CN205252800U - A formula air cleaner is strained to double -deck oil that is used for between vertical pulling stove and vacuum pump - Google Patents
A formula air cleaner is strained to double -deck oil that is used for between vertical pulling stove and vacuum pump Download PDFInfo
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- CN205252800U CN205252800U CN201520998634.0U CN201520998634U CN205252800U CN 205252800 U CN205252800 U CN 205252800U CN 201520998634 U CN201520998634 U CN 201520998634U CN 205252800 U CN205252800 U CN 205252800U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
- Y02A50/2351—Atmospheric particulate matter [PM], e.g. carbon smoke microparticles, smog, aerosol particles, dust
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Abstract
Description
技术领域 technical field
本实用新型涉及一种直拉炉与真空泵之间的空气净化装置,特别是涉及一种用于直拉炉与真空泵之间的双层油滤式空气过滤器。 The utility model relates to an air purification device between a Czochralski furnace and a vacuum pump, in particular to a double-layer oil filter type air filter used between the Czochralski furnace and the vacuum pump.
背景技术 Background technique
现有的空气过滤器没有介质并且多采用单层油滤方式,过滤效果不理想。尤其用于直拉炉与真空泵之间的空气过滤器的主要作用是清理直拉炉中的微粒、灰尘及杂质。灰尘杂质等进入真空泵,会导致真空泵经常损坏,造成维修率增加,不但影响生产效率,还增加了维修成本。 Existing air filters have no media and mostly use single-layer oil filtration, and the filtering effect is not ideal. Especially the main function of the air filter used between the Czochralski furnace and the vacuum pump is to clean up the particles, dust and impurities in the Czochralski furnace. The entry of dust and impurities into the vacuum pump will cause frequent damage to the vacuum pump and increase the maintenance rate, which not only affects production efficiency, but also increases maintenance costs.
发明内容 Contents of the invention
鉴于现有技术存在的问题和缺陷,本实用新型设计一种用于直拉炉与真空泵之间的双层油滤式空气过滤器。采用双层油滤的过滤方式,对进入过滤罐内的空气进行两次清洁,使进入真空泵的空气更加洁净,保证真空泵安全可靠运行。 In view of the problems and defects in the prior art, the utility model designs a double-layer oil filter air filter used between the Czochralski furnace and the vacuum pump. The double-layer oil filter is used to clean the air entering the filter tank twice to make the air entering the vacuum pump cleaner and ensure the safe and reliable operation of the vacuum pump.
本实用新型为实现上述目的,所采取的技术方案是:一种用于直拉炉与真空泵之间的双层油滤式空气过滤器,其特征在于:包括过滤罐上盖、过滤罐罐底和过滤罐罐体组装在一起构成的过滤罐,还包括金属过滤网、分层挡板、进气口I、进气口II、一次排污口、二次排污口、出气口、观察口、锥形反射罩、过滤油液,所述锥形反射罩为伞状,所述分层挡板设置在过滤罐罐体内将过滤罐罐体分为上下两层油滤区,上层油滤区为细过滤,下层油滤区为粗过滤,在分层挡板上设有进气口II,在进气口II上通过数个连接柱固定锥形反射罩,在下层油滤区内设有与过滤罐罐体相固定的金属过滤网,在下层油滤区过滤罐罐体的壁上设有进气口I,进入下层油滤区内的进气口I垂直端的出口穿过金属过滤网设置在下层油滤区内,在上层油滤区过滤罐罐体壁的下端设有二次排污口,在所述过滤罐罐底上设有一次排污口,在所述过滤罐上盖上分别设有出气口和观察口,在上层油滤区和下层油滤区内分别装有过滤油液。 In order to achieve the above purpose, the utility model adopts a technical solution as follows: a double-layer oil filter air filter used between the Czochralski furnace and the vacuum pump, which is characterized in that it includes a filter tank upper cover, a filter tank bottom The filter tank assembled with the filter tank body also includes metal filter screen, layered baffle, air inlet I, air inlet II, primary sewage outlet, secondary sewage outlet, air outlet, observation port, cone shaped reflector to filter oil, the conical reflector is umbrella-shaped, the layered baffle is set in the filter tank body to divide the filter tank body into upper and lower oil filter areas, and the upper oil filter area is fine Filtration, the lower oil filter area is a coarse filter, the air inlet II is set on the layered baffle, the conical reflector is fixed on the air inlet II through several connecting columns, and the lower oil filter area is equipped with a filter The metal filter screen fixed to the tank body is provided with an air inlet I on the wall of the filter tank body in the lower oil filter area, and the outlet of the vertical end of the air inlet I in the lower oil filter area passes through the metal filter screen and is arranged on the In the lower oil filter area, a secondary sewage outlet is provided at the lower end of the filter tank body wall in the upper oil filter area, a primary sewage outlet is provided on the bottom of the filter tank, and a sewage discharge port is provided on the upper cover of the filter tank. The air outlet and the observation port are respectively equipped with filtered oil in the upper oil filter area and the lower oil filter area.
