CN104565031B - A kind of sapphire wafer cleaning machine moving guide rail mechanism - Google Patents
A kind of sapphire wafer cleaning machine moving guide rail mechanism Download PDFInfo
- Publication number
- CN104565031B CN104565031B CN201410624563.8A CN201410624563A CN104565031B CN 104565031 B CN104565031 B CN 104565031B CN 201410624563 A CN201410624563 A CN 201410624563A CN 104565031 B CN104565031 B CN 104565031B
- Authority
- CN
- China
- Prior art keywords
- guide rail
- mobile base
- optical axis
- support mobile
- axis guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
A kind of sapphire wafer cleaning machine moving guide rail mechanism of the present invention, including support Mobile base and two optical axis guide rails, optical axis guide rail are distributed in support Mobile base two ends in parallel；Optical axis guide rail bottom is provided with some screwed holes, and optical axis guide rail bottom is provided with guide rail filler strip, and optical axis guide rail is arranged on the fuselage of cleaning machine by screwed hole with screw rod；Four horizontal rollers are provided with inside support Mobile base, optical axis guide rail upper end position is arranged at；Vertical wheel described in four vertical wheels is provided with inside support Mobile base positioned at optical axis guide rail side, vertical wheel includes vertical screw, vertical wheel body, ball bearing, disk spring washer, plain washer and nylon loosen nut, and vertical wheel coordinates realization to be fixed on inside support Mobile base by vertical screw screw top and screwed hole.Less roller force of rolling friction, and have preferable load-bearing property, reduce the problem that the abrasion of traditional line guide rail slide block load-bearing property difference easily produces failure.
Description
Technical field
The present invention relates to a kind of sapphire wafer cleaning machine moving guide rail mechanism.
Background technology
Sapphire wafer cleaning is a very important technological process in sapphire substrate manufacture, and it determines sapphire
Annealing or the clean-up performance of chip surface after polishing, if meet customer demand, general single device is adopted using multiple rinse baths
With different ultrasounds, temperature, the technique such as bubbling reaches process requirements, and current most of cleaning machines have been able to automatically extract clear
Washing basket, is automatically put into next cell body continuation cleaning and instructs cleaning to finish.The movement that traditional automatic basket puts basket device is all
Carried out by the way of line slideway plus sliding block, the force of sliding friction of generation is larger, guide rail slide block bearing capacity is limited, when long
Between run easy wear damage, cause equipment to delay machine, add the line slideway and sliding block price of in the market all costly, manufacture
Maintenance cost is higher.
The content of the invention
The invention aims to overcome the above not enough, there is provided a kind of sapphire wafer cleaning machine moving guide rail mechanism,
Less roller force of rolling friction, instead of force of sliding friction larger between traditional line guide rail and sliding block, and have preferably
Load-bearing property, reduce traditional line guide rail slide block load-bearing property difference abrasion easily produce failure problem.
The purpose of the present invention is achieved in that：
A kind of sapphire wafer cleaning machine moving guide rail mechanism of the present invention, including support Mobile base and two optical axis guide rails,
Characterized in that, the support Mobile base both sides are respectively provided with two guide rail mounting holes, the mounting hole is symmetrical set, the light
By mounting hole through support Mobile base, described two optical axis guide rails are distributed in support Mobile base two ends to axis rail in parallel；Institute
State optical axis guide rail bottom and be provided with some screwed holes, the optical axis guide rail bottom is provided with guide rail filler strip, and the optical axis guide rail passes through
Screwed hole is arranged on the fuselage of cleaning machine with screw rod；Four horizontal rollers, the level are provided with inside the support Mobile base
Roller is located at the support Mobile base corner, is arranged at optical axis guide rail upper end position, and the horizontal roller both sides are provided with ball axle
Hold, inside is provided with horizontal roller axle, the horizontal roller axle side is provided with fixed cylinder, and the support Mobile base side is provided with peace
Dress circular hole, the horizontal roller realizes connection by installing circular hole fit fixed cylinder, and branch is provided with inside the mobile support base
Fagging, the supporting plate is provided with positioning round orifice, and the used positioning round orifice of horizontal roller axle opposite side is arranged on support and moves
Seat is internal；Four vertical wheels are provided with inside the support Mobile base, the vertical wheel is located at the support Mobile base corner,
The vertical wheel is located at the optical axis guide rail side, and the vertical wheel includes vertical screw, vertical wheel body, ball axle
Hold, disk spring washer, plain washer and nylon loosens nut, and the vertical screw top is equipped with screw thread with bottom, described
Vertical screw bottom fit vertical wheel body, ball bearing, disk spring washer and plain washer successively from top to bottom, then lead to
Cross bottom thread and nylon and loosen nut and realize being connected, four circular mounting projections, institute are provided with the support Mobile base
State and screwed hole is provided with installation projection, the vertical wheel coordinates realization to be fixed on by vertical screw screw top and screwed hole
Inside support Mobile base.
