CN104730046A - Laser-induced breakdown trace amount substance analysis device - Google Patents
Laser-induced breakdown trace amount substance analysis device Download PDFInfo
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- CN104730046A CN104730046A CN201510125498.9A CN201510125498A CN104730046A CN 104730046 A CN104730046 A CN 104730046A CN 201510125498 A CN201510125498 A CN 201510125498A CN 104730046 A CN104730046 A CN 104730046A
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Abstract
The invention relates to a laser-induced breakdown trace amount substrate analysis device. The requirement for a detected sample is high and the in-situ detection property is poor in the prior art. A polarized light field control technology and a wavefront control technology are combined, the polarization control is carried out for laser beams to obtain a specific polarized distribution light field, the laser light field with controllable distribution of light field characteristics is generated to carry out the in-situ excitation for a detected substance by virtue of the wavefront control, the generated information light field passes through a light field filter to be received by a photovoltaic detection part by virtue of the interaction of the controllable light field and the substance on the basis of vectors to obtain the spectrum information of the detected substance, and the substance analysis is realized by virtue of the spectrum analysis. The laser-induced breakdown trace amount substance analysis device has characteristics of low requirement for the detected sample, high reliability, high accuracy, capability of realizing the in-situ detection, high substance distinguishing capacity, easiness for increasing the function, wide application range and the like.
Description
Technical field
The invention belongs to optical technical field, relate to a kind of trace substance analysis device, a particularly laser-induced breakdown trace substance analysis device, is mainly used in the trace species analysis in the fields such as material analysis, material detection, environmental monitoring, life science, medical, national defense safety, process control, advanced manufacture.
Technical background
Extensively there is a large amount of trace species analysis demands in the fields such as field such as material analysis, material detection, environmental monitoring, life science, medical, national defense safety, process control, advanced manufactures, and require more and more higher to trace materials detection technique.Laser-induced Breakdown Spectroscopy (Laser induced breakdown spectroscopy, be called for short LIBS) be a kind of atomic emission spectrum, convergent laser bundle is utilized to produce plasma on the surface of sample or internal excitation, then collect and spectral analysis plasma light, the analysis of quantitative and qualitative analysis is realized by the position and intensity detecting the spectral line of emission, because be convergent laser institute induced plasma, this spectral technique and tradition utilize contiguous physical device as atomization driving source atomic emission spectrum technology compared with there is series of advantages.
A kind of Laser-induced Breakdown Spectroscopy species analysis device is there is in first technology, see United States Patent (USP), patent name: Analysis of array by laser induced breakdown spectroscopy, inventor: Anoop Agrawal, Juan Carlos L. Tonazzi, the patent No.: US8687189B2, patent issue date: on April 1st, 2014, although the present invention has certain advantage, but still Shortcomings: this is set in vessel array in first technical requirement tested substance, if liquid tested substance, needing that liquid state is detected sample is placed in vessel array, if solid-state detected sample, also need paid close attention to tested substance to fetch from solid sample to present liquid state, subsequent detection could be detected, high to detected sample requirement, affect reliability and the accuracy of detection simultaneously, in testing process, detected sample is needed to be arranged in specific array container, or present matrix-like distribution, like this condition residing for tested substance is limited, in situ detection cannot be realized well, particularly wait detected material to solid-state, or the dynamic realtime detection in process then cannot realize, and affects in first technology usable range.
Summary of the invention
Object of the present invention is exactly for the deficiencies in the prior art, a kind of laser-induced breakdown trace substance analysis device is provided, there is, reliability low to detected sample requirement and accuracy is high, can realize in situ detection, material resolving ability is strong, function is easy to features such as expanding, usable range is wide.
Basic conception of the present invention is: polarized light field control technique and wavefront control technology are combined, specific polarization distribution light field is obtained by carrying out polarization tune to laser beam, by controlling wavefront, the excitation light field that generation optical field characteristics distributes controlled is carried out original position to tested substance and is excited, based on the controlled light field of vector and matter interaction, the information light field produced is by after light field wave filter, received by photoelectric detecting parts, obtain the spectral information of tested substance, realize species analysis by spectral analysis.
The present invention includes: LASER Light Source, expand reshaper, polarization state adjustment member, wavefront regulation and control parts, spectroscope, focusing block, light field wave filter and photoelectric detecting parts; The light path last time of LASER Light Source outgoing beam is provided with and expands reshaper, polarization state adjustment member, wavefront regulation and control parts, spectroscope, focusing block; LASER Light Source outgoing beam expands through expanding reshaper, then through the polarization state adjustment of polarization state adjustment member and the wavefront regulation and control of wavefront regulation and control parts, focused on the excitation light field producing optical field characteristics and distribute controlled by focus lamp, original position is carried out to tested substance and excites; The information light field that tested substance produces is after focusing block, and the mirror that is split reflects, and the light path of folded light beam is disposed with light field wave filter, photoelectric detecting parts; Tested substance excites the information light field of generation by original position, after light field wave filter, is received by photoelectric detecting parts, obtains the spectral information of tested substance, realizes species analysis by spectral analysis.
