CN104614654A - Automatic test system for testing multiple electrical parameters of semiconductor - Google Patents
Automatic test system for testing multiple electrical parameters of semiconductor Download PDFInfo
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Abstract
The invention discloses an automatic test system for testing multiple electrical parameters of a semiconductor. The system comprises a test environment control unit used for providing test environments of different temperatures, magnetic fields and lighting conditions, a signal test unit used for testing various electrical parameters of a tested sample under different test environments, and a main control unit used for controlling the test environment control unit to adjust the test environment and controlling the signal test unit to complete automatic test and process and analyze the various electrical parameters of the tested sample. The automatic test system of the invention can be used for automatically testing various electrical parameters of a sample, and has very high test accuracy and test efficiency.
Description
Technical field
The invention belongs to semiconductor materials and devices technical field, particularly relate to and a kind ofly transport the automatization test system of the multichip semiconductor electrical parameter of parameter for the multiple electricity of automatic measurement under complex environment.
Background technology
In the process of research semiconductor materials and devices, it is a kind of very important and conventional research means that electricity transports test.By changing the external condition such as temperature magnetic field, the difference such as resistivity, mobility, carrier concentration of study sample the impact of parameter by outfield can be transported.
But the function of current most of accurate electronic transport test macro is all more single, can only realize test that is a kind of or a few Electrical transport.If need to test existing system survey parameter outside Electrical transport, then need again again to purchase other whole set of system, so not only wasted fund but also needed again to require efforts and learn the use of new system.
Only for resistance test, the resistance sizes that different samples has is different, and its method of testing is also different, the resistance that especially resistance is very low and resistance is very high, needs special method of testing could realize accurately test all respectively.And traditional transport the accurate test that test macro seldom can take into account low-resistance and super highly resistant material simultaneously.And the Hall phenomenon of some semiconductor is not clearly, neither be very large even if add the Hall voltage that very large magnetic field obtains, be easy to be flooded by noise, this just needs extremely good shielding and ground connection, more accurate processing is carried out to instrument and test lead, even if but such precision effect that also may not ensure system simultaneously.
The temperature variation testing of existing accurate electronic transport test macro is Non-follow control, after such as testing series of parameters under first temperature spot, needs Non-follow control temperature controller by temperature change to second temperature spot, then carries out next step test.If need like this to test a lot of temperature spot, will be very consuming time and very loaded down with trivial details.
The same system that seldom has fully automatically can test different temperatures, the I-V curve of sample under different magnetic field.And constantly reducing along with modern electronic devices size, its electronic transport performance will be subject to the impact of quantum effect, the test of single I-V curve can not meet the demand to Resistance Analysis, and needing the slope of the I-V curve of its device on mass data point, this just needs us to draw differential conductance figure.Especially concerning cryogenic semiconductor device, the test of differential conductance is particularly important, and the environment such as different temperature, magnetic field or illumination can affect the Quantum Properties even spin properties of device, thus causes the change of differential conductance.But almost there is no the system of the test that can realize automatic test alternating temperature differential conductance or varying magnetic field differential conductance at present.
Be more importantly, in general illumination all can produce very tremendous influence to the Electrical transport of sample, but because low temperature strong magnetic field circumstance is all generally closed, thus almost do not have at present similar alternating temperature varying magnetic field transport system can under different light the Electrical transport of accurate study sample.
Multiple electronic transport parameter cannot be tested in order to overcome in prior art simultaneously, test operating procedure complexity be loaded down with trivial details and cannot realize the defects such as high-precision automatic measurement, proposes a kind of automatization test system of multichip semiconductor electrical parameter.
Summary of the invention
The present invention proposes a kind of automatization test system of multichip semiconductor electrical parameter, comprising: test environment regulation and control unit, it is in order to provide the test environment of different temperatures, magnetic field and illumination; Signal testing unit, it is in order to the electronic transport parameter of test sample under described test environment; Main control unit, it controls described test environment regulation and control unit and regulates described test environment, controls the electronic transport parameter that described signal testing unit completes described sample in automatic test and Treatment Analysis.
