power chromatic aberration
Aberration is all rationally corrected.In the present embodiment, f1/fa=0.82, f2/fa=0.82 ,-f3/fa=2.06.
In the first microscope group g1, at least contain plus lens and minus lenses meet: ndp ＞ ndn, at least contain one
Individual plus lens and minus lenses meet: vdp ＜ vdn.Wherein, ndp is the d line refractive index of described plus lens, and ndn is described negative
The d line refractive index of lens, vdp is the abbe number of described plus lens, and vdn is the abbe number of described minus lenses.First microscope group
The Main Function of g1 so design is primary and the high-order spherical aberration of correction projection objective, the two of the axial chromatic aberration of balance projection objective
Level spectrum aberration, the ratio chromatism, of auxiliary balance projection objective.
In the second microscope group g2, meet relational expression: 1. vd=(nd-1)/(nf-nc)；2. nd ＜ 1.65 and vd ＞ 62
A minimum of two of plus lens；3. a minimum of of the minus lenses of nd ＞ 1.50 and vd ＜ 55；4. two air-lens are at least contained
Meet relational expression: | (r21-r22)/(r21+r22) | < 0.6, | (vd21-vd22) | ＞ 28, | (nd21-nd22) | ＞ 0.09；⑤
Second microscope group (g2) at least contains two plus lens and meets at ambient temperature: dn/dt ＜ 0.Wherein, vd is abbe number, body
The constant of the degree of dispersion of existing optical material, nf is the f line refractive index of wavelength 486nm, and nd is the d line refractive index of wavelength 587nm,
Nc is the c line refractive index of wavelength 656nm；The radius of curvature of r21, r22 respectively lens surface of air-lens both sides, vd21,
Vd22 is respectively the abbe number of the lens of air-lens both sides, and nd21, nd22 are respectively the d of the lens of both sides of air-lens
Line refractive index, n is refractive index, and t is temperature, and dn/dt is the thermal refractive index coefficient that varies with temperature of refractive index of optical material.
In the present embodiment, between lens l6, l7 of the second microscope group l2, between lens l8, l9, between lens l9, l10
All exist and meet the 4. article i.e.: | (r21-r22)/(r21+r22) | < 0.6, | (vd21-vd22) | ＞ 28, | (nd21-nd22) |
The air-lens of ＞ 0.09.As relational expression, the value of calculation of | (r21-r22)/(r21+r22) | is respectively 0.247,0.054 He
0.166, | (r21-r22)/(r21+r22) | < 0.6 that meet relational expression.Main Function is the correction primary of projection objective and senior
Spherical aberration and coma, correct the axial chromatic aberration of projection objective simultaneously and are effectively reduced its second order spectrum aberration；It is effectively reduced amber
Hereby cut down (petzval) and allow the curvature of the image of projection objective to obtain well-corrected.
The of second microscope group l2 be 5. article i.e.: the second microscope group g2 at least contains two plus lens and meets at ambient temperature: dn/
Dt ＜ 0.Different from dn/dt ＞ 0 characteristic of general optical glass material, when having plus lens to meet dn/dt ＜ 0, with other one
As the thermal refractive index coefficient of optical glass lens characteristic contrary, cancel each other it is possible to improve the heat of projection objective
Stability, makes projection objective in variation of ambient temperature, and its image planes position and image quality keep stable.
In the 3rd microscope group g3, containing the concave surface one facing each other for a pair, and the pair of concave surface one facing each other it
Between at least contain minus lenses, and described minus lenses contain the concave surface two towards thing side p1.3rd microscope group g3 also meets relation
Formula: at least contain plus lens and minus lenses meet ndp ＞ ndn, at least contain plus lens and minus lenses
Meet vdp ＜ vdn.The Main Function of the 3rd microscope group g3 so design is the primary and senior astigmatism of balance projection objective and helps
In the second order spectrum aberration reducing axial chromatic aberration, the ratio chromatism, of balance projection objective.In the present embodiment, the 12nd lens
There is, between l12 and the 14th lens l14, the concave surface one facing each other for a pair, that is, the 12nd lens l12 is towards the 14th lens
The curved surface of l14 is concave surface, and the 14th lens l14 is also concave surface towards the curved surface of the 12nd lens l12.At this to facing each other
The 13rd lens l13 of minus lenses is existed for, the 13rd lens l13 contains the concave surface two towards thing side p1, that is, between concave surface one
13rd lens l13 is also concave surface towards the curved surface of thing side p1.
