CN104730681A - Planar film mirror installing method - Google Patents
Planar film mirror installing method Download PDFInfo
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- CN104730681A CN104730681A CN201510106688.6A CN201510106688A CN104730681A CN 104730681 A CN104730681 A CN 104730681A CN 201510106688 A CN201510106688 A CN 201510106688A CN 104730681 A CN104730681 A CN 104730681A
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- annulus
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- thin membrance
- membrance mirror
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
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- Optics & Photonics (AREA)
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Abstract
Provided is a planar film mirror installing method. Firstly, a round film mirror is expanded to be in a planar state, rectangular thin gaskets with holes evenly and firmly adhere to the periphery of the film mirror through a special tool, the two ends of N ropes are connected with the rectangular gaskets and tension sensors respectively, and the tension sensors on the periphery are fixed so that the ropes can be located on the same plane. Then, a precise supporting ring is placed below the film mirror which is slightly ejected through the side with an annular step face, a pressing ring is installed above the supporting ring, the pressing ring is pre-tightened through a screw, but it is guaranteed that the film mirror can move between the pressing ring and the supporting ring, tension is applied to the outermost ends of the ropes on the periphery of the film mirror, tension values are displayed through the tension sensors, the tension values are adjusted, deformation of the film mirror is detected in real time, and the tension values are repeatedly adjusted according to actually measured deformation so that the film mirror face can be optimal. According to the method, supporting is performed through the supporting ring, installation of the high-precision planar film mirror is achieved in a coplane tension adjustment mode on the edge of the film mirror, and the using requirement of a high-precision optical system can be met.
Description
Technical field
The present invention relates to a kind of flat film mirror installation method, can be applicable to the thin membrance mirror installation requirements of imaging optical system.
Background technology
Along with the development of aerospace optical remote sensing technology, on the one hand, light optical remote sensor is just becoming the focus that various countries' Field of Space Optical Remote Sensor is chased; The spacefaring nation that ultra-large type high-resolution optical remote sensing device also becomes headed by the U.S. on the other hand has study hotspot.At present, at catoptron or lens that Field of Space Optical Remote Sensor more is rigidity, material many employings devitrified glass, ULE and silit etc., use the catoptron made of rigid material or lens volume, weight all larger, and, be limited to the moulding process of rigidity mirror body, bore be greater than 5m mirror body development, processing very difficult, above factor causes rigid lens to be difficult to the growth requirement of satisfied following remote sensor heavy caliber, low weight, low cost.
Thin membrance mirror technology can as the solution of rigidity mirror body development bottleneck.In recent years, domestic and international Duo Jia scientific research institution, universities and colleges had launched the correlative study of thin membrance mirror technology, but still did not clearly propose a kind of installation method of accurate thin membrance mirror.
Summary of the invention
The technical matters that the present invention solves is: overcome the deficiencies in the prior art, provide a kind of flat film mirror installation method, is supported and film surrounding pulling force regulative mode realizes the installation of high precision plane thin membrance mirror by accurate support ring.
Technical scheme of the present invention is: a kind of flat film mirror installation method, and step is as follows:
1) be positioned over by thin membrance mirror between the first annulus and the second annulus, the order of placement is from bottom to top followed successively by annulus, thin membrance mirror, annulus, ensures that thin membrance mirror is in flat condition in the middle of the first annulus and the second annulus; Described first annulus is evenly equipped with threaded hole, and on the second annulus, the position of corresponding first annulus upper screwed hole is evenly equipped with through hole; The radial rectangular channel digging N number of width and be greater than rectangular film pad on the second annulus outward flange, N be more than or equal to 6 positive integer; Utilize screw to pass through hole and threaded hole after putting well the first annulus and the second annulus are compressed;
2) rectangular film pad is put into rectangular channel, then with glue by rectangular film pad and thin membrance mirror marginal adhesion;
3) after glue solidifies completely, the circular hole place on each rectangular film pad is a rope, then is separated with the second annulus by the first annulus, takes out the thin membrance mirror being bonded with rectangular film pad;
4) after utilizing rope that thin membrance mirror preliminary elongational is become flat condition, the position of fixing every root rope;
5) thin membrance mirror is placed on the first ring-type step surface of support ring; Described support ring there is a circle first ring-type step surface, surface figure accuracy RMS< λ/10 of the first ring-type step surface, λ=0.632 μm near internal diameter side;
6) pressure ring is positioned over the top of support ring, the second circular step face of pressure ring is gently pressed on thin membrance mirror, ensure that thin membrance mirror can move between pressure ring and support ring; Described pressure ring has a circle second circular step face near internal diameter side, and the second circular step face is positioned at inside rectangular film pad, both do not contact;
7) connect pulling force sensor at the rope other end, apply pulling force at the pulling force sensor other end, accurate adjustment is carried out to the face shape of thin membrance mirror; By the change of pulling force sensor Real-Time Monitoring pulling force in accurate adjustment process, and pulling force is regulated in real time, make the surface figure accuracy of thin membrance mirror reach pre-value requirement;
8) after accurate adjustment terminates, compress pressure ring completely, be then completely fixed thin membrance mirror assembly with screw; Described thin membrance mirror assembly comprises thin membrance mirror, support ring and pressure ring;
9) remove thin membrance mirror surrounding rectangular film pad, thin membrance mirror assembly is separated with other structure.
