CN104658934B - Monitoring device, monitoring method and the chip production device of photoresist surplus - Google Patents
Monitoring device, monitoring method and the chip production device of photoresist surplus Download PDFInfo
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- CN104658934B CN104658934B CN201310577894.6A CN201310577894A CN104658934B CN 104658934 B CN104658934 B CN 104658934B CN 201310577894 A CN201310577894 A CN 201310577894A CN 104658934 B CN104658934 B CN 104658934B
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Abstract
The invention provides a kind of monitoring device, monitoring method and the chip production device of photoresist surplus.Monitoring device includes：Acquiring unit, to obtain the shipping Qty. of various types of product；Computing unit, is connected with acquiring unit, the unit product photoresist consumption of the different photoresists used with the shipping Qty. according to various types of product, various types of product and every kind of photoresist primary quantity, determines the photoresist surplus of every kind of photoresist；Memory cell, is connected with computing unit, to store the photoresist surplus of every kind of photoresist and update photoresist primary quantity.Due to the photoresist surplus of every kind of photoresist can be determined according to above- mentioned information, thus staff can in real time be monitored to photoresist surplus, so as to provide reliable reference frame for staff's reasonable arrangement manufacturing schedule, the utilization rate of photoresist is improved, production is reduced and wastes and improve productivity effect.
Description
Technical field
The application is related to technical field of manufacturing semiconductors, more particularly, to a kind of monitoring device of photoresist surplus,
Monitoring method and chip production device.
Background technology
Wafer refers to the silicon wafer used in silicon semiconductor production of integrated circuits, because it is shaped as circle, therefore referred to as wafer；
Various circuit component structures can be manufactured on silicon, and as the product for having specific electrical functionality.
, it is necessary to carry out photoetching treatment to silicon chip during wafer is manufactured.Chip production device is used in the prior art
（For example：Litho machine）Photoetching process processing is carried out, silicon chip enters inside chip production device the silicon chip table, it is necessary to after deposition
Face coating photoresistance agent carries out photoetching.
Polytype photoresist can be placed in yellow light area inside the chip production device simultaneously, these photoresists are filled
It it is 4 liters in volume（Or 1 gallon, 1 gallon made in U.S.A=3.785 liters）Plastic bottle or vial in.Because photoresist is a kind of sense
Optical medium, and there is a special production requirement yellow light area, thus the photoresistance bottle used in above-mentioned carrying photoresist is opaque modeling
Bottle or vial are expected, so that staff is difficult the surplus for observing every bottle of photoresist, it is impossible to photoresistance in photoresistance bottle
The residual state of agent is monitored, and inconvenience is brought to production.
In addition, photoresist have cost it is high, easily it is expired, need to often change, miscellaneous feature, and photoresist pass through
Moving back has the shelf-life after ice, thus if be processed using photoresist out of date to product, product quality can be caused to go out
Existing problem.The photoresist surplus in photoresistance bottle can not be monitored just because of prior art, thus cause many photoresistances
Agent is expired because of not being finished in time, is wasted so as to cause production.
The content of the invention
The application aims to provide a kind of monitoring device, monitoring method and the chip production device of photoresist surplus, to solve
The problem of certainly photoresist surplus can not be monitored in the prior art.
In order to solve the above technical problems, the one side of the application provides a kind of monitoring device of photoresist surplus,
Including：Acquiring unit, to obtain the shipping Qty. of various types of product；Computing unit, is connected with acquiring unit, with according to various types of
The unit product photoresist consumption for the different photoresists that the shipping Qty. of product, various types of product are used and the light of every kind of photoresist
Resist primary quantity, determines the photoresist surplus of every kind of photoresist；Memory cell, is connected with computing unit, to store every kind of light
The photoresist surplus and renewal photoresist primary quantity of resist.
Further, monitoring device also include display unit, be connected with memory cell, with show photoresist surplus with/
Or the type of photoresist.
Further, monitoring device also includes scanning element, to scan the mark of the replacing construction on photoresist, scanning element
It is connected with display unit, display unit is to show the replacing construction of photoresist.
Further, monitoring device also includes：Switch element, for sending on-off model when changing photoresist；Meter
Shi Danyuan, timing unit is connected with switch element, and switch element, which sends on-off model, to be used to start or stop timing unit；Report
Alert unit, timing unit is connected with alarm unit, with will expired alarm prompting in photoresist.
