CN104713815A - Sample gas pipeline, made of glass material, of aerosol focusing gas circuit and manufacturing method of sample gas pipeline - Google Patents

Sample gas pipeline, made of glass material, of aerosol focusing gas circuit and manufacturing method of sample gas pipeline Download PDF

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Publication number
CN104713815A
CN104713815A CN201510130763.2A CN201510130763A CN104713815A CN 104713815 A CN104713815 A CN 104713815A CN 201510130763 A CN201510130763 A CN 201510130763A CN 104713815 A CN104713815 A CN 104713815A
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feed channel
sample feed
gas circuit
sample
glass material
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CN104713815B (en
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赵永凯
卜一川
陈正岩
廖洋
张佩
黄惠杰
程亚
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Shanghai Lasensor Photoelectric Technology Co ltd
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

The invention discloses a sample gas pipeline of an aerosol focusing gas circuit in a real-time single aerosol particle detection and analysis instrument. The pipeline comprises a sample gas pipeline body made of glass material and a connecting installing flange, the installing and positioning are realized through tolerance fitting, a clamping ring is fixedly installed, an O-shaped ring or a sealant is used for sealing, the external circle of the sample gas pipeline is processed through a conventional optical processing method, an internal gas circuit through hole is formed through femtosecond laser processing, and the aperture of the through hole can reach micron dimension. The sample gas pipeline is capable of meeting design, assembling-calibrating and processing technology requirements; the processing and residual stress are small; the coaxiality, verticality, sealing and other design and assembling-calibrating requirements are easy to meet; and a pollution status and a cleaning status of the sample gas pipeline can be conveniently checked.