本实用新型所产生的有益效果是:采用本实用新型,可使直拉炉中的污浊混合气通过真空泵负压的作用吸入双层油滤式空气过滤器,微粒、灰尘、氧化物等杂质沉积在过滤罐里油液的底部,同时由于采用双层油滤方式使进入真空泵的空气更加洁净,达到无污染物、洁净的效果,保证真空泵安全可靠运行。本实用新型具有结构简单,操作简便,延长真空泵的使用寿命等特点,从而减少和避免了真空泵经常损坏,维修率增加,影响生产效率,增加维修成本等诸多问题。 The beneficial effects produced by the utility model are: adopting the utility model, the dirty mixed gas in the Czochralski furnace can be sucked into the double-layer oil filter type air filter through the negative pressure of the vacuum pump, and impurities such as particles, dust, oxides, etc. are deposited At the bottom of the oil in the filter tank, at the same time, due to the double-layer oil filter method, the air entering the vacuum pump is cleaner, achieving the effect of no pollutants and cleanness, and ensuring the safe and reliable operation of the vacuum pump. The utility model has the characteristics of simple structure, easy operation and prolonging the service life of the vacuum pump, thereby reducing and avoiding frequent damage of the vacuum pump, increasing maintenance rate, affecting production efficiency, increasing maintenance cost and many other problems.
附图说明 Description of drawings
图1为本实用新型结构示意图。 Fig. 1 is the structural representation of the utility model.
具体实施方式 detailed description
以下结合附图对本实用新型作进一步说明: Below in conjunction with accompanying drawing, the utility model will be further described:
参照图1,一种用于直拉炉与真空泵之间的双层油滤式空气过滤器,包括过滤罐上盖1-1、过滤罐罐底1-2和过滤罐罐体1-3组装在一起构成的过滤罐1,还包括金属过滤网2、分层挡板3、进气口I4、进气口II5、一次排污口6、二次排污口7、出气口8、观察口9、锥形反射罩10、过滤油液11。 Referring to Fig. 1, a kind of double-layer oil-filtered air filter used between the Czochralski furnace and the vacuum pump comprises the filter tank upper cover 1-1, the filter tank tank bottom 1-2 and the filter tank tank body 1-3 assembly The filter tank 1 formed together also includes a metal filter screen 2, a layered baffle plate 3, an air inlet I4, an air inlet II5, a primary sewage discharge port 6, a secondary sewage discharge port 7, an air outlet 8, an observation port 9, Cone reflector 10, filter oil 11.
锥形反射罩(10)为伞状。 The conical reflector (10) is umbrella-shaped.
分层挡板3设置在过滤罐罐体1-3内将过滤罐罐体1-3分为上下两层油滤区,上层油滤区为细过滤,下层油滤区为粗过滤,在分层挡板3上设有进气口II5,在进气口II5上通过数个连接柱固定锥形反射罩10,在下层油滤区内设有与过滤罐罐体1-3相固定的金属过滤网2,在下层油滤区过滤罐罐体1-3的壁上设有进气口I4,进入下层油滤区内的进气口I4垂直端的出口穿过金属过滤网2设置在下层油滤区内,在上层油滤区过滤罐罐体1-3壁的下端设有二次排污口7,在过滤罐罐底1-2上设有一次排污口6,在过滤罐上盖1-1上分别设有出气口8和观察口9,在上层油滤区和下层油滤区内分别装有过滤油液11。 The layered baffle 3 is arranged in the filter tank body 1-3 to divide the filter tank body 1-3 into upper and lower oil filter areas, the upper oil filter area is for fine filtration, and the lower oil filter area is for coarse filtration. The air inlet II5 is arranged on the baffle plate 3, and the conical reflector 10 is fixed by several connecting columns on the air inlet II5, and the metal plate fixed with the filter tank body 1-3 is arranged in the oil filter area of the lower layer. The filter screen 2 is provided with an air inlet I4 on the wall of the filter tank body 1-3 in the lower oil filter area, and the outlet of the vertical end of the air inlet I4 entering the lower oil filter area passes through the metal filter screen 2 and is arranged on the lower oil filter screen. In the filter area, a secondary sewage discharge port 7 is provided at the lower end of the filter tank body 1-3 wall of the upper oil filter area, and a primary sewage discharge port 6 is provided on the bottom 1-2 of the filter tank. 1 is respectively provided with an air outlet 8 and an observation port 9, and an oil filter 11 is respectively installed in the upper oil filter area and the lower oil filter area.
过滤油液11为矿物油或植物油或生物油或废机油。 Filter oil liquid 11 is mineral oil or vegetable oil or biological oil or waste machine oil.