A kind of above-mentioned sapphire wafer cleaning machine moving guide rail mechanism, wherein, it is provided with off-centre operation inside the fixed cylinder
Hole, the fixed cylinder is linked in outside horizontal roller axle by eccentric circular hole, and the peace fixed cylinder side is provided with plain washer
With outer-hexagonal screw, the outer-hexagonal screw is through plain washer installed in fixed cylinder one end.
A kind of above-mentioned sapphire wafer cleaning machine moving guide rail mechanism, wherein, the mounting hole side is provided with location hole, institute
Horizontal roller axle is stated to realize being fixed inside support Mobile base by set screw and location hole.
A kind of above-mentioned sapphire wafer cleaning machine moving guide rail mechanism, wherein, it is provided with dust protection rubber inside the mounting hole
Scrape brushing piece.
Compared with prior art, beneficial effects of the present invention are：
1st, it is the manufacturing cost of the equipment of having saved for relative rectilinear guide rail and sliding block.
2nd, less roller force of rolling friction is make use of, slip larger between traditional line guide rail and sliding block is instead of and is rubbed
Power is wiped, guide rail is reduced and the probability of failure is produced after sliding block weares and teares, reduction equipment operation maintenance cost, increase equipment has
Effect utilization rate.
3rd, for relative rectilinear guide rail and sliding block, weight capacity is strong, is adapted to large-scale, the movement of multiple-grooved cleaning machine automatic basket
Mechanism.
4th, dust protection rubber is provided with inside mounting hole and scrapes brushing piece, inner ring rubber layer is tightly attached to above 2 optical axis guide rails, it is real
Show without gap, the unapproachable function of dust.
5th, by being provided with the setting of eccentric circular hole inside fixed cylinder, outer-hexagonal screw can be rotated, so that it may carry out bias
Adjustment, it is ensured that 4 vertical wheels all with 2 optical axis guide rail horizontal planes on；After adjustment terminates, 4 positions are fixed
Set screw, by locking, horizontal roller axle will not move back and forth, it is ensured that horizontal roller does not move back and forth, by locking, water
Flat roller axle will not rotate, and after also ensure that eccentric adjustment, horizontal plane will not change.
6th, nylon stop nut is locked on the screw thread of vertical screw, and the torsion of its locking can be according to the elastic situation for rolling
It is adjusted, as long as keeping the contact between the rolling surface and optical axis guide rail of vertical wheel, below each vertical wheel
2 disk spring washers will play a part of to adjust elasticity when vertical wheel 8 is rolled, and 4 vertical wheels are arranged on 2 light
The inner side of axis rail 4, respectively to the left and to the right, play prevents from the Mobile base in moving process from moving left and right position producing active force
The problem of skew.
Brief description of the drawings
Fig. 1 is schematic structural view of the invention.
Fig. 2 is optical axis guide rail figure.
Fig. 3 is upward view of the present invention.
Fig. 4 is vertical wheel schematic diagram.
Fig. 5 is horizontal roller schematic diagram.
Fig. 6 is horizontal roller bearing schematic diagram.
Fig. 7 is internal structure enlarged drawing of the present invention.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.
