CN104635776A - Wide-range pressure control system and method applied to vacuum equipment - Google Patents
Wide-range pressure control system and method applied to vacuum equipment Download PDFInfo
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- CN104635776A CN104635776A CN201310574551.4A CN201310574551A CN104635776A CN 104635776 A CN104635776 A CN 104635776A CN 201310574551 A CN201310574551 A CN 201310574551A CN 104635776 A CN104635776 A CN 104635776A
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Abstract
The invention relates to the technical field of vacuum, in particular to a wide-range vacuum pressure control system and method with an automatic pressure regulation function. A vacuum gauge is connected with a vacuum chamber and collects a vacuum degree signal of the vacuum chamber; a regulation valve control system is connected with the vacuum gauge, collects the vacuum degree signal and regulates vacuum degree of the vacuum chamber; one end of a vacuum regulation system is connected with the vacuum gauge, collects the vacuum degree signal and regulates the vacuum degree of the vacuum chamber; a mass flowmeter is connected with the vacuum chamber and used for filling the vacuum chamber with gas. The automatic regulation function is realized, during operation, the vacuum chamber is filled with the gas, when the temperature in the vacuum chamber is changed, the vacuum degree can be regulated automatically according to requirements of customers, and the wanted vacuum degree is reached.
Description
Technical field
The present invention relates to technical field of vacuum, specifically a kind of can the wide-range vacuum control pressure system of automatic Regulation and method.
Background technology
Traditional vacuum equipment gas control system, just in execution technique, when being filled with working gas, start vacuum pump simultaneously and carry out air suction process to vacuum chamber, the gaseous tension of vacuum chamber is a dynamic changing value.But in actual applications, the technological requirement of client is not want a vacuum pressure scope, and client has different process conditions, often needs vacuum cavity to remain on certain vacuum tightness.
Existing technology is generally that customer equipment increases various valve, and by setting the aperture (and valve after setting aperture would not action again) of valve, controlled by vacuum chamber to fluctuate in certain scope, system itself does not carry out monitor and forecast to vacuum tightness.
Summary of the invention
For the problems referred to above, the invention provides a kind of vacuum tightness that can need according to client, carry out pumping speed and automatically adjust, reach the vacuum tightness wanted, and when vacuum indoor temperature changes, also can ensure constant pressure, the wide-range control pressure system of energy automatic Regulation and method.
The technical scheme that the present invention is adopted for achieving the above object is:
For a wide-range control pressure system for vacuum equipment, it is characterized in that:
Vacuum meter connects vacuum chamber, gathers the vacuum tightness signal of vacuum chamber;
Governor valve control system connects vacuum meter, gathers vacuum tightness signal, and regulates the vacuum tightness of vacuum chamber;
Vacuum regulating system one end connects vacuum meter, gathers vacuum tightness signal, and regulates the vacuum tightness of vacuum chamber;
Mass flowmeter connects vacuum chamber, for vacuum chamber insufflation gas.
Described governor valve control system comprises connected governor valve control device and variable valve; Wherein governor valve control device connects vacuum meter, and variable valve connects vacuum chamber.
Described vacuum regulating system comprises the regulation meter, frequency converter, vaccum pump motor and the vacuum pump that connect successively; Wherein regulation meter connects vacuum meter, and vacuum pump connects vacuum chamber.
For a wide-range pressure control method for vacuum equipment, mass flowmeter is to vacuum chamber insufflation gas;
Vacuum meter gathers the vacuum tightness signal of vacuum chamber, and by vacuum tightness signal transmission to governor valve control device and regulation meter;
The vacuum tightness signal received is carried out PID adjustment by governor valve control device, and carrys out the valve plate opening angle of regulating and controlling valve by the signal after regulating, and controls vacuum indoor pressure;
The need of work pressure signal that the vacuum tightness signal received and regulation meter have set compares by regulation meter, by comparative result data feedback to frequency converter, frequency converter sends frequency variation signal, regulate the rotating speed of vaccum pump motor, controlled the pumping speed of vacuum pump by vaccum pump motor rotational speed regulation, control vacuum indoor pressure.
The present invention has following beneficial effect and advantage:
The present invention according to vacuum tightness settings, can adjust automatically, reaches the constant vacuum tightness that client wants.
Accompanying drawing explanation
Fig. 1 is system architecture schematic diagram of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further detail.
