CN104567663A - Three-dimensional moving device - Google Patents
Three-dimensional moving device Download PDFInfo
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- CN104567663A CN104567663A CN201310498667.4A CN201310498667A CN104567663A CN 104567663 A CN104567663 A CN 104567663A CN 201310498667 A CN201310498667 A CN 201310498667A CN 104567663 A CN104567663 A CN 104567663A
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- mobile platform
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Abstract
The invention discloses a three-dimensional moving device, and belongs to the technical field of optical measurement. The three-dimensional moving device comprises a base, a fixing connecting part, an X-direction moving platform, a Y-direction moving platform, a limiting plate, a lifting mechanism and a bearing mechanism, wherein the lifting mechanism is limited by an accommodation space formed by a first through hole of the fixing connecting part, a second through hole of the X-direction moving platform, a third through hole of the Y-direction moving platform and a fourth through hole of the limiting plate; the lifting mechanism is enabled to move in the X-direction by operating the X-direction moving platform; the lifting mechanism is enabled to move in the Y-direction by operating the Y-direction moving platform; the lifting mechanism self can move in a Z direction. Therefore, the bearing mechanism which is fixedly connected with the lifting mechanism can move to a precise measurement position in the X direction, the Y direction and the Z direction respectively.
Description
Technical field
The present invention relates to field of optical measuring technologies, particularly a kind of three-dimensional moving device.
Background technology
Along with the fast development of semicon industry, utilize optical measuring technique accurately to measure the structure of single or multiple lift film on wafer, thickness, space pattern and material behavior become very important.The diversity of optical measurement means, makes various optical measuring apparatus arise at the historic moment, and a kind of measuring equipment often can only meet a kind of needs of measurement, needs for measurement multiple in optical laboratory, then need to customize multiple different measuring equipment.Not only waste financial resources, and be unfavorable for environmental protection.Applied optics measuring table is to the structure of single or multiple lift film on wafer, thickness, when space pattern and material behavior carry out optical measurement, position to be measured is arrived in order to testing sample can be made, need to move from XYZ tri-directions testing sample, existing mobile device is difficult to ensure that testing sample all moves to accurate measuring position in XYZ tri-directions.
Summary of the invention
In order to solve the problem, the present invention proposes and a kind ofly can ensure that load carrier all moves to the three-dimensional moving device of accurate measuring position in XYZ tri-directions.
Three-dimensional moving device provided by the invention comprises base, fixed connecting piece, X-direction mobile platform, Y-direction mobile platform, limiting plate, elevating mechanism and load carrier,
Described fixed connecting piece is fixedly connected on described base, and described fixed connecting piece top is provided with X-direction guided way, and described fixed connecting piece center has the first through hole;
Described X-direction mobile platform bottom can form X-direction sliding pair with described X-direction guided way, and described X-direction mobile platform top is provided with Y-direction guided way, and described X-direction mobile platform center has the second through hole;
The bottom of described Y-direction mobile platform can form Y-direction sliding pair with described Y-direction guided way, and described Y-direction mobile platform center has third through-hole;
Described limiting plate is embedded in described third through-hole, and described limiting plate center has fourth hole;
Described first through hole, the second through hole, third through-hole are communicated with fourth hole and form accommodation space, and described elevating mechanism to be arranged in described accommodation space and to be limited to described accommodation space;
Described load carrier is fixedly connected on the top of described elevating mechanism.
The elevating mechanism of three-dimensional moving device provided by the invention is limited to the accommodation space formed by the second through hole of the first through hole of fixed connecting piece, X-direction mobile platform, the third through-hole of Y-direction mobile platform and the fourth hole of limiting plate, operation X-direction mobile platform can make this elevating mechanism move in X direction, operation Y-direction mobile platform can be that this elevating mechanism moves along Y-direction, this elevating mechanism itself can move along Z-direction, therefore, the load carrier being fixedly connected on this elevating mechanism can move to accurate measuring position along XYZ tri-directions respectively.
Accompanying drawing explanation
The structural representation of the three-dimensional moving device that Fig. 1 provides for the embodiment of the present invention.
