CN104611674B - Plane magnetic control negative electrode - Google Patents
Plane magnetic control negative electrode Download PDFInfo
- Publication number
- CN104611674B CN104611674B CN201410629538.9A CN201410629538A CN104611674B CN 104611674 B CN104611674 B CN 104611674B CN 201410629538 A CN201410629538 A CN 201410629538A CN 104611674 B CN104611674 B CN 104611674B
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- CN
- China
- Prior art keywords
- negative electrode
- magnetic control
- plane magnetic
- control negative
- target
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- Water Treatment By Electricity Or Magnetism (AREA)
Abstract
The invention discloses a kind of plane magnetic control negative electrode, the plane magnetic control negative electrode includes：It is embedded with nucleome, the nucleome on magnet, the magnet and is provided with a passage；Copper coin, the copper coin seals the passage；Target, the target is spliced to form by multiple target blocks, and is fixed in the copper coin.The plane magnetic control negative electrode of the present invention can prevent thermal expansion.
Description
Technical field
The present invention relates to sputtering source, in particular it relates to a kind of plane magnetic control negative electrode.
Background technology
Temperature is very high when plane magnetic control negative electrode in the prior art works, in an environment of high temperature, plane magnetic control
The operating efficiency reduction of negative electrode, in high temperature environments, thermal expansion can occur for plane magnetic control negative electrode, can so reduce plane magnetic control cloudy
A kind of stability of pole, then the problem of a kind of plane magnetic control negative electrode of low temperature of design turns into urgent need to resolve.
The content of the invention
The purpose of the present invention is to overcome the problem of thermal expansion can occur for plane magnetic control negative electrode in the prior art flat there is provided one kind
Face magnetron cathode, the plane magnetic control negative electrode can prevent thermal expansion.
To achieve these goals, the invention provides a kind of plane magnetic control negative electrode, the plane magnetic control negative electrode includes：Core
It is embedded with body, the nucleome on magnet, the magnet and is provided with a passage；
Copper coin, the copper coin seals the passage；
Target, the target is spliced to form by multiple target blocks, and is fixed in the copper coin.
Preferably, the nucleome is fixed in framework by collets.
Preferably, the target is secured by bolts on the copper coin.
Preferably, the target is clamped on the copper coin by pliers.
Preferably, water swivel is additionally provided with the nucleome, the water swivel receives cooling water by water route.
Preferably, the water route includes：First paragraph water pipe, heat-shrink tube and the second segment water pipe being sequentially communicated, described first
Duan Shuiguan is communicated in the water swivel, and insulation assembly is additionally provided with the outer surface of the heat-shrink tube.
Preferably, the outer surface of the first paragraph water pipe and the outer surface of water swivel are provided with insulating barrier.
Preferably, the water route also includes：Cover plate and the annular ring being arranged on the cover plate, the cover plate are arranged at
The outer surface of the nucleome, and the insulation assembly is clamped by annular ring.
Preferably, the outer surface of the second segment water pipe is also respectively sleeved on, high voltage tong and cage are pressed from both sides.
Preferably, the surface of the copper coin is in contact with the surface of the target.
By above-mentioned embodiment, plane magnetic control negative electrode of the invention is radiated by copper coin to target, it is to avoid institute
The temperature for stating target is too high, and the target being spliced to form by multiple target blocks, can reduce thermal expansion, accelerates the radiating of target block.
Other features and advantages of the present invention will be described in detail in subsequent embodiment part.
Embodiment
The embodiment to the present invention is described in detail below.It should be appreciated that described herein specific
Embodiment is merely to illustrate and explain the present invention, and is not intended to limit the invention.
In the present invention, in the case where not making opposite explanation, the noun of locality used such as " inside and outside " refers on contour structure
It is interior with it is outer." remote, near " refers to relative in some part and outer.
The present invention provides a kind of plane magnetic control negative electrode, and the plane magnetic control negative electrode includes：Magnetic is embedded with nucleome, the nucleome
A passage is provided with body, the magnet；
Copper coin, the copper coin seals the passage；
Target, the target is spliced to form by multiple target blocks, and is fixed in the copper coin.
By above-mentioned embodiment, plane magnetic control negative electrode of the invention is radiated by copper coin to target, it is to avoid institute
The temperature for stating target is too high, and the target being spliced to form by multiple target blocks, is attached between multiple target blocks by press strip, energy
Thermal expansion is enough reduced, accelerates the radiating of target block.
The present invention is further detailed below, plane magnetic control negative electrode in the present invention can accelerate radiating.
In this kind of embodiment, wherein, nucleome must be insulated between the earth, therefore, in order to nucleome is fixed and
Insulated with the earth, the nucleome is fixed in framework by collets.
In this kind of embodiment, it is necessary to target is fixed on the target of the present invention, on the one hand to target one
The strong point, on the other hand also enables target to be radiated by copper coin, the target is secured by bolts in the copper coin
On.
In another embodiment, the target can also be clamped by pliers on the copper coin, and such mode will
More facilitate the replacing and dismounting of target, the simpler practicality for realizing embodiments of the present invention.
In one embodiment of the invention, nucleome has very high heat when work, and target is Just because of this
Heat be easy for the work of thermal expansion effects target, then how could reduce heat, as spirit of the invention, adopt
It is water-cooled on method, the nucleome and is additionally provided with water swivel, the water swivel receives cooling water by water route, and such mode is not
Electric current only can be provided to the nucleome can also provide cooling water for nucleome simultaneously.