Description

A kind of glass material gasoloid focuses on gas circuit sample feed channel and preparation method thereof
Technical field
The present invention relates to a kind of sample feed channel for particulate focusing gas circuit in the real-time examination and analysb instrument of single particulate and preparation method thereof.
Background technology
Gasoloid refers to and to be disperseed by solid or liquid particle and to be suspended in the multinomial mixed system formed in gas medium.Particle or grain size are 0.001 ~ 100 μm.Traditionally, these particles are called gasoloid.
Particulate causes many physical and chemical processes and the health material impacts such as rain, water circulation, visibility change to ground vapour radiation balance, Cheng Yun.Atmospheric aerosol particle kind and Component Source is heterogeneous, form complexity, researchist needs physics, optics or chemical feature etc. according to particulate to identify particle and source thereof.Therefore, particulate determination and analysis technology that is real-time, original position is needed in environment measuring and research association area.Such as, the optical particle counter based on particulate elastic light scattering principle has been widely used in measuring single particle scattered optical field intensity distributions thus has obtained particulate particle diameter size distribution.
The real-time examination and analysb technology of single-particle by fast, the relevant featuring parameters of single particle in the atmospheric aerosol stream of Measurement accuracy sampling, by obtaining the relevant information of the particulate in surrounding air to the Treatment Analysis of data and Statistic analysis.Owing to generally need detect particulate particle size range generally at 0.1-10 μm, the signal intensity that detection system obtains is comparatively faint.In order to reduce systems axiol-ogy error and particle aliasing error, improve input sensitivity and consistance, many detection systems adopt the gasoloid based on aerodynamic principle design to focus on gas circuit.
Fig. 1 is that a kind of Conventional aerosol focuses on gas circuit structure schematic diagram, focus on gas circuit top and be divided into inside and outside circle loop configuration, be made up of sheath gas admission piece 14, outer toroid sheath air pipe 15, interior annulus sample gas admission line 16 and nozzle of air supply 17, be usually installed on pick-up unit cavity upper surface.Focus on gas circuit bottom and be divided into outgassing nozzle 18, be installed on pick-up unit cavity lower surface.The 2 groups of air pumps overall gas circuits of control device and sheath gas gas circuit flow and flow velocity is respectively had in gas circuit.Gas circuit is tightly connected by tracheae, web member and structural member.Atmospheric aerosol is sampled and enters sample feed channel.Outer toroid sheath feed channel passes into clean sheath gas.Focus on gas circuit principle of work as shown in Figure 2, in gas circuit outlet nozzle position, be subject to sheath gas effect of stress, sample gas gas circuit beam diameter can be compressed or claim to focus in certain gas circuit length.The particulate position range dynamic with sample fate reduces with beam diameter.When particle concentration in sample gas is interval in restriction, particle forms single-particle sequence successively by the desirable surveyed area of detection system within the scope of less the relative position error, reduces aliasing error, improves accuracy in detection.Meanwhile, the clean sheath gas wrapping up sample gas can reduce the interference of other external particles.
Focus in gas circuit at gasoloid, require below sample feed channel demand fulfillment:
1) gas circuit designing requirement: comprise sample feed channel inlet inside diameter, exit inside diameter and length equidimension, sample feed channel exit end face angle etc.;
2) structure dress school requires: usually sample feed channel and sheath feed channel or inlet nozzle anatomical connectivity, and pipeline gas Lu Zhizheng and inlet nozzle have the parameter request such as right alignment, relative position;
3) fabrication design requires: because the various designing requirements of gas circuit and structure limit, for ensureing sample feed channel size and avoiding the factors such as structure machining deformation, need to consider satisfactory feasible scheme.
In addition, because sample feed channel often adopts the metal material being convenient to process and assemble, in use cannot observe inner tubal wall pollution situation, also be difficult to clean up inner tubal wall, gasoloid metrical error can be caused.
In first technology one (see " particle detection ", China Patent No. 200920307707.1, inventor Zhan Ningbo, Wu Taihu, Du Yaohua etc.) sample feeding pipe that adopts is straight tubule, is inlaid in sample introduction flange support inner circle, and utilizes quick connector air inlet.This structure has the following disadvantages:
1. this sample feed channel is elongated, wall thickness is little, is easily out of shape.In assembling up-to-date style feed channel position if any deviation, be comparatively difficult to ensure the right alignment of card and sheath stream pipe;
2. this sample feed channel is inlaid in sample introduction flange support inner circle, and coordinate not easily tight, quick connector adopts with sample introduction flange support and is threaded, and total sealing effectiveness is not good.
Summary of the invention
The object of the invention is to overcome the above-mentioned deficiency in first technology, propose to focus on gas circuit sample feed channel based on the gasoloid of the glass material of femtosecond laser processing.
