CN104641449B - Tubulose target piece - Google Patents
Tubulose target piece Download PDFInfo
- Publication number
- CN104641449B CN104641449B CN201380048331.6A CN201380048331A CN104641449B CN 104641449 B CN104641449 B CN 104641449B CN 201380048331 A CN201380048331 A CN 201380048331A CN 104641449 B CN104641449 B CN 104641449B
- Authority
- CN
- China
- Prior art keywords
- connector
- target
- target body
- piece
- target piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3423—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/342—Hollow targets
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
Abstract
The present invention relates to a kind of target piece (2a) for cathode atomization system, have the tubulose target body made of atomizing material (4a)；And two connectors (10a) of the target body (4a) can be fastened to, it is used to the target body (4a) being connected to cathode atomization system, wherein the first connector can be connected to the first end of the target body (4a), and second connector can be connected to the second end of the target body (4a), and wherein at least one locking mechanism (12a-d) is formed on each connector (10a), so that connector out of the ordinary (10a) is connected to the target body (4a) with the fixed form for resisting rotation.
Description
Technical field
The present invention relates to a kind of target piece for cathode atomization system, with tubulose target body.
Background technology
1 225 249 B1 of EP disclose a kind of tubulose target piece for cathode atomization system.According to a kind of design scheme,
Backing pipe or connecting tube are arranged in the end of the tubulose target body made of atomizing material in the case of various.The target piece be by
It is installed in system in the backing pipe of the prominent target body.In a kind of design scheme, backing pipe is loaded into opening for the target body
Then it is fixed in end and by means of screw, which passes through the flange of the backing pipe to be screwed into the terminal edge of the target body.Or
Person provides the external screw thread for union nut on the target body, can be pressed the flange of the backing pipe at this by means of the nut
On the end face of target body.
Invention content
An object of the present invention is to provide a kind of tubulose target piece, can be installed easily and securely.
This purpose is reached by the feature of claim 1.
Dependent claims are related to advantageous embodiment.
According to claim 1, a kind of target piece for cathode atomization system is provided, has and is managed made of atomizing material
Shape target body and two connectors that the target body can be fastened to.By means of such connector, can the target body be connected or is fastened to the moon
Pole atomization system or sputtering system.First connector can be connected to the first end of the target body and the second connector can be connected to this
The second end of target body.Connector can be manufactured by one or more components or is made of one or more components, so that ensuring the target
Body is connect with the reliable vacuum tightness of cathode atomization system.
Each connector has at least one locking mechanism, so that connector out of the ordinary is tight with the fixed form for resisting rotation
Gu or being locked to the target body.Also that is, after the connector out of the ordinary has been connected to the target body, by means of at least one locking machine
Structure stops or forbids the connector out of the ordinary around the rotation of the longitudinal axis of the tubulose target body.In other words, at least one locking mechanism
The connector out of the ordinary is fixed to resist the rotation relative to the target body.Locking mechanism can be for example as prominent convex block or as door bolt
Lock set is formed on connector, which is in its final position or operating position on the target body in the connector
When be engagement or latch in the respective cut on the target body.In other words, at least one locking mechanism is formed at each connector
Above and-that is, in system after the rotation of the target piece-ensures that the torque for being sent to such connector reliably passes during use
It send to the target body.Such connector is prevented around the rotation or displacement relative to the target body of the longitudinal axis of the tubulose target body.
In EP 1225249B1, connecting tube is fixed on target body by means of screw, by flange or by means of union nut.Relatively
In this, the present invention provides a kind of target piece, and wherein locking mechanism is formed on connector out of the ordinary, is especially formed with the connector
For part.In other words, the present invention provides a kind of target piece with less component, so that the target piece better simply and thus
Timesaving installation becomes possible, without thus weakening being fixedly connected between the target body and such connector.
At least one locking mechanism on the connector out of the ordinary is preferably designed to be engaged on the target body circumference
In at least one recess.For example, at least one locking mechanism be created as on the connector out of the ordinary one or more are prominent
Rise or one or more (latch) convex blocks.