Further, monitoring device also includes the weighing unit for being used to weigh photoresist.
Further, acquiring unit is counter.
Further, switch element is touch sensor.
Further aspect of the application is the provision of a kind of chip production device, including above-mentioned monitoring device.
Further, the chip production device includes control unit, and the computing unit of control unit and monitoring device is connected,
Photoresist surplus for being determined according to computing unit adjusts the production species of product.
Another aspect of the application provides a kind of monitoring method of photoresist surplus, including：Step S1：Obtain each
The shipping Qty. of category；Step S2：The different photoresists used according to various types of product, inquiry obtains every kind of photoresist
Photoresist primary quantity；Step S3：The unit of the different photoresists used according to the shipping Qty. of various types of product, various types of product
The photoresist primary quantity of product photoresist consumption and every kind of photoresist, determines the photoresist surplus of every kind of photoresist, and stores
The photoresist surplus and the renewal photoresist primary quantity of every kind of photoresist.
Further, the photoresist primary quantity of photoresist is the photoresist surplus of the photoresist after last use.
Further, according to following formula（1）Determine photoresist surplus：
Formula（1）
Wherein, AiFor the shipping Qty. of a certain category；BiFor a certain photoresist corresponding with a certain category
Unit product photoresist consumption；C is the photoresist surplus of a certain photoresist after last use；D is that photoresist is remaining
Amount；i≥1.
Further, monitoring method is additionally included in the step S4 after step S3：Show that the photoresist of every kind of photoresist is remained
Surplus and type.
Further, the step of monitoring method also includes the replacing construction of monitoring photoresist.
Further, the step of replacing construction of monitoring photoresist includes：Step S10：Replacing construction mark is attached to
On photoresist；Step S20：Scan replacing construction mark；Step S30：Show the temporal information of replacing construction mark.
Further, monitoring method also includes alarming step：The alarm of default photoresist is interval, at photoresist surplus
When in alarm is interval, alarm is pointed out.
Further, monitoring method also includes production set-up procedure：The adjustment of default photoresist is interval, when photoresist is remaining
When amount is in adjustment interval, the production species of product is adjusted.
Monitoring device in the application includes acquiring unit, computing unit and memory cell, computing unit and acquiring unit
Connection, memory cell is connected with computing unit.Due to being provided with acquiring unit, thus the shipment number of various types of product can be obtained
Amount；Due to being provided with computing unit, thus it can not shared the same light according to what the shipping Qty. of various types of product, various types of product were used
The unit product photoresist consumption of resist and the photoresist primary quantity of every kind of photoresist, determine that the photoresist of every kind of photoresist is remaining
Amount；Due to being provided with memory cell, thus the photoresist surplus of every kind of photoresist, and the photoresist surplus can be stored
It is the photoresist primary quantity of photoresist when calculating photoresist surplus next time.Due to every kind of light can be determined according to above- mentioned information
The photoresist surplus of resist, thus staff can in real time be monitored to photoresist surplus, so as to be staff
Reasonable arrangement manufacturing schedule provides reliable reference frame, improves the utilization rate of photoresist, reduces production and wastes and carry
High productivity effect.
Brief description of the drawings
The accompanying drawing for constituting the part of the application is used for providing further understanding of the present application, the schematic reality of the application
Apply example and its illustrate to be used to explain the application, do not constitute the improper restriction to the application.In the accompanying drawings：
The annexation that Fig. 1 diagrammatically illustrates each unit of monitoring device in a preferred embodiment in the application is shown
It is intended to；
Fig. 2 diagrammatically illustrates the connection of a part of unit of monitoring device in another preferred embodiment in the application
Relation schematic diagram；
Fig. 3 diagrammatically illustrates the annexation schematic diagram of another part unit of monitoring device in Fig. 2 embodiments；And
Fig. 4 diagrammatically illustrates the flow chart of the monitoring method in the application.
Reference in figure：10th, acquiring unit；20th, computing unit；30th, memory cell；40th, display unit；50th, scan
Unit；60th, switch element；70th, timing unit；80th, alarm unit；90th, control unit.
Embodiment
Embodiments herein is described in detail below in conjunction with accompanying drawing, but the application can be defined by the claims
Implement with the multitude of different ways of covering.