Convergence parts are provided with between described light field wave filter and photoelectric detecting parts.
Described LASER Light Source is the one of semiconductor laser, solid state laser, gas laser, liquid laser.
The described reshaper that expands is one in Galilean type collimating and correcting device, Kepler-type collimating and correcting device.
Described polarization state adjustment member is the one of wave plate, liquid crystal type polarization state regulator, microstructure polarization form converter.
Described wavefront regulation and control parts are the one of liquid crystal type spatial light modulator, microstructure spatial light modulator, phase plate.
Described focusing block is the one of transmission-type object lens, focusing mirror mirror.
Described light field wave filter is the one of optical filter, analyzer
Described photoelectric detecting parts is the one in monochromator, spectrometer, photodiode, snowslide pipe, photomultiplier.
The course of work of apparatus of the present invention is: LASER Light Source outgoing beam expands through expanding reshaper, then through the polarization state adjustment of polarization state adjustment member and the wavefront regulation and control of wavefront regulation and control parts, focused on the excitation light field producing optical field characteristics and distribute controlled by focus lamp, original position is carried out to tested substance and excites; The information light field that tested substance produces is after focusing block, and the mirror that is split reflects, and the light path of folded light beam is disposed with light field wave filter, converges parts, photoelectric detecting parts; Tested substance excites the information light field of generation by original position, after light field wave filter, is received by photoelectric detecting parts, obtains the spectral information of tested substance, realizes species analysis by spectral analysis.
Vector Laser Focusing technology, wavefront control technique, spectral information analytical technology, photoelectric conversion technique in the present invention, be mature technology.Inventive point of the present invention is polarized light field control technique and wavefront control technology to combine, produce controlled stimulus light field, utilize the controlled light field light field of vector and matter interaction effect, obtain the spectral information of tested substance, realize species analysis by spectral analysis, provide a, reliability low to detected sample requirement and accuracy is high, can realize in situ detection, material resolving ability is strong, function is easy to the laser-induced breakdown trace substance analysis device that expands, usable range is wide.
Compared with prior art, advantage of the present invention:
1) be set in vessel array in first technical requirement tested substance, if liquid tested substance, needing that liquid state is detected sample is placed in vessel array, if solid-state detected sample, also need paid close attention to tested substance to fetch from solid sample to present liquid state, could subsequent detection be detected, high to detected sample requirement, affect reliability and the accuracy of detection simultaneously; Polarized light field control technique and wavefront control technology combine by the present invention, the excitation light field that generation optical field characteristics distributes controlled is carried out original position to tested substance and is excited, after the information light field produced is risen by light field filtering, received by photoelectric detecting parts, obtain the spectral information of tested substance, there is, reliability low to detected sample requirement and accuracy is high, can realize the feature of in situ detection;
2) in first technology for detection process, detected sample is needed to be arranged in specific array container, or present matrix-like distribution, like this condition residing for tested substance is limited, cannot realize in situ detection well, particularly wait detected material to solid-state, or the dynamic realtime detection in process then cannot realize, impact, in first technology usable range, is difficult to realize detection of dynamic; Do not limit tested substance in the present invention, can detect various form material, and can carry out in situ detection, detection speed is fast, so the dynamic realtime that can carry out in process detects;
3) the present invention obtains specific polarization distribution light field by carrying out polarization tune to laser beam, by controlling wavefront, the excitation light field that generation optical field characteristics distributes controlled is carried out original position to tested substance and is excited, based on the controlled light field of vector and matter interaction, the information light field produced, therefore there is the feature of controllable light field excitation, there is the features such as material resolving ability is strong, function is easy to expansion, usable range is wide.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
As shown in Figure 1, a kind of laser-induced breakdown trace substance analysis device, comprising: LASER Light Source 1, expand reshaper 2, polarization state adjustment member 3, wavefront regulation and control parts 4, spectroscope 5, focusing block 6, light field wave filter 7, converge parts 8 and photoelectric detecting parts 9;
The light path of LASER Light Source 1 outgoing beam is disposed with and expands reshaper 2, polarization state adjustment member 3, wavefront regulation and control parts 4, spectroscope 5, focusing block 6; LASER Light Source 1 outgoing beam expands through expanding reshaper 2, then through the polarization state adjustment of polarization state adjustment member 3 and the wavefront regulation and control of wavefront regulation and control parts 4, focused on the excitation light field producing optical field characteristics and distribute controlled by focus lamp 6, original position is carried out to tested substance 10 and excites; The information light field that tested substance 10 produces is after focusing block 6, and the mirror 5 that is split reflects, and the light path of folded light beam is disposed with light field wave filter 7, converges parts 8, photoelectric detecting parts 9; Tested substance 10 excites the information light field of generation by original position, after light field wave filter 7, is received by photoelectric detecting parts 9, obtains the spectral information of tested substance, realize species analysis by spectral analysis.