In the automatization test system of the multichip semiconductor electrical parameter that the present invention proposes, described signal testing unit comprises: current source, and it is connected with described sample, for providing the electric current of sample described in test process; Nanovoltmeter, for testing the voltage of described test signal; Program control source table, it is connected with described sample, for testing the I-V curve of ultra-high resistance value and described sample; Hyperchannel programmed switch controller, for realizing the automatic switchover of measuring sample signal pin in test process; Described sample signal pin is connected with described sample; Hall effect card, it is arranged in the draw-in groove of described hyperchannel programmed switch controller, interface shows with described current source, described nanovoltmeter, described program control source respectively and described sample is connected, and isolates and coordinate described hyperchannel programmed switch controller to carry out the automatic switchover of described sample signal pin for signal.
In the automatization test system of the multichip semiconductor electrical parameter that the present invention proposes, described signal testing unit comprises far-end prime amplifier further; Described program control source table is connected with described sample by described far-end prime amplifier, makes described program control source show to test resistance up to too ohmage magnitude.
In the automatization test system of the multichip semiconductor electrical parameter that the present invention proposes, comprise further: described Hall effect cartoon crosses three axle shielding lines and described current source, described nanovoltmeter and described program control source list catenation; Described Hall effect cartoon is crossed BNC line and is connected with described sample signal pin.
In the automatization test system of the multichip semiconductor electrical parameter that the present invention proposes, described test environment regulation and control unit comprises liquid helium magneto-optical device, light supply apparatus, superconducting magnet current source and temperature controller; Described liquid helium magneto-optical device is connected with described superconducting magnet current source and described temperature controller, and described light supply apparatus is right against described liquid helium magneto-optical device and arranges; Described superconducting magnet current source 110 is connected with described main control unit with described temperature controller 111.
In the automatization test system of the multichip semiconductor electrical parameter that the present invention proposes, described liquid helium magneto-optical device is provided with sample bin, superconducting magnet and well heater; Be provided with window in described sample bin, in described sample bin, hold described sample; Window described in the light therethrough of described light supply apparatus is radiated on described sample and forms illumination, described superconducting magnet forms magnetic field by described superconducting magnet in described sample bin, and described temperature controller controls the temperature in described sample bin by described well heater.
In the automatization test system of the multichip semiconductor electrical parameter that the present invention proposes, described main control unit regulates and controls unit by GPIB board with described test environment and described signal testing unit is connected, and described main control unit is tested automatically by signal testing unit described in procedure auto-control.
The present invention has following beneficial effect:
The present invention can carry out becoming illumination, temperature, the multiple test transporting parameter, such as resistance, magnetic resistance, Hall effect and the isoparametric automatic test of IV curve under varying magnetic field, and programmable automation test alternating temperature, differential conductance spectrum under varying magnetic field.
Present invention employs Hall effect card and hyperchannel programmed switch, automatically can be realized the switch test of pin by programmed control.And propose a kind of vanderburg method of testing of improvement, can measuring accuracy be improved, reduce the requirement to system mask and ground connection performance.
The present invention utilizes the exact instrument such as current source, nanovoltmeter, sub-fA program control source table, the resistive voltage that can accurately provide the steady current of skin peace rank and acquisition to receive volt rank and Hall voltage.In addition, the present invention carries out Delta test automatically by being combined current source, nanovoltmeter, can be used for accurately test and is low to moderate the super-low resistance value of 1n Ω.
Shielding measure of the present invention is good, test result accuracy.Use sub-fA program control source table, in conjunction with far-end prime amplifier and specimen holder, accurately can test the ultra-high resistance resistance up to 1T Ω.
Alternating temperature, the varying magnetic field test of native system are all automatic by programmed control.After the virtual instrument of test data through program inside carries out necessary signal transacting and gather, result preserves into the electronic document of setting form automatically, automatically shows the parametric image needed.
The present invention can directly be injected in sample bin by visible-near-infrared by window, under studying complex environment (comprising profound hypothermia high-intensity magnetic field), different light is on the impact of sample transport characteristic, also can study the photo-generated carrier characteristic under complex environment.And sample and light source completely isolated, the impact of light source heating on sample can be ignored.
Accompanying drawing explanation
Fig. 1 represents system architecture diagram of the present invention.