Described support ring and the material of pressure ring are titanium alloy T c4 or are indium steel.
Described step 4) in glue be xm23.
The first described ring-type step surface width range is 2 ~ 4mm.
The present invention's advantage is compared with prior art:
(1) the inventive method directly contacts with film the surface figure accuracy improving thin membrance mirror by the high precision anchor ring of accurate support ring, reduce because supporting construction precision deficiency causes the impact that thin membrance mirror surface figure accuracy is not high, the surface figure accuracy of thin membrance mirror is greatly improved, and (bore is the thin membrance mirror of 20cm, RMS can be better than λ/2, λ=0.632 μm);
(2) change of tension force suffered by the pulling force sensor Real-Time Monitoring film utilizing thin membrance mirror periphery to connect, is conducive to the face shape of thin membrance mirror is carried out to adjustment in real time and controlled, and can avoids in installation process because overtension causes the destruction of thin membrance mirror;
(3) the present invention utilizes adhesive tool evenly to determine the relative position of rectangular washer and thin membrance mirror at thin membrance mirror periphery, and apply the pulling force suffered by thin membrance mirror edge by rectangular washer, the adjustment pulling force at thin membrance mirror edge is uniformly distributed, and the stress that pulling force can be avoided to be applied directly to the generation of thin membrance mirror edge concentrate situation.
(4) the inventive method is simple, handled easily, and the assembly related to is less, and supporting construction is simple, supporting construction weight is less.
Accompanying drawing explanation
Fig. 1, Fig. 2 are thin membrance mirror assembly schematic diagram of the present invention;
Fig. 3 is thin membrance mirror form schematic diagram bonding with Thin Rectangular pad in the present invention;
Fig. 4 is thin membrance mirror required lower annulus bonding with Thin Rectangular pad in the present invention;
Fig. 5 is thin membrance mirror required upper annulus bonding with Thin Rectangular pad in the present invention;
Fig. 6 is that in the present invention, thin membrance mirror is installed and adjustment process schematic diagram;
Fig. 7 is that in the present invention, thin membrance mirror is installed and adjustment process schematic diagram partial cross-section;
Fig. 8 is accurate support ring partial cross-section in the present invention;
Fig. 9 is pressure ring partial cross-section in the present invention.