In order to solve to propose one in the problem of photoresist surplus pointed in background technology can not be monitored, the application
Plant the monitoring device of photoresist surplus.As shown in figure 1, monitoring device includes：Acquiring unit 10, to obtain various types of product
Shipping Qty.；Computing unit 20, is connected with acquiring unit 10, is made with the shipping Qty. according to various types of product, various types of product
The unit product photoresist consumption of different photoresists and the photoresist primary quantity of every kind of photoresist, determine every kind of photoresist
Photoresist surplus；Memory cell 30, is connected with computing unit 20, to store photoresist surplus and the renewal of every kind of photoresist
Photoresist primary quantity.Meanwhile, above-mentioned photoresist surplus is also the photoresist of photoresist when calculating photoresist surplus next time
Primary quantity.Due to that can determine the photoresist surplus of every kind of photoresist according to above- mentioned information, thus staff can be to light
Resist surplus is monitored in real time, so as to provide reliable reference frame for staff's reasonable arrangement manufacturing schedule, carry
The high utilization rate of photoresist, reduce production and waste, improve productivity effect.
Chip production device, all can be by product category numbering, the photoresist type used of the product when manufacturing product
Deng information flag on product ontology.In said apparatus, monitoring device also includes scanning element, and the scanning element is used to obtain
Product category numbering on product ontology.Staff to product category numbering by being scanned, it may be determined that the product
Product category, the shipping Qty. so as to acquiring unit 10 respectively to various types of product is monitored.
In above-mentioned monitoring device, due to being provided with acquiring unit 10, thus the number that can be gathered according to acquiring unit 10
It is believed that breath, determines the shipping Qty. of the various types of product in the batch products.Preferably, the acquiring unit 10 is counter.Enter
One step, counter can be photoelectric sensor.The photoelectric sensor can be arranged on the one of the conveyer belt of products export
Side, when a product passes through photoelectric sensor, is counted once.Because photoelectric sensor has the characteristics of stability is high,
Hereby it is ensured that the use reliability of the monitoring device of photoresist surplus.It is, of course, also possible to use existing chip production device
In hardware device, by inquiring about the condition of production of product in record of production table, directly determine the shipping Qty. of product.And according to
Detailed data record in the record of production table, determines the specific shipping Qty. of each product.
In above-mentioned monitoring device, because staff knows that certain product of manufacture needs which kind photoresist used, because
And by determining that the method for product category can determine the photoresist type that the category is used.It is, of course, also possible to using existing
There is the hardware device of chip production device, by inquiring about the condition of production of product in record of production table, according to each product
Specific shipping Qty. and the photoresist information used, determine the photoresist type used corresponding to each product.Certainly, also
The unit product photoresist consumption of every category can be determined.
In above-mentioned monitoring device, due to being provided with computing unit 20, thus can be according to the shipment number of various types of product
The unit product photoresist consumption and the photoresist primary quantity of every kind of photoresist for the different photoresists that amount, various types of product are used,
The photoresist surplus of every kind of photoresist is determined, so that the state to photoresist surplus is monitored, facilitates staff to pacify
Manufacturing schedule is arranged, production waste is reduced, improves productivity effect.Preferably, computing unit 20 is connected with scanning element.Above-mentioned
In computing unit 20, a variety of computational methods, a kind of computational methods of every kind of product correspondence are provided with.In the computational methods of different product
In, the information such as photoresist type, unit product photoresist consumption corresponding to different product all can be different.Obtained by scanning element
Take after product category numbering, computing unit 20 can correspond to the computational methods that start corresponding to the product, and the production is obtained so as to calculate
The photoresistance surplus of correspondence photoresist after product are machined.
In above-mentioned monitoring device, due to being provided with memory cell 30, thus the photoresist of every kind of photoresist can be stored
Surplus and renewal photoresist primary quantity.The photoresist surplus is also photoresist when calculating photoresist surplus next time simultaneously
Photoresist primary quantity, consequently facilitating staff is inquired about photoresist surplus or photoresist primary quantity.