Technical solution of the present invention is as follows:
Gasoloid focuses on a sample feed channel for gas circuit, and its feature is:
Described gasoloid focus on gas circuit sample feed channel comprises sample feed channel body, connection flange, trim ring, trim ring mounting screw, be sealed and matched part 5 part.The material of described sample feed channel body is glass.
As shown in Figure 3, described sample feed channel body cylindrical is according to structural design and processing requirement, adopt certain angle of taper transition or segment outer diameter ladder to increase the design proposals such as transition, the less outside dimension needed from sample gas exit end face is transitioned into the outside dimension being applicable to coordinating.Adopt fillet or cone angle transition between increasing comprising sample gas exit end face and cylindrical each section of external diameter ladder, reduce interference in air flow.Sample feed channel body and connection flange have two pairs of mating surfaces, are respectively and ensure that the hole axle of right alignment coordinates and ensures that the inner plane of sample gas exit end face position coordinates.
In described sample feed channel body, pipe is isometrical or the gas circuit through hole of multistage different inner diameters according to designing requirement, passes through cone angle transition in the gas circuit of sample gas air inlet endoporus and each section of different pore size between pipe, reduces interference in air flow.The endoporus of described sample feed channel is realized by femtosecond laser processing method, and relative dimensions parameter is by processing guarantee.
Described connection flange is for selecting the materials such as metal.Flange can design uniform hole in outside, for the mechanical connection of the parts such as sample feed channel and sheath feed channel; Also can according to physical condition directly and sheath feed channel integrated.Connection flange, except with except two pairs of mating surfaces of sample feed channel, has two pairs of mating surfaces with sheath feed channel, is respectively and ensures that the internal orifice dimension of right alignment coordinates and ensures that the inner plane of sample gas exit end face position contacts cooperation.
Described sample feed channel body can be installed trim ring mode by trim ring mounting screw with connection flange and be connected for assembly, adopts O type circle to seal or sealant sealing, also can adopt fluid sealant adhesion fixing seal between sample feed channel body and connection flange.
Described sample feed channel body processing is divided into following 2 steps:
1) pipeline body Excircle machining is realized by normal optical material processing method;
2) in sample feed channel body, pipe is realized by femtosecond laser processing method.
Described femtosecond laser process technology is high with its machining precision, thermal effect is little and can realize the advantages such as three-dimensional micro Process to transparent material provides and a kind ofly prepares method that is extensive, complicate three dimension microstructure in micro-manufacture in present age field.Femtosecond laser carries out the modification of spatial selectivity local by non-linear absorption process to glass, thus has high-resolution Three-dimension process ability.
The present invention uses glass for base material, directly uses the method processing gasoloid of hydrofluorite or potassium hydroxide corrosion to focus on gas circuit sample feed channel after adopting Gold Films Irradiated by Femtosecond Laser glass.Wherein, quartz glass has excellent optical transmittance, and high temperature resistant, expansion coefficient is low, and well, minimum process internal diameter can arrive 3 μm for chemical stability and electrical insulation capability.This job operation refers to see document: A.Marcinkevicius, S.Juodkazis, et al., Opt.Lett.26, and 277 (2001).
With compared with first technology, the present invention has following characteristics:
1) described sample feed channel meets the design of gasoloid focusing gas circuit, dress school, process technology requirement;
2) sample feed channel endoporus can be realized by Laser Processing, good with the right alignment of structural requirement, and processing is little with residual stress, and interior caliber can reach micron order;
3) sample feed channel body and connection flange adopt plane and hole axial plane to coordinate, and are easy to the relative position of guarantee sample feed channel, verticality, right alignment requirement;
4) sample feed channel body is integral structure, is located, good airproof performance with described connection flange by O type circle or fluid sealant adhesion;
5) sample feed channel is made by glass processing, is easy to check pipeline pollution situation, carries out cleaning or replacing.
Accompanying drawing explanation
A kind of Conventional aerosol that Fig. 1 the present invention introduces focuses on gas circuit structure schematic diagram;
Fig. 2 is that gasoloid focuses on gas circuit fundamental diagram;
Fig. 3 is that the glass gasoloid designed in the present invention focuses on gas circuit sample feed channel structural drawing.A () sample feed channel body cylindrical adopts certain angle of taper Transition Design scheme; B () sample feed channel body cylindrical adopts segment outer diameter ladder to increase transition scheme; The vertical view of (c) 2 kinds of sample feed channel bodies;
Fig. 4 is result of calculation Fig. 3 model being used to software commercialization hydrodynamic simulation software ANSYS.