Embodiment
The key step of the inventive method is as follows:
(1) annulus 5 and annulus 6 as shown in Figure 3, Figure 4, is chosen as thin membrance mirror 1 aid accurately bonding with rectangular film pad 4;
(2) as shown in Figure 4, process the rectangular channel 6-1 of N place width slightly larger than rectangular film pad 4 width in annulus 6 surrounding, ensure that rectangular film pad 4 can be put into from rectangular channel 6-1;
(3) as shown in Figure 2, thin membrance mirror 1 is positioned between annulus 5 and annulus 6, the order of placement is from bottom to top followed successively by annulus 5, thin membrance mirror 1, annulus 6, ensure that thin membrance mirror 1 is in flat condition at annulus 5 and annulus 6, then annulus 5 and annulus 6 are compressed, prevent thin membrance mirror 1 from moving between annulus 5 and annulus 6;
(4) successively with glue by N number of rectangular film pad 4 along rectangular channel 6-1 and thin membrance mirror 1 marginal adhesion, ensure certain bonding strength;
(5) after glue solidifies completely, connect all rectangular film pads 4 with rope 7 by circular hole, then annulus 5 is separated with annulus 6, take out the thin membrance mirror 1 of bonding Thin Rectangular pad 4 and rope 7;
(6) thin membrance mirror 1 surrounding rope 7 is utilized thin membrance mirror to be drawn into flat condition, the position of static line 7;
(7) as shown in Figure 5, Figure 6, connect pulling force sensor 8 at rope 7 other end, apply pulling force 9 at pulling force sensor 8 other end, pulling force sensor 8 is used for monitoring the change of pulling force 9 in installation process and suitably regulates according to actual face shape;
(8) the anchor ring 2-1 of accurate support ring 2 is placed on the position parallel with thin membrance mirror 1, and contacts gently with thin membrance mirror 1, keep thin membrance mirror 1 to be in flat state;
(9) pressure ring 3 is positioned over the top of accurate support ring 2, make the anchor ring 3-1 of pressure ring 3 gently press thin membrance mirror 1, anchor ring 3-1 is positioned at inside rectangular film pad 4, and both do not contact, now, thin membrance mirror 1 can be pulled by surrounding pulling force 9 between accurate support ring 2 and pressure ring 3;
(10) according to actual detection faces shape, regulate the pulling force 9 of thin membrance mirror 1 periphery, until thin membrance mirror 1 shape reaches optimum, compress pressure ring 3 completely, prevent thin membrance mirror 1 shape from departing from optimum face shape in compaction process, be then completely fixed thin membrance mirror assembly with screw;
(11) remove thin membrance mirror 1 surrounding rectangular film pad 4, thin membrance mirror assembly is separated with other structure;
The thin membrance mirror assembly of installation comprises thin membrance mirror 1, accurate support ring 2 and pressure ring 3.Thin membrance mirror base material adopts the comparatively ripe Kapton of moulding process, Kapton plates reflectance coating as film reflecting mirror.For reducing the temperature deformation of thin membrance mirror assembly, same material got by the material of accurate support ring 2 and pressure ring 3, selects titanium alloy T c4 or indium steel.Because the face shape impact of anchor ring 2-1 on thin membrance mirror 1 of accurate support ring 2 is very large, thus require that anchor ring 2-1 plane surface shape precision RMS is better than λ/10 (λ=0.632 μm), annular width scope is 2 ~ 4mm, adopts optical fabrication technique to complete grinding.
Embodiment
The face shape index of thin membrance mirror 1 depends on the surface figure accuracy of film itself and precision, the rigidity of accurate support ring, simultaneously also relevant with film internal stress.The surface figure accuracy of the surface figure accuracy of thin membrance mirror 1 itself, the anchor ring 2-1 of accurate support ring 2 is limited herein, and ensures that this being limited in engineering easily realizes, as prerequisite, method of the present invention is introduced.
First the parameter of thin membrance mirror 1 is limited, in the present embodiment, for the thin membrance mirror assembly clear aperture met after last shaping is Ф 200mm, the diameter of thin membrance mirror itself is Ф 250mm, thickness is 20 μm, and surface figure accuracy is better than λ/10 (λ=0.632 μm).
Again the performance of accurate support ring 2 is limited, internal diameter is Ф 220mm, for Ф 200mm clear aperture stays certain surplus, external diameter is Ф 280mm, quality is 0.8kg, and also as shown in Figure 7, the width of anchor ring 2-1 is 2 ~ 4mm to partial cross-section, edge rounding, anchor ring 2-1 surface figure accuracy RMS is better than λ/10 (λ=0.632 μm).
Be limited the performance of pressure ring 3, internal diameter Ф 240mm, external diameter Ф 280mm, quality is 0.2kg again, and also as shown in Figure 8, Figure 9, the width of anchor ring 3-1 is 2 ~ 3mm to partial cross-section, edge rounding, and anchor ring 3-1 flatness is better than 0.01mm.
These are limited in Practical Project and all can realize above, and based on this, the method can realize the installation that surface figure accuracy RMS is better than λ/2 (λ=0.632 μm) thin membrance mirror assembly.
The assembling process of thin membrance mirror assembly divides four steps: rectangular film pad 4 is bonding with thin membrance mirror, apply and regulate pulling force 9 to monitor film mirror surface-shaped, connection fastening pressure ring 3 and accurate support ring 2, separating film mirror assembly simultaneously.