Fig. 2 represents specimen holder structural drawing.
Fig. 3 represents Van Der Pauw test structure schematic diagram.
Fig. 4 represents the vanderburg Hall test schematic diagram of improvement.
Fig. 5 represents the storehouse schematic diagram of " slidingtype filtering " and " repeat type filtering " technology of nanovoltmeter.
Fig. 6 represents the schematic diagram of differential conductance test philosophy in native system.
Fig. 7 represents varying magnetic field vanderburg test procedure process flow diagram.
Fig. 8 represents alternating temperature I-V curve test flow chart.
Fig. 9 represents varying magnetic field differential conductance spectrum test procedure process flow diagram.
Embodiment
In conjunction with following specific embodiments and the drawings, the present invention is described in further detail.Implement process of the present invention, condition, experimental technique etc., except the following content mentioned specially, be universal knowledege and the common practise of this area, the present invention is not particularly limited content.
Consult Fig. 1, the automatization test system of multichip semiconductor electrical parameter of the present invention, it comprises test environment regulation and control unit, signal testing unit and main control unit.Test environment regulation and control unit provides different light for sample, the test environment of magnetic field and temperature, signal testing unit provides test signal to test for sample, and gather the electronic transport parameter of sample after tested, main control unit and test environment regulate and control unit and signal testing unit and are connected and set up data and transmit, main control unit is processor, it can control the illumination that the robotization of test environment regulation and control unit regulates test environment, magnetic field and temperature, and the electronic transport parameter of control signal test cell automatic test sample, and analysis is carried out to electronic transport parameter and obtains its result.
Below introduce the test environment regulation and control unit in the present invention, test environment regulation and control unit comprises liquid helium magneto-optical device 108, light supply apparatus 113, superconducting magnet current source 110 and temperature controller 111.The temperature of the test environment of test environment regulon can from 2K to 300K, and magnetic field range can from 0 to 10T, change of magnetic field strength speed can reach 1 tesla/minute.Wherein, temperature controller 111 uses ITC503.
The all control of native system and process of measurement all use the Labview software programming of National Instruments.
Liquid helium magneto-optical device 108 adopts the Spectromag SM4000 of Oxford Instruments, and it is provided with sample bin 802, superconducting magnet and well heater; Be provided with window 801 in sample bin 802, in sample bin 802, hold sample; The light therethrough window 801 of light supply apparatus 113 is radiated on sample 4 and forms illumination.By arranging dissimilar window 801, thus select through the wavelength of light, select the light of corresponding wavelength to be irradiated on sample thus regulate the illumination of test environment.
In use, liquid helium Dewar passes into the environment that liquid helium forms low temperature in the sample bin 802 of liquid helium magneto-optical device 108 in liquid helium magneto-optical device 108, makes superconducting magnet be operated in simultaneously and wherein forms superconduction.Temperature controller 111 controls to produce heat, the temperature in Quality control storehouse 802 in sample bin 802 by well heater (such as, electric resistance heater).Temperature controller 111 is by the control of main control unit, and main control unit robotization can regulate temperature controller 111, thus the temperature of test environment (that is, in sample bin 802) at sample.
Superconducting magnet 110 is IPS120, and it is by master control unit controls, and superconducting magnet 110 forms magnetic field by superconducting magnet in sample bin 802, and robotization can regulate the intensity in magnetic field under the control of main control unit.
Below introduce the sample in the present invention.Sample can be made into different shapes according to different demand.When needing to test resistivity, Hall coefficient, the carrier concentration in sample electronic transport parameter, during the basic parameters such as mobility, vanderburg method is used to test sample, although vanderburg method does not have very strict requirement to sample shape, but for the purpose of accurately, sample should be made into square as far as possible, what a electrode foursquare each angle does respectively.
In specific embodiment, the pcb board 903 of sample has 6 pads, can place the vanderburg sample of one piece of 4 pin and the sample of one piece of 2 pin simultaneously.Wherein the 1st, 2,3,4 pad is connected respectively to 1,2,3,4 electrode pins of vanderburg method sample; Vanderburg test can record sample resistivity and Hall effect etc.5th, 6 pads are connected respectively to the two ends of 2 pin samples, can carry out ultra-high resistance test, the test etc. that the test of I-V curve and differential conductance are composed.