In order to eliminate the internal stress of optical glass, thermal stress and aging, and its harmful effect that optical imagery is caused,
Keep the stability of projection objective, all lens surfaces in the first microscope group g1, the second microscope group g2, the 3rd microscope group g3 are sphere,
Do not contain aspheric surface, the second microscope group g2, the 3rd microscope group g3 are the simple lens composition not containing cemented surface.In addition, not comprising non-
Spherical lenses, can be greatly lowered processing, the difficulty in detection and dress school and cost.
In order to obtain good image space telecentricity projection objective effect, the capture being later provides good condition, as
Side p2 has the concave spherical surface towards thing side p1, and meets: α in < na/ β, and 0.8 < lpout/rim < 1.2；Wherein, α in is projection thing
In the angle of incidence of image side p2, na is the object-side numerical aperture of projection objective to the chief ray of mirror, and β is the enlargement ratio of projection objective,
Lpout is projection objective image space distance of exit pupil, the radius of curvature of rim image planes concave spherical surface.
In the present embodiment, the parameter value of projection objective: β=10；Na=0.35；Hy=21.2；Spectral region: 470-
750nm.Wherein, β is projection multiplying power, 4 < β < 18；Na is thing side opening number；Hy is that maximum thing is high.
For the reasonable control cost of wide spectrum big visual field projection objective, and obtain optimal cost performance, described wide spectrum is big
The lens total quantity of visual field projection objective is located between 12 to 28.
In a word, in the present embodiment, three lens cluster is finally guaranteed using such lens structure and achieves projection thing
The spherical aberration of mirror, coma, astigmatism, filed curvature and distortion, the items aberration such as axial chromatic aberration and multiplying power chromatic aberration all obtains
Well-corrected, simultaneously can with the greatest optical bore of effective control camera lens, reduce camera lens processing, test and dress school difficulty and
Cost.
The wide spectrum big visual field projection objective of present embodiment, axial chromatic aberration such as Fig. 9 of wide spectrum big visual field projection objective
Shown, effectively correct axial chromatic aberration in the range of broad band, cover 480-730nm wave-length coverage.Can from figure
Go out, the present invention can effectively obtain high imaging quality.The projection objective of wide spectrum big visual field projection objective is in 480-730nm ripple
The transmission function mtf figure of long scope is as shown in Figure 10.Wave aberration wfe (rms) the result table of the analysis of specialty optics design software
Bright: less than the 1/14 of wave aberration wfe (rms) its wavelength all of each wavelength, as shown in table 6.
The wave aberration of each wavelength of table 6.
| Wavelength (nm) | Title | Wave aberration (rms) | Wave aberration (rms) |
| 486.13 | F line | 1/9λ | 0.11λ |
| 546.07 | E line | 1/19λ | 0.053λ |
| 587.56 | D line | 1/18λ | 0.055λ |
| 656.27 | C line | 1/14λ | 0.073λ |
| 706.52 | R line | 1/11λ | 0.09λ |
| 730 | --- | 1/10λ | 0.1λ |
| 480-730 | Wave-length coverage | 1/14λ | 0.072λ |
Embodiment 4
Refer to Figure 11, the structural representation of its wide spectrum big visual field projection objective providing for the embodiment of the present invention 4.Wide
Spectrum big visual field projection objective includes the first microscope group g1, equivalent parallel plate plate, the second mirror successively from thing side p1 to image side p2
Group g2, the 3rd microscope group g3.It is provided with diaphragm as in the second microscope group g2, the openings of sizes of diaphragm as can be adjusted, can adopt and open
Mouth size adjustable diaphragm.
From thing side p1 to image side p2, the first microscope group g1 can include the first lens l1, the second lens l2, the 3rd lens successively
L3, the 4th lens l4；Second microscope group g2 can include the 5th lens l5, the 6th lens l6, the 7th lens l7, the 8th lens successively
L8, the 9th lens l9, the tenth lens l10, the 11st lens l11；3rd microscope group g3 can include successively the 12nd lens l12,
13 lens l13, the 14th lens l14, the 15th lens l15, the 16th lens l16, the 17th lens l17.
