CN105174531A - Special treatment system and treatment method for leaching waste water containing silane waste gas in polysilicon production - Google Patents
Special treatment system and treatment method for leaching waste water containing silane waste gas in polysilicon production Download PDFInfo
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- CN105174531A CN105174531A CN201510486091.9A CN201510486091A CN105174531A CN 105174531 A CN105174531 A CN 105174531A CN 201510486091 A CN201510486091 A CN 201510486091A CN 105174531 A CN105174531 A CN 105174531A
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Abstract
The invention provides a special treatment system and treatment method for leaching waste water containing silane waste gas in polysilicon production. The method is as below: conducting primary adjustment on waste water in a sewage adjustment tank, sending the waste water to a sludge pond for a first neutralization, conducting a first press filtration in a filter press, the sending the filtrate into a neutralization tank for a second neutralization, conducting a second filtration in a filter, and discharging the filtrate. The system can achieve standard treatment of silane gas leaching wastewater containing chlorine, ensure that the suspension concentration in the supernatant of less than 10mg/L, pH value at 6-9, meet environmental requirements, and achieve standard discharge.
Description
Technical field
The invention belongs to flare system technical field, be specifically related to a kind of dedicated processes system for containing chlorosilane in polysilicon production waste gas wastewater eluting and treatment process.
Background technology
The waste gas main component produced in polysilicon production process is chlorosilane, hydrogenchloride, hydrogen and nitrogen etc., the conventional treatment process of chlorine-containing silane waste gas has WATER-WASHING METHOD, calcium washes method and sodium washes method, is the chlorosilane that medium and chlorine-containing silane waste gas carry out reacting to remove in waste gas respectively with water, milk of lime, sodium hydroxide solution.When the chlorosilane adopted in lime milk solution hydrolysis neutralizing treatment waste gas and hydrogenchloride, the main component that drip washing produces waste water has calcium chloride, Calucium Silicate powder, silicon-dioxide and unreacted lime.This waste water at present technique adopting neutralization to filter processes more.Due to the product that the Calucium Silicate powder in waste water, silicon-dioxide are gas and liquid reactions, particle diameter is very little, and conventional pressure filter can not effectively be removed, and causes the suspended substance in water outlet higher, can not qualified discharge, causes environmental influence.
Summary of the invention
The technical problem that the present invention solves: a kind of dedicated processes system for containing chlorosilane in polysilicon production waste gas wastewater eluting and treatment process are provided, waste water enter after initial adjustment in sludge sump in sewage regulating tank to carry out once and, then enter pressure filter and carry out a press filtration, filtrate enters neutralization tank Two-step neutralization, enter strainer after neutralization and carry out secondary press filtration, filtrate rear discharge up to standard, adopt this system can realize the process up to standard of chlorine-containing silane waste gas wastewater eluting, guarantee that the concentration of suspension of supernatant liquor is less than 10mg/L, PH is 6-9, meet environmental requirement, realize qualified discharge.
The technical solution used in the present invention: for the dedicated processes system of containing chlorosilane in polysilicon production waste gas wastewater eluting, the waste water that the drip washing of chlorine-containing silane waste gas produces enters from sewage regulating tank entrance end, the exit end of described sewage regulating tank is connected with an inlet end of sludge sump, described sludge sump exit end is connected with pressure filter inlet end, an exit end of described pressure filter is connected with an inlet end of neutralization tank, another exit end of pressure filter discharges waste residue, described neutralization tank exit end is connected with filter inlet end, an exit end of described strainer with go out water pot inlet end and be connected, another exit end of strainer discharges filter residue, described filter residue enters in sludge sump by second inlet end of sludge sump, described go out water pot exit end with contain qualified water receptacle and be connected, go out another exit end of water pot to be connected with emergent basin inlet end, described emergent basin outlet end is connected with the 3rd inlet end of sludge sump, an exit end of vitriol oil storage tank is connected with the 4th inlet end of sludge sump, another exit end of vitriol oil storage tank is connected with another inlet end of neutralization tank.