It is particularly preferred that：At least one locking mechanism is created as having at least one recess, interrupts or gap
Flange, so that the flange is engaged in when the connector out of the ordinary is inserted into or is pushed into the respective notches on the target body.Citing and
There are the terminal edge of speech, the target body riser portions (elevation), the riser portions to be engaged in the respective notches on the flange
In.For example, at least 2,3,4 or 8 recesses are provided on the flange, the fixedly locked of rotation is resisted to generate.
According to a kind of design scheme, which is formed as latch assembly, which is designed to fasten with a bolt or latch
It is buckled in the corresponding latching receptacle on the target body.For example, the locking mechanism be created as a spring catch or using spring come
The latch convex block of pretension, the spring catch or the latch convex block are when the connector is inserted into the target body and reaches its final position
In respective socket or recessed portion of the latch in the target body.
The mode that such connector preferably can again be dismantled is connected to the target body.In other words, in the work of the target piece
At the end of phase, such connector can be dismantled from the target body again, to be for example inserted into new target body.For example, in the company
Bayonet closure is provided between fitting and the target body.In other words, which is formed as bayonet closure component.
For example, complementary protuberance or convex block are formed on connector, and such convex block is engaged in corresponding longitudinal and transverse direction therein
Groove is formed on the target body.Alternatively, longitudinal and transverse direction groove or longitudinal and transverse direction slit are provided on the connector, and shape
At on the target body complementary protuberance or convex block be engaged in such groove or slit.By this method, such connector is with can be again
The mode of dismounting easily and is securely connected to the target body.
Preferably at least one connector, which provides, has at least one solid of the connecting shaft perpendicular to the tubulose target body axis
Determine component.For example, at least one screw, rivet or split pin are provided, the target body axis is perpendicular to and is guided through this
Connector and the target body, and the connector is connected to the target body to resist the fixed form of rotation.
According to a kind of design scheme, at least one connector is to be integrally connected to the target body.For example, connector is
It is glued or welded to the target body, is conductively connected in order to be established between such component.In detail, welding or gluing make such component
Between connection it is more stable.At the end of the work phase of the target piece, the connection between such component can be split off, to reuse
Such connector.For example, heating the target piece makes binder decompose or make solder liquidous, to split off connection and to make such company
Fitting is separated with the target body.
According to a kind of optimum design, a kind of target piece for cathode atomization system is provided, is had by atomizing material
Manufactured tubulose target body；And two connectors, it is used to the target body being connected to cathode atomization system.First connector can be tightened
To the target body first end and the second connector can be screwed to the second end of the target body.For example, such connector tool
There is external screw thread, and the target body has corresponding internal thread；Or such connector has internal thread, and the target body has corresponding outer spiral shell
Line.In addition, two connectors are to be integrally connected to the target body.For example, these components are glued each other, weld or melt
It connects.In other words, screw connection is additionally by entirety in conjunction with fixing, and in this case, connection as described above can by adding
Heat is split off again, to back-out such connector from the target body for reusing.
According to a kind of design scheme, at least one connector has at least one recessed portion on its excircle, welds material
Material can be introduced into the recessed portion for the connector is connected to the target body.For example, it is provided at least on the connector
One circumferential groove is put into welding sheet or welding ring at least one circumferential groove, such component placed later or
It is screwed together, which is then inserted into the target body to and is heated the target piece, so that the solder fusing and making the target body
It is connected to the connector.By this method, it can make that the component of the target piece is simple, is connected to each other quickly and reliably.
Conductive material is preferably arranged between such connector and the target body, to ensure the reliable electricity of such component
Gas connects, such material such as graphite foil or copper mesh, or conductive adhesive as described above or welding material.
According to a kind of design scheme, at least one connector has outside taper, is designed to be engaged in outside the taper
In the corresponding tapered opening of the end of the target body.In other words, taper connection is formed between the connector and the target body, and this connects
Connecing can additionally be fixed by locking mechanism as described above by resist rotation.
