CN104567690A - Field calibration method and device for laser beams - Google Patents

Field calibration method and device for laser beams Download PDF

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CN104567690A
CN104567690A CN201410829642.2A CN201410829642A CN104567690A CN 104567690 A CN104567690 A CN 104567690A CN 201410829642 A CN201410829642 A CN 201410829642A CN 104567690 A CN104567690 A CN 104567690A
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hole
hot spot
scaling board
displacement sensor
axis
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CN104567690B (en
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李斌
熊忠星
李沨
郑飞
刘红奇
毛新勇
彭芳瑜
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Huazhong University of Science and Technology
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Abstract

The invention provides a field calibration method for laser beams. The method specifically comprises steps as follows: leveling a calibration plate, wherein the calibration plate has three through holes, and connection lines among the through holes are perpendicular; emitting a laser beam to the calibration plate to form an image by a laser displacement sensor; driving the laser displacement sensor to move for a distance in the Y-axis direction of a machine tool, and then emitting a laser beam to the calibration plate to from an image; driving the laser displacement sensor to move for a distance in the Z-axis direction of the machine tool, and then emitting a laser beam to the calibration plate to from an image; calculating deviation angles formed by the laser beams and a spindle of the machine tool according to position relations of the three through holes in the three images. The invention further provides a device for realizing the method. The device comprises the calibration plate, a leveling device, a CCD (charge coupled device) camera and a processor. According to the method and the device, the laser displacement sensor is driven by movement in all axes of the machine tool, the CCD camera is adopted to shoot images of light spots of the laser beams on the calibration plate, the direction characteristic of the laser beams is determined accurately through digital image analysis, and measurement results in the later period are compensated.