A kind for the treatment of process for containing chlorosilane in polysilicon production waste gas wastewater eluting is also provided, comprises the steps:
1) initial adjustment: first the waste water that the drip washing of chlorine-containing silane waste gas produces enter sewage regulating tank and collect, and carries out the adjustment of water quality and quantity in sewage regulating tank;
2) once neutralize: the waste water after regulating, at the bottom of the tank of sewage regulating tank, enter sludge sump, the vitriol oil added in sludge sump from vitriol oil storage tank 3 carries out neutralizing treatment, regulates waste water PH to be about 8.5;
3) once filter: the waste water after neutralization carries out press filtration through pressure filter, realizes solid-liquid separation, waste residue outward transport process, filtrate enters neutralization tank;
4) Two-step neutralization: according to the pH value of filtrate in neutralization tank, adds in the vitriol oil from vitriol oil storage tank further and regulates the pH of filtrate to be 6-9;
5) secondary filtration: the filtrate of neutralization tank 7 is filtered again by strainer, the water outlet of described strainer enters out water pot, the residue filtered down enters sludge sump, the water outlet going out water pot detects through pH and suspended substance, qualified rear outer row, underproof water outlet enters emergent pond, squeezes into sewage regulating tank again process according to running condition.
Above-mentioned steps 2) and step 4) in, once neutralization with Two-step neutralization all adopt concentration be 98% the vitriol oil.
Further, be provided with in described sludge sump and make waste water neutralize stirrer completely in it.
Further, described pressure filter is chamber-type press filter.
Further, described strainer is fluid film strainer.
The present invention compared with prior art by the first adjustment of waste water, once neutralize, once the process implementation such as filtration, Two-step neutralization, secondary filtration to the process up to standard of chlorine-containing silane waste gas wastewater eluting, avoid the generation of environmental accident.
Accompanying drawing explanation
Fig. 1 is principle of the invention structural representation.
Embodiment
Below in conjunction with accompanying drawing 1, a kind of embodiment of the present invention is described.
For the dedicated processes system of containing chlorosilane in polysilicon production waste gas wastewater eluting, the waste water 1 that the drip washing of chlorine-containing silane waste gas produces enters from sewage regulating tank 2 entrance end, the exit end of described sewage regulating tank 2 is connected with an inlet end of sludge sump 4, be provided with in sludge sump 4 and make waste water neutralize stirrer completely in it, described sludge sump 4 exit end is connected with pressure filter 5 inlet end, an exit end of described pressure filter 5 is connected with an inlet end of neutralization tank 7, another exit end of pressure filter 5 discharges waste residue 6, and pressure filter 5 is chamber-type press filter, described neutralization tank 7 exit end is connected with strainer 8 inlet end, an exit end of described strainer 8 with go out water pot 10 inlet end and be connected, strainer 8 is fluid film strainer, another exit end of strainer 8 discharges filter residue 9, described filter residue 9 enters in sludge sump 4 by second inlet end of sludge sump 4, described go out water pot 10 1 exit end with contain qualified water receptacle and be connected, go out another exit end of water pot 10 to be connected with emergent pond 11 inlet end, described emergent pond 11 exit end is connected with the 3rd inlet end of sludge sump 4, an exit end of vitriol oil storage tank 3 is connected with the 4th inlet end of sludge sump 4, another exit end of vitriol oil storage tank 3 is connected with another inlet end of neutralization tank 7.
Principle of work:
1, initial adjustment: first the waste water 1 that the drip washing of chlorine-containing silane waste gas produces enter sewage regulating tank 2 and collect, and carries out the adjustment of water quality and quantity in sewage regulating tank 2.
2, once neutralize: the waste water after regulating, at the bottom of the tank of sewage regulating tank 2, enter sludge sump 4, in sludge sump 4, add the vitriol oil carry out neutralizing treatment, regulate PH to be about 8.5, the vitriol oil is from vitriol oil storage tank 3, and in acid adding process, in sludge sump, stirrer runs continuously.