As illustrated, a kind of sapphire wafer cleaning machine moving guide rail mechanism, including support Mobile base 1 and two light spindle guides
Rail 2, it is characterised in that support Mobile base 1 both sides are respectively provided with two guide rail mounting holes 3, the mounting hole 3 is in symmetrically to set
Put, by mounting hole 3 through support Mobile base 1, described two optical axis guide rails 2 are distributed in support to the optical axis guide rail 2 in parallel
The two ends of Mobile base 1；The bottom of the optical axis guide rail 2 is provided with some screwed holes 4, and the bottom of the optical axis guide rail 2 is provided with guide rail filler strip
21, the optical axis guide rail 2 is arranged on the fuselage of cleaning machine by screwed hole 4 with screw rod 14；Set inside the support Mobile base 1
There are four horizontal rollers 5, the horizontal roller 5 is located at 1 four jiaos of the Mobile base of support, is arranged at the upper end position of optical axis guide rail 2,
The both sides of the horizontal roller 5 are provided with ball bearing 6, and inside is provided with horizontal roller axle 7, and the side of horizontal roller axle 7 is provided with solid
Determine cylinder 71, support Mobile base 1 side is provided with installation circular hole 8, and the horizontal roller 7 is fixed by installing the fit of circular hole 8
71 posts of circle realize connection, and supporting plate 9 is provided with inside the mobile support base 1, and the supporting plate 9 is provided with positioning round orifice 91, institute
The used positioning round orifice 91 of the opposite side of horizontal roller axle 7 is stated to be arranged on inside support Mobile base 1；Set inside the support Mobile base 1
There are four vertical wheels 10, the vertical wheel 10 is located at 1 four jiaos of the Mobile base of support, and the vertical wheel 10 is located at described
The side of optical axis guide rail 2, the vertical wheel 10 includes vertical screw 101, vertical wheel body 102, ball bearing 103, dish
Spring washer 104, plain washer 105 and nylon loosen nut 106, and the top of the vertical screw 101 is equipped with screw thread with bottom
11, the bottom of the vertical screw 101 fit vertical wheel body 102, ball bearing 103, disk spring pad successively from top to bottom
104 and plain washer 105 are enclosed, then nut 106 is loosened by bottom thread 11 and nylon and realize being connected, the support movement
Four circular mounting projections 12 are provided with seat 1, described installation in raised 12 is provided with screwed hole 121, and the vertical wheel 10 passes through
The screw top 11 of vertical screw 101 coordinates realization to be fixed on inside support Mobile base 1 with screwed hole 121.
A kind of above-mentioned sapphire wafer cleaning machine moving guide rail mechanism, wherein, it is provided with bias inside the fixed cylinder 71
Circular hole 711, the fixed cylinder 71 is linked in outside horizontal roller axle 7 by eccentric circular hole 711, the side of the fixed cylinder 71
Plain washer 712 and outer-hexagonal screw 713 are provided with, the outer-hexagonal screw 713 is arranged on fixed cylinder 71 1 through plain washer 712
End.
A kind of above-mentioned sapphire wafer cleaning machine moving guide rail mechanism, wherein, the side of the mounting hole 3 is provided with location hole
13, the horizontal roller axle 7 is realized fixed inside support Mobile base 1 by set screw and location hole 13.
A kind of above-mentioned sapphire wafer cleaning machine moving guide rail mechanism, wherein, dust-proof rubber is provided with inside the mounting hole 3
Glue scrapes brushing piece 31.
Compared with prior art, beneficial effects of the present invention are：
1st, it is the manufacturing cost of the equipment of having saved for relative rectilinear guide rail and sliding block.
2nd, less roller force of rolling friction is make use of, slip larger between traditional line guide rail and sliding block is instead of and is rubbed
Power is wiped, guide rail is reduced and the probability of failure is produced after sliding block weares and teares, reduction equipment operation maintenance cost, increase equipment has
Effect utilization rate.
3rd, for relative rectilinear guide rail and sliding block, weight capacity is strong, is adapted to large-scale, the movement of multiple-grooved cleaning machine automatic basket
Mechanism.