How the sample below introduced in the present invention is arranged in test environment regulon, has introduced a kind of specimen holder 109 in the present embodiment.As shown in Figure 2, specimen holder 109 is main body long straight-bar, and its one end is provided with three fischer connectors (comprising connector A, B, C), and the other end is for placing sample.After sample is arranged on one end of specimen holder 109, by main body being sent into the inside of liquid helium magneto-optical device 108, sample is placed in sample bin 802, fischer connector and is exposed to the external world.Signal lead in main body connects fischer connector and sample and well heater.
Below introduce the signal testing unit in the present invention, signal testing unit comprises: current source 103, nanovoltmeter 104, program control source table 105, hyperchannel programmed switch controller 106 and Hall effect card 107.
Current source 103 is KEITHLEY 6221, and the connector of its specimen holder 109 connects, thus is connected with sample, by wire for sample in test process provides electric current.
Hall effect card 107 is KEITHLEY 7065, and Hall effect card 107 is inserted in hyperchannel programmed switch controller 106, and its pin is connected on the sample signal pin of sample respectively by the signal lead on specimen holder 109.
Program control source table 105 is specially sub-fA program control source table, and it is connected with sample, for testing the I-V curve of ultra-high resistance value and sample by specimen holder 109;
Hyperchannel programmed switch controller 106 is KEITHLEY 7001, during use, Hall effect card 107 is inserted in the draw-in groove of hyperchannel programmed switch controller 106, hyperchannel programmed switch controller 106 opens and closes the switch in Hall effect card 107 automatically according to program, realize the automatic switchover of test sample pin.
The high-low voltage input port of nanovoltmeter 104 is connected with the height interface of the signal output part of Hall effect card 107 respectively by BNC connecting line, for testing the voltage of test signal.Preferably, current source 103 and nanovoltmeter 104 utilize serial communication, can use as a complete machine.Further, consider the setting of wave filter in automatic test course, nanovoltmeter voltage tester can adopt " slidingtype filtering " and " repeat type filtering " to improve the accuracy of test.The wave filter of nanovoltmeter 104 is one " noise filter ", its noise margin=range * spectral window size.When time dependent tested voltage is by wave filter, if change is within noise margin, then carry out stored in buffer area after A/D conversion, if exceed noise margin scope, then wave filter resets, and re-starts collection.As shown in Figure 5, when average filter is enable, and set wave filter buffer size (namely, filter count in programming) time, " slidingtype filtering " have employed the storehouse of first in first out, in storehouse the oldest data will be removed when having new reading to enter storehouse at every turn, then storehouse is now averaged." repeat type filtering " is then, when waiting for that all data of buffer area are filled up, carry out an average computation, then empty all buffer memorys, carry out collection next time and calculating.When carrying out normal voltage collection, use " slidingtype filtering ", because it has speed faster.And when carrying out differential conductance test, can only use " repeat type filtering ", because the algorithm of " slidingtype filtering " cannot obtain the result needed.
Below introduce the main control unit 101 in the present invention.Main control unit 101 is processor device, such as computing machine, main control unit 101 is connected by gpib bus 102 and above-mentioned current source 103, program control source table 105, hyperchannel programmed switch controller 106, superconducting magnet electric current 110 and temperature controller 111, thus realizes automatic test by main control unit 101 according to the above-mentioned each element of programmed control.Further, main control unit 101 can also process the electronic transport parameter after collecting test, thus carries out the analysis of many electrical parameters to sample.
Embodiment 1: varying magnetic field vanderburg is tested.
Have employed the vanderburg Hall test of improvement in the present embodiment, its principle as shown in Figure 4, respectively at the two ends galvanization of sample, in other two ends test voltage, by FR after testing 4 times, then is tested 4 times, is finally obtained Hall coefficient according to formulae discovery.Using the vanderburg Hall test method of improvement in native system, when not applying extra show to sample, 8 times that sample carries out as shown in the figure being tested.Test result is designated as Vn0 respectively, and n is the label of voltage tester.Then apply magnetic field to sample, also test 8 times as shown in the figure, test result is designated as Vn respectively, and the pin that wherein during Vn0 and Vn test, electric current applies and the pin of voltage tester are all one to one.Note Δ Vn=Vn-Vn0.Like this, Δ Vn eliminates neighbourhood noise and asymmetric on after the impact of sample, the voltage only caused by Hall effect.The Hall coefficient obtained after average computation so just becomes more accurate.And whole test process is carried out automatically by programmed control, so do not bring more complicacy to experiment.