Description

A kind of laser beam field calibration method and device
Technical field
The present invention relates to and measure beam direction characteristic calibration technique field, in particular, the present invention relates to a kind of laser beam field calibration method and device.
Background technology
Laser measuring technique is as a kind of contactless measuring technique, and its measuring accuracy and efficiency are greatly improved compared to traditional contactless gauge head, more and more extensive in the application of detection field.Laser measurement principle utilizes laser displacement sensor to launch beam of laser to beat on testee surface, by receiving reflected light, measures the distance of object to laser displacement sensor.
For the free form surface class part that some are large-scale, as large-scale spiral paddle blade, the measurement of the parts such as turbine chamber, utilize existing machine tool often, then the detection that laser displacement sensor carries out External Shape is carried, in testing process, the laser that laser displacement sensor is launched is tried one's best and machine tool chief axis axis coaxle, but due to the positioning error of alignment error or lathe itself, the actual direction of laser beam and main-shaft axis can be caused to have certain deviation, this deviation brings very large error can to final measurement result, therefore in the urgent need to a kind of can the deviation of Accurate Calibration beam direction, to compensate the measurement result in later stage, thus guarantee measuring accuracy.
Summary of the invention
For some defects and the new demand of existing calibration technique, the invention provides a kind of laser beam field calibration method and device, laser displacement sensor is driven by the motion of each axle of lathe, adopt the image of CCD camera shooting laser beam spot on scaling board, by the azimuth characteristic of digital image analysis Accurate Measurement laser beam, to compensate the measurement result in later stage.
A kind of laser beam field calibration method, comprises the following steps:
(1) leveling scaling board makes it vertical with machine Z-axis, and described scaling board has three through holes, and between the first through hole with the second through hole, line is vertical with line between the first through hole with third through-hole;
(2) use laser displacement sensor Emission Lasers bundle to form the first hot spot to scaling board, projection is had to the scaling board imaging of the first hot spot;
(3) order about laser displacement sensor displacement L in lathe Y direction, re-use laser displacement sensor Emission Lasers bundle and form the second hot spot to scaling board, projection is had to the scaling board imaging of the second hot spot;
(4) order about laser displacement sensor displacement H in machine Z-axis direction, re-use laser displacement sensor Emission Lasers bundle and form the 3rd hot spot to scaling board, projection is had to the scaling board imaging of the 3rd hot spot;
(5) calculate the drift angle of laser beam and machine tool chief axis, be specially:
On scaling board with the first through hole for demarcating coordinate origin, the first through hole and the second through hole line are for demarcating coordinate system X-axis, and the first through hole and third through-hole line are for demarcating coordinate system Y-axis;
Be the coordinate under demarcation coordinate system by the coordinate conversion of first, second and third hot spot in imaging, be designated as (x 1, y 1), (x 2, y 2), (x 3, y 3);
Build the first hot spot and the second hot spot line equation L 12: a 1x+b 1y+c 1=0, a 1, b 1and c 1for straight-line equation coefficient;
Build the second hot spot and the 3rd hot spot line equation L 23: a 2x+b 2y+c 2=0, a 2, b 2and c 2for straight-line equation coefficient;
Calculate laser beam and machine Z-axis angle ∠ α=arctan (L/H);
Calculate the projection of laser beam in lathe XOY plane and angle ∠ β=arctan ((a of lathe Y-axis 1* b 2-a 2* b 1)/(a 1* a 2+ b 1* b 2)).
A kind of laser beam field calibration method, comprises the following steps:
(1) leveling scaling board makes it vertical with machine Z-axis, and described scaling board has three through holes, and the first through hole is vertical with third through-hole line with the first through hole with the second through hole line;
(2) use laser displacement sensor Emission Lasers bundle to form the first hot spot to scaling board, projection is had to the scaling board imaging of the first hot spot;
(3) order about laser displacement sensor displacement L in lathe X-direction, use laser displacement sensor Emission Lasers bundle to form the second hot spot to scaling board, projection is had to the scaling board imaging of the second hot spot;
(4) order about laser displacement sensor displacement H in machine Z-axis direction, use laser displacement sensor Emission Lasers bundle to form the 3rd hot spot to scaling board, projection is had to the scaling board imaging of the 3rd hot spot;
(5) calculate the drift angle of laser beam and machine tool chief axis, be specially:
On scaling board with the first through hole for demarcating coordinate origin, the first through hole and the second through hole line are for demarcating coordinate system X-axis, and the first through hole and third through-hole line are for demarcating coordinate system Y-axis;
Be the coordinate under demarcation coordinate system by the coordinate conversion of first, second and third hot spot in imaging, be designated as (x 1, y 1), (x 2, y 2), (x 3, y 3);
Build the first hot spot and the second hot spot line equation L 12: a 1x+b 1y+c 1=0, a 1, b 1and c 1for straight-line equation coefficient; And build the second hot spot and the 3rd hot spot line equation L 23: a 2x+b 2y+c 2=0, a 2, b 2and c 2for straight-line equation coefficient;
Calculate laser beam and lathe Z week angle ∠ α=arctan (Dx/H);
Calculate the projection of laser beam in lathe XOY plane and angle ∠ γ=arctan ((a of lathe X-axis 1* b 2-a 2* b 1)/(a 1* a 2+ b 1* b 2)).
Realize a device for described laser beam field calibration method, comprise scaling board, levelling device, CCD camera and processor; Described scaling board is arranged on levelling device, and it has three through holes, and wherein the first through hole is vertical with third through-hole line with the first through hole with the second through hole line; Described CCD camera is used for having the scaling board of hot spot to carry out imaging to projection; Described processor carries out to imaging the drift angle that digital image analysis obtains laser beam and machine tool chief axis.
Advantageous Effects of the present invention is embodied in:
The present invention utilizes the motion of each axle of lathe to drive laser displacement sensor along the orbiting motion of setting, the image of CCD camera shooting laser beam projects on scaling board, three steps are only needed just to complete the collection of three images, do not need the reading utilizing laser displacement sensor itself, the measuring error avoiding sensor affects calibration result, complicated equation is not needed yet, demarcation flow process is simple and convenient, can the deviation of Calibration of Laser Shu Fangxiang, to compensate the measurement result in later stage, thus ensure measuring accuracy.