The first step, as shown in Figure 2, thin membrance mirror 1 is positioned between annulus 5 and annulus 6, the order of placement is from bottom to top followed successively by annulus 5, thin membrance mirror 1, annulus 6, ensure that thin membrance mirror 1 is in flat condition at annulus 5 and annulus 6, then annulus 5 and annulus 6 are compressed, prevent thin membrance mirror 1 from moving between annulus 5 and annulus 6, successively with glue by 12 rectangular film pads 4 along rectangular channel 6-1 and thin membrance mirror 1 marginal adhesion, ensure certain bonding strength, ensure the external diameter of inscribe diameter of a circle slightly larger than the anchor ring 3-1 of pressure ring 3 of 12 place's rectangular film pads simultaneously;
Second step, after glue solidifies completely, all rectangular film pads 4 are connected by circular hole with rope 7, again annulus 5 is separated with annulus 6, take out the thin membrance mirror 1 of bonding rectangular film pad 4 and rope 7, utilize thin membrance mirror 1 surrounding rope 7 that thin membrance mirror is drawn into flat condition, the position of static line 7, 12 are made to restrict 7 in same plane, as Fig. 5, shown in Fig. 6, pulling force sensor 8 is connected at rope 7 other end, pulling force 9 is applied at pulling force sensor 8 other end, pulling force sensor 8 is used for monitoring the change of pulling force 9 in installation process and suitably regulates according to actual face shape, pressure ring 3 is positioned over the top of accurate support ring 2, the anchor ring 3-1 of pressure ring 3 is made gently to press thin membrance mirror 1, anchor ring 3-1 is positioned at inside rectangular film pad 4, both do not contact, now, thin membrance mirror 1 can be pulled by surrounding pulling force 9 between accurate support ring 2 and pressure ring 3, according to actual detection faces shape, regulate the pulling force 9 of thin membrance mirror 1 periphery, until thin membrance mirror 1 shape reaches optimum,
3rd step, compresses pressure ring 3 completely, prevents thin membrance mirror 1 shape from departing from optimum face shape, be then completely fixed thin membrance mirror assembly with screw in compaction process;
3rd step, removes thin membrance mirror 1 surrounding rectangular film pad 4, thin membrance mirror assembly is separated with other structure;
The content be not described in detail in instructions of the present invention belongs to the known technology of those skilled in the art.
Claims (4)
1. a flat film mirror installation method, is characterized in that step is as follows:
1) thin membrance mirror (1) is positioned between the first annulus (5) and the second annulus (6), the order of placement is from bottom to top followed successively by annulus (5), thin membrance mirror (1), annulus (6), ensures that thin membrance mirror (1) is in flat condition in the middle of the first annulus (5) and the second annulus (6); Described first annulus (5) is evenly equipped with threaded hole, and the position of upper corresponding first annulus (5) upper screwed hole of the second annulus (6) is evenly equipped with through hole; On the second annulus (6) outward flange, radial direction digs the rectangular channel (6-1) that N number of width is greater than rectangular film pad (4), N be more than or equal to 6 positive integer; Utilize screw to pass through hole and threaded hole after putting well the first annulus (5) and the second annulus (6) are compressed;
2) rectangular film pad (4) is put into rectangular channel (6-1), then with glue by rectangular film pad (4) and thin membrance mirror (1) marginal adhesion;
3) after glue solidifies completely, circular hole place on each rectangular film pad (4) is a rope (7), again the first annulus (5) is separated with the second annulus (6), takes out the thin membrance mirror (1) being bonded with rectangular film pad (4);
4) after utilizing rope (7) that thin membrance mirror (1) preliminary elongational is become flat condition, the position of fixing every root rope (7);
5) thin membrance mirror (1) is placed on the first ring-type step surface (2-1) of support ring (2); Described support ring (2) is upper has circle first ring-type step surface (2-1), surface figure accuracy RMS< λ/10 of the first ring-type step surface (2-1), λ=0.632 μm near internal diameter side;
6) pressure ring (3) is positioned over the top of support ring (2), make the second circular step face (3-1) of pressure ring (3) gently be pressed on thin membrance mirror (1), ensure that thin membrance mirror (1) can move between pressure ring (3) and support ring (2); Described pressure ring (3) is upper has a circle second circular step face (3-1) near internal diameter side, and the second circular step face (3-1) is positioned at rectangular film pad (4) inner side, and both do not contact;
7) connect pulling force sensor (8) at rope (7) other end, apply pulling force at pulling force sensor (8) other end, accurate adjustment is carried out to the face shape of thin membrance mirror (1); By the change of pulling force sensor (8) Real-Time Monitoring pulling force in accurate adjustment process, and pulling force is regulated in real time, make the surface figure accuracy of thin membrance mirror (1) reach pre-value requirement;
8) after accurate adjustment terminates, compress pressure ring (3) completely, be then completely fixed thin membrance mirror assembly with screw; Described thin membrance mirror assembly comprises thin membrance mirror (1), support ring (2) and pressure ring (3);
9) remove thin membrance mirror (1) surrounding rectangular film pad (4), thin membrance mirror assembly is separated with other structure.