Monitoring device in the application also includes display unit 40, is connected with memory cell 30, to show that photoresist is remaining
The type of amount and/or photoresist.Due to being provided with display unit 40, thus the photoresist surplus of every bottle of photoresist can pass through
Display unit 40 is shown, consequently facilitating staff understands the use state of every bottle of photoresist in time.Preferably, show single
Member 40 is LED or LCD display.Certainly, while showing photoresist surplus, it can also correspond to and show the photoresist surplus
Photoresist type so that display information is more complete, clear, staff is comprehensively monitored the shape of photoresist
State, preferably arranges production.
As shown in Fig. 2 the monitoring device in the application also includes scanning element 50, to scan the replacing construction on photoresist
Mark, scanning element 50 is connected with display unit 40, and display unit 40 can show the replacing construction of photoresist.Due to being provided with
After scanning element 50, thus scanning of the replacing construction by scanning element 50 of photoresist, it can be shown on display unit 40
Out, so that staff can not only be monitored to photoresist surplus, moreover it is possible to point out staff according to photoresist
Replacing construction changes photoresist, so avoid the occurrence of photoresist be not run out and it is expired the problem of, enable staff more preferable
Ground arrange production progress, improve productivity effect.
It is, of course, also possible to set input block in monitoring device, input block is connected with memory cell 30.When more renewing
Photoresist when, the replacing construction information of the photoresist can be keyed in by input block in monitoring device and be stored in storage
In unit 30, consequently facilitating staff reads out the information in inquiry, and shown on display unit 40.
As shown in figure 3, the monitoring device in the application also includes：Switch element 60, for being sent when changing photoresist
On-off model；Timing unit 70, timing unit 70 is connected with switch element 60, and switch element 60, which sends on-off model, to be used for
Start or stop timing unit 70；Alarm unit 80, timing unit 70 is connected with alarm unit 80, with will be expired in photoresist
Alarm is pointed out.Preferably, switch element 60 is touch switch.When photoresist is contacted with touch switch, contact is opened
Close and close, on-off model is sent to timing unit 70, so that timing unit 70 starts timing；When photoresist is opened with contact
When closing separation, touch switch is disconnected, and on-off model is sent to timing unit 70, so that timing unit 70 stops timing.
Because photoresist has the shelf-life, thus when the timing of timing unit 70 is to a certain preset value（Namely photoresist soon arrives guarantor
During the matter phase）, timing unit 70 can send an electric signal to alarm unit 80, alarm unit 80 is alarmed, so as to remind work
This bottle of photoresist of personnel should be used as early as possible by expired.Preferably, alarm unit 80 is buzzer siren or light emitting diode.
Certainly, the monitoring device in the application also includes the weighing unit for being used to weigh photoresist.Because photoresist is used
Its weight can mitigate after a period of time, thus by measuring photoresist using front and rear weight difference, can estimate to obtain photoresist
Consumption and photoresist surplus, so as to realize the monitoring to photoresist surplus from another point of view.
Meanwhile, it also proposed a kind of chip production device in the application.The chip production device includes above-mentioned monitoring
Device.Preferably, the chip production device is litho machine.Because the chip production device has above-mentioned photoresist status monitoring
Device, thus the chip production device is while normal production, the photoresistance that staff can be inquired about in each photoresist bottle
The information such as agent surplus, the corresponding photoresist type of photoresist bottle, the replacing construction of photoresist bottle, so that staff
Can preferably be arranged production while being monitored to the state of photoresist progress, improve productivity effect.
As shown in figure 3, the chip production device in the application can also include control unit 90, control unit 90 and monitoring
The computing unit 20 of device is connected, and the photoresist surplus for being determined according to computing unit 20 adjusts the production species of product.
When staff wishes the use speed for reducing a certain photoresist, the interval threshold value of the adjustment can be set higher, when
The photoresist surplus of the photoresist reaches the interval threshold value of the adjustment, and chip production device just stops producing this kind of product, turned
And other kinds of product is produced, so as to no longer consume the photoresist.Or, staff sufficiently changes photoresistance in order to be able to have
The time of agent, the interval threshold value of the adjustment of a certain photoresist can be set lower, when the photoresist surplus of the photoresist
Fall into the adjustment it is interval in when, chip production device not this kind of product of reproduction, and other photoresists of converting produce other products,
Thus the time that the photoresist leaves abundance is changed for staff.Because the chip production device in the application can root
The production species of product is adjusted according to photoresist surplus, thus it is most eugenic chip production device is carried out according to actual conditions
Production, reaches the requirement of Flexible Production, so as to improve productivity effect.