Before the experiments, first make it be in liquid helium low-temperature condition according to the operation instructions of liquid helium magneto-optical device SM4000 108, superconducting magnet 110 can normally be run.High-purity helium is used to be pressed in SM4000 108 by the liquid helium in liquid helium Dewar 114 when liquid helium is inadequate.
Consult Fig. 3, the electrode of sample is good with the corresponding pad solder that disperses of the pcb board 903 of sample respectively.Sample frame 901 has fixed fixing PCB in advance, and above it, row's welding hole is connected with the lead-in wire of specimen holder 109, and on lower row's welding hole, special capillary seat has been got well in welding in advance; The capillary seat that now only upper row's welding hole of sample pcb board 903 directly need be inserted into fixing pcb board 902 can realize conducting.
After specimen holder 109 is correctly inserted into liquid helium magneto-optical device, each instrument is connected by accompanying drawing.Before testing, need surrounding light to close, avoid light on the impact of sample.
What Fig. 7 showed is the process flow diagram that varying magnetic field vanderburg is tested, main control unit 101 changes the magnetic field of sample place test environment by the size of current be applied on superconducting coil changing superconducting magnet current source 110, and hyperchannel programmed switch automatically controls Hall effect card and switches pin.The magnitude of voltage of sample is gathered by nanovoltmeter 104, main control unit 101 records the number of times switching pin, after being switched to No. the 12nd switch, control test environment regulation and control unit make FR and continue to measure, after being switched to No. the 16th switch, controlling test environment regulation and control unit magnetic field is recovered.Now main control unit 101 is analyzed these 16 times measurement acquired results and preserves, and next changes magnetic field size, carries out next group and measures.
Table 1 is to CuCr
0.96mg
0.04the varying magnetic field vanderburg measurement result that O2 film sample carries out at 200K temperature:
This form is the data result directly obtained after experiment.Very directly can obtain resistivity in the table, conductivity, magnetic resistance and Hall effect parameter are along with the change in magnetic field.As shown in the tables, the resistivity of this sample can demonstrate positive magnetoresistance under large magnetic field.The Hall coefficient of this sample also presents ascendant trend slowly along with the increase in magnetic field.This is the ultimate principle meeting semiconductor Hall effect.All parameters in form all with 6 bit representations after radix point, there is very high precision.Show that this system is minimum through test findings checking and can measure 10
-3cm
2the mobility size of/(Vs) magnitude.As can be seen from the table, although the mobility of this sample is not very large, minimum only have 1cm
2/ (Vs) magnitude, but this measuring system can accurately distinguish this precision, and this relative traditional instrument has been very high precision.
Embodiment 2: alternating temperature vanderburg is tested.
First main control unit 101 controls the refrigeration of temperature controller (ITC) 111 according to the pid parameter set and adds the temperature that heat changes sample place test environment.The front result measured for 8 times due to vanderburg test is used to obtain resistivity or conductivity, and rear measurement for 8 times is used to obtain Hall effect.So under this temperature spot, first do not add the test in magnetic field, the measurement result that main control unit 101 obtains is as zero magnetic field bias value of sample.Then main control unit 101 will apply magnetic field to sample by test environment regulation and control unit, under this magnetic field, again carry out vanderburg test to sample.
A zone bit is utilized to distinguish whether apply magnetic field in the program of main control unit 101.When completing sample under this temperature spot after all measurements, judge whether according to temperature controller 111 the finishing temperature point arriving setting.If do not arrive finishing temperature point, then utilize temperature controller 111 to change temperature to next temperature spot and again measure, till all measurements under completing all temperature spots, thus complete the test of alternating temperature vanderburg.
