CN104654993A - Differential capacitor type one-dimensional position vector sensor - Google Patents
Differential capacitor type one-dimensional position vector sensor Download PDFInfo
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- CN104654993A CN104654993A CN201510019220.3A CN201510019220A CN104654993A CN 104654993 A CN104654993 A CN 104654993A CN 201510019220 A CN201510019220 A CN 201510019220A CN 104654993 A CN104654993 A CN 104654993A
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Abstract
The invention discloses a differential capacitor type one-dimensional position vector sensor, and belongs to the field of length measurement. The sensor comprises a high-voltage polar plate consisting of a first high-voltage polar plate and a second high-voltage polar plate, a zeroing polar plate, a high-voltage polar plate shield, a zeroing polar plate shield and a shielding window, wherein the opposite positions of the high-voltage polar plate and the zeroing polar plate are fixed, and a differential capacitor is formed; the shielding window is positioned between the high-voltage polar plate and the zeroing polar plate and is parallel to the two polar plates. In the working process of the sensor, the high-voltage polar plate shield, the zeroing polar plate shield and the shielding window are grounded; the shielding window can move relative to a differential capacitor polar plate; an output of the differential capacitor is only sensitive to the position vector change of the dimension parallel to the differential capacitor polar plate; the position where the output of the differential capacitor is 0 is a zero point of the sensor. The sensor is simple in structure and higher in interference resistance, and the measurement resolution is higher than 0.1 micron.
Description
Technical field
The invention belongs to linear measure longimetry field, relate generally to a kind of differential capacitance type one-dimensional position vector sensor.
Background technology
In linear measure longimetry field, micron-sized one-dimensional position vector measurement system is widely used, but traditional differential capacitance type position vector sensor is easily subject to the interference of other dimension position vector change in measuring process, and antijamming capability is poor.The one-dimensional position vector sensor of current differential capacitance type adopts the method measuring relative position change between capacitor plate, carry out linear measure longimetry, but measured target in motion process often because guide rail linearity is undesirable, or other environmental factor interference and cannot ensure only to move along a dimension.The method that traditional differential capacitance type one-dimensional position vector sensor many employings capacitor plate follows measured target motion is measured, and it is to except the position vector sensitive of tested dimension, and the position vector change for other dimension is responsive too.Therefore traditional differential capacitance type one-dimensional position vector sensor is easily subject to the interference of environmental factor and introduces measuring error.
Summary of the invention
In order to overcome above-mentioned deficiency, the present invention proposes a kind of differential capacitance type one-dimensional position vector measurement sensor, employing the shield technology based on shielding window, based on the sensor of differential capacitance, there is stronger antijamming capability relative to tradition.
The technical solution adopted for the present invention to solve the technical problems is: a kind of differential capacitance type one-dimensional position vector sensor, comprise the first high-pressure polar plate, the second high-pressure polar plate, nulling pole plate and shielding window, first high-pressure polar plate, between the second high-pressure polar plate and nulling pole plate, form differential capacitance, it is characterized in that: the first high-pressure polar plate, between the second high-pressure polar plate and nulling pole plate, be provided with shielding window; Described shielding window is provided with opening in central authorities; Shielding window can move relative to differential capacitance.
Wherein, the relative position of the first high-pressure polar plate, the second high-pressure polar plate and nulling pole plate is fixed.
Wherein, the screen layer of ground connection is provided with around the first high-pressure polar plate, the second high-pressure polar plate and nulling pole plate.
Wherein, the first high-pressure polar plate, the second high-pressure polar plate are parallel with nulling pole plate.
Wherein, described shielding window is sheet metal, and ground connection.
Wherein, window is shielded parallel with the first high-pressure polar plate, the second high-pressure polar plate and nulling pole plate.
The invention has the beneficial effects as follows, sensor construction is simple, has stronger antijamming capability, and only responsive to one-dimensional position coordinate, the resolving power that position vector is measured is better than 0.1 μm.
Accompanying drawing explanation
Fig. 1 is the structural representation of differential capacitance type one-dimensional position vector sensor of the present invention.
In figure: 1, high-pressure polar plate shielding, the 2, first high-pressure polar plate, the 3, second high-pressure polar plate, 4, shielding window, 5, the shielding of nulling pole plate, 6, nulling pole plate.
Embodiment
Below in conjunction with accompanying drawing, the embodiment of the present invention is described in detail.
A kind of differential capacitance type one-dimensional position vector sensor, mainly comprises following ingredient: high-pressure polar plate shielding the 1, first high-pressure polar plate 2, second high-pressure polar plate 3, shielding window 4, nulling pole plate shielding 5, nulling pole plate 6.Wherein, be provided with high-pressure polar plate shielding 1 around the first high-pressure polar plate 2 and the second high-pressure polar plate 3, and leave certain gap between the first high-pressure polar plate 2 and the second high-pressure polar plate 3; Nulling pole plate shielding 5 is provided with around nulling pole plate 6; First high-pressure polar plate 2, second high-pressure polar plate 3 is parallel with nulling pole plate 6, form differential capacitance, and between each pole plate of differential capacitance, relative position is fixed between the first high-pressure polar plate 2, second high-pressure polar plate 3 and nulling pole plate 6; Be provided with between first high-pressure polar plate 2, second high-pressure polar plate 3 and nulling pole plate 6 and shield window 4, and shield window 4 central authorities and be provided with opening.The orientation of the first high-pressure polar plate 2 and the second high-pressure polar plate 3, the one dimension direction vector measured by sensor.The width of the opening of described shielding window 4 or the gap be highly at least greater than between the first high-pressure polar plate 2 and the second high-pressure polar plate 3.