Meanwhile, it also proposed a kind of monitoring method of photoresist surplus in the application.As shown in figure 4, the monitoring side
Method includes：Step S1：Obtain the shipping Qty. of various types of product；Step S2：The different photoresists used according to various types of product,
Inquiry obtains the photoresist primary quantity of every kind of photoresist；Step S3：Made according to the shipping Qty. of various types of product, various types of product
The unit product photoresist consumption of different photoresists and the photoresist primary quantity of every kind of photoresist, determine every kind of photoresist
Photoresist surplus, and store the photoresist surplus of every kind of photoresist and update the photoresist primary quantity.Due to work people
Member can produce according to the photoresist primary quantity of the shipping Qty., photoresist type, photoresist of various types of product, the unit of photoresist
The information such as product photoresist consumption determine photoresist surplus of every kind of photoresist after production, thus can be to various types of photoresistance
The photoresist surplus of agent is monitored in real time, thus for staff's reasonable arrangement manufacturing schedule provide it is reliable with reference to according to
According to, improve the utilization rate of photoresist, reduce production waste, improve productivity effect.
The photoresist primary quantity of photoresist in the application is the photoresist surplus of the photoresist after last use.When
So, if the photoresist used for the first time, then the photoresist primary quantity of photoresist is the total capacity of photoresist.Root in this application
According to following formula（1）Determine photoresist surplus：
Formula（1）
Wherein, AiFor the shipping Qty. of a certain category；BiFor a certain photoresist corresponding with a certain category
Unit product photoresist consumption；C is the photoresist surplus of a certain photoresist after last use；D is that photoresist is remaining
Amount；i≥1.
Because the species of photoresist is various, thus the photoresist consumption of the unit product of different photoresists is different, and together
There is also very big difference for the photoresist consumption of unit product during kind photoresist processing different product.Make according in current production
Depending on the situation of photoresist, the interval of the photoresist consumption of unit product is [0.6,4].
In a preferred embodiment, multiple photoresist bottles are provided with the yellow light area of chip production device（Each
The volume of photoresist bottle is 4 liters）, but it is provided with same photoresist in multiple photoresists bottle.Due to being provided only with one kind
Photoresist, thus the product of device production is same product, now, staff can be by producing daily record or production
Photoresist type used in this batch of product of record queries, so that it is determined that the photoresist consumption B of the unit producti.In the implementation
The photoresist consumption B of the unit product of above-mentioned photoresist in exampleiFor 3.8 milliliters.Due to being used only one bottle during production product every time
Photoresist bottle, thus, it is necessary in units of bottle when determining the photoresist surplus in photoresist bottle, one bottle of one bottle is individually determined.
Staff can be by measuring or inquiring about the shipping Qty. that the method for the record of production learns the product of photoresist bottle correspondence production
Ai, shipping Qty. A in this embodimentiFor 1000, and the capacity of the known photoresist used for the first time is that C is 4 liters, now,
Can be according to formula（1）Determine that the photoresist surplus in photoresist bottle is
So as to learn that the photoresist surplus in photoresist bottle is 5%.According to the situation of photoresist surplus in photoresist bottle, work
Making personnel can preferentially be produced in production next time using this bottle of photoresist, so as to avoid this bottle of photoresist because shelving and mistake
Phase causes the problem of production is wasted, and then improves productivity effect.Certainly, the photoresist for this bottle of photoresist that this measurement is obtained
Surplus also uses the photoresist primary quantity as photoresist during calculating next time.Meanwhile, staff should be ready to standby
Photoresist, after the photoresist in this bottle of photoresist exhausts, supplements new photoresist in time, to avoid because not finding photoresistance in time
The problem of agent exhausts and causes damp production or substandard product occur, and the lag time for changing photoresist is shortened, from
And improve the reliability of production.