Wherein, the first lens l1, the 3rd lens l3, the 6th lens (l6), the 9th lens l9, the 13rd lens l13, the tenth
Four lens l14, the 15th lens l15 are respectively provided with negative power.Second lens l2, the 4th lens l4, the 5th lens l5, the 7th saturating
Mirror l7, the 8th lens l8, the tenth lens l10, the 11st lens l11, the 12nd lens l12, the 16th lens l16, the 17th
Lens l17 is respectively provided with positive light coke.
In the present embodiment, the component parameters of the first to the 17th lens l1～l17 are as shown in table 7.
Table 7 projection objective parameter
Relational expression is met between first microscope group g1, the second microscope group g2, each microscope group of the 3rd microscope group g3: 0.3 < f1/fa < 2.8,
0.25 < f2/fa < 2.5,0.25 <-f3/fa < 5.5.Wherein, f1 is the combined focal length of the first microscope group g1, and f2 is the second microscope group g2
Combined focal length, f3 is the combined focal length of the 3rd microscope group g3, and fa is the combined focal length of whole projection objective.Such lens structure can
So that the spherical aberration of projection objective, coma, astigmatism, filed curvature and distortion, the items such as axial chromatic aberration and multiplying power chromatic aberration
Aberration is all rationally corrected.In the present embodiment, f1/fa=1.18, f2/fa=0.90 ,-f3/fa=2.02.
In the first microscope group g1, at least contain plus lens and minus lenses meet: ndp ＞ ndn, at least contain one
Individual plus lens and minus lenses meet: vdp ＜ vdn.Wherein, ndp is the d line refractive index of described plus lens, and ndn is described negative
The d line refractive index of lens, vdp is the abbe number of described plus lens, and vdn is the abbe number of described minus lenses.First microscope group
The Main Function of g1 so design is primary and the high-order spherical aberration of correction projection objective, the two of the axial chromatic aberration of balance projection objective
Level spectrum aberration, the ratio chromatism, of auxiliary balance projection objective.
In the second microscope group g2, meet relational expression: 1. vd=(nd-1)/(nf-nc)；2. nd ＜ 1.65 and vd ＞ 62
A minimum of two of plus lens；3. a minimum of of the minus lenses of nd ＞ 1.50 and vd ＜ 55；4. two air-lens are at least contained
Meet relational expression: | (r21-r22)/(r21+r22) | < 0.6, | (vd21-vd22) | ＞ 28, | (nd21-nd22) | ＞ 0.09；⑤
Second microscope group (g2) at least contains two plus lens and meets at ambient temperature: dn/dt ＜ 0.Wherein, vd is abbe number, body
The constant of the degree of dispersion of existing optical material, nf is the f line refractive index of wavelength 486nm, and nd is the d line refractive index of wavelength 587nm,
Nc is the c line refractive index of wavelength 656nm；The radius of curvature of r21, r22 respectively lens surface of air-lens both sides, vd21,
Vd22 is respectively the abbe number of the lens of air-lens both sides, and nd21, nd22 are respectively the d of the lens of both sides of air-lens
Line refractive index, n is refractive index, and t is temperature, and dn/dt is the thermal refractive index coefficient that varies with temperature of refractive index of optical material.
In the present embodiment, between lens l6, l7 of the second microscope group l2, between lens l8, l9, between lens l9, l10
All exist and meet the 4. article i.e.: | (r21-r22)/(r21+r22) | < 0.6, | (vd21-vd22) | ＞ 28, | (nd21-nd22) |
The air-lens of ＞ 0.09.As relational expression, the value of calculation of | (r21-r22)/(r21+r22) | is respectively 0.220,0.264 He
0.166, | (r21-r22)/(r21+r22) | < 0.6 that meet relational expression.Main Function is the correction primary of projection objective and senior
Spherical aberration and coma, correct the axial chromatic aberration of projection objective simultaneously and are effectively reduced its second order spectrum aberration；It is effectively reduced amber
Hereby cut down (petzval) and allow the curvature of the image of projection objective to obtain well-corrected.