Accompanying drawing explanation
Fig. 1 is demarcation process flow diagram of the present invention;
Fig. 2 is apparatus of the present invention structure and imaging schematic diagram, and Fig. 2 (a) is apparatus structure diagram, and Fig. 2 (b) is imaging schematic diagram;
Fig. 3 is the drift angle schematic diagram calculation of laser beam of the present invention and machine tool chief axis, and Fig. 3 (a) is the drift angle schematic diagram under lathe coordinate system, and Fig. 3 (b) is the drift angle schematic diagram under demarcation coordinate system.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.In addition, if below in described each embodiment of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
Laser displacement sensor, in installation process, due to tool locating error or other reasons, causes the direction of laser beam and anticipation to have certain deviation, therefore needs to calibrate laser beam direction in space.
Lathe has self-defining coordinate system and is designated as lathe XYZ coordinate system.In lathe XYZ coordinate system, the angle calibrating laser beam and two axles just can determine the direction of laser beam, below described be concrete steps of the present invention:
(1) leveling scaling board makes it vertical with machine Z-axis, and described scaling board has three through holes, and the first through hole is vertical with third through-hole line with the first through hole with the second through hole line;
(2) use laser displacement sensor Emission Lasers bundle to form the first hot spot 1 to scaling board, projection is had to the scaling board imaging of the first hot spot 1, picture one as shown in Figure 1;
(3) order about laser displacement sensor displacement L in lathe Y direction, use laser displacement sensor Emission Lasers bundle to form the second hot spot 2 to scaling board, projection is had to the scaling board imaging of the second hot spot 2, picture two as shown in Figure 1;
(4) order about laser displacement sensor displacement H in machine Z-axis direction, use laser displacement sensor Emission Lasers bundle to form the 3rd hot spot 3 to scaling board, projection is had to the scaling board imaging of the 3rd hot spot 3, picture three as shown in Figure 1;
(5) calculate the drift angle of laser beam and machine tool chief axis, be specially:
On scaling board with the first through hole for demarcating coordinate origin, the first through hole and the second through hole line are for demarcating coordinate system X-axis, and the first through hole and third through-hole line are for demarcating coordinate system Y-axis;
Be the coordinate under demarcation coordinate system by the coordinate conversion of first, second and third hot spot in imaging, be designated as (x 1, y 1), (x 2, y 2), (x 3, y 3); According to the coordinate of two through holes in picture and the actual range D on ceramic scaling board, be demarcating the coordinate under coordinate system by the coordinate transformation of three hot spot points in picture, D determines scale amplifying and minification in conversion.Build the first hot spot and the second hot spot line equation L 12: a 1x+b 1y+c 1=0, a 1, b 1and c 1for straight-line equation coefficient; And build the second hot spot and the 3rd hot spot line equation L 23: a 2x+b 2y+c 2=0, a 2, b 2and c 2for straight-line equation coefficient;
Calculate laser beam and machine Z-axis angle ∠ α=arctan (L/H);
Calculate the projection of laser beam in lathe XOY plane and angle ∠ β=arctan ((a of lathe Y-axis 1* b 2-a 2* b 1)/(a 1* a 2+ b 1* b 2)).
Above-mentioned steps moves for lathe Y-axis, is not limited to this, applicable equally to lathe X-axis.
Consider convenience of calculation, the first through hole of preferred described scaling board is equal with third through-hole spacing with the first through hole with the second through-hole spacing.
Present invention also offers the device realizing said method, comprise scaling board, levelling device, CCD camera and processor; Described scaling board is arranged on levelling device, and it has three through holes, and wherein the first through hole is vertical with third through-hole line with the first through hole with the second through hole line; Described CCD camera is used for having the scaling board of hot spot to carry out imaging to projection; Described processor carries out to imaging the drift angle that digital image analysis obtains laser beam and machine tool chief axis.Fig. 2 (a) gives device schematic diagram, and in Fig. 2 (b), 01,02,03 represents three through holes on scaling board, and the spacing in 01,02 hole and 01,03 hole is D.
Scaling board preferably ceramic material, ceramic wafer is good diffuse-reflective material, is widely used in Experiments of Optics, has good optical property.
The inventive method and device can be demarcated beam direction error under the various mounting means of laser displacement sensor, adapt to site environment, do not need the survey measurements utilizing laser displacement sensor itself, do not need complicated matrix operation.
In the present invention, laser displacement sensor adopts mounting means vertically downward, and lathe can be with dynamic sensor to move upward in XYZ tri-sides, the coordinate information of the measuring point on measurement target object.Can be used for setting up the three-dimensional model of object after the coordinate information collection of measuring point.Under other measurement environment or other mounting means, sensor equally can along axis of motion, and method of the present invention is not limited to installs vertically downward.
Example:
The present invention implemented by the bright lathe of Mick, and shown in sensor and CCD camera mounting means figure below, scaling board is placed on platen, and worktable itself is level, with the level condition of clock gauge inspection scaling board before experiment.What this experiment sensor adopted is mounting means vertically downward, and Machine Tool Positioning Accuracy is at 2um, and CCD camera is 5,000,000 pixels, and scaling board is of a size of 60mm*60mm, and through-hole diameter is 2mm.Distance D=40mm between through hole 01,02 and through hole 01,03.
According to demarcating steps, the picture of experiment shooting is as shown below, the distance L=30mm that lathe moves in the X direction, the distance H=50mm that lathe declines in Z-direction.
Experiment has carried out 10 times altogether, and at every turn by the angular setting 0.5 ° of laser beam, then utilize method provided by the invention to demarcate, experimental data is as shown in the table.Experimental result shows, when lathe positioning error is 2um, time CCD camera pixel is 5,000,000, adopts scaling method of the present invention, and the error calibrating laser beam drift angle is no more than 0.05 °, and the present invention has very high precision and efficiency.
Sequence number Actual angle Demarcate angle Error
1 0.5° 0.512° 0.012°
2 1.0° 1.028° 0.028°
3 1.5° 1.535° 0.035°
4 2.0° 2.048° 0.048°
5 2.5° 2.542° 0.042°
6 3.0° 3.012° 0.012°
7 3.5° 3.547° 0.047°
8 4.0° 4.049° 0.049°
9 4.5° 4.536° 0.036°
10 5.0° 5.028° 0.028°
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.