In the present embodiment, LASER Light Source 1 is solid state laser, and wavelength is 532 nanometers; Expand reshaper 2 for Galilean type collimating and correcting device; Polarization state adjustment member 3 is liquid crystal type polarization state regulator; Wavefront regulation and control parts 4 are liquid crystal type spatial light modulator; Spectroscope 5 is spectrum mirror; Focusing block 6 is transmission-type object lens; Light field wave filter 7 is optical filter; Converge parts 8 and adopt cemented doublet; Photoelectric detecting parts 9 is spectrometer.
The course of work of apparatus of the present invention is: LASER Light Source 1 outgoing beam expands through expanding reshaper 2, then through the polarization state adjustment of polarization state adjustment member 3 and the wavefront regulation and control of wavefront regulation and control parts 4, focused on the excitation light field producing optical field characteristics and distribute controlled by focus lamp 6, original position is carried out to tested substance 10 and excites; The information light field that tested substance 10 produces is after focusing block 6, and the mirror 5 that is split reflects, and the light path of folded light beam is disposed with light field wave filter 7, converges parts 8, photoelectric detecting parts 9; Tested substance 10 excites the information light field of generation by original position, after light field wave filter 7, received by photoelectric detecting parts 9, obtain the spectral information of tested substance, species analysis is realized by spectral analysis, in the present embodiment, successfully Concentration Testing is carried out to the heavy metal chromium in solid matter.The present invention has, reliability low to detected sample requirement and accuracy is high, can realize in situ detection, material resolving ability is strong, function is easy to features such as expanding, usable range is wide.
Originally be in embodiment, if tested substance content is high, spectroscope 5 can be being removed, utilizing the direct Information Monitoring light field of photoelectric detecting parts 9 to detect.Above-described embodiment has been described in detail technical scheme of the present invention and beneficial effect; be understood that and the foregoing is only most preferred embodiment of the present invention; be not limited to the present invention; all make in spirit of the present invention any amendment, supplement and equivalent to replace, all should be included within protection scope of the present invention.
Claims (7)
1. a laser-induced breakdown trace substance analysis device, is characterized in that comprising: LASER Light Source, expand reshaper, polarization state adjustment member, wavefront regulation and control parts, spectroscope, focusing block, light field wave filter and photoelectric detecting parts;
The light path last time of LASER Light Source outgoing beam is provided with and expands reshaper, polarization state adjustment member, wavefront regulation and control parts, spectroscope, focusing block; LASER Light Source outgoing beam expands through expanding reshaper, then through the polarization state adjustment of polarization state adjustment member and the wavefront regulation and control of wavefront regulation and control parts, focused on the excitation light field producing optical field characteristics and distribute controlled by focus lamp, original position is carried out to tested substance and excites; The information light field that tested substance produces is after focusing block, and the mirror that is split reflects, and the light path of folded light beam is disposed with light field wave filter, photoelectric detecting parts; Tested substance excites the information light field of generation by original position, after light field wave filter, is received by photoelectric detecting parts, obtains the spectral information of tested substance, realizes species analysis by spectral analysis.
2. a kind of laser-induced breakdown trace substance analysis device as claimed in claim 1, is characterized in that: be provided with convergence parts between described light field wave filter and photoelectric detecting parts.
3. a kind of laser-induced breakdown trace substance analysis device as claimed in claim 1, is characterized in that: described LASER Light Source is the one in semiconductor laser, solid state laser, gas laser, liquid laser.
4. a kind of laser-induced breakdown trace substance analysis device as claimed in claim 1, is characterized in that: the described reshaper that expands is one in Galilean type collimating and correcting device, Kepler-type collimating and correcting device.
5. a kind of laser-induced breakdown trace substance analysis device as claimed in claim 1, is characterized in that: described polarization state adjustment member is the one of wave plate, liquid crystal type polarization state regulator, microstructure polarization form converter.
6. a kind of laser-induced breakdown trace substance analysis device as claimed in claim 1, is characterized in that: described wavefront regulation and control parts are the one in liquid crystal type spatial light modulator, microstructure spatial light modulator, phase plate.
7. a kind of laser-induced breakdown trace substance analysis device as claimed in claim 1, is characterized in that: described focusing block is the one of transmission-type object lens, focusing mirror mirror.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110441288A (en) * | 2019-08-28 | 2019-11-12 | 南京信息工程大学 | A kind of multi-angle objective plasma collection device |
| CN112748102A (en) * | 2021-01-04 | 2021-05-04 | 远正(江苏)水务科技有限公司 | Active cavity traveling wave field enhanced gas Raman detection device |
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| CN101013136A (en) * | 2007-02-08 | 2007-08-08 | 北京工业大学 | Laser-induction fluorescence co-focusing scan device and method |
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| CN112748102A (en) * | 2021-01-04 | 2021-05-04 | 远正(江苏)水务科技有限公司 | Active cavity traveling wave field enhanced gas Raman detection device |
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