There is following principal reaction in acid adding:
Ca(OH)
2+H
2SO
4＝＝CaSO
4+H
2O---------------------1
CaCl
2+H
2SO
4＝＝CaSO
4+HCl-------------------------2
Ca(OH)
2+HCl＝＝CaCl
2+H
2O-------------------------3
3, once filter: the waste water after neutralization carries out press filtration through pressure filter 5, realizes solid-liquid separation, process transported outward by waste residue 6, and filtrate enters neutralization tank 7.
4, Two-step neutralization: according to the filtrate pH of neutralization tank 7, further acid neutralization regulates the pH of filtrate to be 6-9.
5, secondary filtration: the filtrate of neutralization tank 7 is filtered again by strainer 8.Strainer 8 adopts millipore filtration, can the suspended substance that cannot remove of effective filtration pressure filter 5.The water outlet of strainer 8 enters out water pot 10, and the residue 9 filtered down enters sludge sump 4.The water outlet going out water pot 10 detects through pH and suspended substance, and qualified rear outer row, underproof water outlet enters emergent pond 11, squeezes into sewage regulating tank 2 again process according to running condition.
The wastewater eluting of chlorine-containing silane waste gas is by the method for preconditioning, Two-step neutralization and twice filtration, and can use water suspension concentration and be less than 10mg/L, the scope control of pH, between 6-9, meets environmental requirement, realizes qualified discharge, avoids the generation of environmental accident.
Above-described embodiment, just preferred embodiment of the present invention, is not used for limiting the scope of the present invention, therefore all equivalence changes done with content described in the claims in the present invention, all should be included within the claims in the present invention scope.
Claims (6)
1. for the dedicated processes system of containing chlorosilane in polysilicon production waste gas wastewater eluting, it is characterized in that: the waste water (1) that the drip washing of chlorine-containing silane waste gas produces enters from sewage regulating tank (2) entrance end, the exit end of described sewage regulating tank (2) is connected with an inlet end of sludge sump (4), described sludge sump (4) exit end is connected with pressure filter (5) inlet end, an exit end of described pressure filter (5) is connected with an inlet end of neutralization tank (7), pressure filter (5) another exit end discharges waste residue (6), described neutralization tank (7) exit end is connected with strainer (8) inlet end, an exit end of described strainer (8) with go out water pot (10) inlet end and be connected, strainer (8) another exit end discharges filter residue (9), described filter residue (9) enters in sludge sump (4) by second inlet end of sludge sump (4), described go out water pot (10) exit end with contain qualified water receptacle and be connected, go out water pot (10) another exit end to be connected with emergent pond (11) inlet end, described emergent pond (11) exit end is connected with the 3rd inlet end of sludge sump (4), an exit end of vitriol oil storage tank (3) is connected with the 4th inlet end of sludge sump (4), another exit end of vitriol oil storage tank (3) is connected with another inlet end of neutralization tank (7).
2., as claimed in claim 1 for the treatment process of containing chlorosilane in polysilicon production waste gas wastewater eluting, it is characterized in that comprising the steps:
1) initial adjustment: first the waste water (1) that the drip washing of chlorine-containing silane waste gas produces enter sewage regulating tank (2) and collect, and carries out the adjustment of water quality and quantity in sewage regulating tank (2);
2) once neutralize: the waste water after regulating, sludge sump (4) is entered at the bottom of the tank of sewage regulating tank (2), in sludge sump (4), the vitriol oil added from vitriol oil storage tank 3 carries out neutralizing treatment, regulates waste water PH to be about 8.5;
3) once filter: the waste water after neutralization carries out press filtration through pressure filter (5), realizes solid-liquid separation, waste residue (6) outward transport process, filtrate enters neutralization tank (7);
4) Two-step neutralization: according to the pH value of neutralization tank (7) interior filtrate, adds in the vitriol oil from vitriol oil storage tank (3) further and regulates the pH of filtrate to be 6-9;
5) secondary press filtration: the filtrate of neutralization tank 7 is filtered again by strainer (8), the water outlet of described strainer (8) enters out water pot (10), the residue (9) filtered down enters sludge sump (4), the water outlet going out water pot (10) detects through pH and suspended substance, qualified rear outer row, underproof water outlet enters emergent pond (11), squeezes into sewage regulating tank (2) again process according to running condition.