4th, dust protection rubber is provided with inside mounting hole and scrapes brushing piece, inner ring rubber layer is tightly attached to above 2 optical axis guide rails, it is real
Show without gap, the unapproachable function of dust.
5th, by being provided with the setting of eccentric circular hole inside fixed cylinder, outer-hexagonal screw can be rotated, so that it may carry out bias
Adjustment, it is ensured that 4 vertical wheels all with 2 optical axis guide rail horizontal planes on；After adjustment terminates, 4 positions are fixed
Set screw, by locking, horizontal roller axle will not move back and forth, it is ensured that horizontal roller does not move back and forth, by locking, water
Flat roller axle will not rotate, and after also ensure that eccentric adjustment, horizontal plane will not change.
6th, nylon stop nut is locked on the screw thread of vertical screw, and the torsion of its locking can be according to the elastic situation for rolling
It is adjusted, as long as keeping the contact between the rolling surface and optical axis guide rail of vertical wheel, below each vertical wheel 2
Individual disk spring washer will play a part of to adjust elasticity when vertical wheel 8 is rolled, and 4 vertical wheels are arranged on 2 light
The inner side of axis rail 4, respectively to the left and to the right, play prevents from the Mobile base in moving process from moving left and right position producing active force
The problem of skew.
Above example is served only for being further described the present invention, it is impossible to be interpreted as to the scope of the present invention
Limitation, some nonessential modifications and adaptations that those skilled in the art's the above of the invention is made belong to this
The protection domain of invention.
Claims (4)
1. a kind of sapphire wafer cleaning machine moving guide rail mechanism, including support Mobile base and two optical axis guide rails, its feature exist
In the support Mobile base both sides are respectively provided with two guide rail mounting holes, and the mounting hole is symmetrical set, and the optical axis guide rail leads to
Mounting hole is crossed through support Mobile base, described two optical axis guide rails are distributed in support Mobile base two ends in parallel；The smooth spindle guide
Flange of rail portion is provided with some screwed holes, and the optical axis guide rail bottom is provided with guide rail filler strip, the optical axis guide rail by screwed hole with
Screw rod is arranged on the fuselage of cleaning machine；Four horizontal rollers are provided with inside the support Mobile base, the horizontal roller is located at
The support Mobile base corner, is arranged at optical axis guide rail upper end position, and the horizontal roller both sides are provided with ball bearing, and inside sets
There is horizontal roller axle, the horizontal roller axle side is provided with fixed cylinder, and the support Mobile base side is provided with installation circular hole, institute
State horizontal roller and realize connection by installing circular hole fit fixed cylinder, supporting plate is provided with inside the mobile support base, it is described
Supporting plate is provided with positioning round orifice, and the used positioning round orifice of horizontal roller axle opposite side is arranged on inside support Mobile base；Institute
State and four vertical wheels are provided with inside support Mobile base, the vertical wheel is located at the support Mobile base corner, described vertical
Roller is located at the optical axis guide rail side, and the vertical wheel includes vertical screw, vertical wheel body, ball bearing, dish
Spring washer, plain washer and nylon loosen nut, and the vertical screw top is equipped with screw thread, the vertical screw with bottom
Bottom fit vertical wheel body successively from top to bottom, ball bearing, disk spring washer and plain washer, then by bottom spiral shell
Line loosens nut and realizes being connected with nylon, and four circular mounting projections are provided with the support Mobile base, and the installation is convex
Screwed hole is provided with rising, the vertical wheel coordinates realization to be fixed on support movement by vertical screw screw top and screwed hole
Seat is internal.
2. a kind of sapphire wafer cleaning machine moving guide rail mechanism as claimed in claim 1, wherein, inside the fixed cylinder
Eccentric circular hole is provided with, the fixed cylinder is linked in outside horizontal roller axle by eccentric circular hole, the fixed cylinder side sets
There are plain washer and outer-hexagonal screw, the outer-hexagonal screw is arranged on fixed cylinder one end through plain washer.