Preferably：The such connector for being connected to the target body does not extend beyond the whole length of the tubulose target body.It changes
Such connector can be inserted into the end out of the ordinary of the target body by Yan Zhi, so that the end outwardly of such connector can
Have other connection components, such as protrusion or flange, for being connected to cathode atomization system.
Description of the drawings
The embodiment of the present invention will in more detail illustrate refering to schema.
Fig. 1 shows the axial plane figure of the tubulose target piece according to the first design scheme,
The lateral sectional view of target piece shown in Fig. 2 display diagrams 1, and
Fig. 3 shows the axial plane figure of the tubulose target piece according to the second design scheme.
Specific implementation mode
Fig. 1 is illustrated in the plan view on the directions longitudinal axis A according to the tubulose target piece 2a of the first design scheme.Target piece 2a is to set
It counts to be used in cathode atomization system and there is the tubulose target body 4a made of atomizing material.Two ends of target piece 2a have phase
With or congruence design scheme, and therefore for clarity the considerations of, the only end of displaying target piece 2a or target body in the drawings
The end of 4a.In all cases, tubular connection 10a was inserted at the beginning of target body 4a.Target piece 2a can be by means of connection
Part 10a is connected to cathode atomization system.During use, target piece 2a is installed in the vacuum chamber of system, wherein cooling dress
It sets and magnet apparatus is for example arranged in the internal capacity of hollow target piece 2a.Connector 10a ensure target piece 2a and the system it
Between air-tight connection.
Target body 4a protrudes target body 4a (Fig. 2) so that target piece 2a to be connected to concentrically around connector 10a, connector 10a
System.In all cases, connector 10a is pushed into the end of target body 4a so that for be fastened to system flange or
Other highlighted components can be for example formed at outer end or the exposed ends of connector 10a.
The lateral sectional view along straight line D-D of the end of tubulose target piece 2a shown in Fig. 2 display diagrams 1.Shown in connect
Part 10a corresponds to the second connector (not shown) for another end for being arranged in target piece 2a.Connector 10a has in radial direction
There are flange assembly 12a-d or protrusion, these flange assemblies or protrusion are designed to the respective cut being engaged on the end faces target body 4a
In 14a-d or recessed portion.Flange assembly 12a-d and notch 14a-d fixes push-in connector 10a to resist relative to target body 4a's
Rotation.In other words, flange assembly 12a-d makes connector 10a be locked on target body 4a to resist the fixed form of rotation.
A plurality of circumferential groove 16a-e are provided on the circumference of connector 10a being pushed into target body 4a.It is being inserted into target body
Before in 4a, welding material is for example introduced into the form of bonding wire or welding sheet in groove 16a-e.After the insertion, it heats
The terminal region of target piece 2a or target piece 2a so that make introduced welding material melt and in connector 10a and target body 4a it
Between establish airtight be conductively connected.
Target body 4a, which has receiving opening, connector 10a, to be pushed into the receiving opening.Inside fold 6 on the target body fills
When the limit deep for being pushed into connector 10a.The internal diameter C of the internal diameter A and connector 10a of target body 4a are identical or generally phase
Together, and the plane transition without ladder is therefore provided between two components.Sealing ring 8 is arranged in fold 6, and more than removing
Except the welding, which also ensures that the air-tight connection between connector 10a and target body 4a.Alternatively, not providing sealing
Ring 8.
Fig. 3 shows the plan view of the target piece 2b according to the second design scheme.Unless specified otherwise herein, the otherwise component of target piece 2b
And function is corresponding to the component and function described in the first design scheme above with respect to target piece 2a.With first design scheme pair
Than providing wider flange assembly 12e-h on connector 10b and providing corresponding wider notch 14e-h on target body 4b.Example
Such as, wider flange assembly 12e-h more has back shear stress during operations or rotation of the target piece 2b in cathode atomization system
Elasticity.Alternatively, for example, it is possible to provide a unique flange assembly or multiple flange assemblies, in order to the connector and the target body
Between establish resist rotation be fixedly connected.
