CN104701294B - electric fuse structure - Google Patents
electric fuse structure Download PDFInfo
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- CN104701294B CN104701294B CN201310654425.XA CN201310654425A CN104701294B CN 104701294 B CN104701294 B CN 104701294B CN 201310654425 A CN201310654425 A CN 201310654425A CN 104701294 B CN104701294 B CN 104701294B
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- fuse
- electric fuse
- convex portion
- line width
- electric
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Abstract
A kind of electric fuse structure, including：Substrate, formed with fleet plough groove isolation structure in the substrate；Electric fuse on the fleet plough groove isolation structure, the electric fuse include anode, negative electrode and the fuse between the anode and negative electrode；Multiple convex portions that the fuse includes body and is distributed positioned at the body portion sidewalls and along the body length direction, have space between adjacent two convex portion of the same side wall of the body.In the technical program, the line edge roughness increase of fuse, fuse formation process including multiple convex portions is controllable, using convex portion come to increase the technique of the line roughness of fuse be controllable, can obtain the electric fuse with satisfactory line edge roughness.
Description
Technical field
The present invention relates to technical field of semiconductors, more particularly to a kind of electric fuse structure.
Background technology
With semiconductor technology microminiaturization and complicate the raising of degree, semiconductor element be easy to by various defects or
Impurity effect, and the failure of the interconnection of single or some metals, diode or transistor frequently can lead to the failure of whole chip.For
Solve this problem, the connecting line of fusible is usually provided with integrated circuit（fuse links）, i.e. fuse（fuse）, for repairing
Multiple defective circuit, to improve the yield rate of IC chip.Fuse can be divided into thermo-fuse and electric smelting from mode of operation
Silk（electrical fuse）Two kinds.Wherein, electric fuse is to utilize electron transfer（electro-migration）Principle makes electricity
There is open circuit in fuse.
Reference picture 1, Fig. 1 are the dimensional structure diagrams of existing electric fuse, and existing electric fuse includes：Anode 1, negative electrode
2, and the fuse 3 of the strip between anode 1 and negative electrode 2, fuse 3, anode 1 and negative electrode 2 be formed as one.Wherein, exist
Formed with conductive plunger on anode 1, negative electrode 2（Not shown in figure）, conductive plunger electrically connects with external circuit.
The electric fuse is applied in integrated circuit, when between anode 1, negative electrode 2 by larger immediate current, moment
In the range of the current values for allowing electric fuse to fuse, fuse 3 can generate heat size of current in the presence of immediate current, make fuse
The position fusing for being heated most in 3.The fusing position for defining fuse 3 is the fuse area of fuse 3.
In the prior art, it is commonly designed that fuse is thinner, i.e. line width of the fuse in fuse widths direction is smaller.So, melt
Power-off stream is smaller, and when the immediate current passed through in fuse is smaller, fuse is with regard to fusible.Moreover, when fuse line width is smaller, melt
The line edge roughness of silk（Line Edge Roughness, LER）Larger, fuse edge is more coarse.When passing through in fuse
During immediate current, the thermograde (Temperature Gradient) on fuse element length direction is larger, that is, fuse segment
Temperature change it is larger so that heat fuse segment concentrate, accelerate fuse failure.
But when fuse line width is smaller, in the technique for forming electric fuse, the line edge roughness of fuse is not easy to obtain
To control, the electric fuse with satisfactory line edge roughness can not be obtained.
The content of the invention
The present invention solves the problems, such as that in the technique for forming electric fuse, the line edge roughness of fuse is difficult to obtain
Control, can not obtain the electric fuse with satisfactory line edge roughness.
To solve the above problems, the present invention provides a kind of electric fuse structure, the electric fuse structure includes：
Substrate, formed with fleet plough groove isolation structure in the substrate；
Electric fuse on the fleet plough groove isolation structure, the electric fuse include anode, negative electrode and positioned at the sun
Fuse between pole and negative electrode；
The fuse includes body and is distributed positioned at the body portion sidewalls and along the body length direction more
Individual convex portion, there is space between adjacent two convex portion of the same side wall of the body.
