CN104671498B - A kind of processing method and processing device containing superfine silica powder waste water - Google Patents
A kind of processing method and processing device containing superfine silica powder waste water Download PDFInfo
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- CN104671498B CN104671498B CN201510034498.8A CN201510034498A CN104671498B CN 104671498 B CN104671498 B CN 104671498B CN 201510034498 A CN201510034498 A CN 201510034498A CN 104671498 B CN104671498 B CN 104671498B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W10/00—Technologies for wastewater treatment
- Y02W10/30—Wastewater or sewage treatment systems using renewable energies
- Y02W10/37—Wastewater or sewage treatment systems using renewable energies using solar energy
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- Separation Of Suspended Particles By Flocculating Agents (AREA)
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Abstract
The present invention discloses a kind of processing method and processing device containing superfine silica powder waste water, belongs to the process field of polysilicon industry silicon powder-containing waste water；The method of the invention, using 20 ~ 32%NaOH solution as precipitant, adds containing in superfine silica powder waste water, makes superfine silica powder in waste water flocculate, natural sedimentation in about hour.The NaOH solution of present invention high concentration is as precipitant, solve owing in the waste water of the cutting process generations such as silicon core, silicon powder particle is the least, surface activity is high, hydrogenate with water, (exceed half a year) for a long time and suspend in water do not precipitate, the problem of filtration difficulty, can significantly alleviate the load of existing pressure-filtering process, improve filter efficiency, supernatant alkaline water and filtrate alkaline water realize recycling for the absorbent of chlorosilane waste gas drip washing operation, meanwhile, the processing pressure of subsequent wastewater treatment system is alleviated.The present invention processes containing superfine silica powder waster water process simple, and the flocculation sediment time is short, high treating effect, low cost.
Description
Technical field
The present invention relates to a kind of processing method and processing device containing superfine silica powder waste water, belong to polysilicon industry silicon powder-containing waste water
Process field.
Background technology
Silicon powder-containing wastewater source: in silicon core preparation section, the silica flour produced with silicon core saw cut silicon rod, simultaneously with ultrapure
Water as the directly cooling of silicon rod cutting process and silicon core saw, silicon rod surface are washed formed containing superfine silica powder
Silicon powder-containing waste water.
Silica flour in silicon powder-containing waste water is very thin, and major part grain diameter hangs at 0.1 ~ 1 μ m, major part fine particle
Floating in water, stand half a year more than and also only have part bulky grain to be deposited on bottom, the tiny silica flour of major part still suspends in water,
Silicon powder-containing waste water is made to be constantly in the state of muddiness.
Owing to the silica flour in silicon powder-containing waste water is very thin, its surface reaction activity is high, can react with water, produces
H2, so silicon powder-containing waste water can not long term storage, have the danger caught fire, chemical formula: Si+3H2O→H2SiO3+2H2↑.The present invention
People thinks that the silicon powder surface in silicon powder-containing waste water has occurred that change (aquation generation silicic acid), if by its silicon powder-containing waste water
Silica flour reclaims, the most difficult, and to obtain material may not be high purity polycrystalline silicon.
Owing in silicon powder-containing waste water, silicon powder particle particle diameter is less, general filtration treatment effect is bad, and after processing
Water turbidity is the highest, it is impossible to direct reuse is also difficult to qualified discharge, and additionally aquation silica flour blocking filter cloth is serious so that cross filtration resistance
Power is big, and filter efficiency is low, changes filter cloth cycle time, and cost is high.
From the point of view of the composition of silicon powder-containing waste water, substantially it is made up of superfine silica powder and ultra-pure water.If institute is siliceous in water
Powder can not be removed, and water is just difficult to recycle, and does not also meet the standard that cleaning produces.
Present stage report silicon powder-containing method of wastewater treatment mainly by containing float method of wastewater treatment at
Reason, is i.e. to add the flocculant such as aluminium polychlorid (PAC), polyacrylamide (PAM), polyacrylic acid to make silicon powder-containing waste water flocculating sink
Forming sediment, this method processes silicon powder-containing waste water, weak effect, and introduces a lot of other element, to the resource profit of water after processing
With impacting.
