CN104576273A - Application of beam current collection circuit to ion implanter - Google Patents
Application of beam current collection circuit to ion implanter Download PDFInfo
- Publication number
- CN104576273A CN104576273A CN201310507670.8A CN201310507670A CN104576273A CN 104576273 A CN104576273 A CN 104576273A CN 201310507670 A CN201310507670 A CN 201310507670A CN 104576273 A CN104576273 A CN 104576273A
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/31701—Ion implantation
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Respiratory Apparatuses And Protective Means (AREA)
Abstract
The invention discloses the application of a beam current collection circuit to an ion implanter. The circuit comprises a voltage filtering unit 1, a constant current source unit 2, a 12-path I/V conversion unit 3 and a 12-path voltage amplification unit 4. In the Specification, the circuit is described in detail, and a specific implementation scheme is given.
Description
Technical field
The present invention is the application of line Acquisition Circuit in ion implantor.This circuit gathers current signal from ion implantor faraday array, is converted to the voltage of 0-10V after treatment, and shows at host computer place.Related personnel, by observing the size of correlation values determination Faraday cup institute received current, judges relative position and the uniformity of line with this.
Background technology
Ion implantor is a kind of by guiding impurity to inject semiconductor wafer, thus changes the equipment of the conductivity of wafer, and wherein, the uniformity of the degree of depth that impurity injects and density all directly determines the quality injecting wafer.Therefore, must the uniformity of line be monitored and be debugged before injection.
Ion implantor, in debugging line process, the uniformity to line can only be monitored, but this method can not be reached the object of Real-Time Monitoring by mobile faraday and PMAC motion controller, and complicated operation, has certain limitation.Therefore, in the debugging line process of ion implantor, in order to the situation of change of line simply directly can be observed, structurally with in control innovate, in ion implantor project, introduce faraday's array and line Acquisition Circuit.These two innovations well solve the problem of Real-Time Monitoring in line debugging, and can better observe injection direction and the uniformity of line.
Detailed introduction is done herein by line Acquisition Circuit.
Summary of the invention
The present invention is the application of line Acquisition Circuit in ion implantor, by designing a kind of hardware circuit, sends into controller analog input port, for upper machine data process also after the 21 road electric currents gathered being carried out I/V conversion and voltage amplification.This circuit has gearshift function, can select different gears according to different line values, convenient, flexible in debugging.
The present invention is achieved through the following technical solutions:
1. voltage filter unit 1, is made up of electric capacity, resistance, Surge Protector, Transient Suppression Diode, power supply indicator etc., for whole circuit provide working stability ± 15V, 24V voltage.
2. constant current source unit 2, is made up of electricity pieces such as PNP triode, voltage references, resistance, toggle switchs.After unit 2 is powered, voltage reference chip Vout port produces constant voltage, and the path selecting resistance different by toggle switch, produces different constant currents.Utilize this electric current, unit 3 and unit 4 are debugged, make it export identical voltage, true to ensure the numerical value of host computer display in line gatherer process.
3.12 road I/V converting units 3, each road circuit theory is identical, is made up of relay, amplifier, diode, resistance etc., and its repeat circuit is used for carrying out gear selection, and current conversion is become negative voltage with resistance by amplifier.Unit 3 completes the transfer process of electric current to voltage.
4.12 road voltage amplification unit 4, the compositions such as each routing resistance, electric capacity, amplifier, slide rheostat.The negative voltage of last cell translation is oppositely amplified between 0-10 by unit 4, and delivers to the analog input port of controller.
Accompanying drawing explanation
Fig. 1 voltage filter unit schematic diagram
Fig. 2 constant current source unit schematic diagram
Fig. 3 I/V converting unit schematic diagram
Fig. 4 voltage amplification unit schematic diagram
Embodiment
This patent is achieved through the following technical solutions:
1. voltage filter unit 1.Form primarily of protectiveness device.Power input J13 provides ± 15V direct voltage and GND; can through Surge Protector and Transient Suppression Diode; these two kinds of elements effectively can suppress the sudden change of input voltage, are the operating voltage of circuit with stable, thus the electric elements in protective circuit.In circuit, all earth points such as line input metal shell, amplifier earth terminal are all connected with the GND of power input, to ensure that controller and line Acquisition Circuit have identical reference point.In addition, unit 1 is also designed with voltage indicator lamp and test point, for debugging efforts is provided convenience.
2. constant current source unit 2.PNP triode C collection is connected with 6 pin with 2 pin of reference voltage device U1, and 6 pin of such U1 can produce constant voltage.6 pin of U1 are connected with 4 road toggle switch S1 through R1, R2, R3 that resistance is different, by different resistances with select different path, the constant measuring current of 3 kinds of different brackets can be produced at 6 pin of toggle switch S1,7 pin, 8 pin places.After selecting suitable measuring current, the slide rheostat connect by 4 road toggle switch S2 and 8 road toggle switch S3 and amplifier 1 pin, 5 pin progressively completes the debugging task to each road line Acquisition Circuit in unit 3 and unit 4, reaches the object that each road exports identical voltage under identical measuring current.After having debugged, all toggle switchs are allocated to open state.The wherein 5-8 Jiao Jie 1-4 road of S2, the 9-12 pin of S3 connects 5-12 road.
