CN104569486A - Hot air speed sensing system composed of infrared image sensor - Google Patents

Hot air speed sensing system composed of infrared image sensor Download PDF

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Publication number
CN104569486A
CN104569486A CN201510024525.3A CN201510024525A CN104569486A CN 104569486 A CN104569486 A CN 104569486A CN 201510024525 A CN201510024525 A CN 201510024525A CN 104569486 A CN104569486 A CN 104569486A
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China
Prior art keywords
infrared image
image sensor
sensible heat
upper cover
substrate
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Pending
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CN201510024525.3A
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Chinese (zh)
Inventor
秦明
姚玉瑾
王芳
杨佳伟
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Southeast University
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Southeast University
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Priority to CN201510024525.3A priority Critical patent/CN104569486A/en
Publication of CN104569486A publication Critical patent/CN104569486A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a hot air speed sensing system composed of an infrared image sensor. The system comprises a base and an upper cover. The base and the upper cover are fixed through supporting columns and a gap is formed between the base and the upper cover. A substrate is arranged in the middle of the upper surface of the base. A thermal insulation film is arranged on the upper surface of the substrate. A heating unit is arranged in the middle of the upper surface of the thermal insulation film. A thermal sensing board is arranged below the upper cover. The infrared image sensor is arranged between the upper cover and the thermal sensing board. Both the thermal sensing board and the infrared image sensor are fixed to the upper cover. Infrared image information of the thermal sensing board is collected through the infrared image sensor. The hot air speed sensing system has the advantages of being simple in structure, small in temperature excursion, low in power consumption and the like.