Embodiment 3: alternating temperature I-V curve is tested
The electrode of sample is good with the corresponding pad solder that disperses of the pcb board 903 of sample respectively.Sample frame 901 has fixed fixing PCB in advance, and above it, row's welding hole is connected with the lead-in wire of specimen holder 109, and on lower row's welding hole, special capillary seat has been got well in welding in advance; The capillary seat that now only upper row's welding hole of sample pcb board 903 directly need be inserted into fixing pcb board 902 can realize conducting.
After specimen holder 109 is correctly inserted into liquid helium magneto-optical device, each instrument is connected by accompanying drawing.Before testing, need surrounding light to close, avoid light on the impact of sample.
What Fig. 8 showed is the process flow diagram that alternating temperature I-V curve is tested, and main control unit 101 controls the refrigeration of temperature controller 111 according to the pid parameter set and adds the temperature that heat changes sample place test environment.According to set voltage steps and final voltage, program control source table 105 carries out I-V curve to sample automatically, main control unit 101 record and analysis result.After the I-V curved scanning under this temperature spot completes, judge to judge whether to arrive the final temperature arranged according to the reading of temperature controller 111, as do not arrived, continuing to change to next temperature spot and carrying out I-V curved scanning.
Embodiment 4: varying magnetic field differential conductance spectrum test
The electrode of sample is good with the corresponding pad solder that disperses of the pcb board 903 of sample respectively.Sample frame 901 has fixed fixing PCB in advance, and above it, row's welding hole is connected with the lead-in wire of specimen holder 109, and on lower row's welding hole, special capillary seat has been got well in welding in advance; The capillary seat that now only upper row's welding hole of sample pcb board 903 directly need be inserted into fixing pcb board 902 can realize conducting.
After specimen holder 109 is correctly inserted into liquid helium magneto-optical device, each instrument is connected by accompanying drawing.Before testing, need to guarantee that test is carried out under dark surrounds, avoid light on the impact of sample.
The principle of varying magnetic field differential conductance spectrum test as shown in Figure 6, to sample differential current increment dI, can record a differential voltage dV.Differential conductance dG or differential resistance dR can be calculated with dI and dV.Each differential voltage calculated value needs to carry out A/D with the test of first three time of nanovoltmeter and changes gained, and this is similar to three-point delta method to reduce EMFs effect.
What Fig. 9 showed is the process flow diagram that varying magnetic field differential conductance spectrum is tested, and main control unit 101 is by changing the magnetic field being applied to the size of current change sample place test environment on superconducting coil of superconducting magnet current source 110.Current source 103 output current, nanovoltmeter 104 gathers after voltage completes, and procedure auto-control current source output current changes.Main control unit 101 is by program record and utilize above-mentioned algorithm to process the signal collected, and finally draws the differential conductance spectrum under this magnetic field.Then main control unit 101 judges whether to reach magnetic field of the goal according to the reading of superconducting magnet current source 110.As do not reached, change the measurement that the differential conductance spectrum of next magnetic field point is carried out in magnetic field.
The automatization test system of multichip semiconductor electrical parameter of the present invention also can perform the test of alternating temperature differential conductance spectrum and varying magnetic field I-V curve test etc.The test of alternating temperature differential conductance spectrum is similar with alternating temperature I-V curve test process, need be only differential conductance spectrometry by the measurement curriculum offering of each temperature spot.It is similar that the test of varying magnetic field I-V curve and varying magnetic field differential conductance compose test process, need be only I-V curved measurement by the measurement curriculum offering of each magnetic field point.
When studying illumination to the affecting of magnetic sample Electrical transport, first should close light source, carrying out dark current voltage tester; Then open light supply apparatus 113 and current/voltage collection is carried out to sample.Main control unit 101 pairs of acquired results carry out preservation and analyze.
Protection content of the present invention is not limited to above embodiment.Under the spirit and scope not deviating from inventive concept, the change that those skilled in the art can expect and advantage are all included in the present invention, and are protection domain with appending claims.