Embodiment
In order to understand the present invention in depth, below in conjunction with drawings and the specific embodiments, the present invention is described in detail.
See accompanying drawing 1, optical measurement platform provided by the invention comprises base 1, fixed connecting piece 2, X-direction mobile platform 17, Y-direction mobile platform 18, limiting plate 8, elevating mechanism 10 and load carrier 11.
Fixed connecting piece 2 is fixedly connected on base 1, and fixed connecting piece 2 top is provided with X-direction guided way 3, and fixed connecting piece 2 center has the first through hole;
X-direction mobile platform 17 bottom can form X-direction sliding pair with X-direction guided way 3, and X-direction mobile platform 17 top is provided with Y-direction guided way 7, and X-direction mobile platform 17 center has the second through hole;
The bottom of Y-direction mobile platform 18 can form Y-direction sliding pair with Y-direction guided way 7, and Y-direction mobile platform 18 center has third through-hole;
Limiting plate 8 is embedded in third through-hole, and limiting plate 8 center has fourth hole;
First through hole, the second through hole, third through-hole are communicated with fourth hole and form accommodation space 9, and elevating mechanism 10 to be arranged in accommodation space 9 and to be limited to accommodation space 9;
Load carrier 11 is fixedly connected on the top of elevating mechanism 10.
Wherein, X-direction guided way 3 has two, is arranged in the Y-direction both sides of fixed connecting piece 2 symmetrically, thus ensures the stress balance of X-direction mobile platform.
Wherein, Y-direction guided way 7 has two, is arranged in the X-direction both sides of X-direction mobile platform symmetrically, thus ensures the stress balance of Y-direction mobile platform.
Wherein, the Y-direction dual-side of X-direction mobile platform 17 has the first downward spacing preiection 5, first spacing preiection 5 and Y-direction two side contacts of fixed connecting piece 2, thus, ensure the position of X-direction mobile platform relative to fixed connecting piece 2.
Wherein, the X-direction dual-side of Y-direction mobile platform 18 has the second downward spacing preiection 6, second spacing preiection 6 and X-direction two side contacts of X-direction mobile platform 17, thus ensures the position of Y-direction mobile platform relative to X-direction mobile platform 17.
Wherein, optical measurement platform provided by the invention also comprises X-direction driving mechanism 4, move in X direction for driving X-direction mobile platform 17, in the present embodiment, X-direction driving mechanism 4 is stepper motors, thus realizes the automatic movement of optical measurement platform provided by the invention in X-direction, because this moves the control by stepper motor, therefore, compared with manually moving, can realize more accurate.
Wherein, optical measurement platform provided by the invention also comprises Y-direction driving mechanism 13, moves, in the present embodiment for driving Y-direction mobile platform 18 along Y-direction, Y-direction driving mechanism 13 is stepper motors, thus realizes optical measurement platform provided by the invention automatic movement in the Y direction.
The elevating mechanism 10 of three-dimensional moving device provided by the invention is limited to by the first through hole of fixed connecting piece 2, second through hole of X-direction mobile platform 17, the accommodation space 9 that the third through-hole of Y-direction mobile platform 18 and the fourth hole of limiting plate 8 are formed, operation X-direction mobile platform 17 can make this elevating mechanism 10 move in X direction, operation Y-direction mobile platform 18 can be that this elevating mechanism 10 moves along Y-direction, this elevating mechanism 10 itself can move along Z-direction, therefore, the load carrier 11 being fixedly connected on this elevating mechanism 10 can move along XYZ tri-directions respectively.
Time on the load carrier 11 testing sample being placed in three-dimensional mobile platform provided by the invention, testing sample just can move to accurate measuring position along XYZ tri-directions along with load carrier 11 respectively.