Another preferred embodiment in, multiple photoresists bottle is provided with the yellow light area of chip production device（Often
The volume of individual photoresist bottle is 4 liters）, but multiple photoresists bottle in photoresist species differ（Or multiple photoresists
Photoresist existing same type in bottle also has different types of）.Now, the product produced using the chip production device
In be often mixed with several different types of products, the product of some species is processed by the photoresist of a certain type, is had
The product of a little species is processed by the photoresist of certain several types, it is determined that the photoresist in these photoresists bottle is remaining
, it is necessary to classify to the said goods according to the shipping Qty. of product before amount, and then determine to use corresponding to each product
Photoresist type, then calculate the photoresist surplus of different photoresists one by one respectively again.
First, staff can learn the shipping Qty. of this batch of product by measuring or inquiring about the method for the record of production,
Then according to the variety classes of product, the shipping Qty. A of each product is determined respectivelyi（Certainly, this is also by measuring or looking into
What the method for the inquiry record of production was learnt）；Then, according to the shipping Qty. A of every kind of producti, the species of these products is determined successively,
And the photoresist type that the category is used is inquired about by producing daily record or the record of production according to the species of these products, so that
By the shipping Qty. A of every kind of producti, the photoresist type institute that uses of the photoresist type that uses of every kind of product, every kind of product it is right
The photoresist consumption B for the unit product answerediCarry out matching correspondingly to arrange, and then obtain determining the ginseng of photoresist surplus
Examine foundation.
By taking the product of some species in the said goods as an example, the shipping Qty. A of a certain product1, should for 1000
Product has used two kinds of photoresists, and the photoresist consumption of the unit product of the first photoresist is 3.8 milliliters, second photoresist
The photoresist consumption B of unit product1For 2 milliliters.Due to producing during this kind of product, different types of photoresist is in different technique
Between use, thus, it is necessary in units of bottle when determining the photoresist surplus in photoresist bottle, one bottle of one bottle is individually determined.Remove
Outside this, due in this batch of blended product, in addition to the product of mentioned kind uses second of photoresist, another product is also used
To second of photoresist, and its shipping Qty. is A2For 100, its using the unit product of second of photoresist photoresist consumption B2
For 2.5 milliliters, because the capacity C of the known photoresist bottle used for the first time is 4 liters, thus now then can be according to formula（1）It is determined that
Photoresist surplus in second photoresist bottle is
So that it is determined that the actual photoresist surplus in second of photoresist bottle is 43.75%.According to the photoresistance in second of photoresist bottle
From the point of view of the situation of agent surplus, what staff should be noted that this bottle of photoresist moves back the ice time, is carried out as early as possible using this bottle of photoresist
Production, so as to produce the problem of wasting caused by avoiding this bottle of photoresist expired because shelving, and then improves productivity effect.
Above-mentioned shipping Qty. is the quantity of the product completed by board actual processing.Namely obtained by the manufacturing
Product finished product, without the quantity of the product including semi-finished product.
Monitoring method in the application is additionally included in the step S4 after step S3：Show that the photoresist of every kind of photoresist is remained
Surplus and type.Due to can not only determine photoresist surplus, and photoresist surplus, thus convenient work can also be shown
Personnel are monitored to the state of photoresist consumption, so that progress of preferably arranging production, improves productivity effect, it is to avoid light
The problem of resist is wasted because expired, reduces production cost.
For when being provided with polytype photoresist simultaneously in chip production device, due to the kind of photoresist
Class is different, and the photoresist type of this kind of photoresist of display is so also corresponded to while photoresist surplus is shown, work is facilitated
Make personnel to be monitored different photoresists, and can clearly grasp the use state of each photoresist, improve life
Produce reliability.
The step of monitoring method in the application also includes the replacing construction of monitoring photoresist.Needed because photoresist is moved back after ice
Will be within the shelf-life using finishing, thus the replacing construction of display photoresist can remind making for this bottle of photoresist of staff
With the life-span, allow staff's more arranged rational manufacturing schedule, it is ensured that production reliability.
The step of replacing construction of monitoring photoresist in the application, includes：Step S10：Replacing construction mark is attached to
On photoresist；Step S20：Scan replacing construction mark；Step S30：Show the temporal information of replacing construction mark.Every bottle of photoresistance
Agent is put into chip production device in use, replacing construction mark can be all attached on body, by scanning the replacing construction mark
Know, staff can determine the replacing construction of this bottle of photoresist, so that the expired time, use state to this bottle of photoresist are entered
Row is preferably monitored.