Patent CN103272433A discloses a kind of silicon powder-containing waste water filtering purifying treatment method, this silicon powder-containing waste component
Identical with the silicon powder-containing waste water of the present invention, the method is using perlite or kieselguhr as filter aid, first by perlite or
Kieselguhr and clear water mixing, then use chamber-type press filter filter pressing, perlite or kieselguhr shape on the filter cloth of chamber-type press filter
Become a metafiltration film, then switch silicon powder-containing waste water and continue through chamber-type press filter and filter.The advantage of this invention is that the water after processing is
Neutrality, can directly discharge or reuse, and the weak point that this invention exists is that the filtrate of early stage is defective, needs the most more
Changing filter membrane, cost is high, less additionally, due to silica flour particle diameter in silicon powder-containing waste water, and filter membrane blocking is serious, and difficult cleaning cleans filter cloth again
Produce a large amount of waste water, increase wastewater flow rate so that treatment effeciency is low.
Patent CN102653433A discloses the processing method of the technique waste water preparing silicon wafer, this silicon powder-containing waste component
Different from the silicon powder-containing waste component of the present invention, in this invention, the main component of technique waste water also has SiC and organic except silica flour
Thing, the first step of this invention removes microgranule in technique waste water exactly, and the method is mentioned and made particle coagulation by the method for chemical flocculation
Become colloid, then realize solid-liquid separation through precipitation unit, obtain supernatant and exist without obvious granule.Use is not talked about in this invention
Which kind of flocculant, mentions the method and can remove the microgranule of 90% ~ 95% in patent.
Patent CN101683981A discloses a kind of waste silicon solution reclaiming method, and this patent first step mentions cutting silicon rod
The useless silicon waste water produced is centrifuged separating, and filter cloth aperture is 800 ~ 1500 mesh, it is thus achieved that silica flour material, through a series of physics
Chemical method reclaims and obtains solar energy-level silicon wafer.The advantage of the method is to achieve the resource of silica flour in silicon powder-containing waste water, and
And processed water, but for the silicon powder-containing waste water in the present invention, its silica flour particle diameter is very thin, is directly carried out by silicon powder-containing waste water
Centrifugation is the most inapplicable, and its treatment effect is bad.
Patent CN103028329A discloses a kind of abrasive waste water reuse with tube type filter membrance assembly, silica flour reclaims dress
Put, this patent mainly with can the silicon powder-containing sewage treatment equipment that tube type filter membrance assembly is main body of backwash, this invention
Advantage is high treating effect, and treatment effeciency is high, but the method is relatively costly.
In the open silicon cutting wastewater of patent CN101683981A, silica flour and waste water reclamation utilize devices and methods therefor, this invention
Utilizing electrolysis system, centrifugal separation system, drying system, filtration system, this invention silicon powder-containing waste component is different from the present invention,
Possibly together with SiC outside removing silicon powder, Polyethylene Glycol, surfactant.
Summary of the invention
In silicon powder-containing waste water, the particle diameter of silica flour is less, and long-time standing does not precipitates, and traditional processing method effect is bad, existing
Some methods are relatively costly, and the technical problem to be solved in the present invention is to provide the silicon powder-containing waste water that a kind of silicon core cutting process produces
Processing method, it is achieved the recycling of alkaline water after precipitant and silicon-containing wastewater process in silicon-containing wastewater, and alleviate follow-up useless
The processing pressure of water treatment facilities.