A kind of wide-range control pressure system that can automatically regulate for vacuum equipment of the present invention, vacuum pump, vaccum pump motor, frequency converter, regulation meter, variable valve, governor valve control device, vacuum meter, mass flowmeter.Wherein mass flowmeter operationally can be filled with the working gas of constant basis to vacuum chamber, vacuum indoor pressure is changed, or vacuum indoor temperature changes and also can cause the fluctuation of vacuum indoor pressure, vacuum meter gathers the vacuum tightness signal of vacuum cavity, and simultaneously by vacuum tightness signal transmission to governor valve control device, regulation meter, now governor valve control device can carry out PID adjustment with vacuum tightness signal, and the angle of being opened to regulate variable valve valve plate by the signal after regulating, thus reach the object of pressure control; And another road enters the signal of regulation meter, compare with the need of work pressure that regulation meter has set, and by data feedback to frequency converter, the rotating speed of vaccum pump motor is regulated by frequency converter, regulated the pumping speed of vacuum pump by the change of vaccum pump motor rotating speed, reached the object of pressure control by the pumping speed change of vacuum pump.
And two cover control pressure systems, pressure control operation can be carried out simultaneously, realize the control pressure system of wide-range, one also can be selected to carry out pressure control operation.
Vacuum pump, during work, carries out air suction process to vacuum chamber.
Vaccum pump motor, the rotation speed change of motor controls the pumping speed of vacuum pump.
Frequency converter, drives vaccum pump motor, the rotational speed of adjustment motor, and then the pumping speed of adjustment vacuum pump, reaches the object of automatic Regulation.
Regulation meter, in its dial plate setting desired pressure value, and can compare with the force value come from vacuum meter collection, and comparing result is fed back to frequency converter.
Variable valve, reaches adjustment vacuum pumping speed by the opening angle of valve plate.
Governor valve control device, PID regulates, and comparing with the force value come from vacuum meter collection regulates the opening angle of variable valve valve plate.
Vacuum meter, measures vacuum indoor pressure, and have analog signal output and signal of communication output, signal exports to regulation meter and governor valve control device, reaches the object of vacuum tightness Real-Time Monitoring.
Mass flowmeter, during duty, is filled with a certain amount of working gas to vacuum chamber.
Claims (4)
1., for a wide-range control pressure system for vacuum equipment, it is characterized in that:
Vacuum meter connects vacuum chamber, gathers the vacuum tightness signal of vacuum chamber;
Governor valve control system connects vacuum meter, gathers vacuum tightness signal, and regulates the vacuum tightness of vacuum chamber;
Vacuum regulating system one end connects vacuum meter, gathers vacuum tightness signal, and regulates the vacuum tightness of vacuum chamber;
Mass flowmeter connects vacuum chamber, for vacuum chamber insufflation gas.
2. a kind of wide-range control pressure system for vacuum equipment according to claim 1, is characterized in that: described governor valve control system comprises connected governor valve control device and variable valve; Wherein governor valve control device connects vacuum meter, and variable valve connects vacuum chamber.
3. a kind of wide-range control pressure system for vacuum equipment according to claim 1, is characterized in that:
Described vacuum regulating system comprises the regulation meter, frequency converter, vaccum pump motor and the vacuum pump that connect successively; Wherein regulation meter connects vacuum meter, and vacuum pump connects vacuum chamber.
4., for a wide-range pressure control method for vacuum equipment, it is characterized in that:
Mass flowmeter is to vacuum chamber insufflation gas;
Vacuum meter gathers the vacuum tightness signal of vacuum chamber, and by vacuum tightness signal transmission to governor valve control device and regulation meter;
The vacuum tightness signal received is carried out PID adjustment by governor valve control device, and carrys out the valve plate opening angle of regulating and controlling valve by the signal after regulating, and controls vacuum indoor pressure;