3.12 road I/V converting units 3.In unit 3, the I/V conversion on each road is all identical, need when designing to consider following some: 1) in collection line process, the size of line is by extraction voltage and D1 voltage and efficiency of transmission decision; 2) ion implantor PSI controller, can only gather the voltage of 0-10V; 3) multiplication factor of unit 4 amplifier is set as 10.Conversion due to current/voltage is mainly realized by resistance, in order to meet above condition and the line of correct collection different brackets, devising line and gathering gearshift function in unit 3.Be described for the first via: relay K 1 coil is 1 pin and 16 pin, meets the Dout1 of DC 24V and PSI controller respectively, 4 pin are common point, be normally closed and often open with 6 pin and 8 pin.Normally-closed contact is connected with R6, is acquiescence shelves 1.Normally opened contact is connected with R7, is shelves 2.When needs are shifted gears, make the conducting of Dout1 road, relay coil obtains electric, and normally closed normally opened contact exchanges, and completes the switching of shelves 1 and shelves 2.1 pin, 5 pin of amplifier U2 connect slide rheostat, and 2 pin are the input of electric current, 3 pin ground connection, and 4 pin and 7 pin meet operating voltage ± 15V, and 6 pin are for exporting.Due to 3 pin ground connection of amplifier, known according to the concept of virtual earth, gather electric current I will produce U=-I*R6 (or R7) voltage at output 6 pin place, and in faraday's array, the electric current that each Faraday cup receives is microampere rank, according to practical experience, selects R6=50K, R7=5K, ensures-0.1V≤U≤0V by gearshift function.
4.12 road voltage amplification unit 4.Unit 4 is voltage reversal amplifying circuit, and each road is all identical, primarily of amplifier and resistance composition.Slide rheostat is connect for 1 pin of first via amplifying circuit: amplifier U3,5 pin, 2 pin are voltage input end, 3 pin ground connection, 4 pin and 7 pin meet operating voltage ± 15V, 6 pin are connected with the analog input port of controller as output, the multiplication factor A=-R10/R9 of U3, and the voltage amplification exported by 6 pin of U2 is to 0-10V, deliver to PSI controller, and show in host computer place.
In board design, unit 1 to unit 4 being welded on one piece of area is on the plank of 297mm × 154mm.Faraday's array is made up of 21 Faraday cups, therefore foregoing circuit plate needs 2 pieces, wherein every block is using 90 ° of plug-in printed circuit board sockets and plug as the input J1-J12 of 12 road lines collections, with power supply and gearshift input that the 3.96mm connector J13 of 6 pins is 12 road line Acquisition Circuit, take the 3.96mm connector J14 of 12 pins as the output of 12 road line Acquisition Circuit.
The above elaborates content of the present invention.For persons skilled in the art, not deviating under prerequisite of the present invention any apparent change that it does, all forming the infringement to patent of the present invention, corresponding legal liabilities will be born.
Claims (3)
1. the application of line Acquisition Circuit in ion implantor, is characterized in that: voltage filter unit 1; Constant current source unit 2; 12 road I/V converting units 3; 12 road voltage amplification unit 4.Unit 1 is the operating voltage of circuit with stable; Unit 2 provides constant electric current, utilizes the circuit of this electric current to unit 3 and unit 4 to debug; Unit 3 gathers electric current from Faraday cup, and converts voltage to, and unit 3 has gearshift function; The voltage of unit 4 collecting unit 3, and controller analog input port will be delivered to after voltage amplification to 0-10V, and in host computer display interface inquiry respective bundles flow valuve.
2. this hardware circuit as claimed in claim 1, is characterized in that, 4 different units are welded at an area to be on the plank of 297mm × 154mm, to utilize collection and the output of 90 ° of plug-in printed circuit board sockets and 3.96mm connector settling signal.
3. circuit board as claimed in claim 2, is made up of 21 Faraday cups according to faraday's array, should selects 2 pieces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310507670.8A CN104576273A (en) | 2013-10-24 | 2013-10-24 | Application of beam current collection circuit to ion implanter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310507670.8A CN104576273A (en) | 2013-10-24 | 2013-10-24 | Application of beam current collection circuit to ion implanter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104576273A true CN104576273A (en) | 2015-04-29 |
Family
ID=53092072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310507670.8A Pending CN104576273A (en) | 2013-10-24 | 2013-10-24 | Application of beam current collection circuit to ion implanter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104576273A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109116403A (en) * | 2017-06-23 | 2019-01-01 | 北京中科信电子装备有限公司 | A kind of precise acquisition line circuit |
| CN109309023A (en) * | 2017-07-26 | 2019-02-05 | 北京中科信电子装备有限公司 | A kind of method of general monitoring ion beam current distribution |
-
2013
- 2013-10-24 CN CN201310507670.8A patent/CN104576273A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109116403A (en) * | 2017-06-23 | 2019-01-01 | 北京中科信电子装备有限公司 | A kind of precise acquisition line circuit |
| CN109309023A (en) * | 2017-07-26 | 2019-02-05 | 北京中科信电子装备有限公司 | A kind of method of general monitoring ion beam current distribution |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhongkexin Electronic Equipment Co., Ltd., Beijing Document name: Notification of before Expiration of Request of Examination as to Substance |
|
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150429 |