Claims (7)
1. an automatization test system for multichip semiconductor electrical parameter, is characterized in that, comprising:
Test environment regulation and control unit, it is in order to provide the test environment of different temperatures, magnetic field and illumination;
Signal testing unit, it is in order to the electronic transport parameter of test sample under described test environment;
Main control unit, it controls described test environment regulation and control unit and regulates described test environment, controls the electronic transport parameter that described signal testing unit completes described sample in automatic test and Treatment Analysis.
2. the automatization test system of multichip semiconductor electrical parameter as claimed in claim 1, it is characterized in that, described signal testing unit comprises:
Current source (103), it is connected with described sample, for providing the electric current of sample described in test process;
Nanovoltmeter (104), for testing the voltage of described test signal;
Program control source table (105), it is connected with described sample, for testing the I-V curve of ultra-high resistance value and described sample;
Hyperchannel programmed switch controller (106), for realizing the automatic switchover of measuring sample signal pin in test process; Described sample signal pin is connected with described sample;
Hall effect card (107), it is arranged in the draw-in groove of described hyperchannel programmed switch controller (106), interface, respectively with described current source (103), described nanovoltmeter (104), (105) are shown in described program control source and described sample is connected, is isolated for signal and coordinates described hyperchannel programmed switch controller (106) to carry out the automatic switchover of described sample signal pin.
3. the automatization test system of multichip semiconductor electrical parameter as claimed in claim 2, it is characterized in that, described signal testing unit comprises far-end prime amplifier (501) further; Described program control source table (105) is connected with described sample by described far-end prime amplifier (501), makes described program control source show (105) and can test resistance up to too ohmage magnitude.
4. the automatization test system of multichip semiconductor electrical parameter as claimed in claim 2, it is characterized in that, comprise further: described Hall effect card (107) is shown (105) by three axle shielding lines with described current source (103), described nanovoltmeter (104) and described program control source and is connected; Described Hall effect card (107) is connected with described sample signal pin by BNC line.
5. the automatization test system of multichip semiconductor electrical parameter as claimed in claim 1, it is characterized in that, described test environment regulation and control unit comprises liquid helium magneto-optical device (108), light supply apparatus (113), superconducting magnet current source (110) and temperature controller (111);
Described liquid helium magneto-optical device (108) is connected with described superconducting magnet current source (110) and described temperature controller (111), and described light supply apparatus (113) is right against the setting of described liquid helium magneto-optical device (108);
Described superconducting magnet current source 110 is connected with described main control unit with described temperature controller 111.
6. the automatization test system of multichip semiconductor electrical parameter as claimed in claim 5, it is characterized in that, described liquid helium magneto-optical device (108) is provided with sample bin (802), superconducting magnet and well heater;
Be provided with window (801) in described sample bin (802), in described sample bin (802), hold described sample; Window (801) described in the light therethrough of described light supply apparatus (113) is radiated on described sample (4) and forms illumination, described superconducting magnet (110) forms magnetic field by described superconducting magnet in described sample bin (802), and described temperature controller (111) controls the temperature in described sample bin (802) by described well heater.
7. the automatization test system of multichip semiconductor electrical parameter as claimed in claim 1, is characterized in that, described main control unit regulates and controls unit by GPIB board (5) with described test environment and described signal testing unit is connected.
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| CN109490744A (en) * | 2018-12-14 | 2019-03-19 | 北京航空航天大学 | A kind of PN junction device impurity concentration/concentration gradient automatic measurement system and method |
| CN112162223A (en) * | 2020-08-20 | 2021-01-01 | 中国计量科学研究院 | SQUID device electromagnetic parameter testing method and device and computer equipment |
| CN112162223B (en) * | 2020-08-20 | 2023-09-05 | 中国计量科学研究院 | SQUID device electromagnetic parameter testing method and device and computer equipment |
| CN112363038A (en) * | 2020-09-30 | 2021-02-12 | 温州大学 | Wide bandgap semiconductor heterojunction transition time diode noise detection method and system |
| CN113419157A (en) * | 2021-06-22 | 2021-09-21 | 浙江森尼克半导体有限公司 | Test system and test method suitable for semiconductor low-temperature variable-temperature magnetoelectric performance |
| CN113686783A (en) * | 2021-08-13 | 2021-11-23 | 华东师范大学 | Automatic test system of photoelectric current spectrum based on Fourier infrared spectrometer |
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