Monitoring method in the application also includes alarming step：The alarm of default photoresist is interval, when photoresist surplus
When in alarm interval, alarm is pointed out.The alarm that staff can set photoresist according to actual conditions is interval, works as process
Formula（1）It is determined that after obtained photoresist surplus when being less than setting value（It is namely interval interior in alarm）, system prompt report
It is alert, staff is known that this bottle of photoresist, in the state that will be used up, reminds staff to change this kind of photoresistance in time
Agent, to ensure normal manufacturing schedule.
In addition, monitoring method also includes production set-up procedure in a preferred embodiment：The adjustment of default photoresist
Interval, when photoresist surplus is in adjustment interval, adjusts the production species of product.Staff sets according to production needs
The adjustment for determining photoresist is interval, when passing through formula（1）It is determined that after obtained photoresist surplus be in the adjustment it is interval in when, core
Piece manufacture device can adjust the species for producing product according to actual conditions, so as to determine using a certain photoresist or disable a certain
Photoresist is planted, making the service condition of photoresist has adjustability.
This application provides a kind of monitoring device, monitoring method and the chip production device of photoresist surplus, solve
The problem of pointed photoresist surplus can not be monitored in the prior art, and following function can be realized：
（1）Photoresist surplus is monitored, be conducive to staff arrange production progress, improve photoresist utilize
Rate.
（2）Photoresist surplus is shown, photoresist state is easy to monitoring, improves production reliability.
（3）By the display corresponding with photoresist surplus of photoresist type, staff is set more to be apparent from every kind of light
The use state of resist, it is ensured that the quality of production.
（4）The replacing construction of photoresist is shown, that reminds staff's photoresist moves back phase ice day, it is to avoid photoresist is also unused
It is complete to be timed out, reduce production and waste, improve the performance of enterprises.
（5）According to photoresist surplus, the species of adjustment production product or alarm improve the use of chip production device
Reliability.
The preferred embodiment of the application is the foregoing is only, the application is not limited to, for the skill of this area
For art personnel, the application can have various modifications and variations.It is all within spirit herein and principle, made any repair
Change, equivalent substitution, improvement etc., should be included within the protection domain of the application.
Claims (17)
1. a kind of monitoring device of photoresist surplus, it is characterised in that including：
Acquiring unit（10）, to obtain the shipping Qty. of various types of product；
Computing unit（20）, with the acquiring unit（10）Connection, with the shipping Qty. according to the various types of product, described each
The photoresist primary quantity of the unit product photoresist consumption for the different photoresists that category is used and every kind of photoresist, really
The photoresist surplus of fixed every kind of photoresist；
Memory cell（30）, with the computing unit（20）Connection, with store every kind of photoresist photoresist surplus and
Update the photoresist primary quantity.
2. monitoring device according to claim 1, it is characterised in that the monitoring device also includes display unit（40）,
With the memory cell（30）Connection, to show the type of the photoresist surplus and/or the photoresist.
3. monitoring device according to claim 2, it is characterised in that the monitoring device also includes scanning element（50）,
To scan the mark of the replacing construction on the photoresist, the scanning element（50）With the display unit（40）Connection, it is described
Display unit（40）To show the replacing construction of the photoresist.
4. monitoring device according to claim 1, it is characterised in that the monitoring device also includes：
Switch element（60）, for sending on-off model when changing the photoresist；
Timing unit（70）, the timing unit（70）With the switch element（60）Connection, the switch element（60）Send
The on-off model is used to start or stop the timing unit（70）；
Alarm unit（80）, the timing unit（70）With the alarm unit（80）Connection, with will mistake in the photoresist
Phase alarm is pointed out.
5. monitoring device according to claim 1, it is characterised in that the monitoring device also includes being used to weigh the light
The weighing unit of resist.
6. monitoring device according to claim 1, it is characterised in that the acquiring unit（10）For counter.
7. monitoring device according to claim 4, it is characterised in that the switch element（60）For touch sensor.
8. a kind of chip production device, it is characterised in that including the monitoring device any one of claim 1 to 7.
9. chip production device according to claim 8, it is characterised in that the chip production device includes control unit
（90）, described control unit（90）With the computing unit of the monitoring device（20）Connection, for according to the computing unit
（20）The photoresist surplus of determination adjusts the production species of product.