The of second microscope group l2 be 5. article i.e.: the second microscope group g2 at least contains two plus lens and meets at ambient temperature: dn/
Dt ＜ 0.Different from dn/dt ＞ 0 characteristic of general optical glass material, when having plus lens to meet dn/dt ＜ 0, with other one
As the thermal refractive index coefficient of optical glass lens characteristic contrary, cancel each other it is possible to improve the heat of projection objective
Stability, makes projection objective in variation of ambient temperature, and its image planes position and image quality keep stable.
In the 3rd microscope group g3, containing the concave surface one facing each other for a pair, and the pair of concave surface one facing each other it
Between at least contain minus lenses, and described minus lenses contain the concave surface two towards thing side p1.3rd microscope group g3 also meets relation
Formula: at least contain plus lens and minus lenses meet ndp ＞ ndn, at least contain plus lens and minus lenses
Meet vdp ＜ vdn.The Main Function of the 3rd microscope group g3 so design is the primary and senior astigmatism of balance projection objective and helps
In the second order spectrum aberration reducing axial chromatic aberration, the ratio chromatism, of balance projection objective.In the present embodiment, the 13rd lens
There is, between l13 and the 15th lens l15, the concave surface one facing each other for a pair, that is, the 13rd lens l13 is towards the 15th lens
The curved surface of l15 is concave surface, and the 15th lens l15 is also concave surface towards the curved surface of the 13rd lens l13.At this to facing each other
The 14th lens l14 of minus lenses is existed for, the 14th lens l14 contains the concave surface two towards thing side p1, that is, between concave surface one
14th lens l14 is also concave surface towards the curved surface of thing side p1.
In order to eliminate the internal stress of optical glass, thermal stress and aging, and its harmful effect that optical imagery is caused,
Keep the stability of projection objective, all lens surfaces in the first microscope group g1, the second microscope group g2, the 3rd microscope group g3 are sphere,
Do not contain aspheric surface, the second microscope group g2, the 3rd microscope group g3 are the simple lens composition not containing cemented surface.In addition, not comprising non-
Spherical lenses, can be greatly lowered processing, the difficulty in detection and dress school and cost.
It is provided with equivalent parallel plate (in the present embodiment, equivalent flat between the first microscope group g1 and the 3rd microscope group g3
Row flat board is located between the first microscope group g1 and the second microscope group g2), equivalent parallel plate meets: tpl ＞ 0.6dop.Wherein, tpl is
Equivalent parallel plate thickness, dop is the maximum clear aperture of equivalent parallel plate, and it is thin that equivalent parallel plate contains one or more layers
Film is to have the divided beams device partially transmitted and partially reflecting, and its Main Function is available with the part of equivalent parallel plate
Transmission and the light splitting function of part reflection, realize various coaxially falling to penetrating illumination.
For the reasonable control cost of wide spectrum big visual field projection objective, and obtain optimal cost performance, described wide spectrum is big
The lens total quantity of visual field projection objective is located between 12 to 28.
In a word, in the present embodiment, three lens cluster is finally guaranteed using such lens structure and achieves projection thing
The spherical aberration of mirror, coma, astigmatism, filed curvature and distortion, the items aberration such as axial chromatic aberration and multiplying power chromatic aberration all obtains
Well-corrected, simultaneously can with the greatest optical bore of effective control camera lens, reduce camera lens processing, test and dress school difficulty and
Cost.
The wide spectrum big visual field projection objective of present embodiment, axial chromatic aberration such as Figure 12 of wide spectrum big visual field projection objective
Shown, effectively correct axial chromatic aberration in the range of broad band, cover 480-730nm wave-length coverage.Can from figure
Go out, the present invention can effectively obtain high imaging quality.The projection objective of wide spectrum big visual field projection objective is in 480-730nm ripple
The transmission function mtf figure of long scope is as shown in figure 13.Wave aberration wfe (rms) the result table of the analysis of specialty optics design software
Bright: less than the 1/14 of wave aberration wfe (rms) its wavelength all of each wavelength, as shown in table 8.
The wave aberration of each wavelength of table 8..