In this kind of embodiment, in order to realize the mode of above-mentioned water route cooling, the water route also includes：It is sequentially communicated
First paragraph water pipe, heat-shrink tube and second segment water pipe, the first paragraph water pipe are communicated in the water swivel, in the outer of the heat-shrink tube
Surface is additionally provided with insulation assembly, wherein, water pipe is divided into three sections, wherein heat-shrink tube can change straight with the change of temperature
Footpath, can so control the flow velocity of water, if temperature is raised, heat-shrink tube narrows, and water flow velocity increase so accelerates the cold of nucleome
But.
In this kind of embodiment, in order to realize the present invention, water swivel and first paragraph water pipe need to insulate with the earth, because
This, the outer surface of the first paragraph water pipe and the outer surface of water swivel are provided with insulating barrier.
In this kind of embodiment, water route is closed with cover plate for convenience, the water route can also include：Cover plate and
The annular ring on the cover plate is arranged at, the cover plate is arranged at the outer surface of the nucleome, and described by annular ring clamping
Insulation assembly, by the setting of annular ring enable the present invention plane magnetic control negative electrode close it is more preferable.
In this kind of embodiment, the outer surface of the second segment water pipe is also respectively sleeved on high voltage tong and cage folder.
In this kind of embodiment, because copper coin can be with heat conduction, in order to allow target to be easier radiating, the surface of the copper coin
It is in contact with the surface of the target.
The preferred embodiment of the present invention described in detail above, still, the present invention are not limited in above-mentioned embodiment
Detail, in the range of the technology design of the present invention, a variety of simple variants can be carried out to technical scheme, this
A little simple variants belong to protection scope of the present invention.
It is further to note that each particular technique feature described in above-mentioned embodiment, in not lance
In the case of shield, can be combined by any suitable means, in order to avoid unnecessary repetition, the present invention to it is various can
The combination of energy no longer separately illustrates.
In addition, various embodiments of the present invention can be combined randomly, as long as it is without prejudice to originally
The thought of invention, it should equally be considered as content disclosed in this invention.
Claims (8)
1. a kind of plane magnetic control negative electrode, it is characterised in that the plane magnetic control negative electrode includes：Magnet is embedded with nucleome, the nucleome,
A passage is provided with the magnet；
Copper coin, the copper coin seals the passage；
Target, the target is spliced to form by multiple target blocks, and is fixed in the copper coin；
Water swivel is additionally provided with the nucleome, the water swivel receives cooling water by water route；
The water route includes：First paragraph water pipe, heat-shrink tube and the second segment water pipe being sequentially communicated, the first paragraph water pipe are communicated in
The water swivel, insulation assembly is additionally provided with the outer surface of the heat-shrink tube.
2. plane magnetic control negative electrode according to claim 1, it is characterised in that the nucleome is fixed on framework by collets
It is interior.
3. plane magnetic control negative electrode according to claim 1, it is characterised in that the target is secured by bolts in the copper
On plate.
4. plane magnetic control negative electrode according to claim 1, it is characterised in that the target is clamped in the copper coin by pliers
On.
5. plane magnetic control negative electrode according to claim 1, it is characterised in that the outer surface of the first paragraph water pipe and water connect
The outer surface of head is provided with insulating barrier.
6. plane magnetic control negative electrode according to claim 1, it is characterised in that the water route also includes：Cover plate and setting
Annular ring on the cover plate, the cover plate is arranged at the outer surface of the nucleome, and clamps the insulation by annular ring
Component.
7. plane magnetic control negative electrode according to claim 1, it is characterised in that also distinguish the outer surface of the second segment water pipe
It is socketed with, high voltage tong and cage are pressed from both sides.
8. plane magnetic control negative electrode according to claim 1, it is characterised in that the surface of the copper coin and the table of the target
Face is in contact.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410629538.9A CN104611674B (en) | 2014-11-10 | 2014-11-10 | Plane magnetic control negative electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410629538.9A CN104611674B (en) | 2014-11-10 | 2014-11-10 | Plane magnetic control negative electrode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104611674A CN104611674A (en) | 2015-05-13 |
| CN104611674B true CN104611674B (en) | 2017-08-25 |
Family
ID=53146312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410629538.9A Expired - Fee Related CN104611674B (en) | 2014-11-10 | 2014-11-10 | Plane magnetic control negative electrode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104611674B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1795531A (en) * | 2003-05-23 | 2006-06-28 | 应用菲林股份有限两合公司 | Magnetron sputter cathode |
| CN201301339Y (en) * | 2008-10-17 | 2009-09-02 | 湖南玉丰真空科学技术有限公司 | High-power planar magnetic control spluttering cathode |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100345924B1 (en) * | 2000-01-24 | 2002-07-27 | 한전건 | Planar typed magnetron sputtering apparatus |
-
2014
- 2014-11-10 CN CN201410629538.9A patent/CN104611674B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1795531A (en) * | 2003-05-23 | 2006-06-28 | 应用菲林股份有限两合公司 | Magnetron sputter cathode |
| CN201301339Y (en) * | 2008-10-17 | 2009-09-02 | 湖南玉丰真空科学技术有限公司 | High-power planar magnetic control spluttering cathode |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104611674A (en) | 2015-05-13 |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170825 Termination date: 20191110 |
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| CF01 | Termination of patent right due to non-payment of annual fee |