Processing method containing superfine silica powder waste water of the present invention, comprises the following steps:
(1) waste water (granularity of silica flour is 0.1 ~ 1 μm) containing superfine silica powder is passed through in wastewater collection pond 1, then will contain
The waste water of superfine silica powder is passed through in flocculation sedimentation tank 2；
(2) precipitant NaOH solution (mass percent is 20 ~ 32%) is pumped in flocculation sedimentation tank 2 by alkali liquor pond 3,
Controlling blender rotating speed is 10 ~ 20r/min；Control the pH value of flocculation sedimentation tank 2 liquid be 12 ~ 13.5 and the response time be 30 ~
90min forms supernatant layer and the beds of precipitation；
(3) flocculation sedimentation tank 2 upper supernatant layer enters alkaline water collecting pit 6；Alkaline water one in alkaline water collecting pit 6
Part returns to alkali liquor pond 3 as circulation alkaline water, is used for preparing precipitant solution, and remaining part is transported to industry water and collects
In pond 5, it is then fed in chlorosilane waste gas drip washing equipment 7 as the absorbent in chlorosilane waste gas lessivation；
(4) flocculation sedimentation tank 2 bottom sediment is transported in pressure filter 4 carry out filter pressing, and filtering residue directly transports slag storehouse, filtrate to
Enter alkaline water collecting pit 6.
Device used by processing method containing superfine silica powder waste water of the present invention includes silicon-containing wastewater collecting pit 1, wadding
Coagulate sedimentation tank 2, alkali liquor pond 3, pressure filter 4, industry water collecting pit 5, alkaline water collecting pit 6, chlorosilane waste gas drip washing equipment 7, stir
Mixing device I 8, agitator II 9, wastewater collection pond 1, alkali liquor pond 3 are connected with flocculation sedimentation tank 2 by pump respectively, flocculation sedimentation tank 2
Lower end by pump connects with pressure filter 4, upper end connects with alkaline water collecting pit 6；Alkaline water collecting pit 6 and industry water collecting pit
5 connections, and be connected with alkali liquor pond 3 by pump, industry water collecting pit 5 is connected with chlorosilane waste gas drip washing equipment 7 by pump；Flocculation
Sedimentation tank 2, internal being respectively equipped with between agitator I 8 and agitator II 9, each parts being connected in alkali liquor pond 3 are equipped with valve
Door.
Chlorosilane waste gas drip washing operation of the present invention refers to from trichlorosilane synthesis procedure, trichlorosilane rectification and purification
Operation and trichlorosilane reduction operation are produced containing SiH2Cl2、SiHCl3And SiCl4Spray-absorption is carried out Deng waste gas alkali liquor
The technical process processed.
Beneficial effects of the present invention:
(1) present invention adds the flocculant such as PAC, PAM using NaOH solution as precipitant rather than tradition, reduces siliceous
The cost that powder waste water processes, without other impurity, the recycling of alkaline water after convenient process；
(2) present invention with 20 ~ 32%NaOH solution of high concentration as flocculant, it is possible to reduce the amount of bringing into of moisture, to alleviate
The processing pressure of equipment；
(3) present invention is not traditional process containing powder silicon waste water to reach discharge standard or recycle water standard, but becomes
Becoming the raw material of other operations of factory, it may be assumed that the alkaline water produced after processing silicon powder-containing waste water, a part returns to alkali liquor pond and continues
As the water used by precipitant preparation, another part is as the absorbent of chlorosilane exhaust-gas treatment operation, it is achieved alkali and the money of water
Sourceization utilizes；
(4) simply, the flocculation sediment time is short, high treating effect for silicon powder-containing sewage treatment equipment of the present invention, technique.
Accompanying drawing explanation
Fig. 1 is the process flow diagram of the present invention；
In figure: 1-wastewater collection pond；2-flocculation sedimentation tank；3-alkali liquor pond；4-pressure filter；5-industry water collecting pit；6-alkali
Property water collecting pit；7-chlorosilane waste gas drip washing equipment；8-agitator I；9-agitator II.
Detailed description of the invention
With detailed description of the invention, the present invention is described in further detail below in conjunction with the accompanying drawings, but protection scope of the present invention
It is not limited to described content.