The need of work pressure signal that the vacuum tightness signal received and regulation meter have set compares by regulation meter, by comparative result data feedback to frequency converter, frequency converter sends frequency variation signal, regulate the rotating speed of vaccum pump motor, controlled the pumping speed of vacuum pump by vaccum pump motor rotational speed regulation, control vacuum indoor pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310574551.4A CN104635776A (en) | 2013-11-13 | 2013-11-13 | Wide-range pressure control system and method applied to vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310574551.4A CN104635776A (en) | 2013-11-13 | 2013-11-13 | Wide-range pressure control system and method applied to vacuum equipment |
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| CN104635776A true CN104635776A (en) | 2015-05-20 |
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| CN201310574551.4A Pending CN104635776A (en) | 2013-11-13 | 2013-11-13 | Wide-range pressure control system and method applied to vacuum equipment |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105058802A (en) * | 2015-09-08 | 2015-11-18 | 上海联泰科技有限公司 | Scraper vacuum degree controlling method of light curing molding equipment |
| CN105510368A (en) * | 2015-12-02 | 2016-04-20 | 北京金自天正智能控制股份有限公司 | Vacuum degree control system, control method and X-ray fluorescence spectrograph |
| CN106195391A (en) * | 2016-07-15 | 2016-12-07 | 成都中科唯实仪器有限责任公司 | Push-pull valve controls vacuum system and control method thereof |
| CN109404322A (en) * | 2018-12-06 | 2019-03-01 | 北京东方计量测试研究所 | A kind of wide-range high-precision molecular pump pumping speed test macro and method |
| CN110220116A (en) * | 2019-06-04 | 2019-09-10 | 凯盛光伏材料有限公司 | A kind of exhaust gas constant current processing system |
| CN111594446A (en) * | 2020-05-14 | 2020-08-28 | 上海利方达真空技术有限公司 | Dynamic pressure accurate control system for continuous charging of working gas into low-vacuum system |
| CN111749879A (en) * | 2019-03-29 | 2020-10-09 | 亚台富士精机股份有限公司 | Control method and vacuum system |
| CN112343789A (en) * | 2020-10-14 | 2021-02-09 | 中广核工程有限公司 | Spent fuel storage tank vacuumizing method and system |
| CN113106543A (en) * | 2021-04-14 | 2021-07-13 | 沈阳中科汉达科技有限公司 | Pressure control system for gallium nitride crystal growth |
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| JPS5937387A (en) * | 1982-08-27 | 1984-02-29 | Showa Shinku:Kk | Pressure control device of vacuum tank |
| US20050234394A1 (en) * | 2004-03-26 | 2005-10-20 | Rod Ross | Dual cylinder vacuum pump for medical aspiration system |
| CN1932453A (en) * | 2005-09-15 | 2007-03-21 | 比亚迪股份有限公司 | Vehicle air throttle air inflow test system and testing method |
| CN102023654A (en) * | 2010-12-23 | 2011-04-20 | 北京航空航天大学 | Large environment simulation laboratory pressure control system and control method thereof |
| CN201925151U (en) * | 2011-03-08 | 2011-08-10 | 黑龙江省农业机械工程科学研究院 | Vacuum pump performance testing device |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS5937387A (en) * | 1982-08-27 | 1984-02-29 | Showa Shinku:Kk | Pressure control device of vacuum tank |
| US20050234394A1 (en) * | 2004-03-26 | 2005-10-20 | Rod Ross | Dual cylinder vacuum pump for medical aspiration system |
| CN1932453A (en) * | 2005-09-15 | 2007-03-21 | 比亚迪股份有限公司 | Vehicle air throttle air inflow test system and testing method |
| CN102023654A (en) * | 2010-12-23 | 2011-04-20 | 北京航空航天大学 | Large environment simulation laboratory pressure control system and control method thereof |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105058802A (en) * | 2015-09-08 | 2015-11-18 | 上海联泰科技有限公司 | Scraper vacuum degree controlling method of light curing molding equipment |
| CN110539488A (en) * | 2015-09-08 | 2019-12-06 | 上海联泰科技股份有限公司 | Doctor blade stabilizing system |
| CN105510368A (en) * | 2015-12-02 | 2016-04-20 | 北京金自天正智能控制股份有限公司 | Vacuum degree control system, control method and X-ray fluorescence spectrograph |
| CN106195391A (en) * | 2016-07-15 | 2016-12-07 | 成都中科唯实仪器有限责任公司 | Push-pull valve controls vacuum system and control method thereof |
| CN106195391B (en) * | 2016-07-15 | 2019-02-12 | 成都中科唯实仪器有限责任公司 | The control method of gate valve control vacuum degree system |
| CN109404322A (en) * | 2018-12-06 | 2019-03-01 | 北京东方计量测试研究所 | A kind of wide-range high-precision molecular pump pumping speed test macro and method |
| CN111749879A (en) * | 2019-03-29 | 2020-10-09 | 亚台富士精机股份有限公司 | Control method and vacuum system |
| CN110220116A (en) * | 2019-06-04 | 2019-09-10 | 凯盛光伏材料有限公司 | A kind of exhaust gas constant current processing system |
| CN111594446A (en) * | 2020-05-14 | 2020-08-28 | 上海利方达真空技术有限公司 | Dynamic pressure accurate control system for continuous charging of working gas into low-vacuum system |
| CN112343789A (en) * | 2020-10-14 | 2021-02-09 | 中广核工程有限公司 | Spent fuel storage tank vacuumizing method and system |
| CN113106543A (en) * | 2021-04-14 | 2021-07-13 | 沈阳中科汉达科技有限公司 | Pressure control system for gallium nitride crystal growth |
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Application publication date: 20150520 |