In working sensor process, high-pressure polar plate shielding 1, nulling pole plate shielding 5 and shielding window 4 ground connection.The relative motion of parallel-moving type can be produced between shielding window 4 and differential capacitance.When shielding window 4 position about the first high-pressure polar plate 2 and the second high-pressure polar plate 3 symmetry, the capacitance of differential capacitance is 0, and this position is the zero point of one-dimensional position vector sensor.When shielding the relative position between window 4 and differential capacitance pole plate and departing from null position, the capacitance of differential capacitance is linear relative to the change at zero point with shielding window 4, and namely this sensor can measure the one-dimensional position vector of shielding window 4 relative to zero point.
Because this sensor is only to the position vector sensitive being parallel to this dimension of differential capacitance pole plate, and insensitive to the position vector change in other dimension, and thus this sensor can improve the antijamming capability of one-dimensional position vector measurement.
Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if belong within the scope of the claims in the present invention and equivalent technologies thereof to these amendments of the present invention and distortion, then the present invention also comprises these changes and distortion.
Claims (6)
1. a differential capacitance type one-dimensional position vector sensor, comprise the first high-pressure polar plate, the second high-pressure polar plate, nulling pole plate and shielding window, first high-pressure polar plate, between the second high-pressure polar plate and nulling pole plate, form differential capacitance, it is characterized in that: the first high-pressure polar plate, between the second high-pressure polar plate and nulling pole plate, be provided with shielding window; Described shielding window is provided with opening in central authorities; Shielding window can move relative to differential capacitance.
2. differential capacitance type one-dimensional position vector sensor according to claim 1, is characterized in that: the relative position of the first high-pressure polar plate, the second high-pressure polar plate and nulling pole plate is fixed.
3. differential capacitance type one-dimensional position vector sensor according to claim 1, is characterized in that: the screen layer being provided with ground connection around the first high-pressure polar plate, the second high-pressure polar plate and nulling pole plate.
4. differential capacitance type one-dimensional position vector sensor according to claim 1, is characterized in that: the first high-pressure polar plate, the second high-pressure polar plate are parallel with nulling pole plate.
5. differential capacitance type one-dimensional position vector sensor according to claim 1, is characterized in that: described shielding window is sheet metal, and ground connection.
6. the differential capacitance type one-dimensional position vector sensor according to claim 1 or 2 or 4, is characterized in that: shielding window is parallel with the first high-pressure polar plate, the second high-pressure polar plate and nulling pole plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510019220.3A CN104654993B (en) | 2015-01-14 | 2015-01-14 | A kind of differential capacitance type one-dimensional position vector sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510019220.3A CN104654993B (en) | 2015-01-14 | 2015-01-14 | A kind of differential capacitance type one-dimensional position vector sensor |
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| Publication Number | Publication Date |
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| CN104654993A true CN104654993A (en) | 2015-05-27 |
| CN104654993B CN104654993B (en) | 2017-08-11 |
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| CN201510019220.3A Active CN104654993B (en) | 2015-01-14 | 2015-01-14 | A kind of differential capacitance type one-dimensional position vector sensor |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86106558A (en) * | 1986-09-09 | 1988-03-23 | 王祖斌 | Grid displacement sensor of capacity type |
| CN2117588U (en) * | 1992-03-18 | 1992-09-30 | 水利部、能源部地质勘探机电研究所 | Plate condenser type displacement sensor |
| CN101493310A (en) * | 2009-01-21 | 2009-07-29 | 哈尔滨工业大学 | Cylinder type bidirectional capacitance displacement sensor with across double-window counter electrode structure |
| CN201964871U (en) * | 2011-03-01 | 2011-09-07 | 欧阳祖熙 | Capacitive displacement sensor and component-type borehole strain meter adopting same |
| CN102359754A (en) * | 2011-08-09 | 2012-02-22 | 张华建 | Differential-capacitive length sensor |
| CN104215165A (en) * | 2013-05-31 | 2014-12-17 | 浙江师范大学 | Precision measurement method for one-dimensional displacement |
-
2015
- 2015-01-14 CN CN201510019220.3A patent/CN104654993B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86106558A (en) * | 1986-09-09 | 1988-03-23 | 王祖斌 | Grid displacement sensor of capacity type |
| CN2117588U (en) * | 1992-03-18 | 1992-09-30 | 水利部、能源部地质勘探机电研究所 | Plate condenser type displacement sensor |
| CN101493310A (en) * | 2009-01-21 | 2009-07-29 | 哈尔滨工业大学 | Cylinder type bidirectional capacitance displacement sensor with across double-window counter electrode structure |
| CN201964871U (en) * | 2011-03-01 | 2011-09-07 | 欧阳祖熙 | Capacitive displacement sensor and component-type borehole strain meter adopting same |
| CN102359754A (en) * | 2011-08-09 | 2012-02-22 | 张华建 | Differential-capacitive length sensor |
| CN104215165A (en) * | 2013-05-31 | 2014-12-17 | 浙江师范大学 | Precision measurement method for one-dimensional displacement |
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| CN104654993B (en) | 2017-08-11 |
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