Reference sign
2a-b tubulose target piece
4a-b target bodys
6 folds
8 sealing rings
10a-b connectors
12a-h flange assemblies
14a-h notch
16a-e circumferential grooves
A target piece axis
B target body internal diameters
C connector internal diameters
Claims (14)
1. a kind of target piece (2a, 2b) for cathode atomization system has：
The tubulose target body made of atomizing material (4a, 4b)；And
Two connectors (10a, 10b) of the target body (4a, 4b) are can be connected to, for the target body (4a, 4b) to be connected to cathode
Atomization system, wherein the first connector can be connected to the first end of the target body (4a, 4b), and the second connector can be connected to this
The second end of target body (4a, 4b),
It is characterized in that：
At least one locking mechanism (12a-h) is formed on each connector (10a, 10b), so as to by each corresponding connector
(10a, 10b) is connected to the target body (4a, 4b) with the fixed form for resisting rotation, wherein the locking mechanism (12a-h) is to set
Meter is engaged in the end face of the target body (4a, 4b), and wherein described at least one locking mechanism (12a-h) be to it is each corresponding
Connector (10a, 10b) is formed as single type.
2. target piece as described in claim 1, wherein at least one locking mechanism (12a-h) are designed to be engaged in the target body
In at least one recess (14a-h) of (4a, 4b).
3. target piece as described in claim 1, wherein at least one locking mechanism (12a-h) are created as having at least one
The flange of recess.
4. target piece as described in claim 1, wherein at least one locking mechanism have latch assembly, which is to set
Meter carrys out latch among the corresponding latching receptacle on the target body (4a, 4b).
5. target piece as described in claim 1, wherein at least one locking mechanism are formed as bayonet closure component.
6. target piece as described in claim 1, wherein at least one fixation kit with the connecting shaft perpendicular to target body axis (A)
It is for being used at least one connector.
7. target piece as claimed in claim 6, wherein the connector is screw, rivet or split pin.
8. target piece as described in claim 1, wherein at least one connector (10a, 10b) is to be integrally connected to the target body
(4a, 4b).
9. target piece as claimed in claim 7, wherein at least one connector (10a, 10b) is integrally to be glued or welded to this
Target body (4a, 4b).
10. target piece as described in claim 1, wherein at least one connector (10a, 10b) has at least on its excircle
One recessed portion (16a-e), welding material can be introduced into the recessed portion connector (10a, 10b) being connected to this
Target body (4a, 4b).
11. target piece as claimed in claim 10, wherein the recessed portion is circumferential groove.
12. target piece as described in claim 1, wherein conductive material are to be arranged in the connector (10a, 10b) and the target body
Between (4a, 4b).
13. target piece as claimed in claim 12, wherein the conductive material is conductive adhesive, solder, graphite foil or copper mesh.
14. target piece as described in claim 1, wherein at least one connector has outside taper, is design outside the taper
To be engaged in the corresponding tapered opening of the end of the target body.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ATGM365/2012U AT13609U1 (en) | 2012-09-17 | 2012-09-17 | Tubular target |
| ATGM365/2012 | 2012-09-17 | ||
| PCT/AT2013/000152 WO2014040100A1 (en) | 2012-09-17 | 2013-09-13 | Tubular target |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104641449A CN104641449A (en) | 2015-05-20 |
| CN104641449B true CN104641449B (en) | 2018-10-23 |
Family
ID=50277396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380048331.6A Active CN104641449B (en) | 2012-09-17 | 2013-09-13 | Tubulose target piece |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20150221485A1 (en) |