Above-described embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only the specific embodiment of the present invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. a three-dimensional moving device, is characterized in that, comprises base, fixed connecting piece, X-direction mobile platform, Y-direction mobile platform, limiting plate, elevating mechanism and load carrier,
Described fixed connecting piece is fixedly connected on described base, and described fixed connecting piece top is provided with X-direction guided way, and described fixed connecting piece center has the first through hole;
Described X-direction mobile platform bottom can form X-direction sliding pair with described X-direction guided way, and described X-direction mobile platform top is provided with Y-direction guided way, and described X-direction mobile platform center has the second through hole;
The bottom of described Y-direction mobile platform can form Y-direction sliding pair with described Y-direction guided way, and described Y-direction mobile platform center has third through-hole;
Described limiting plate is embedded in described third through-hole, and described limiting plate center has fourth hole;
Described first through hole, the second through hole, third through-hole are communicated with fourth hole and form accommodation space, and described elevating mechanism to be arranged in described accommodation space and to be limited to described accommodation space;
Described load carrier is fixedly connected on the top of described elevating mechanism.
2. device according to claim 1, is characterized in that, described X-direction guided way has two, is arranged in the Y-direction both sides of described fixed connecting piece symmetrically.
3. device according to claim 1, is characterized in that, described Y-direction guided way has two, is arranged in the X-direction both sides of described X-direction mobile platform symmetrically.
4. device according to claim 1, is characterized in that, the Y-direction dual-side of described X-direction mobile platform has the first downward spacing preiection, Y-direction two side contacts of described first spacing preiection and described fixed connecting piece.
5. device according to claim 1, is characterized in that, the X-direction dual-side of described Y-direction mobile platform has the second downward spacing preiection, X-direction two side contacts of described second spacing preiection and described X-direction mobile platform.
6. device according to claim 1, is characterized in that, also comprises X-direction driving mechanism, moves in X direction for driving described X-direction mobile platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310498667.4A CN104567663A (en) | 2013-10-22 | 2013-10-22 | Three-dimensional moving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310498667.4A CN104567663A (en) | 2013-10-22 | 2013-10-22 | Three-dimensional moving device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104567663A true CN104567663A (en) | 2015-04-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201310498667.4A Pending CN104567663A (en) | 2013-10-22 | 2013-10-22 | Three-dimensional moving device |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05332743A (en) * | 1992-06-02 | 1993-12-14 | Sumitomo Heavy Ind Ltd | Measuring device of three-dimensional position information |
| JPH08122031A (en) * | 1994-10-25 | 1996-05-17 | Sony Corp | Apparatus and method for inspection of component |
| CN101319876A (en) * | 2008-07-21 | 2008-12-10 | 西安理工大学 | Six-shaft test bench |
| CN201196562Y (en) * | 2008-05-07 | 2009-02-18 | 广东正业科技有限公司 | Drilling bit detecting instrument |
| CN201488711U (en) * | 2009-06-19 | 2010-05-26 | 源台精密科技股份有限公司 | Double-shaft image measurement device |
| CN202471004U (en) * | 2012-03-19 | 2012-10-03 | 蒋晓捷 | Full-automatic image measuring instrument based on plurality of camera lenses |
-
2013
- 2013-10-22 CN CN201310498667.4A patent/CN104567663A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05332743A (en) * | 1992-06-02 | 1993-12-14 | Sumitomo Heavy Ind Ltd | Measuring device of three-dimensional position information |
| JPH08122031A (en) * | 1994-10-25 | 1996-05-17 | Sony Corp | Apparatus and method for inspection of component |
| CN201196562Y (en) * | 2008-05-07 | 2009-02-18 | 广东正业科技有限公司 | Drilling bit detecting instrument |
| CN101319876A (en) * | 2008-07-21 | 2008-12-10 | 西安理工大学 | Six-shaft test bench |
| CN201488711U (en) * | 2009-06-19 | 2010-05-26 | 源台精密科技股份有限公司 | Double-shaft image measurement device |
| CN202471004U (en) * | 2012-03-19 | 2012-10-03 | 蒋晓捷 | Full-automatic image measuring instrument based on plurality of camera lenses |
Non-Patent Citations (1)
| Title |
|---|
| 李凯岭等: "《现代注塑模具设计制造技术》", 31 July 2011, 北京：清华大学出版社 * |
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Application publication date: 20150429 |
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| RJ01 | Rejection of invention patent application after publication |