Embodiment 1
The processing method of superfine silica powder waste water is contained, it is characterised in that comprise the following steps described in the present embodiment:
(1) waste water (granularity of silica flour is 0.1 ~ 1 μm) containing superfine silica powder is collected in silicon-containing wastewater collecting pit 1, so
After the waste water containing superfine silica powder is passed through in flocculation sedimentation tank 2；
(2) precipitant NaOH solution (mass percent is 20%) is pumped in flocculation sedimentation tank 2 by alkali liquor pond 3, controls
Agitator speed is 10r/min；The pH value of control flocculation sedimentation tank 2 liquid is 12.81 and the response time is that 30min forms supernatant
Liquid layer and the beds of precipitation；
(3) flocculation sedimentation tank 2 upper supernatant layer enters alkaline water collecting pit 6；Alkaline water one in alkaline water collecting pit 6
Part returns to alkali liquor pond 3 as circulation alkaline water, is used for preparing precipitant solution, and remaining part is transported to industry water and collects
In pond 5, it is then fed in chlorosilane waste gas drip washing equipment 7 as the absorbent in chlorosilane waste gas lessivation；
(4) flocculation sedimentation tank 2 bottom sediment is transported in pressure filter 4 carry out filter pressing, and filtering residue directly transports slag storehouse, filtrate to
Enter alkaline water collecting pit 6；
The device used by the processing method containing superfine silica powder waste water described in the present embodiment include silicon-containing wastewater collecting pit 1,
Flocculation sedimentation tank 2, alkali liquor pond 3, pressure filter 4, industry water collecting pit 5, alkaline water collecting pit 6, chlorosilane waste gas drip washing equipment 7,
Agitator I 8, agitator II 9, wastewater collection pond 1, alkali liquor pond 3 be connected with flocculation sedimentation tank 2 by pump respectively, flocculation sediment
The lower end in pond 2 is by pump connects with pressure filter 4, upper end connects with alkaline water collecting pit 6；Alkaline water collecting pit 6 is received with industry water
Collection pond 5 connects, and is connected with alkali liquor pond 3 by pump, and industry water collecting pit 5 is connected with chlorosilane waste gas drip washing equipment 7 by pump；
Flocculation sedimentation tank 2, internal being respectively equipped with between agitator I 8 and agitator II 9, each parts being connected in alkali liquor pond 3 are equipped with
Valve.
The leading indicator of the silicon-containing wastewater after the present embodiment process is shown in Table 1, it is evident that the float (SS) of waste water and turbidity
All meet enterprise's recycle water standard, may be used for production of polysilicon enterprise chlorosilane waste gas absorption.
Index before and after the process of table 1. silicon powder-containing waste water
Embodiment 2
The processing method of superfine silica powder waste water is contained, it is characterised in that comprise the following steps described in the present embodiment:
(1) waste water (granularity of silica flour is 0.1 ~ 1 μm) containing superfine silica powder is collected in silicon-containing wastewater collecting pit 1, so
After the waste water containing superfine silica powder is passed through in flocculation sedimentation tank 2；
(2) precipitant NaOH solution (mass percent is 30%) is pumped in flocculation sedimentation tank 2 by alkali liquor pond 3, controls
Agitator speed is 15r/min；The pH value of control flocculation sedimentation tank 2 liquid is 12.90 and the response time is that 60min forms supernatant
Liquid layer and the beds of precipitation；
(3) flocculation sedimentation tank 2 upper supernatant layer enters alkaline water collecting pit 6；Alkaline water one in alkaline water collecting pit 6
Part returns to alkali liquor pond 3 as circulation alkaline water, is used for preparing precipitant solution, and remaining part is transported to industry water and collects
In pond 5, it is then fed in chlorosilane waste gas drip washing equipment 7 as the absorbent in chlorosilane waste gas lessivation；
(4) flocculation sedimentation tank 2 bottom sediment is transported in pressure filter 4 carry out filter pressing, and filtering residue directly transports slag storehouse, filtrate to
Enter alkaline water collecting pit 6；
The device used by the processing method containing superfine silica powder waste water described in the present embodiment include silicon-containing wastewater collecting pit 1,
Flocculation sedimentation tank 2, alkali liquor pond 3, pressure filter 4, industry water collecting pit 5, alkaline water collecting pit 6, chlorosilane waste gas drip washing equipment 7,
Agitator I 8, agitator II 9, wastewater collection pond 1, alkali liquor pond 3 be connected with flocculation sedimentation tank 2 by pump respectively, flocculation sediment
The lower end in pond 2 is by pump connects with pressure filter 4, upper end connects with alkaline water collecting pit 6；Alkaline water collecting pit 6 is received with industry water
Collection pond 5 connects, and is connected with alkali liquor pond 3 by pump, and industry water collecting pit 5 is connected with chlorosilane waste gas drip washing equipment 7 by pump；
Flocculation sedimentation tank 2, internal being respectively equipped with between agitator I 8 and agitator II 9, each parts being connected in alkali liquor pond 3 are equipped with
Valve.
