CN104656225B - Annular amplifying mechanism based lens driving device and method - Google Patents
Annular amplifying mechanism based lens driving device and method Download PDFInfo
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- CN104656225B CN104656225B CN201510087330.3A CN201510087330A CN104656225B CN 104656225 B CN104656225 B CN 104656225B CN 201510087330 A CN201510087330 A CN 201510087330A CN 104656225 B CN104656225 B CN 104656225B
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- displacement
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention provides an annular amplifying mechanism based lens driving device and method. The device comprises a displacement output platform (1), an annular displacement amplifying mechanism (2) and a support casing (4) which are connected in sequence, wherein the support casing (4) is contacted with the annular displacement amplifying mechanism (2) through displacement drivers (3). The driving method comprises steps as follows: the support casing (4) and the displacement output platform (1) are connected with an optical system or other devices requiring displacement output, and the deformation quantity and the vibrational frequency of each displacement driver (3) as well as response time difference of the displacement drivers (3) are independently or synchronously controlled by a driving control system (5), so that the displacement output platform (1) is controlled to move or rotate in a vertical or horizontal direction. The structure is simple, the axial scanning speed is high, and the scanning range is large.
Description
Technical field
The invention belongs to lens driver, the axle of the optical element such as optical lenses, reflecting mirror in optical system is applied to
To scanning or Plane Rotation, and in particular to a kind of lens driver based on annular enlarger.
Background technology
Based on the lens driver of electroluminescent displacement drive device, with driving force is big, fast response time, positioning precision are high
The advantages of, lead in pH effect, ultrahigh resolution optical detection, micro- bioluminescence, cell three-dimensional imaging, Ultra-precision Turning etc.
There is very important application in domain.With the development of bio-photon imaging field, optical microscope system is for Sample Scan speed
The requirement more and more higher of degree, scanning speed will reach KHz magnitudes.Conventional mobile object lens method, i.e., axially moved by driving object lens
It is dynamic, change focal position, reach the purpose of scanning, the method is limited by the machinery inertial that object lens own wt is produced, scanning
Speed ratio is relatively low.And by special optical design, the function of the i.e. achievable axial scan of minority eyeglass in object lens is driven, because of thing
Mirror eyeglass is very light, it is possible to achieve high-velocity scanning.The impulse stroke of piezoelectric ceramic actuator is limited by piezoelectric ceramics itself, typically
Displacement amplifying mechanism is needed to be operated stroke amplification.Micro displacement magnifying mechanism the most frequently used both at home and abroad mainly has lever to put at present
Great institutions, symmetrical enlarger and bridge type enlarger etc., these displacement amplifying mechanism displacement equations multiplying powers are limited, volume compared with
Greatly, error is readily incorporated in installation process, and the friction produced during work also easily affects response speed.Based on this several enlarger
The lens driver of structure, it is also difficult to while reaching the requirements such as positioning precision is high, scanning speed is fast, sweep limitss are big, small volume.
Therefore, on the premise of high positioning resolution, the scope that exposes thoroughly is ensured, design compact conformation, small volume, scanning speed it is fast,
The lens driver of integrated multifunctional has great importance, and can be widely applied to front line science and field of engineering technology.
The content of the invention
The technical problem to be solved is：A kind of lens driver and side based on annular enlarger is provided
Method, present configuration are simple, and axial scan speed is fast, and sweep limitss are big.
The technical solution adopted in the present invention is：Based on the lens driver of annular enlarger, including being sequentially connected
Displacement output stage, annular displacement amplifying mechanism, support housing, support housing also by displacement drive device and annular displacement
Enlarger is contacted.
Described lens driver, displacement drive device are also connected with driving control system.
Described lens driver, the displacement drive device other end are connect with the pretension screw for being arranged on support housing bottom
Touch.
Described lens driver, support housing be hollow circle tube, annular displacement amplifying mechanism, displacement driver
Part, pretension screw include three groups, are arranged symmetrically along supporting shell body axis.
Described lens driver, displacement output stage are annular shape.