Embodiment
Below in conjunction with specific embodiment, set forth the present invention further, but should not limit the scope of the invention with this.
Fig. 3 is the structural representation that gasoloid of the present invention focuses on gas circuit sample feed channel, comprises the sample feed channel body 1 of glass material, the connection flange 2 of metal material, sample feed channel inner sealing O type circle 3, sheath feed channel 4, sheath feed channel install sealing O type circle 5, flange mounting screw 6, trim ring mounting screw 7 and trim ring 8.
According to structural design and processing, sample feed channel body 1 cylindrical requires that employing can angle of taper Transition Design scheme in Fig. 3 (a), or segment outer diameter ladder increases transition scheme in Fig. 3 (b), the less outside dimension needed from sample gas exit end face is transitioned into the outside dimension being applicable to coordinating.Wherein in Fig. 3 (b), cylindrical each section of external diameter ladder adopts fillet or cone angle transition between increasing, and reduces interference in air flow.101 of sample feed channel body 1 is cooperation axial plane, and axial plane center and 102 facial planes have verticality requirement.Sample feed channel body 1 and connection flange 2 have two pairs of mating surfaces, and 101 can ensure the requirement of structure installment right alignment with the shaft hole matching of 201, and the plane contact of 102 and 202 can ensure verticality and the positioning requirements of sample gas exit end face position.Sample feed channel body 1 exit is external diameter Φ 6mm, and semiapex angle is the truncated cone 13 of 40 °.Described sample feed channel body 1 cylindrical adopts the processing of normal optical job operation.
In described sample feed channel body 1, pipe is divided into 11-1 according to designing requirement, the gas circuit through hole of 3 sections of different inner diameters such as 11-2,11-3.Gas circuit through hole 11-1 is sample feed channel air intake opening, and aperture is Φ 5mm; Gas circuit through hole 11-2 is sample feed channel gas circuit transition section, and aperture is Φ 3.0mm; Gas circuit through hole 11-3 is sample feed channel outgassing nozzle, and aperture is Φ 1.8mm.By cone angle 12-1 and 12-2 transition between different inner diameters gas circuit through hole, reduce interference in air flow.Described gas circuit through hole is realized by femtosecond laser processing method, and design size and error are by processing guarantee.Wherein, sample air pipe air intake opening endoporus section 11-1 aperture is comparatively large, also can be processed by normal optical job operation.
Uniform shoulder hole outside described connection flange 2, for the mechanical connection of the flange mounting screw 6 between flange 2 and sheath feed channel 4.Connection flange 2 is except with except two pairs of mating surfaces of sample feed channel body 1, two pairs of mating surfaces are had with sheath feed channel 4, the shaft hole matching of 203 and 403 is for ensureing the right alignment requirement of sample feed channel and sheath feed channel, and the plane of 204 and 404 coordinates the positioning requirements for ensureing sample gas exit end face and sheath feed channel.Axial plane 403 axis coordinates plane 404 to have verticality requirement with contacting.
Be designed with sample feed channel inner sealing O type circle 3 between described sample feed channel body 1 and connection flange 2 to seal.
Described sample feed channel body 1 is connected with connection flange 2, sample feed channel inner sealing O type circle 3 for assembly by trim ring mounting screw 7, trim ring 8.
Described connection flange 2 and sheath feed channel 4 utilize flange mounting screw 6 to be connected, and are designed with sheath feed channel installation sealing O type circle 5 between the two and seal.
Described sample feed channel, by being installed to sheath stream pipeline, forming gasoloid with miscellaneous part and focuses on gas circuit.When gas circuit works, particulate follows sample air motion, enters sample feed channel body 1 from sample feed channel air intake opening, flows out after each section of gas circuit through hole from sample feed channel outgassing nozzle.At outlet nozzle place, be subject to the effect of sheath gas shearing force, sample gas gas circuit width can be compressed, though particulate position range can be little along with the compression of sample gas, and realizes hierarchal arrangement.
Fig. 4 is the result of calculation according to aerodynamic principle, Fig. 3 model being used to software commercialization hydrodynamic simulation software ANSYS.Simulation result shows, particulate can be compressed in the scope of Φ 0.25mm.
With compared with first technology, the feature of tool of the present invention is: 1) sample feed channel meets the design of gasoloid focusing gas circuit, dress school, process technology requirement; 2) sample feed channel endoporus can be realized by Laser Processing, good with the right alignment of structural requirement, and processing is little with residual stress, and interior caliber can reach micron order; 3) sample feed channel body and connection flange adopt plane and axis hole face to coordinate, and are easy to the relative position of guarantee sample feed channel, verticality, right alignment requirement; 4) sample feed channel body is integral structure, is located, good airproof performance with described connection flange by O type circle or fluid sealant adhesion; 5) sample feed channel is made by glass processing, is easy to check pipeline pollution situation, carries out cleaning or replacing.