10. a kind of monitoring method of photoresist surplus, it is characterised in that including：
Step S1：Obtain the shipping Qty. of various types of product；
Step S2：The different photoresists used according to the various types of product, inquiry obtains the photoresist of every kind of photoresist
Primary quantity；
Step S3：The unit of the different photoresists used according to the shipping Qty. of the various types of product, the various types of product
The photoresist primary quantity of product photoresist consumption and every kind of photoresist, determines that the photoresist of every kind of photoresist is remaining
Amount, and store the photoresist surplus of every kind of photoresist and update the photoresist primary quantity.
11. monitoring method according to claim 10, it is characterised in that the photoresist primary quantity of the photoresist is upper one
The photoresist surplus of the photoresist after secondary use.
12. monitoring method according to claim 11, it is characterised in that according to following formula（1）Determine the photoresist
Surplus：
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<mi>C</mi>
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<mi>&Sigma;</mi>
<mrow>
<mi>i</mi>
<mo>=</mo>
<mn>1</mn>
</mrow>
<mi>n</mi>
</munderover>
<msub>
<mi>A</mi>
<mi>i</mi>
</msub>
<msub>
<mi>B</mi>
<mi>i</mi>
</msub>
<mo>)</mo>
</mrow>
</mrow>
<mi>C</mi>
</mfrac>
</mrow>
Formula（1）
Wherein, AiFor the shipping Qty. of a certain category；BiFor a certain photoresistance corresponding with a certain category
The unit product photoresist consumption of agent；C is the photoresist surplus of a certain photoresist after last use；D is institute
State photoresist surplus；i≥1.
13. monitoring method according to claim 10, it is characterised in that the monitoring method is additionally included in the step S3
Step S4 afterwards：Show the photoresist surplus and type of every kind of photoresist.
14. monitoring method according to claim 10, it is characterised in that the monitoring method also includes monitoring the photoresistance
The step of replacing construction of agent.
15. monitoring method according to claim 14, it is characterised in that the step of monitoring the replacing construction of the photoresist
Including：
Step S10：Replacing construction mark is attached on the photoresist；
Step S20：Scan the replacing construction mark；
Step S30：Show the temporal information of the replacing construction mark.
16. monitoring method according to claim 10, it is characterised in that the monitoring method also includes alarming step：In advance
If the alarm of the photoresist is interval, when the photoresist surplus is in the alarm interval, alarm is pointed out.
17. monitoring method according to claim 10, it is characterised in that the monitoring method also includes production adjustment step
Suddenly：The adjustment for presetting the photoresist is interval, when the photoresist surplus is in the adjustment interval, adjusts the production
The production species of product.
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| CN106611731A (en) * | 2015-10-22 | 2017-05-03 | 中芯国际集成电路制造(上海)有限公司 | Intelligent loading box |
| CN108695186B (en) * | 2017-04-05 | 2021-07-20 | 玄创半导体设备（上海）有限公司 | Intelligent fool-proof system and method for chemical replacement |
| CN111799190A (en) * | 2019-04-09 | 2020-10-20 | 长鑫存储技术有限公司 | Alarm monitoring method, device, medium and electronic equipment |
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|---|---|---|---|---|
| CN1378167A (en) * | 2001-04-05 | 2002-11-06 | 华邦电子股份有限公司 | Design and method for preventing mis-use of photoresistor beyond time limit and error photoresistor |
| CN102129182A (en) * | 2010-01-20 | 2011-07-20 | 中芯国际集成电路制造(上海)有限公司 | Method and system for monitoring conservation time of photoresist |
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| JP5577615B2 (en) * | 2009-04-01 | 2014-08-27 | セイコーエプソン株式会社 | Liquid consumption system, liquid consumption apparatus, liquid supply unit, and method for managing the remaining amount of liquid stored in the liquid supply unit |
| US8666264B2 (en) * | 2010-06-03 | 2014-03-04 | Casio Computer Co., Ltd. | Image forming apparatus and toner refilling method therefor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1378167A (en) * | 2001-04-05 | 2002-11-06 | 华邦电子股份有限公司 | Design and method for preventing mis-use of photoresistor beyond time limit and error photoresistor |
| CN102129182A (en) * | 2010-01-20 | 2011-07-20 | 中芯国际集成电路制造(上海)有限公司 | Method and system for monitoring conservation time of photoresist |
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