Described lens driver, annular displacement amplifying mechanism include lever construction, the carry-out bit of displacement drive device
Move displacement output stage is sent to after being amplified by lever construction.
Described lens driver, annular displacement amplifying mechanism include the first lever construction and the second lever construction, the
One lever construction includes one-level rotation flexible hinge, one-level rigidity fragment and displacement drive device, the displacement of displacement drive device
Outfan and one-level rigidity fragment contacts, and one end connection of one-level rotation flexible hinge supports the section of housing, the other end with
One end of one-level rigidity fragment is connected, and the other end of one-level rigidity fragment is used as displacement outfan；Second lever construction includes one
Level shifter output terminal flexible hinge, two grades of rigid fragments and two grades of rotation flexible hinges, one-level displacement outfan flexible hinge
One end is connected to the displacement outfan of one-level rigidity fragment, the other end of one-level displacement outfan flexible hinge and two grades of rigid fragments
It is connected, one end of two grades of rigid fragments is connected with a section for supporting housing by two grades of rotation flexible hinges, two grades of rigidity
The other end of fragment as displacement outfan, by the bottom surface phase of two level shifter output terminal flexible hinges and displacement output stage
Even.
Described lens driver, displacement output stage, annular displacement amplifying mechanism, support housing are justified by a heavy wall
Tubular steel part is integrally machined by wire cutting and is formed.
Described lens driver, institute's displacement drive part are stacked piezoelectric ceramic actuator, twin lamella bending
Type piezoelectric ceramic actuator or other electroluminescent displacement drive devices.
Based on the lens driving method of annular enlarger, adjust first pretension screw, annular displacement amplifying mechanism it is each
The length of contact point, the position of flexible hinge and each rigid fragment, so as to the displacement for adjusting whole annular displacement amplifying mechanism is put
Big multiplying power；To support again housing and displacement output stage and optical system or other need the device of displacement output to be connected, by driving
Autocontrol system individually or Synchronization Control each group displacement drive device deformation quantity, frequency of vibration, and each group displacement driver
Response time between part is poor；When driving control system provides response time to three groups of displacement drive devices by control signal wire
Difference is the control signal of zero three groups of Complete Synchronizations, then three groups of displacement drive device synchronization telescopes, by annular displacement equations machine
Structure causes three two level shifter output terminal flexible hinges of displacement output stage lower section to produce identical displacement output, and displacement is defeated
Go out platform and remain level, and vertically axial scan；When three groups of control signals that driving control system is provided are being believed
Number intensity still has when there is a timing difference between different, or three groups of signals, in three groups of displacement drive devices of same time point
Displacement is different, and the displacement of three two level shifter output terminal flexible hinges outputs has differences so that displacement output stage phase
For horizontal plane rotates a certain angle.
Compared with prior art, the invention has the advantages that and effect：
The present invention is using annular displacement amplifying mechanism, simple and compact for structure, and displacement equations rate is high, and the continuous nothing of motion transmission is rubbed
Wipe, install beneficial to modularity；Three set drive parts individually can be controlled, displacement output stage can realize along z-axis axial scan and
Rotate along x, y-axis, it is possible to provide larger driving force, axial scan speed are fast；Can mounted lens, reflecting mirror on displacement output stage
It is Deng optical element, of many uses.
Description of the drawings
Fig. 1 is apparatus of the present invention overall structure diagram.
Fig. 2 is apparatus of the present invention unit enlarger schematic diagram.
Fig. 3 is apparatus of the present invention unit enlarger floor map.
In figure, 1：Displacement output stage；2：Annular displacement amplifying mechanism；3：Displacement drive device；4：Support housing；5：Drive
Autocontrol system；6：Pretension screw；7：Control signal wire；2a：Two level shifter output terminal flexible hinges；2b：Two grades of rotations are flexible
Hinge；2c：Two grades of rigid fragments；2d：One-level displacement outfan flexible hinge；2e：One-level rigidity fragment；2f：One-level rotation is soft
Property hinge.