In sum, the present invention has wide spectrum, high-resolution, 3 kinds of big visual field characteristic simultaneously, at present also rare precedent；Tool
There is good image space telecentricity projection objective effect, the capture being later provides good condition；The greatest optical mouth of projection objective
Footpath only has the 60% about of image space full filed bore, considerably reduces manufacturing cost and the difficulty of projection objective.And common picture
The greatest optical bore of Fang Yuanxin projection objective is more than the 100% of image space full filed bore, and manufacturing cost is high and manufactures difficulty
Degree is big；Eyeglass bore is little, does not comprise aspherical lens, considerably reduces processing, the difficulty in detection and dress school and cost；Permissible
Using the light splitting function of partially transmitted and partially reflecting of equivalent parallel plate, realize various coaxially falling to penetrating illumination.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all essences in the present invention
Any modification, equivalent and improvement made within god and principle etc., should be included within the scope of the present invention.
Claims (10)
1. a kind of wide spectrum big visual field projection objective, its from thing side (p1) to image side (p2) include successively the first microscope group (g1),
Two microscope groups (g2), the 3rd microscope group (g3)；Wherein,
In the second microscope group (g2), meet relational expression: vd=(nd-1)/(nf-nc), the plus lens of nd ＜ 1.65 and vd ＞ 62
A minimum of two, a minimum of one of the minus lenses of nd ＞ 1.50 and vd ＜ 55；Wherein, vd is abbe number, embodies optical material
Degree of dispersion constant, nf be wavelength 486nm f line refractive index, nd be wavelength 587nm d line refractive index, nc be wavelength
The c line refractive index of 656nm；
In the 3rd microscope group (g3), containing the concave surface one facing each other for a pair, and between the pair of concave surface one facing each other
At least contain minus lenses, and described minus lenses contain the concave surface two towards thing side；3rd microscope group (g3) also meets relational expression:
At least contain plus lens and minus lenses meet ndp ＞ ndn, at least contain plus lens and minus lenses meet
Vdp ＜ vdn；Wherein, ndp is the d line refractive index of described plus lens, and ndn is the d line refractive index of described minus lenses, and vdp is described
The abbe number of plus lens, vdn is the abbe number of described minus lenses；
Relational expression is met between first microscope group (g1), the second microscope group (g2), each microscope group of the 3rd microscope group (g3): 0.3 < f1/fa < 2.8,
0.25 < f2/fa < 2.5,0.25 <-f3/fa < 5.5；Wherein, f1 is the combined focal length of the first microscope group (g1), and f2 is the second microscope group
(g2) combined focal length, f3 is the combined focal length of the 3rd microscope group (g3), and fa is the combined focal length of whole projection objective；
It is characterized in that:
It is provided with diaphragm (as) between the first microscope group (g1) and the 3rd microscope group (g3)；
In the second microscope group (g2), at least contain two air-lens meet relational expression: | (r21-r22)/(r21+r22) | <
0.6, | (vd21-vd22) | ＞ 28, | (nd21-nd22) | ＞ 0.09；Wherein, r21, r22 are respectively the saturating of air-lens both sides
The radius of curvature on mirror surface, vd21, vd22 are respectively the abbe number of the lens of air-lens both sides, and nd21, nd22 are respectively
The d line refractive index of the lens of the both sides of air-lens；It is full at ambient temperature that second microscope group (g2) at least contains two plus lens
Foot: dn/dt ＜ 0；Wherein, n is refractive index, and t is temperature, and dn/dt is the refractive index that varies with temperature of refractive index of optical material
Temperature coefficient.
2. wide spectrum big visual field projection objective as claimed in claim 1 it is characterised in that: in the first microscope group (g1): at least
Meet containing plus lens and minus lenses: ndp ＞ ndn；At least contain plus lens and minus lenses meet:
Vdp ＜ vdn.
3. wide spectrum big visual field projection objective as claimed in claim 1 it is characterised in that: the big visual field of described wide spectrum projects thing
The lens total quantity of mirror is located between 12 to 28.
4. the big visual field projection objective of the wide spectrum as described in any one in claims 1 to 3 it is characterised in that: the first microscope group
(g1), the second microscope group (g2), all lens surfaces in the 3rd microscope group (g3) are sphere, do not contain aspheric surface, the second microscope group
(g2), the 3rd microscope group (g3) is the simple lens composition not containing cemented surface.