2. a kind of flat film mirror installation method according to claim 1, is characterized in that: described support ring (2) and the material of pressure ring (3) are titanium alloy T c4 or are indium steel.
3. a kind of flat film mirror installation method according to claim 1, is characterized in that: described step 4) in glue be xm23.
4. a kind of flat film mirror installation method according to claim 1, is characterized in that: the first described ring-type step surface (2-1) width range is 2 ~ 4mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510106688.6A CN104730681B (en) | 2015-03-11 | 2015-03-11 | Planar film mirror installing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510106688.6A CN104730681B (en) | 2015-03-11 | 2015-03-11 | Planar film mirror installing method |
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| CN104730681A true CN104730681A (en) | 2015-06-24 |
| CN104730681B CN104730681B (en) | 2017-01-18 |
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| CN201510106688.6A Active CN104730681B (en) | 2015-03-11 | 2015-03-11 | Planar film mirror installing method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105842844A (en) * | 2016-05-22 | 2016-08-10 | 上海大学 | Magnetic liquid deformable mirror based on elastic reflection film and manufacturing method thereof |
| CN108717223A (en) * | 2018-05-29 | 2018-10-30 | 上海交通大学 | It is tensioned platform and is tensioned platform combination device with Film Optics shape face |
| CN111505786A (en) * | 2019-01-31 | 2020-08-07 | 株式会社岛津制作所 | Beam splitter module and analyzer having the same |
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| CH685080A5 (en) * | 1992-04-15 | 1995-03-15 | Contraves Ag | Inflatable antenna reflector |
| US20070200789A1 (en) * | 2006-02-28 | 2007-08-30 | The Boeing Company | Arbitrarily shaped deployable mesh reflectors |
| CN102981242A (en) * | 2012-12-12 | 2013-03-20 | 中国科学院长春光学精密机械与物理研究所 | Flexible supporting mechanism for reflector of spatial optical remote sensor |
| CN103472567A (en) * | 2013-09-26 | 2013-12-25 | 北京空间机电研究所 | Photoisomerization reflecting mirror system |
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2015
- 2015-03-11 CN CN201510106688.6A patent/CN104730681B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH685080A5 (en) * | 1992-04-15 | 1995-03-15 | Contraves Ag | Inflatable antenna reflector |
| US20070200789A1 (en) * | 2006-02-28 | 2007-08-30 | The Boeing Company | Arbitrarily shaped deployable mesh reflectors |
| CN102981242A (en) * | 2012-12-12 | 2013-03-20 | 中国科学院长春光学精密机械与物理研究所 | Flexible supporting mechanism for reflector of spatial optical remote sensor |
| CN103472567A (en) * | 2013-09-26 | 2013-12-25 | 北京空间机电研究所 | Photoisomerization reflecting mirror system |
Non-Patent Citations (1)
| Title |
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| 龙亮等: "国外空间红外天文望远镜技术发展现状及启示", 《第二十六届全国空间探测学术研讨会》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105842844A (en) * | 2016-05-22 | 2016-08-10 | 上海大学 | Magnetic liquid deformable mirror based on elastic reflection film and manufacturing method thereof |
| CN108717223A (en) * | 2018-05-29 | 2018-10-30 | 上海交通大学 | It is tensioned platform and is tensioned platform combination device with Film Optics shape face |
| CN111505786A (en) * | 2019-01-31 | 2020-08-07 | 株式会社岛津制作所 | Beam splitter module and analyzer having the same |
| CN111505786B (en) * | 2019-01-31 | 2021-10-22 | 株式会社岛津制作所 | Beam splitter module and analyzer having the same |
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| Publication number | Publication date |
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| CN104730681B (en) | 2017-01-18 |
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