Specific embodiment
Lens driver generally comprises support housing, displacement drive device, displacement amplifying mechanism, displacement outfan.For
Further simplify the structure of lens driver, improve axial scan speed, increase sweep limitss, the present invention provides a kind of lens
Driving means, are simplified overall structure, are improved displacement equations rate, reduction machine using the technology that is integrally machined and annular displacement amplifying mechanism
Tool rubs, and controls the displacement drive device of three groups of centrosymmetry distributions respectively, is capable of achieving movement output platform and drives lens to carry out
Quick-speed large-scale axial scan or Plane Rotation.
With reference to embodiment and accompanying drawing, the invention will be further described.
The lens driver based on annular enlarger of the present invention, by the control to displacement driving element, realizes
Movement output platform drives lens to carry out quick-speed large-scale axial scan.The lens driver includes：Support housing, annular position
Move enlarger, displacement output stage, wherein three groups of displacement drive devices, three groups of pretension screws and driving control systems, institute
State support housing to be connected by annular displacement amplifying mechanism with displacement output stage, three is passed through by a thick cyclinder shape steel part
Wire cutting is integrally machined and forms；The annular displacement amplifying mechanism is made up of the enlarger that three centrosymmetry are distributed, each
Enlarger carries out two-stage amplification using lever amplification principle to displacement；Along housing axis in 120 degree in the support housing wall
Angle is provided with three grooves, for installing three groups of displacement drive devices；Three groups of displacement drive devices are symmetrical along housing axis centre
Distribution, one end are contacted by point with the displacement input of annular displacement amplifying mechanism and are closely connected, the other end be installed on housing
The pretension screw of bottom is in close contact；The driving control system is connected with displacement drive device, and to displacement driving element
It is controlled.
The displacement output stage, annular displacement amplifying mechanism and support housing, by a whole tubular steel part wire cutting
It is integrally machined and forms, three is seamlessly connected.
The annular displacement amplifying mechanism, including the identical enlarger symmetrical along axis centre of three structures, often
Individual enlarger can work independently, and carry out displacement two-stage amplification based on lever amplification principle.
Three groups of displacement drive devices are symmetrical along axis centre, and every group of displacement drive device can be by drive control system
System is individually controlled, by Synchronization Control or respectively control can drive displacement output stage carry out along z-axis axial scan and along x, y-axis
Rotate.
Upper displacement drive part can be the stacked piezoelectric ceramic actuator for being formed of being connected by multi-layer ceramic chip, bending
Type piezoelectric ceramic actuator, or other have the electroluminescent displacement drive device of high response speed.
It is understandable for enabling the above objects, features and advantages of the present invention to become apparent from, below in conjunction with the accompanying drawings to the present invention
Specific embodiment be described in further detail：
As shown in Figure 1, this lens driver based on annular enlarger, by displacement output stage 1, annular displacement
2, three groups of displacement drive devices 3 of enlarger, support housing 4, driving control system 5, three groups of pretension screws 6 and control signals
Line 7 is constituted；Wherein described supporting shell body 4 is connected by annular displacement amplifying mechanism 2 with displacement output stage 1, and three is whole by one
Individual hollow thick cyclinder shape steel part is integrally machined by wire cutting and is formed, the flexible hinge produced by wire cutting between each structure
Chain connects；In annular shape, support housing 4 is hollow cylindrical to displacement output stage 1；The annular displacement amplifying mechanism 2, displacement
Driving element 3 and pretension screw 6 include three groups respectively, and are arranged symmetrically in 120 degree of angles along the axis for supporting housing 4 respectively；
Three grooves are provided with along housing axis in 120 degree of angles in support 4 wall of housing, for installing three groups of displacement drive devices 3.
3 one end of institute displacement drive part is contacted by point with the displacement input of annular displacement amplifying mechanism 2 and is closely connected
Connect, the other end is in close contact with the pretension screw 6 for being installed on housing bottom, can be adjusted by adjusting pretension screw 6 during installation
The initial position of the displacement input of annular displacement amplifying mechanism 2.
The driving control system 5 is connected by control signal wire 7 with displacement drive device 3, and to displacement driver
Part 3 provides control signal, so as to control deformation quantity, the frequency of vibration of every group of displacement drive device 3, and each group displacement driver
Response time between part 3 is poor.