Alternatively, the convex portion has the first line width along the body width, same positioned at the body
First line width of adjacent two convex portion of side wall is equal.
Alternatively, the convex portion has the second line width along the body length direction, same positioned at the body
Second line width of adjacent two convex portion of side wall is equal.
Alternatively, the gap has the 3rd line width along the body length direction, same positioned at the body
3rd line width in the gap of side wall is equal.
Alternatively, multiple convex portions of the body two side are symmetrical on the body.
Alternatively, the edge lines of the convex portion are curved.
Alternatively, the material of the electric fuse is DOPOS doped polycrystalline silicon.
Alternatively, in addition to：
Interlayer dielectric layer in the substrate, the interlayer dielectric layer covering substrate and electric fuse；
The first conductive plunger and the second conductive plunger in the interlayer dielectric layer, first conductive plunger and sun
Pole electrically connects, the second conductive plunger and the negative electrode electrical connection.
Alternatively, there is gold between first conductive plunger and anode, between second conductive plunger and negative electrode
Belong to silicide.
Alternatively, the metal silicide is nisiloy, titanium silicon or cobalt silicon.
Compared with prior art, technical scheme has advantages below：
The fuse includes body and is distributed positioned at the body portion sidewalls and along the body length direction more
Individual convex portion, there is space between adjacent two convex portion of the same side wall of the body.Observed along fuse bearing of trend, fuse
Line edge roughness increase.So, when passing through immediate current in fuse, along the thermograde on fuse bearing of trend compared with
Greatly, according to the heat output in unit interval unit area（Heat flow density）It is directly proportional to thermograde, heat output on fuse compared with
Greatly, heat is concentrated in fuse segment, accelerates fuse failure.Compared with prior art, in the technical program, although each convex portion
Line roughness is influenceed by specific embodiment, is uncontrollable, but for the overall figure of fuse, including multiple convex portions
Fuse formation process be controllable, using convex portion come to increase the technique of the line roughness of fuse be controllable, can be had
There is the electric fuse of satisfactory line edge roughness.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of the electric fuse of prior art；
Fig. 2 is the top view of the electric fuse structure of the specific embodiment of the invention；
Fig. 3 is the cross-sectional view of the electric fuse structure of the specific embodiment of the invention；
Fig. 4 is the top view of the electric fuse of another embodiment of the present invention；
Fig. 5 is the top view of the electric fuse of further embodiment of this invention；
Embodiment
It is understandable to enable the above objects, features and advantages of the present invention to become apparent, below in conjunction with the accompanying drawings to the present invention
Specific embodiment be described in detail.
Reference picture 2, the electric fuse structure of the present embodiment include：
Substrate 100, formed with fleet plough groove isolation structure 101, the upper surface of fleet plough groove isolation structure 101 in substrate 100
Remained basically stable with the upper surface of substrate 100；
Electric fuse 102 on fleet plough groove isolation structure 101, electric fuse 102 include anode 121, negative electrode 122 and position
Fuse 123 between anode 121 and negative electrode 122, projection of the electric fuse 102 in the upper surface of substrate 100 are located at shallow trench isolation
In the range of the upper surface of structure 101；
Fuse 123 includes body 133 and is distributed positioned at the side wall of body 133 and along the length direction of body 133 more
Individual convex portion 103, there is space between adjacent two convex portion 103 of 103 same side wall of body.
In the present embodiment technical scheme, observed along the length direction of fuse 123, positioned at the convex portion 103 of 123 same side wall of fuse
So that the side wall of fuse 123 is uneven, the line edge roughness increase of fuse 123.When passing through immediate current in fuse 123
When, it is larger along the thermograde on the bearing of trend of fuse 123, according to the heat output in unit interval unit area（Heat flow density）
Directly proportional to thermograde, the heat output on fuse 123 is larger, and heat accelerates fuse 123 to fuse in the segment set of fuse 123.
