CN104696200A - Oil filtering type air filter used between czochralski furnace and vacuum pump - Google Patents
Oil filtering type air filter used between czochralski furnace and vacuum pump Download PDFInfo
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- CN104696200A CN104696200A CN201510099512.2A CN201510099512A CN104696200A CN 104696200 A CN104696200 A CN 104696200A CN 201510099512 A CN201510099512 A CN 201510099512A CN 104696200 A CN104696200 A CN 104696200A
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- China
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- vacuum pump
- oil
- filtering tank
- air filter
- filter screen
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Abstract
The invention discloses an oil filtering type air filter used between a czochralski furnace and a vacuum pump. The oil filtering type air filter comprises a filtering tank with an oil liquid, wherein two layers of metal filtering nets are arranged above the oil liquid surface and are fixed on the inner surface of the upper cover of the filtering tank through a vertical fixing rod; an air inlet is formed in one side of the filtering tank; an air outlet and an observation hole are formed in the upper cover; a drainage hole is formed in the bottom of the filtering tank; the air inlet is connected with the czochralski furnace through a tube connector; the air outlet is connected with the vacuum pump through a tube connector; a valve is mounted at the drainage hole through a tube connector. By adopting the oil filtering type air filter, dirty air in the czochralski furnace can be sucked into the oil filtering type air filter under the action of negative pressure of the vacuum pump, impurities such as particles and dust are deposited at the bottom of the oil liquid, clean air is discharged out and fed into the vacuum pump, safe and reliable operation of the vacuum pump can be ensured, and the oil filtering type air filter has the characteristics that the structure is simple, the operation is simple and convenient, the service life of the vacuum pump can be prolonged, and the like, so that multiple problems that the vacuum pump is prevented from being frequently damaged, the repairing rate is increased, the production efficiency is affected, the repairing cost is increased, and the like can be reduced and solved.
Description
Technical field
The present invention relates to the air cleaning unit of Czochralski furnace, particularly relate to a kind of for the oil filter formula air filter between Czochralski furnace and vacuum pump.
Background technique
Existing air filter does not have medium and adopts the filter type of single filter screen, and filtering effect is bad.The Main Function being particularly useful for the air filter between Czochralski furnace and vacuum pump clears up particulate, dust and the impurity in Czochralski furnace.Dust impurity etc. enters vacuum pump, causes vacuum pump often to damage, and maintenance rate increases, and have impact on manufacturing efficiency, adds maintenance cost.
Summary of the invention
In view of above-mentioned prior art Problems existing and defect, the present invention designs a kind of for the oil filter formula air filter between Czochralski furnace and vacuum pump.
The technological scheme that the present invention takes is: a kind of for the oil filter formula air filter between Czochralski furnace and vacuum pump, it is characterized in that: comprise the filtering tank that fluid is housed, double layer of metal filter screen is set above the oil level in filtering tank, double layer of metal filter screen is fixed on the upper interior surface central position of filtering tank by vertical fixing rod, one side of filtering tank is provided with suction port, the upper cover of filtering tank is respectively equipped with air outlet and liquid level observation panel, sewage draining exit is provided with at the bottom of the tank of filtering tank, wherein suction port is connected with Czochralski furnace by gas-tpe fitting, air outlet is connected with vacuum pump by gas-tpe fitting, sewage draining exit is equipped with valve by gas-tpe fitting.
The beneficial effect that the present invention produces is: adopt the present invention, the dirty air in Czochralski furnace can be made to suck oily filter formula air filter by the effect of vacuum pump negative pressure, particulate, the bottom of the Impurity depositions such as dust fluid in filtering tank, clean air is discharged and enters vacuum pump, reach contamination-free, clean effect, ensure vacuum pump safe and reliable operation, there is structure simple, easy and simple to handle, extend the features such as the working life of vacuum pump, thus reduce and avoid vacuum pump and often damage, maintenance rate increases, affect manufacturing efficiency, increase the problems such as maintenance cost.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described:
Oil filter formula air filter is connected between Czochralski furnace and vacuum pump, and Czochralski furnace and vacuum pump are known equipment in the industry.