Claims (5)

1. a glass material gasoloid focuses on gas circuit sample feed channel, it is characterized in that, comprise the sample feed channel body (1) of glass material, the connection flange (2) of metal material, sample feed channel inner sealing O type circle (3), trim ring mounting screw (7) and trim ring (8);
Described sample feed channel body (1) upper end is provided with external cylindrical surface (101) and the body plane (102) perpendicular with this external cylindrical surface (101);
Be provided with in described connection flange (2) interior cylindrical hole (201), with the perpendicular Flange Plane (202) of this inner cylinder face (201), and cooperatively interact with sheath feed channel (4) coordinate axial plane (203) and the installation plane of orientation (204) perpendicular with this axial plane (203);
Described body plane (102) and Flange Plane (202) fit tightly, and described external cylindrical surface (101) and interior cylindrical hole (201) fit tightly;
Be provided with described sample feed channel inner sealing O type circle (3) between described sample feed channel body (1) and connection flange (2) to seal, described trim ring (8) makes described connection flange (2) and sample feed channel body (1) closely pressing by described trim ring mounting screw (7).
Described sheath feed channel (4) inner cylinder face (403) fits tightly with the external cylindrical surface (203) of connection flange (2), and described sheath feed channel (4) inner plane (404) and connection flange (2) inner plane (404) fit tightly.
2. glass material gasoloid according to claim 1 focuses on gas circuit sample feed channel, it is characterized in that, described sample feed channel body is provided with interior pipe, and the gas circuit through hole of this interior Guan Yousan section different inner diameters is formed, by cone angle transition between the gas circuit through hole of different inner diameters.
3. glass material gasoloid according to claim 1 focuses on gas circuit sample feed channel, it is characterized in that, described connection flange (2), sheath feed channel install sealing O type circle (5), flange mounting screw (6) is tightly connected with sheath feed channel (4).
4. glass material gasoloid according to claim 1 focuses on gas circuit sample feed channel, and it is characterized in that, the gas circuit through hole of three sections of described different inner diameters is respectively sample feed channel air intake opening (11-1), and aperture is Φ 5mm; Sample feed channel gas circuit transition section (11-2), aperture is Φ 3.0mm; Sample feed channel outgassing nozzle (11-3), aperture is Φ 1.8mm.
5. the arbitrary described glass material gasoloid of claim 1-4 focuses on a preparation method for gas circuit sample feed channel, and it is characterized in that, described sample feed channel body process steps is as follows:
Step 1) adopt the cylindrical of normal optical material processing method to the sample feed channel body (1) of glass material to process;
Step 2) adopt the interior pipe of femtosecond laser processing method sample feed channel body (1) to process.
CN201510130763.2A 2015-03-24 2015-03-24 A kind of glass material aerosol focuses on gas circuit sample feed channel and preparation method thereof Active CN104713815B (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112198095A (en) * 2020-09-27 2021-01-08 山东诺方电子科技有限公司 Particle sensor sheath gas protective structure
CN113310853A (en) * 2020-02-27 2021-08-27 北京慧荣和科技有限公司 Aerodynamic particle size testing device
CN113504164A (en) * 2021-06-09 2021-10-15 青岛众瑞智能仪器股份有限公司 Sheath flow device and aerosol photometer
CN113720750A (en) * 2021-08-31 2021-11-30 北京航空航天大学 Optical particle counter
CN114062229A (en) * 2021-09-07 2022-02-18 浙江大学 Condensation nucleus particle counter for deducing chemical components of particulate matters
CN114225988A (en) * 2021-11-30 2022-03-25 广东省科学院健康医学研究所 Bidirectional configuration microfluidic droplet generation device and preparation method thereof

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CN113310853A (en) * 2020-02-27 2021-08-27 北京慧荣和科技有限公司 Aerodynamic particle size testing device
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CN114062229A (en) * 2021-09-07 2022-02-18 浙江大学 Condensation nucleus particle counter for deducing chemical components of particulate matters
CN114225988A (en) * 2021-11-30 2022-03-25 广东省科学院健康医学研究所 Bidirectional configuration microfluidic droplet generation device and preparation method thereof

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