According to the relation between line edge roughness and thermograde, the figure of pre-designed fuse 123 includes body
133 and positioned at multiple convex portions 103 of the side wall of body 133, and manufacture to obtain according to preset pattern and have larger line edge thick
The fuse of rugosity.Compared with prior art, in the technical scheme of the present embodiment, although the line roughness of each convex portion 103 by
Specific embodiment influences, and is uncontrollable, but, including the fuse of multiple convex portions 103 is formed. from fuse 123 generally speaking
Technique is controllable so that the line roughness of fuse 123 is substantially controllable, realizes the controllability of manufacturing process.
The electric fuse formation process of the present embodiment and traditional electric fuse formation process are essentially identical, and its difference is electric smelting
Silk figure is different, and the present embodiment deliberately manufactures the electric fuse with larger line edge roughness.Electric fuse can be with transistor
Grid is formed simultaneously.
Reference picture 2, convex portion 123 have the first line width W along the width of body 1331, it is same positioned at body 133
First line width W of adjacent two convex portion 103 of side wall1Can be unequal.
Convex portion 123 has the second line width W along the length direction of body 1332, positioned at the phase of 133 same side wall of body
Second line width W of adjacent two convex portions 1032Can be unequal.
Space between adjacent two convex portion 103 of the same side of body 133 has along the length direction of body 133
3rd line width W3, the 3rd line width W positioned at the gap of 133 same side wall of body3Can be unequal.
In the present embodiment, multiple convex portions 103 of the both sides of body 133 are symmetrical on body 133.So, along fuse
The thermograde even variation of length direction, heat is easily concentrated in fuse area, and then the fuse of fuse area is easy to fuse.
Reference picture 3, electric fuse structure also includes：
Interlayer dielectric layer 104 in substrate 100, interlayer dielectric layer 104 cover substrate 100 and electric fuse 102；
The first conductive plunger 105 and the second conductive plunger 106 in interlayer dielectric layer 104, the first conductive plunger 105
Electrically connect with anode 121, electrically connected between the second conductive plunger 106 and negative electrode 122.
First conductive plunger 105 and the second conductive plunger 106 electrically connect electric fuse 102 with external circuit.Led first
Between electric plug 105 and anode 121, there is metal silicide 107 between the second conductive plunger 106 and negative electrode 122.Metal silication
Thing 107 is used to reduce the contact between the first conductive plunger 105 and anode 121, between the second conductive plunger 106 and negative electrode 122
Resistance, increase the immediate current passed through in electric fuse, avoid the resistance of electric fuse in itself from reducing immediate current, make fuse as expected
Fusing.
In a particular embodiment, the material of metal silicide 107 is nisiloy, titanium silicon or cobalt silicon.
The embodiment of the present invention also provides another electric fuse structure.
Compared with previous embodiment, in the present embodiment, reference picture 4, in the fuse 200 of electric fuse, positioned at body 233
First line width W of adjacent two convex portion 203 of same side wall1It is equal, it can so make the thermograde along the length direction of fuse 203 equal
Even change, be advantageous to heat in fuse concentration of local, fuse is easy to fuse.
Further, positioned at the second line width W of adjacent two convex portion 203 of 233 same side wall of body2It is equal, positioned at described
The 3rd line width W in the gap of 233 same side wall of body3It is equal.So, point of multiple convex portions 203 of the length direction of fuse 223
Cloth is more regular, and thermograde change is more uniform, is more beneficial for heat in fuse concentration of local, fuse is easy to fuse.
In addition in place of the difference with previous embodiment, other unspecified interior perhaps alternatives refer to foregoing
Embodiment, repeat no more in the present embodiment.
The present invention provides another electric fuse structure.
Reference picture 5, in the fuse 323 of electric fuse, the curved distribution of edge lines of convex portion 303.The concave surface of the arc
The axis of body 333 can be directed towards or backwards to the axis of body 333.
In other embodiments, the edge lines of fuse may also be other shapes.
In addition in place of the difference with previous embodiment, other unspecified interior perhaps alternatives refer to foregoing
Embodiment, repeat no more in the present embodiment.