With reference to Fig. 1, oily filter formula air filter comprises the filtering tank 1 that fluid is housed, and arranges double layer of metal filter screen above the oil level in filtering tank 1, double layer of metal filter screen, its upper strata is thin metal filter screen 2, and lower floor is crude metal filter screen 3, and the order number of thin metal filter screen 2 is 10; The order number of crude metal filter screen 3 is 4.Double layer of metal filter screen is fixed on the upper cover 1.1 internal surface central position of filtering tank 1 by vertical fixing rod 4, and the lower end of vertical fixing rod 4 is welded with double layer of metal filter screen; Upper end is welded with upper cover 1.1 internal surface.One side of filtering tank 1 is provided with suction port 5, the upper cover 1.1 of filtering tank 1 is respectively equipped with air outlet 6 and liquid level observation panel 7, at the bottom of the tank of filtering tank 1,1.2 are provided with sewage draining exit 8, wherein suction port 5 is connected with Czochralski furnace by links such as metal bellowss, air outlet 6 is connected with vacuum pump by links such as metal bellowss, and sewage draining exit 8 is equipped with valve by gas-tpe fitting.
The working principle of oil filter formula air filter: above the inherent oil level of filtering tank, double layer of metal filter screen is set, and by the adhesion of oil film and the multiple stack structure of metal filter screen, form Multi-channel filtering wave band, with particulate, the vitiated air of the impurity such as dust enters in fluid, by under vacuum pump suction function, can automatically roll at fluid turning in during air flowing, air forms the bubble of a large amount of oil film parcel when rising to liquid level, particulate in air, dirt ash waits impurity to repeat to filter in Multi-channel filtering wave band, oil film bubble is broken by double layer of metal filter screen, particulate, the Impurity depositions such as dust are in the bottom of filtering tank fluid.Fluid itself has good stickiness, and degerming, filtered air is pure and fresh pleasant.Clean air is discharged.Be deposited in bottom filtering tank dirty by blowdown valve periodic exhaustion.
Oil filter formula air filter covers and is provided with peep hole, can observe the working state of liquid level and equipment at any time, bottom is provided with blowdown valve, periodical blowdown.
Fluid in filtering tank can be divided into: mineral oil, vegetable oil, biological wet goods, also can utilize used oil, and fluid dirtier bottom filtering tank can supplement part fluid by suction port, without the need to whole replacing after discharging.Suction port tracheae enters in filtering tank to oil level.
Double layer of metal filter screen is divided into thickness two trace overlap to filter wave band, and adopt 304 stainless steels, corrosion-resistant, not easily get rusty, repair rate is low.The design of metal filter screen, makes to discharge air purity and significantly promotes.
Oil filter formula air filter is independent and device that is that establish one's own system, is equipped with the link of corresponding size, is just applicable to the vacuum pump of various different model, specification according to the vacuum pump of different model, specification.The present invention also can be widely used in the industries such as chemical industry, metallurgy, oil, food and in various vacuum oil-filter.
Claims (3)
1. filter formula air filter for the oil between Czochralski furnace and vacuum pump for one kind, it is characterized in that: comprise the filtering tank (1) that fluid is housed, above oil level in filtering tank (1), double layer of metal filter screen is set, double layer of metal filter screen is fixed on upper cover (1.1) the internal surface central position of filtering tank (1) by vertical fixing rod (4), one side of filtering tank (1) is provided with suction port (5), the upper cover (1.1) of filtering tank (1) is respectively equipped with air outlet (6) and liquid level observation panel (7), at the bottom of the tank of filtering tank (1), (1.2) are provided with sewage draining exit (8), wherein suction port (5) is connected with Czochralski furnace by gas-tpe fitting, air outlet (6) is connected with vacuum pump by gas-tpe fitting, sewage draining exit (8) is equipped with valve by gas-tpe fitting.
