CN104716924A - 石墨烯谐振器及其制作方法 - Google Patents
石墨烯谐振器及其制作方法 Download PDFInfo
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107101629A (zh) * | 2017-05-10 | 2017-08-29 | 北京航空航天大学 | 一种硅微机械石墨烯梁谐振式陀螺仪 |
US10651792B2 (en) | 2015-12-23 | 2020-05-12 | Nokia Technologies Oy | Oscillator apparatus and associated methods |
CN111575673A (zh) * | 2020-05-19 | 2020-08-25 | 湖南二零八先进科技有限公司 | 一种石墨烯电极谐振子及其制造方法 |
CN113701937A (zh) * | 2021-08-26 | 2021-11-26 | 苏州微光电子融合技术研究院有限公司 | 气压传感器及制备方法 |
US11885985B2 (en) | 2019-06-05 | 2024-01-30 | Regents Of The University Of Minnesota | Graphene plasmon resonators |
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US20110279188A1 (en) * | 2010-05-11 | 2011-11-17 | Industry-Academic Cooperation Foundation, Yonsei University | Resonator using carbon nano substance and method of manufacturing resonator |
CN102315831A (zh) * | 2011-05-04 | 2012-01-11 | 西安电子科技大学 | 基于石墨烯的纳机电谐振器的制备方法 |
CN102538949A (zh) * | 2011-12-13 | 2012-07-04 | 江苏大学 | 一种基于石墨烯片层的纳机电谐振式传感器及其制作方法 |
CN102638753A (zh) * | 2012-03-16 | 2012-08-15 | 中北大学 | 基于石墨烯的mems声学传感器 |
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CN103414449A (zh) * | 2013-08-30 | 2013-11-27 | 电子科技大学 | 一种基于石墨烯材料的高频纳机电谐振器及其制备工艺 |
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Patent Citations (8)
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CN1225760A (zh) * | 1997-05-08 | 1999-08-11 | 东芝株式会社 | 声界面波器件及其制造方法 |
US20110279188A1 (en) * | 2010-05-11 | 2011-11-17 | Industry-Academic Cooperation Foundation, Yonsei University | Resonator using carbon nano substance and method of manufacturing resonator |
CN102315831A (zh) * | 2011-05-04 | 2012-01-11 | 西安电子科技大学 | 基于石墨烯的纳机电谐振器的制备方法 |
US20130062104A1 (en) * | 2011-09-08 | 2013-03-14 | Cornell University - Cornell Center For Technology Enterprise & Commercialization (Cctec) | Resonant material layer apparatus, method and applications |
CN102538949A (zh) * | 2011-12-13 | 2012-07-04 | 江苏大学 | 一种基于石墨烯片层的纳机电谐振式传感器及其制作方法 |
CN102638753A (zh) * | 2012-03-16 | 2012-08-15 | 中北大学 | 基于石墨烯的mems声学传感器 |
CN103296991A (zh) * | 2013-04-28 | 2013-09-11 | 电子科技大学 | 基于柔性基板的石墨烯高频纳机电谐振器及其制备工艺 |
CN103414449A (zh) * | 2013-08-30 | 2013-11-27 | 电子科技大学 | 一种基于石墨烯材料的高频纳机电谐振器及其制备工艺 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10651792B2 (en) | 2015-12-23 | 2020-05-12 | Nokia Technologies Oy | Oscillator apparatus and associated methods |
CN107101629A (zh) * | 2017-05-10 | 2017-08-29 | 北京航空航天大学 | 一种硅微机械石墨烯梁谐振式陀螺仪 |
CN107101629B (zh) * | 2017-05-10 | 2019-12-17 | 北京航空航天大学 | 一种硅微机械石墨烯梁谐振式陀螺仪 |
US11885985B2 (en) | 2019-06-05 | 2024-01-30 | Regents Of The University Of Minnesota | Graphene plasmon resonators |
CN111575673A (zh) * | 2020-05-19 | 2020-08-25 | 湖南二零八先进科技有限公司 | 一种石墨烯电极谐振子及其制造方法 |
CN111575673B (zh) * | 2020-05-19 | 2021-10-08 | 湖南二零八先进科技有限公司 | 一种石墨烯电极谐振子及其制造方法 |
CN113701937A (zh) * | 2021-08-26 | 2021-11-26 | 苏州微光电子融合技术研究院有限公司 | 气压传感器及制备方法 |
CN113701937B (zh) * | 2021-08-26 | 2023-11-07 | 苏州微光电子融合技术研究院有限公司 | 气压传感器及制备方法 |
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