Claims (5)

1. a laser beam field calibration method, is characterized in that, comprises the following steps:
(1) leveling scaling board makes it vertical with machine Z-axis, and described scaling board has three through holes, and between the first through hole with the second through hole, line is vertical with line between the first through hole with third through-hole;
(2) use laser displacement sensor Emission Lasers bundle to form the first hot spot to scaling board, projection is had to the scaling board imaging of the first hot spot;
(3) order about laser displacement sensor displacement L in lathe Y direction, re-use laser displacement sensor Emission Lasers bundle and form the second hot spot to scaling board, projection is had to the scaling board imaging of the second hot spot;
(4) order about laser displacement sensor displacement H in machine Z-axis direction, re-use laser displacement sensor Emission Lasers bundle and form the 3rd hot spot to scaling board, projection is had to the scaling board imaging of the 3rd hot spot;
(5) calculate the drift angle of laser beam and machine tool chief axis, be specially:
On scaling board with the first through hole for demarcating coordinate origin, the first through hole and the second through hole line are for demarcating coordinate system X-axis, and the first through hole and third through-hole line are for demarcating coordinate system Y-axis;
Be the coordinate under demarcation coordinate system by the coordinate conversion of first, second and third hot spot in imaging, be designated as (x 1, y 1), (x 2, y 2), (x 3, y 3);
Build the first hot spot and the second hot spot line equation L 12: a 1x+b 1y+c 1=0, a 1, b 1and c 1for straight-line equation coefficient;
Build the second hot spot and the 3rd hot spot line equation L 23: a 2x+b 2y+c 2=0, a 2, b 2and c 2for straight-line equation coefficient;
Calculate laser beam and machine Z-axis angle ∠ α=arctan (L/H);
Calculate the projection of laser beam in lathe XOY plane and angle ∠ β=arctan ((a of lathe Y-axis 1* b 2-a 2* b 1)/(a 1* a 2+ b 1* b 2)).
2. a laser beam field calibration method, is characterized in that, comprises the following steps:
(1) leveling scaling board makes it vertical with machine Z-axis, and described scaling board has three through holes, and the first through hole is vertical with third through-hole line with the first through hole with the second through hole line;
(2) use laser displacement sensor Emission Lasers bundle to form the first hot spot to scaling board, projection is had to the scaling board imaging of the first hot spot;
(3) order about laser displacement sensor displacement L in lathe X-direction, use laser displacement sensor Emission Lasers bundle to form the second hot spot to scaling board, projection is had to the scaling board imaging of the second hot spot;
(4) order about laser displacement sensor displacement H in machine Z-axis direction, use laser displacement sensor Emission Lasers bundle to form the 3rd hot spot to scaling board, projection is had to the scaling board imaging of the 3rd hot spot;
(5) calculate the drift angle of laser beam and machine tool chief axis, be specially:
On scaling board with the first through hole for demarcating coordinate origin, the first through hole and the second through hole line are for demarcating coordinate system X-axis, and the first through hole and third through-hole line are for demarcating coordinate system Y-axis;
Be the coordinate under demarcation coordinate system by the coordinate conversion of first, second and third hot spot in imaging, be designated as (x 1, y 1), (x 2, y 2), (x 3, y 3);
Build the first hot spot and the second hot spot line equation L 12: a 1x+b 1y+c 1=0, a 1, b 1and c 1for straight-line equation coefficient; And build the second hot spot and the 3rd hot spot line equation L 23: a 2x+b 2y+c 2=0, a 2, b 2and c 2for straight-line equation coefficient;
Calculate laser beam and lathe Z week angle ∠ α=arctan (Dx/H);
Calculate the projection of laser beam in lathe XOY plane and angle ∠ γ=arctan ((a of lathe X-axis 1* b 2-a 2* b 1)/(a 1* a 2+ b 1* b 2)).
3. realize a device for laser beam field calibration method described in claim 1 or 2, it is characterized in that, comprise scaling board, levelling device, CCD camera and processor; Described scaling board is arranged on levelling device, and it has three through holes, and wherein the first through hole is vertical with third through-hole line with the first through hole with the second through hole line; Described CCD camera is used for having the scaling board of hot spot to carry out imaging to projection; Described processor carries out to imaging the drift angle that digital image analysis obtains laser beam and machine tool chief axis.
4. device according to claim 3, is characterized in that, described scaling board adopts stupalith.
5. device according to claim 3, is characterized in that, the first through hole of described scaling board is equal with third through-hole spacing with the first through hole with the second through-hole spacing.
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CN106441113A (en) * 2016-11-17 2017-02-22 浙江大学 Calibration device and method for detecting laser displacement sensor in normal direction by automatic boring and riveting machine, and calibration method applying calibration device
CN106772319A (en) * 2016-12-19 2017-05-31 上海振华重工电气有限公司 AGV laser obstacle avoidance sensor deflection angle automatic calibration devices and scaling method
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