Description

A kind of hot blast speed sensor-based system be made up of infrared image sensor
Technical field
The present invention relates to one and realize the hot wind speed wind direction sensor system of highly sensitive two-dimentional silicon based on infrared image sensor, is adopt infrared image sensor realize the location of hot spot position and then determine the measuring system of wind speed and direction.
Background technology
Meteorological Problem is the major issue that people pay close attention to always, meteorologic parameter mainly comprises temperature, air pressure, humidity, water vapor flux, wind direction and wind velocities etc., wherein wind speed and direction is vital part in meteorological data, and the measurement of wind speed and direction all has a wide range of applications in environmental monitoring, weather forecast and control etc.Such sensor generally has traditional vane and weathervane structure, ultrasonic air velocity transducer and hot blast speed sensor.Tradition vane and weathervane structural volume are comparatively large, general at several tens cm or more, and there are rotatable parts, easily wear and tear; Ultrasonic air velocity transducer obtains very large development in recent years, and it is high that this sensor has precision, and measurement range is large, and many outstanding advantages such as long service life.Its unfavorable factor is volume comparatively large (more than 10 centimetres), on the high side.It is little that miniature hot blast speed sensor based on MEMS process technology has volume, and price is low, the feature of good product consistency, is the focus studied in recent years.But, because this kind of sensor realizes measuring wind speed by the principle measuring thermal field or thermal loss, temperature drift effect and zero point drift larger, and sensor needs continuous heating, and power consumption is larger.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the invention provides and a kind ofly utilize infrared image sensor sense temperature to change thus record the hot blast speed sensor-based system of wind speed and direction, the present invention has the features such as structure is simple, temperature drift is little, low in energy consumption.
Technical scheme: for achieving the above object, the technical solution used in the present invention is:
The hot blast speed sensor-based system be made up of infrared image sensor, comprise pedestal and upper cover, pedestal and upper cover are fixed by support column, and there is gap between pedestal and upper cover; In the middle part of pedestal upper surface, be provided with substrate, substrate top surface is provided with adiabatic membrane, adiabatic membrane upper surface middle part is provided with heating unit; The below of upper cover is provided with sensible heat plate, between upper cover and sensible heat plate, is provided with infrared image sensor, sensible heat plate and infrared image sensor are all fixed on and cover; Infrared image sensor gathers the Infrared Image Information of sensible heat plate.
The above-mentioned hot blast speed sensor-based system be made up of infrared image sensor, is made up of the sensible heat plate added above the heating unit of hot-air, heating unit and the infrared image sensor above sensible heat plate; The air of heating unit heats above it, air rises and contacts sensible heat plate, and formation temperature distribution on sensible heat plate, infrared image sensor above sensible heat plate gathers sensible heat plate image and is transferred in digital signal processor, by analyzing the positional information that can obtain maximum temperature point, actual wind speed and direction information can be calculated by the positional information of maximum temperature point.
Concrete, described sensible heat plate comprises transparency carrier, and transparency carrier one side is coated with sensible heat material, and cover one of sensible heat material facing to heating unit, transparency carrier one is facing to infrared image sensor; Described sensible heat material is anisotropy Heat Conduction Material (namely vertical direction heat conduction is fast, horizontal direction heat conduction is slow) or isotropy heat conduction film/ultrathin film.
Concrete, described substrate also directly can be designed to thermal insulation material, and the upper surface of such substrate just simultaneously can as adiabatic membrane.
Beneficial effect: the hot blast speed sensor-based system be made up of infrared image sensor provided by the invention, accurately can provide the image information of thermal field, wind speed and direction information accurately can be obtained by data processing, therefore there is following advantage: 1, measurement sensistivity is high; 2, due to only measuring tempeature distribution, do not need absolute value to measure, so there is no warm drift problem; 3, whole system does not have movable member, therefore good reliability, easy care; What 4, system can be done is very little, low in energy consumption, is convenient to form portable product; 5, system architecture is simple, and cost is low, therefore marketing and competitiveness strong.
Accompanying drawing explanation
Fig. 1 is sectional structure schematic diagram of the present invention;
Fig. 2 is perspective view of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is further described.
Be a kind of hot blast speed sensor-based system be made up of infrared image sensor as shown in Figure 1 and Figure 2, comprise pedestal 1 and upper cover 7, pedestal 1 and upper cover 7 are fixed by support column 5, and there is gap between pedestal 1 and upper cover 7; Pedestal 1 upper surface middle part is provided with substrate 2, and surface is provided with adiabatic membrane 3 on the substrate 2, and adiabatic membrane 3 upper surface middle part is provided with heating unit 4; The below of upper cover 7 is provided with sensible heat plate 6, is provided with infrared image sensor 8 between upper cover 7 and sensible heat plate 6, sensible heat plate 6 and infrared image sensor 8 are all fixed on upper cover 7; Infrared image sensor 8 gathers the Infrared Image Information of sensible heat plate 6.Described sensible heat plate 6 comprises transparency carrier, and transparency carrier one side is coated with sensible heat material, and cover one of sensible heat material facing to heating unit 4, transparency carrier one is facing to infrared image sensor 8; Described sensible heat material is anisotropy Heat Conduction Material or isotropy heat conduction film.
Some specific design points of the hot blast speed sensor-based system of above-mentioned infrared image sensor composition are as follows: pedestal 1 is encapsulating structure, and circuit board can be put in inside; Substrate 2 is square or circular configuration, and upper surface is smooth; Sensible heat plate 6 is placed in directly over heating unit 4; Support column 5 is evenly arranged in all sides, and partly/whole support column 5 can be designed as hollow structure, can wear wire, facilitate the electricity between up-down structure interconnected; Sensible heat plate 6 is made up of upper conduct heat good metallic film, carbon nano-tube or other anisotropy sensible heat films of one deck that cover of transparent material (as glass or organic glass), and object plays sensible heat effect; Desirable sensible heat film is that thickness direction heat conduction is good, laterally adiabatic, and the metallic film therefore covered or carbon nano-tube can not be too thick, to reduce horizontal heat transfer.
Time calm, heating unit 4 adds hot-air and causes hot-air rising contact sensible heat plate 6, and sensible heat plate 6 is formed similar concentrically ringed Temperature Distribution, and the temperature directly over heating unit 4 is the highest; Whole sensor-based system is blown over along a direction when there being wind, the air be heated will flow along wind direction direction, the Temperature Distribution on sensible heat plate 6 is caused to change, maximum temperature point moves with the wind, this temperature profile is gathered by the infrared image sensor 8 above heat-conducting plate 6, extract through data and analyze the position can finding heat peak, this position is dull relevant with wind speed size to central point length, and this position is exactly the angle of wind direction relative to the angle at center.
The hot blast speed sensor-based system manufacturing process that should be made up of infrared image sensor is: first choose adiabatic substrate 2, the silicon chip of such as thermal oxide, then defined the shape of heating unit 4 in silicon chip center by photoetching technique, one deck nickel or platinum metal film is covered on the substrate 2 by magnetron sputtering technique, removed the metal of other positions by stripping technology, leave heating arrangement 4; Substrate 2 with heating arrangement 4 is contained on pedestal 1 by chip sticker, around pedestal 1, support column 5 is installed, and then the sensible heat plate 6 of fixing glass substrate thereon; Finally by the fixing manufacturing process just completing whole hot blast speed sensor-based system of upper cover 7 that support column 5 will install an infrared image sensor 8 at sensible heat plate 6 overcentre.
The above is only the preferred embodiment of the present invention; be noted that for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.