The leading indicator of the silicon-containing wastewater after the present embodiment process is shown in Table 2, it is evident that the float (SS) of waste water and turbidity
All meet enterprise's recycle water standard, may be used for production of polysilicon enterprise chlorosilane waste gas absorption.
Index before and after the process of table 2. silicon powder-containing waste water
Embodiment 3
The processing method of superfine silica powder waste water is contained, it is characterised in that comprise the following steps described in the present embodiment:
(1) waste water (granularity of silica flour is 0.1 ~ 1 μm) containing superfine silica powder is collected in silicon-containing wastewater collecting pit 1, so
After the waste water containing superfine silica powder is passed through in flocculation sedimentation tank 2；
(2) precipitant NaOH solution (mass percent is 32%) is pumped in flocculation sedimentation tank 2 by alkali liquor pond 3, controls
Agitator speed is 20r/min；The pH value of control flocculation sedimentation tank 2 liquid is 13.01 and the response time is that 90min forms supernatant
Liquid layer and the beds of precipitation；
(3) flocculation sedimentation tank 2 upper supernatant layer enters alkaline water collecting pit 6；Alkaline water one in alkaline water collecting pit 6
Part returns to alkali liquor pond 3 as circulation alkaline water, is used for preparing precipitant solution, and remaining part is transported to industry water and collects
In pond 5, it is then fed in chlorosilane waste gas drip washing equipment 7 as the absorbent in chlorosilane waste gas lessivation；
(4) flocculation sedimentation tank 2 bottom sediment is transported in pressure filter 4 carry out filter pressing, and filtering residue directly transports slag storehouse, filtrate to
Enter alkaline water collecting pit 6；
The device used by the processing method containing superfine silica powder waste water described in the present embodiment include silicon-containing wastewater collecting pit 1,
Flocculation sedimentation tank 2, alkali liquor pond 3, pressure filter 4, industry water collecting pit 5, alkaline water collecting pit 6, chlorosilane waste gas drip washing equipment 7,
Agitator I 8, agitator II 9, wastewater collection pond 1, alkali liquor pond 3 be connected with flocculation sedimentation tank 2 by pump respectively, flocculation sediment
The lower end in pond 2 is by pump connects with pressure filter 4, upper end connects with alkaline water collecting pit 6；Alkaline water collecting pit 6 is received with industry water
Collection pond 5 connects, and is connected with alkali liquor pond 3 by pump, and industry water collecting pit 5 is connected with chlorosilane waste gas drip washing equipment 7 by pump；
Flocculation sedimentation tank 2, internal being respectively equipped with between agitator I 8 and agitator II 9, each parts being connected in alkali liquor pond 3 are equipped with
Valve.
The leading indicator of the silicon-containing wastewater after the present embodiment process is shown in Table 3, it is evident that the float (SS) of waste water and turbidity
All meet enterprise's recycle water standard, may be used for production of polysilicon enterprise chlorosilane waste gas absorption and use.