一种用于直拉炉与真空泵之间的双层油滤式空气过滤器的过滤方法,步骤如下:将进气口I4通过连接件与直拉炉连接,将出气口8通过连接件与真空泵连接,一次排污口6及二次排污口7分别通过连接件装有排污阀。 A method for filtering a double-layer oil filter air filter between a Czochralski furnace and a vacuum pump. The steps are as follows: connect the air inlet I4 to the Czochralski furnace through a connecting piece, and connect the gas outlet 8 to the vacuum pump through a connecting piece. Connection, the first blowdown outlet 6 and the second blowdown outlet 7 are respectively equipped with blowdown valves through connectors.
通过真空泵负压的作用,将直拉炉中带有微粒、灰尘及杂质的污浊空气通过进气口I4吸入过滤罐1内,过滤罐1内设有上下两层油滤区,吸入的空气首先通过下层油滤区的过滤油液11和金属过滤网2进行粗过滤,滤除掉部分杂质的污浊混合气再进入进气口II5,通过锥形反射罩10的反作用力,使污浊混合气自动在过滤油液11里翻滚,将污浊混合气中的杂质再次融合在过滤油液11中,完成了细过滤;空气上升到过滤油液11面时形成大量油膜包裹的气泡,而过滤油液11本身具有良好的粘附性,将空气中的微粒、尘灰等杂质过滤干净,除菌、过滤后的干净空气最终通过出气口8被真空泵排出。 Through the negative pressure of the vacuum pump, the dirty air with particles, dust and impurities in the Czochralski furnace is sucked into the filter tank 1 through the air inlet I4. The filter tank 1 is equipped with upper and lower oil filter areas. Coarse filtration is carried out through the filtered oil 11 and the metal filter screen 2 in the oil filter area of the lower layer, and the dirty mixed gas with some impurities is filtered out and then enters the air inlet II5. Tumbling in the filtered oil 11, the impurities in the dirty mixed gas are fused into the filtered oil 11 again, and the fine filtration is completed; when the air rises to the surface of the filtered oil 11, a large number of bubbles wrapped in an oil film are formed, and the filtered oil 11 It has good adhesion, and can filter out particles, dust and other impurities in the air, and the sterilized and filtered clean air is finally discharged by the vacuum pump through the air outlet 8.
过滤罐上盖1-1上设有的观察口9,可随时观察液位及设备的工作状态。 The observation port 9 that is provided with on the canister loam cake 1-1 can observe the working state of liquid level and equipment at any time.
两层油滤区的过滤后,使得空气中的微粒、灰尘等杂质分别沉积在两层油滤区的底部,对于沉淀的脏污可通过一次排污口6和二次排污口7安装的排污阀定期排放。 After the two-layer oil filter area is filtered, the particles, dust and other impurities in the air are deposited at the bottom of the two-layer oil filter area respectively, and the deposited dirt can pass through the sewage valve installed at the primary sewage outlet 6 and the secondary sewage outlet 7 Discharge regularly.
过滤罐上盖1-1上设有的观察口9,可随时观察液位及设备的工作状态。 The observation port 9 that is provided with on the canister loam cake 1-1 can observe the working state of liquid level and equipment at any time.
双层油滤式空气过滤器是独立而自成体系的装置,根据不同型号、规格的真空泵配以相应尺寸的连接件,就可适用于各种不同型号、规格的真空泵。本发明也可广泛应用于化工、冶金、石油、食品等行业中及各种真空滤油机中。 The double-layer oil filter air filter is an independent and self-contained device. According to different models and specifications of vacuum pumps, it can be applied to various types and specifications of vacuum pumps with corresponding size connectors. The invention can also be widely used in industries such as chemical industry, metallurgy, petroleum, food and various vacuum oil purifiers.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520998634.0U CN205252800U (en) | 2015-12-07 | 2015-12-07 | A formula air cleaner is strained to double -deck oil that is used for between vertical pulling stove and vacuum pump |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520998634.0U CN205252800U (en) | 2015-12-07 | 2015-12-07 | A formula air cleaner is strained to double -deck oil that is used for between vertical pulling stove and vacuum pump |
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| CN205252800U true CN205252800U (en) | 2016-05-25 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105435569A (en) * | 2015-12-07 | 2016-03-30 | 天津中环半导体股份有限公司 | Two-layer oil filtering type air filter used between straight pull furnace and vacuum pump and filtering method |
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2015
- 2015-12-07 CN CN201520998634.0U patent/CN205252800U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105435569A (en) * | 2015-12-07 | 2016-03-30 | 天津中环半导体股份有限公司 | Two-layer oil filtering type air filter used between straight pull furnace and vacuum pump and filtering method |
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Address after: 300384 No.12 Haitai East Road, Huayuan Industrial Zone, New Technology Industrial Park, Binhai New Area, Tianjin Patentee after: TCL Zhonghuan New Energy Technology Co.,Ltd. Address before: No. 12, Haitai East Road, Xiqing District, Tianjin, 300384 Patentee before: TIANJIN ZHONGHUAN SEMICONDUCTOR CO.,LTD. |
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Granted publication date: 20160525 |