2. according to claim 1 a kind of for the oil filter formula air filter between Czochralski furnace and vacuum pump, it is characterized in that: described double layer of metal filter screen, its upper strata is thin metal filter screen (2), and lower floor is crude metal filter screen (3).
3. according to claim 2 a kind of for the oil filter formula air filter between Czochralski furnace and vacuum pump, it is characterized in that: the order number of described thin metal filter screen (2) is 10; The order number of crude metal filter screen (3) is 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510099512.2A CN104696200A (en) | 2015-03-06 | 2015-03-06 | Oil filtering type air filter used between czochralski furnace and vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510099512.2A CN104696200A (en) | 2015-03-06 | 2015-03-06 | Oil filtering type air filter used between czochralski furnace and vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104696200A true CN104696200A (en) | 2015-06-10 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510099512.2A Pending CN104696200A (en) | 2015-03-06 | 2015-03-06 | Oil filtering type air filter used between czochralski furnace and vacuum pump |
Country Status (1)
| Country | Link |
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| CN (1) | CN104696200A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105435568A (en) * | 2015-12-07 | 2016-03-30 | 天津中环半导体股份有限公司 | Single-layer oil filtration type air filter and filtration method |
| CN105435569A (en) * | 2015-12-07 | 2016-03-30 | 天津中环半导体股份有限公司 | Two-layer oil filtering type air filter used between straight pull furnace and vacuum pump and filtering method |
| CN106772863A (en) * | 2016-12-31 | 2017-05-31 | 江苏俊知光电通信有限公司 | A kind of optical fiber cable oversheath negative pressure of vacuum shaped device and method |
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| JP2001017961A (en) * | 1999-07-02 | 2001-01-23 | Orion Mach Co Ltd | Oil-water separator for drain discharged from compressed air |
| CN201454371U (en) * | 2009-03-16 | 2010-05-12 | 杭州汉克净化设备有限公司 | Freeze drier dewatering device |
| CN103239951A (en) * | 2012-02-07 | 2013-08-14 | 南通龙鹰真空泵业有限公司 | Improved filtrating device of vacuum pump |
| CN203570540U (en) * | 2013-09-29 | 2014-04-30 | 山西卓锋钛业有限公司 | Filtering device of waste gas system |
| CN204591638U (en) * | 2015-03-06 | 2015-08-26 | 天津中环半导体股份有限公司 | For the oil filter formula air filter between Czochralski furnace and vacuum pump |
-
2015
- 2015-03-06 CN CN201510099512.2A patent/CN104696200A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001017961A (en) * | 1999-07-02 | 2001-01-23 | Orion Mach Co Ltd | Oil-water separator for drain discharged from compressed air |
| CN201454371U (en) * | 2009-03-16 | 2010-05-12 | 杭州汉克净化设备有限公司 | Freeze drier dewatering device |
| CN103239951A (en) * | 2012-02-07 | 2013-08-14 | 南通龙鹰真空泵业有限公司 | Improved filtrating device of vacuum pump |
| CN203570540U (en) * | 2013-09-29 | 2014-04-30 | 山西卓锋钛业有限公司 | Filtering device of waste gas system |
| CN204591638U (en) * | 2015-03-06 | 2015-08-26 | 天津中环半导体股份有限公司 | For the oil filter formula air filter between Czochralski furnace and vacuum pump |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105435568A (en) * | 2015-12-07 | 2016-03-30 | 天津中环半导体股份有限公司 | Single-layer oil filtration type air filter and filtration method |
| CN105435569A (en) * | 2015-12-07 | 2016-03-30 | 天津中环半导体股份有限公司 | Two-layer oil filtering type air filter used between straight pull furnace and vacuum pump and filtering method |
| CN106772863A (en) * | 2016-12-31 | 2017-05-31 | 江苏俊知光电通信有限公司 | A kind of optical fiber cable oversheath negative pressure of vacuum shaped device and method |
| CN106772863B (en) * | 2016-12-31 | 2020-05-01 | 江苏俊知技术有限公司 | Vacuum negative pressure forming device and method for outer sheath of optical fiber cable |
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Application publication date: 20150610 |
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