CN104603592B - Mems光学传感器 - Google Patents

Mems光学传感器 Download PDF

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Publication number
CN104603592B
CN104603592B CN201380030307.XA CN201380030307A CN104603592B CN 104603592 B CN104603592 B CN 104603592B CN 201380030307 A CN201380030307 A CN 201380030307A CN 104603592 B CN104603592 B CN 104603592B
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CN
China
Prior art keywords
waveguide
optical sensor
optical
sensor
light
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Active
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CN201380030307.XA
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English (en)
Chinese (zh)
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CN104603592A (zh
Inventor
K·雷克
C·厄斯特高
O·汉森
E·V·汤姆森
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Danmarks Tekniske Universitet
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Danmarks Tekniske Universitet
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
    • G01L1/246—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre using integrated gratings, e.g. Bragg gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0633—Directed, collimated illumination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides
    • G01N2201/084—Fibres for remote transmission

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Transform (AREA)
CN201380030307.XA 2012-06-06 2013-06-06 Mems光学传感器 Active CN104603592B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261656051P 2012-06-06 2012-06-06
EP12171002 2012-06-06
EP12171002.4 2012-06-06
US61/656,051 2012-06-06
PCT/EP2013/061701 WO2013182643A1 (en) 2012-06-06 2013-06-06 Mems optical sensor

Publications (2)

Publication Number Publication Date
CN104603592A CN104603592A (zh) 2015-05-06
CN104603592B true CN104603592B (zh) 2018-01-26

Family

ID=49711443

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380030307.XA Active CN104603592B (zh) 2012-06-06 2013-06-06 Mems光学传感器

Country Status (7)

Country Link
US (1) US9574956B2 (enExample)
EP (1) EP2859315B1 (enExample)
CN (1) CN104603592B (enExample)
CA (1) CA2875925A1 (enExample)
EA (1) EA028598B1 (enExample)
IN (1) IN2015DN00016A (enExample)
WO (1) WO2013182643A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105209883B (zh) * 2012-10-08 2018-06-12 新加坡科技研究局 用于对分析物进行分析的折射率传感器及其制造方法
DE102013209248B4 (de) * 2013-05-17 2021-02-11 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
DK3004829T3 (en) * 2013-06-06 2018-04-30 Univ Denmark Tech Dtu Optical pressure sensor
US9728567B2 (en) * 2013-12-02 2017-08-08 United Microelectronics Corp. Semiconductor sensor device
TWI597910B (zh) * 2016-10-03 2017-09-01 國立交通大學 光學元件、壓力感測元件以及壓力感測裝置
US10571633B1 (en) * 2016-12-23 2020-02-25 Acacia Communications, Inc. Suspended cantilever waveguide
TWI633287B (zh) * 2017-08-10 2018-08-21 國立交通大學 光學應力感測元件、系統及方法
CN111213050A (zh) * 2017-10-12 2020-05-29 新加坡科技研究局 化学品传感器及其形成方法
CN108195494B (zh) * 2018-03-13 2023-08-22 南京信息工程大学 一种基于狭缝表面等离激元效应的光学压力传感器及压力检测方法
EP3708990B1 (en) * 2019-03-14 2022-04-27 Thales Management & Services Deutschland GmbH Fiber optic sensor unit, optical measuring system, axle-counting device, axle-counting method
CN110531513B (zh) * 2019-09-03 2022-02-15 山东大学 一种mems换能结构及其应用
CN111555100A (zh) * 2020-04-29 2020-08-18 山西大学 利用三模光机械系统产生高阶横模压缩光的装置和方法
CN116472439A (zh) * 2020-11-04 2023-07-21 香港大学 用于多模态感测的光学软皮肤系统
NL2036074B1 (en) 2023-10-19 2025-05-02 Tarucca Tech B V Installation method and system for monitoring structural response of wind turbine blades

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5819528A (ja) * 1981-07-28 1983-02-04 Shimadzu Corp 光圧力センサ
DE19754910C2 (de) * 1997-12-10 1999-12-02 Geoforschungszentrum Potsdam Wellenlängendetektion an Faser-Bragg-Gitter-Sensoren
CN2527959Y (zh) * 2002-02-15 2002-12-25 燕山大学 用于埋入混凝土结构的光纤应变传感器
CN1648637A (zh) * 2005-01-29 2005-08-03 山西大学 一种光纤气体传感器
US7668419B2 (en) * 2006-10-23 2010-02-23 Weatherford/Lamb, Inc. Evanescent sensor using a hollow-core ring mode waveguide

Also Published As

Publication number Publication date
EP2859315B1 (en) 2021-07-21
IN2015DN00016A (enExample) 2015-05-22
WO2013182643A1 (en) 2013-12-12
US9574956B2 (en) 2017-02-21
EA201492196A1 (ru) 2015-04-30
EP2859315A1 (en) 2015-04-15
CA2875925A1 (en) 2013-12-12
CN104603592A (zh) 2015-05-06
EA028598B1 (ru) 2017-12-29
US20150131100A1 (en) 2015-05-14

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