The annular displacement amplifying mechanism 2, including the identical enlarger symmetrical along axis centre of three structures.Such as
Shown in accompanying drawing 2, accompanying drawing 3, each enlarger includes the first lever construction and the second lever construction, and the first lever construction includes one
Level rotation flexible hinge 2f, one-level rigidity fragment 2e and displacement drive device 3, the displacement outfan of displacement drive device 3 and
Rigid fragment 2e of level contacts, and one end connection of one-level rotation flexible hinge 2f supports the section of housing 4, and the other end is firm with one-level
Property fragment 2e one end be connected, one-level rigidity fragment 2e the other end as displacement outfan；Second lever construction includes one-level
Displacement outfan flexible hinge 2d, two grades of rigid fragments 2c and two grades of rotation flexible hinge 2b, one-level displacement outfan flexible hinge
One end of chain 2d is connected to the displacement outfan of one-level rigidity fragment 2e, the other end and two of one-level displacement outfan flexible hinge 2d
Rigid fragment 2c of level is connected, and one end of two grades of rigid fragments 2c passes through two grades of rotation flexible hinge 2b and support housing 4 one
Section is connected, the other end of two grades of rigid fragments 2c as displacement outfan, by two level shifter output terminal flexible hinge 2a with
The bottom surface of displacement output stage 1 is connected.
Displacement drive device 3 occurs certain by the control signal that control signal wire 7 receives the generation of driving control system 5
Displacement x, and by contact by way of drive one-level rigidity fragment 2e around one-level rotate flexible hinge 2f rotate, according to thick stick
Bar amplification principle can produce the displacement of nx on one-level displacement outfan flexible hinge 2d, and wherein n is the first lever construction
Displacement equations multiplying power；Displacement inputs of the one-level displacement outfan flexible hinge 2d as the second lever construction, drives two grades
Rigid fragment 2c is rotated around two grades of rotation flexible hinge 2b so that produce nmx's on two level shifter output terminal flexible hinge 2a
Displacement, wherein m are the displacement equations multiplying power of the second lever construction, and the final displacement that displacement drive device 3 is produced is put
It is big nm times.In actual applications, each contact point, the position of flexible hinge and each rigid fragment can be adjusted according to demand
Length, so that adjust the displacement equations multiplying power of whole annular displacement amplifying mechanism 2.
Each unit enlarger is separate, can work independently, and every group of displacement drive device 3 can be by driving control system 5
Individually control.It is zero to provide response time difference to three groups of displacement drive devices 3 when driving control system 5 by control signal wire 7
Three groups of Complete Synchronizations control signal, then three groups of 3 synchronization telescopes of displacement drive device, are made by annular displacement amplifying mechanism 2
Three two level shifter output terminal flexible hinge 2a for obtaining 1 lower section of displacement output stage produce identical displacements output, and displacement is defeated
Go out platform 1 and remain level, so as to realize along z-axis axial scan；When three groups of control signals that driving control system 5 is provided exist
Signal intensity still has when there is a timing difference between different, or three groups of signals, in three groups of displacement drive devices 3 of same time point
Displacement it is different, the displacement at three two level shifter output terminal flexible hinge 2a has differences so that displacement output stage 1
With respect to the horizontal plane rotate a certain angle, so as to realize rotating along x, y-axis.Wherein z-axis is vertical direction, and x, y-axis are along level
Direction.
Upper displacement drive part 3 can select different types according to actually used situation, for example：Need to provide Gao Xiang
When answering speed and large driving force, can select to be connected by multi-layer ceramic chip the stacked piezoelectric ceramic actuator for being formed；If desired
Bigger output displacement, and when not being strict with to response speed and driving force, the flexure type piezoelectricity such as twin lamella pottery may be selected
Porcelain driver；If to displacement accuracy without too high request, being control cost, can select other electroluminescent displacement drive devices.