Index before and after the process of table 3. silicon powder-containing waste water
Claims (4)
1. the processing method containing superfine silica powder waste water, it is characterised in that comprise the following steps:
(1) by the wastewater collection containing superfine silica powder in wastewater collection pond (1), then the waste water containing superfine silica powder is passed through flocculation
In sedimentation tank (2)；
(2) precipitant NaOH solution is pumped in flocculation sedimentation tank (2) by alkali liquor pond (3), and control agitator speed is 10 ~ 20r/
min；The pH value of control flocculation sedimentation tank (2) liquid is 12 ~ 13.5 and the response time is 30 ~ 90min；
(3) flocculation sedimentation tank (2) upper supernatant layer enters alkaline water collecting pit (6)；Alkaline water in alkaline water collecting pit (6)
A part returns to alkali liquor pond (3) as circulation alkaline water, is used for preparing precipitant solution, and remaining part is transported to industry water
In collecting pit (5), it is then fed in chlorosilane waste gas drip washing equipment (7) as the absorbent in chlorosilane waste gas lessivation；
(4) flocculation sedimentation tank (2) bottom sediment carries out filter pressing in being transported to pressure filter (4), and filtering residue directly transports slag storehouse, filtrate to
Also into alkaline water collecting pit (6).
Processing method containing superfine silica powder waste water the most according to claim 1, it is characterised in that: the waste water of described silicon powder-containing
The granularity of middle silica flour is 0.1 ~ 1 μm.
Processing method containing superfine silica powder waste water the most according to claim 1, it is characterised in that: described precipitant NaOH is molten
The mass percent of liquid is 20 ~ 32%.
4. the device used by the processing method containing superfine silica powder waste water described in claim 1, it is characterised in that: described device bag
Include wastewater collection pond (1), flocculation sedimentation tank (2), alkali liquor pond (3), pressure filter (4), industry water collecting pit (5), alkaline water collection
Pond (6), chlorosilane waste gas drip washing equipment (7), agitator I (8), agitator II (9), wastewater collection pond (1), alkali liquor pond (3) point
Tong Guo not be connected with flocculation sedimentation tank (2) by pump, the lower end of flocculation sedimentation tank (2) by pump connect with pressure filter (4), upper end and
Alkaline water collecting pit (6) connects；Alkaline water collecting pit (6) is connected with alkali liquor pond (3), industry water collecting pit (5) by pump, industry
Water collecting pit (5) is connected with chlorosilane waste gas drip washing equipment (7) by pump；Flocculation sedimentation tank (2), alkali liquor pond (3) internal difference
It is provided with between agitator I (8) and agitator II (9), each parts being connected and is equipped with valve.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510034498.8A CN104671498B (en) | 2015-01-23 | 2015-01-23 | A kind of processing method and processing device containing superfine silica powder waste water |
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| CN201510034498.8A CN104671498B (en) | 2015-01-23 | 2015-01-23 | A kind of processing method and processing device containing superfine silica powder waste water |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105174531A (en) * | 2015-08-10 | 2015-12-23 | 陕西天宏硅材料有限责任公司 | Special treatment system and treatment method for leaching waste water containing silane waste gas in polysilicon production |
| CN106746019A (en) * | 2017-01-16 | 2017-05-31 | 浙江中州硅业有限公司 | A kind of industrial silicon p owder production sewage technique |
| CN106865819A (en) * | 2017-03-03 | 2017-06-20 | 四川新能水处理工程有限公司 | IC package technique waste water processing method |
| CN110314515A (en) * | 2019-04-29 | 2019-10-11 | 新疆大全新能源股份有限公司 | The processing system and processing method of silicon powder residue in a kind of production of trichlorosilane |
| CN110314420A (en) * | 2019-07-17 | 2019-10-11 | 西安奕斯伟硅片技术有限公司 | A kind of processing method and processing unit of silicon powder |
| CN114855275A (en) * | 2022-03-17 | 2022-08-05 | 无锡海力自控工程有限公司 | Method for recovering monocrystalline silicon powder slurry |
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| CN102390860B (en) * | 2011-08-04 | 2013-06-12 | 山东东岳有机硅材料有限公司 | Environmentally-friendly treatment method and device for organosilicon slurry |
| CN204550266U (en) * | 2015-01-23 | 2015-08-12 | 昆明理工大学 | A kind for the treatment of unit containing superfine silica powder waste water |
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