Claims (3)

1. the hot blast speed sensor-based system be made up of infrared image sensor, it is characterized in that: comprise pedestal (1) and upper cover (7), pedestal (1) and upper cover (7) are fixed by support column (5), and there is gap between pedestal (1) and upper cover (7); Pedestal (1) upper surface middle part is provided with substrate (2), substrate (2) upper surface is provided with adiabatic membrane (3), adiabatic membrane (3) upper surface middle part is provided with heating unit (4); The below of upper cover (7) is provided with sensible heat plate (6), between upper cover (7) and sensible heat plate (6), be provided with infrared image sensor (8), sensible heat plate (6) and infrared image sensor (8) are all fixed on upper cover (7); Infrared image sensor (8) gathers the Infrared Image Information of sensible heat plate (6).
2. the hot blast speed sensor-based system be made up of infrared image sensor according to claim 1, it is characterized in that: described sensible heat plate (6) comprises transparency carrier, transparency carrier one side is coated with sensible heat material, cover one of sensible heat material facing to heating unit (4), transparency carrier one is facing to infrared image sensor (8); Described sensible heat material is anisotropy Heat Conduction Material or isotropy heat conduction film.
3. the hot blast speed sensor-based system be made up of infrared image sensor according to claim 1, it is characterized in that: described substrate (2) is thermal insulation material, the upper surface of substrate (2) is simultaneously as adiabatic membrane (3).
CN201510024525.3A 2015-01-16 2015-01-16 Hot air speed sensing system composed of infrared image sensor Pending CN104569486A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106771338A (en) * 2016-12-30 2017-05-31 北京天恒长鹰科技股份有限公司 A kind of wind direction of near space and the acquisition methods and device of wind speed size
US11333794B2 (en) * 2018-10-23 2022-05-17 International Business Machines Corporation Multimedia derived wind map

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01201165A (en) * 1988-02-05 1989-08-14 Mitsubishi Heavy Ind Ltd Flow observation device
CN101131337A (en) * 2007-10-11 2008-02-27 新源动力股份有限公司 Double-polar plate flow field fluid visualization apparatus and method thereof
CN101832959A (en) * 2009-03-12 2010-09-15 陈文进 Device and method for detecting heat-dissipating plate
CN102735294A (en) * 2011-04-02 2012-10-17 苏州科技学院 Measuring method for wind speed field measurement device based on infrared focal planes and reconstruction technique
CN102749473A (en) * 2012-06-30 2012-10-24 东南大学 Two-dimensional hot-film wind speed and direction sensor and preparation method thereof
CN203705468U (en) * 2013-12-26 2014-07-09 天津大学 Novel surface flow field velocimetry system based on infrared photography

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01201165A (en) * 1988-02-05 1989-08-14 Mitsubishi Heavy Ind Ltd Flow observation device
CN101131337A (en) * 2007-10-11 2008-02-27 新源动力股份有限公司 Double-polar plate flow field fluid visualization apparatus and method thereof
CN101832959A (en) * 2009-03-12 2010-09-15 陈文进 Device and method for detecting heat-dissipating plate
CN102735294A (en) * 2011-04-02 2012-10-17 苏州科技学院 Measuring method for wind speed field measurement device based on infrared focal planes and reconstruction technique
CN102749473A (en) * 2012-06-30 2012-10-24 东南大学 Two-dimensional hot-film wind speed and direction sensor and preparation method thereof
CN203705468U (en) * 2013-12-26 2014-07-09 天津大学 Novel surface flow field velocimetry system based on infrared photography

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106771338A (en) * 2016-12-30 2017-05-31 北京天恒长鹰科技股份有限公司 A kind of wind direction of near space and the acquisition methods and device of wind speed size
US11333794B2 (en) * 2018-10-23 2022-05-17 International Business Machines Corporation Multimedia derived wind map

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Application publication date: 20150429