The present invention is used generally as the subsystem in high-precision optical system, and above-mentioned 4 bottom of support housing is provided with spiral shell
The fixed structures such as stricture of vagina, fixed screw, are connected with other optical systems as interface；Also be provided with displacement output stage 1 screw thread,
The fixed structures such as fixed screw, for optical elements such as mounted lens, reflecting mirror, prism, spectroscopes；1 He of displacement output stage
Support hollow between the bottom of housing 4, diaphragm or optical filter etc. can be installed.The present invention can also depart from optical system, used as drive
Moving platform is used alone, and possesses widely in science and technology fields such as high precision displacement output, Precision Machining, precision instrument manufactures
Application prospect.
In sum, the present invention is using annular displacement amplifying mechanism 2, simple and compact for structure, and displacement equations rate is high, and motion is passed
Pass continuous without friction, install beneficial to modularity；Three set drive parts 3 individually can be controlled, and displacement output stage 1 can be realized along z
Axle axial scan and along x, y-axis rotate, it is possible to provide larger driving force, axial scan speed are fast；On displacement output stage, 1 can pacify
Various optical elements are filled, it is of many uses.
Claims (1)
1. a kind of lens driving method based on annular enlarger, it is characterised in that：Pretension screw (6), annular is adjusted first
The length of each contact point of displacement amplifying mechanism (2), the position of flexible hinge and each rigid fragment, so that adjust whole annular position
Move the displacement equations multiplying power of enlarger (2)；To support again housing (4) and displacement output stage (1) and optical system or other
The device of displacement output is needed to be connected, the shape of or Synchronization Control each group displacement drive device (3) independent by driving control system (5)
Response time between variable, frequency of vibration, and each group displacement drive device (3) is poor；When driving control system (5) is by control
Holding wire (7) processed provide the control signal of three groups of Complete Synchronizations that response time difference is zero to three groups of displacement drive devices (3), then
Three groups of displacement drive device (3) synchronization telescopes, cause displacement output stage (1) lower section by annular displacement amplifying mechanism (2)
Three two levels shifter output terminal flexible hinge (2a) produce identical displacements output, displacement output stage (1) remains water
It is flat, and vertically axial scan；When three groups of control signals that driving control system (5) is provided still have necessarily in signal intensity
It is when there is a timing difference between difference, or three groups of signals, different in the displacement of three groups of displacement drive devices (3) of same time point,
The displacement that three two levels shifter output terminal flexible hinge (2a) are exported has differences so that displacement output stage (1) relative to
Horizontal plane rotates a certain angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510087330.3A CN104656225B (en) | 2015-02-25 | 2015-02-25 | Annular amplifying mechanism based lens driving device and method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510087330.3A CN104656225B (en) | 2015-02-25 | 2015-02-25 | Annular amplifying mechanism based lens driving device and method |
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| Publication Number | Publication Date |
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| CN104656225A CN104656225A (en) | 2015-05-27 |
| CN104656225B true CN104656225B (en) | 2017-03-22 |
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| CN201510087330.3A Active CN104656225B (en) | 2015-02-25 | 2015-02-25 | Annular amplifying mechanism based lens driving device and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108646372A (en) * | 2018-03-28 | 2018-10-12 | 中国科学院光电技术研究所 | Single-point driven axial adjusting mechanism |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2128745Y (en) * | 1992-06-26 | 1993-03-24 | 华中理工大学 | Wide range precision focus control |
| JP4945845B2 (en) * | 2000-03-31 | 2012-06-06 | 株式会社ニコン | An optical element holding device, a lens barrel, an exposure apparatus, and a microdevice manufacturing method. |
| JP5090707B2 (en) * | 2006-10-16 | 2012-12-05 | 並木精密宝石株式会社 | Lens actuator |
| JP5588358B2 (en) * | 2008-02-29 | 2014-09-10 | コーニング インコーポレイテッド | Kinematic optical mount |
| CN102298271B (en) * | 2011-08-17 | 2013-06-26 | 中国科学院光电技术研究所 | Leveling device for flexible mechanism of projection objective |
| CN102565983B (en) * | 2011-11-18 | 2014-08-20 | 中国科学院光电技术研究所 | Axial fine adjustment device for movable mirror |
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