| EP (1) | EP2896064B1 (en) |
| JP (1) | JP6341917B2 (en) |
| KR (1) | KR102111817B1 (en) |
| CN (1) | CN104641449B (en) |
| AT (1) | AT13609U1 (en) |
| TW (1) | TWI550116B (en) |
| WO (1) | WO2014040100A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014102407A1 (en) * | 2014-02-25 | 2015-08-27 | Sindlhauser Materials Gmbh | Sputtertargetanordnung |
| US9992917B2 (en) | 2014-03-10 | 2018-06-05 | Vulcan GMS | 3-D printing method for producing tungsten-based shielding parts |
| AT14911U1 (en) * | 2015-05-06 | 2016-08-15 | Plansee Se | tube target |
| CN108486540B (en) * | 2018-05-16 | 2019-07-02 | 上海大学 | A kind of rotary target material binding method |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5738921A (en) * | 1993-08-10 | 1998-04-14 | E. Khashoggi Industries, Llc | Compositions and methods for manufacturing sealable, liquid-tight containers comprising an inorganically filled matrix |
| US5591314A (en) * | 1995-10-27 | 1997-01-07 | Morgan; Steven V. | Apparatus for affixing a rotating cylindrical magnetron target to a spindle |
| US6551477B2 (en) * | 2000-09-25 | 2003-04-22 | Isoflux, Inc. | Interlocking cylindrical magnetron cathodes and targets |
| DE10102493B4 (en) * | 2001-01-19 | 2007-07-12 | W.C. Heraeus Gmbh | Tubular target and method of making such a target |
| US6905579B2 (en) * | 2003-02-13 | 2005-06-14 | Sputtering Components, Inc. | Cylindrical magnetron target and spindle apparatus |
| US20060096855A1 (en) * | 2004-11-05 | 2006-05-11 | Richard Newcomb | Cathode arrangement for atomizing a rotatable target pipe |
| DE202006018079U1 (en) * | 2006-03-02 | 2007-03-29 | FNE Forschungsinstitut für Nichteisen-Metalle Freiberg GmbH | Target arrangement used as a sputtering target in the production of heat resistant layers or solar protection layers on flat glass or plastic films comprises tubular support element and hollow cylindrical target made from target material |
| DE102006009749A1 (en) * | 2006-03-02 | 2007-09-06 | FNE Forschungsinstitut für Nichteisen-Metalle Freiberg GmbH | target arrangement |
| DE102006017455A1 (en) * | 2006-04-13 | 2007-10-25 | Applied Materials Gmbh & Co. Kg | Tubular cathode for coating materials in a coating process comprises openings provided between a target carrier tube and a target for contacting the target with coolant |
| WO2009100985A1 (en) * | 2008-02-15 | 2009-08-20 | Bekaert Advanced Coatings Nv | Multiple grooved vacuum coupling |
| WO2012002383A1 (en) * | 2010-06-28 | 2012-01-05 | アルバックテクノ株式会社 | Target mounting mechanism |
| EP2593578A4 (en) * | 2010-07-12 | 2014-06-18 | Materion Advanced Materials Technologies And Services Inc | Rotary target backing tube bonding assembly |
-
2012
- 2012-09-17 AT ATGM365/2012U patent/AT13609U1/en not_active IP Right Cessation
-
2013
- 2013-08-27 TW TW102130558A patent/TWI550116B/en active
- 2013-09-13 EP EP13785810.6A patent/EP2896064B1/en active Active
- 2013-09-13 JP JP2015531400A patent/JP6341917B2/en active Active
- 2013-09-13 US US14/428,837 patent/US20150221485A1/en not_active Abandoned
- 2013-09-13 KR KR1020157005831A patent/KR102111817B1/en active IP Right Grant
- 2013-09-13 CN CN201380048331.6A patent/CN104641449B/en active Active
- 2013-09-13 WO PCT/AT2013/000152 patent/WO2014040100A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| AT13609U1 (en) | 2014-04-15 |
| TWI550116B (en) | 2016-09-21 |
| KR102111817B1 (en) | 2020-05-18 |
| EP2896064B1 (en) | 2020-02-26 |
| WO2014040100A1 (en) | 2014-03-20 |
| EP2896064A1 (en) | 2015-07-22 |
| JP2015533940A (en) | 2015-11-26 |
| JP6341917B2 (en) | 2018-06-13 |
| TW201413028A (en) | 2014-04-01 |
| US20150221485A1 (en) | 2015-08-06 |
| CN104641449A (en) | 2015-05-20 |
| KR20150056768A (en) | 2015-05-27 |
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