3. the treatment process for containing chlorosilane in polysilicon production waste gas wastewater eluting according to claim 2, is characterized in that: above-mentioned steps 2) and step 4) in, once neutralization with Two-step neutralization all adopt concentration be 98% the vitriol oil.
4. the dedicated processes system for containing chlorosilane in polysilicon production waste gas wastewater eluting according to claim 1, is characterized in that: be provided with in described sludge sump (4) and make waste water neutralize stirrer completely in it.
5. the dedicated processes system for containing chlorosilane in polysilicon production waste gas wastewater eluting according to claim 1, is characterized in that: described pressure filter (5) is chamber-type press filter.
6. the dedicated processes system for containing chlorosilane in polysilicon production waste gas wastewater eluting according to claim 1, is characterized in that: described strainer (8) is fluid film strainer.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510486091.9A CN105174531A (en) | 2015-08-10 | 2015-08-10 | Special treatment system and treatment method for leaching waste water containing silane waste gas in polysilicon production |
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| CN201510486091.9A CN105174531A (en) | 2015-08-10 | 2015-08-10 | Special treatment system and treatment method for leaching waste water containing silane waste gas in polysilicon production |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108996570A (en) * | 2018-08-20 | 2018-12-14 | 朱翠帮 | A kind of method of treated sewage treatment discharge |
Citations (4)
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| US6413417B1 (en) * | 1999-01-28 | 2002-07-02 | Sharp Kabushiki Kaisha | Waste water treatment apparatus |
| CN203899432U (en) * | 2013-09-16 | 2014-10-29 | 陕西天宏硅材料有限责任公司 | Waste gas leaching wastewater treatment device for polycrystalline silicon production |
| CN104671498A (en) * | 2015-01-23 | 2015-06-03 | 昆明理工大学 | Treatment method and device of wastewater containing superfine silicon powder |
| CN204981418U (en) * | 2015-08-10 | 2016-01-20 | 陕西天宏硅材料有限责任公司 | A special processing system that is arranged in chloride silane waste gas drip washing waste water of polycrystalline silicon production |
-
2015
- 2015-08-10 CN CN201510486091.9A patent/CN105174531A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6413417B1 (en) * | 1999-01-28 | 2002-07-02 | Sharp Kabushiki Kaisha | Waste water treatment apparatus |
| CN203899432U (en) * | 2013-09-16 | 2014-10-29 | 陕西天宏硅材料有限责任公司 | Waste gas leaching wastewater treatment device for polycrystalline silicon production |
| CN104671498A (en) * | 2015-01-23 | 2015-06-03 | 昆明理工大学 | Treatment method and device of wastewater containing superfine silicon powder |
| CN204981418U (en) * | 2015-08-10 | 2016-01-20 | 陕西天宏硅材料有限责任公司 | A special processing system that is arranged in chloride silane waste gas drip washing waste water of polycrystalline silicon production |
Non-Patent Citations (1)
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| 杜娜: ""多晶硅生产废气处理及综合利用"", 《现代化工》 * |
Cited By (1)
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| CN108996570A (en) * | 2018-08-20 | 2018-12-14 | 朱翠帮 | A kind of method of treated sewage treatment discharge |
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Address after: 712038 Xianyang city of Shaanxi province Zhengyang town Weicheng District East Road Embankment Applicant after: Shaanxi Tianhong Silicon Material Co., Ltd. Address before: 710006 Shaanxi city of Xi'an province high tech Zone High Road No. 51 building 6 floor Applicant before: Shaanxi Tianhong Silicon Material Co., Ltd. |
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Application publication date: 20151223 |