5. the big visual field projection objective of the wide spectrum as described in any one in claims 1 to 3 it is characterised in that: from thing side
(p1) arrive image side (p2), the second microscope group (g2) include successively the 5th lens (l5), the 6th lens (l6), the 7th lens (l7), the
Eight lens (l8), the 9th lens (l9), the tenth lens (l10), the 11st lens (l11)；Wherein, the 6th lens (l6) and the 9th
Lens (l9) are respectively provided with negative power, the 5th lens (l5), the 7th lens (l7), the 8th lens (l8), the tenth lens (l10) and
11st lens (l11) are respectively provided with positive light coke.
6. wide spectrum big visual field projection objective as claimed in claim 5 it is characterised in that: the 6th lens of the second microscope group (g2)
(l6) and the 7th lens (l7) between, between the 8th lens (l8) and the 9th lens (l9), the 9th lens (l9) and the tenth lens
(l10) all there are described air-lens between.
7. wide spectrum big visual field projection objective as claimed in claim 5 it is characterised in that: from the object side to image side, the 3rd microscope group
(g3) include successively the 12nd lens (l12), the 13rd lens (l13), the 14th lens (l14), the 15th lens (l15),
16th lens (l16), wherein, the 13rd lens (l13) have negative power, the 15th lens (l15), the 16th lens
(l16) it is respectively provided with positive light coke.
8. wide spectrum big visual field projection objective as claimed in claim 7 it is characterised in that: the 12nd lens (l12) and the tenth
There is, between four lens (l14), the concave surface one facing each other for a pair, exist for negative saturating between this is to the concave surface one facing each other
13rd lens (l13) of mirror, the 13rd lens (l13) contain the concave surface two towards thing side (p1).
9. wide spectrum big visual field projection objective as claimed in claim 7 it is characterised in that: from thing side (p1) to image side (p2),
First microscope group (g1) includes the first lens (l1), the second lens (l2), the 3rd lens (l3), the 4th lens (l4) successively, wherein,
3rd lens (l3) have negative power, and the second lens (l2), the 4th lens (l4) are respectively provided with positive light coke.
10. wide spectrum big visual field projection objective as claimed in claim 1 it is characterised in that: the openings of sizes energy of described diaphragm
Adjust.
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| CN107505692B (en) * | 2017-09-26 | 2020-04-10 | 张家港中贺自动化科技有限公司 | Catadioptric objective lens |
| CN112327465A (en) * | 2020-11-25 | 2021-02-05 | 厦门力鼎光电股份有限公司 | Wide-angle optical imaging lens |
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| CN201673301U (en) * | 2009-05-25 | 2010-12-15 | 富士能株式会社 | Wide-angle lens for projection and projection type display device |
| TW201219885A (en) * | 2010-11-05 | 2012-05-16 | Hon Hai Prec Ind Co Ltd | Zoom projection lens |
| JP2013114262A (en) * | 2011-11-25 | 2013-06-10 | Kofukin Seimitsu Kogyo (Shenzhen) Yugenkoshi | Zoom lens system |
| CN104062748A (en) * | 2014-07-17 | 2014-09-24 | 张家港中贺自动化科技有限公司 | Multiplying power adjustment method of wide spectral line projection optical system |
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| CN103176265A (en) * | 2011-12-23 | 2013-06-26 | 鸿富锦精密工业（深圳）有限公司 | Wide-angle zoom lens |
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| CN201673301U (en) * | 2009-05-25 | 2010-12-15 | 富士能株式会社 | Wide-angle lens for projection and projection type display device |
| TW201219885A (en) * | 2010-11-05 | 2012-05-16 | Hon Hai Prec Ind Co Ltd | Zoom projection lens |
| JP2013114262A (en) * | 2011-11-25 | 2013-06-10 | Kofukin Seimitsu Kogyo (Shenzhen) Yugenkoshi | Zoom lens system |
| CN104062748A (en) * | 2014-07-17 | 2014-09-24 | 张家港中贺自动化科技有限公司 | Multiplying power adjustment method of wide spectral line projection optical system |
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| CN104730693A (en) | 2015-06-24 |
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Denomination of invention: A wide spectrum and wide field projection objective Effective date of registration: 20230209 Granted publication date: 20170125 Pledgee: Bank of China Limited Zhangjiagang branch Pledgor: ZHANGJIAGANG ZHONGHE AUTOMATION TECHNOLOGY CO.,LTD. Registration number: Y2023980032319 |