Although present disclosure is as above, the present invention is not limited to this.Any those skilled in the art, this is not being departed from
In the spirit and scope of invention, it can make various changes or modifications, therefore protection scope of the present invention should be with claim institute
The scope of restriction is defined.
Claims (10)
- A kind of 1. electric fuse structure, it is characterised in that including：Substrate, formed with fleet plough groove isolation structure in the substrate；Electric fuse on the fleet plough groove isolation structure, the electric fuse include anode, negative electrode and positioned at the anode and Fuse between negative electrode；The fuse includes body and is distributed positioned at the body portion sidewalls and along the body length direction multiple convex Portion, there is space between adjacent two convex portion of the same side wall of the body.
- 2. electric fuse structure as claimed in claim 1, it is characterised in that the convex portion has along the body width The first line width, the first line width positioned at adjacent two convex portion of the same side wall of the body is equal.
- 3. electric fuse structure as claimed in claim 1, it is characterised in that the convex portion has along the body length direction The second line width, the second line width positioned at adjacent two convex portion of the same side wall of the body is equal.
- 4. electric fuse structure as claimed in claim 1, it is characterised in that the space has along the body length direction The 3rd line width, the 3rd line width positioned at the space of the same side wall of the body is equal.
- 5. the electric fuse structure as described in any one of Claims 1 to 4, it is characterised in that the body two side it is multiple Convex portion is symmetrical on the body.
- 6. electric fuse structure as claimed in claim 1, it is characterised in that the edge lines of the convex portion are curved.
- 7. electric fuse structure as claimed in claim 1, it is characterised in that the material of the electric fuse is DOPOS doped polycrystalline silicon.
- 8. electric fuse structure as claimed in claim 1, it is characterised in that also include：Interlayer dielectric layer in the substrate, the interlayer dielectric layer covering substrate and electric fuse；The first conductive plunger and the second conductive plunger in the interlayer dielectric layer, the first conductive plunger and the anode electricity Connection, the second conductive plunger and the negative electrode electrical connection.
- 9. electric fuse structure as claimed in claim 8, it is characterised in that between first conductive plunger and anode, institute Stating has metal silicide between the second conductive plunger and negative electrode.
- 10. electric fuse structure as claimed in claim 9, it is characterised in that the metal silicide is nisiloy, titanium silicon or cobalt Silicon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310654425.XA CN104701294B (en) | 2013-12-05 | 2013-12-05 | electric fuse structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310654425.XA CN104701294B (en) | 2013-12-05 | 2013-12-05 | electric fuse structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104701294A CN104701294A (en) | 2015-06-10 |
| CN104701294B true CN104701294B (en) | 2018-02-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310654425.XA Active CN104701294B (en) | 2013-12-05 | 2013-12-05 | electric fuse structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104701294B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108766952B (en) * | 2018-05-22 | 2020-12-04 | 武汉新芯集成电路制造有限公司 | Electrically programmable fuse structure, integrated circuit and electronic device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101752344A (en) * | 2008-12-08 | 2010-06-23 | 联华电子股份有限公司 | Contact plug electric fuse structure and method for manufacturing contact plug electric fuse device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5608257A (en) * | 1995-06-07 | 1997-03-04 | International Business Machines Corporation | Fuse element for effective laser blow in an integrated circuit device |
| US20070284693A1 (en) * | 2006-06-09 | 2007-12-13 | International Business Machines Corporation | Electrically programmable fuse with asymmetric structure |
| US8101977B2 (en) * | 2007-05-09 | 2012-01-24 | Intersil Corporation | Ballasted polycrystalline fuse |
-
2013
- 2013-12-05 CN CN201310654425.XA patent/CN104701294B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101752344A (en) * | 2008-12-08 | 2010-06-23 | 联华电子股份有限公司 | Contact plug electric fuse structure and method for manufacturing contact plug electric fuse device |
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| Publication number | Publication date |
|---|---|
| CN104701294A (en) | 2015-06-10 |
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