3. a kind of sapphire wafer cleaning machine moving guide rail mechanism as claimed in claim 1, wherein, the mounting hole side sets
There is location hole, the horizontal roller axle is realized fixed inside support Mobile base by set screw and location hole.
4. a kind of sapphire wafer cleaning machine moving guide rail mechanism as claimed in claim 1, wherein, set inside the mounting hole
There is dust protection rubber to scrape brushing piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410624563.8A CN104565031B (en) | 2014-11-07 | 2014-11-07 | A kind of sapphire wafer cleaning machine moving guide rail mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410624563.8A CN104565031B (en) | 2014-11-07 | 2014-11-07 | A kind of sapphire wafer cleaning machine moving guide rail mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104565031A CN104565031A (en) | 2015-04-29 |
| CN104565031B true CN104565031B (en) | 2017-06-20 |
Family
ID=53081858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410624563.8A Active CN104565031B (en) | 2014-11-07 | 2014-11-07 | A kind of sapphire wafer cleaning machine moving guide rail mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104565031B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105177717A (en) * | 2015-10-30 | 2015-12-23 | 江苏吉星新材料有限公司 | Washing device for roughly-grinded sapphire |
| CN107511380B (en) * | 2017-09-07 | 2023-12-15 | 迈柯唯医疗设备(苏州)有限公司 | Sealing device of cleaning machine |
| AU2017101396A4 (en) * | 2017-10-19 | 2017-11-16 | Chemserve Pty Ltd | Anti-jamming Mechanism for a Cleaning Tank |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19750113A1 (en) * | 1996-11-14 | 1998-05-28 | Franke & Heydrich Kg | Hybrid dry-running needle roller bearing with sleeve bearing section |
| DE10163875A1 (en) * | 2001-12-22 | 2003-07-10 | Aeg Hausgeraete Gmbh | Dishwasher basket has rollers running in C-section guide rails on each side of wash chamber to limit vertical freedom affecting stability of withdrawn basket |
| CN201902447U (en) * | 2010-12-31 | 2011-07-20 | 北京谊安医疗系统股份有限公司 | Sliding device |
| CN102297199A (en) * | 2011-07-21 | 2011-12-28 | 威海利奥泰儆自动化设备有限公司 | High-speed roller slider with adjustable pre-tightening force |
| CN102182760B (en) * | 2011-05-09 | 2013-05-08 | 李社远 | Adjustable rectangular guide rail pair device |
| CN203862635U (en) * | 2014-06-03 | 2014-10-08 | 江苏肯创催化剂再生技术有限公司 | SCR catalyst regeneration unblocking washing device |
-
2014
- 2014-11-07 CN CN201410624563.8A patent/CN104565031B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19750113A1 (en) * | 1996-11-14 | 1998-05-28 | Franke & Heydrich Kg | Hybrid dry-running needle roller bearing with sleeve bearing section |
| DE10163875A1 (en) * | 2001-12-22 | 2003-07-10 | Aeg Hausgeraete Gmbh | Dishwasher basket has rollers running in C-section guide rails on each side of wash chamber to limit vertical freedom affecting stability of withdrawn basket |
| CN201902447U (en) * | 2010-12-31 | 2011-07-20 | 北京谊安医疗系统股份有限公司 | Sliding device |
| CN102182760B (en) * | 2011-05-09 | 2013-05-08 | 李社远 | Adjustable rectangular guide rail pair device |
| CN102297199A (en) * | 2011-07-21 | 2011-12-28 | 威海利奥泰儆自动化设备有限公司 | High-speed roller slider with adjustable pre-tightening force |
| CN203862635U (en) * | 2014-06-03 | 2014-10-08 | 江苏肯创催化剂再生技术有限公司 | SCR catalyst regeneration unblocking washing device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104565031A (en) | 2015-04-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104565031B (en) | A kind of sapphire wafer cleaning machine moving guide rail mechanism | |
| CN104810310B (en) | A kind of wafer-scanning cleans swinging arm device | |
| CN107569185A (en) | A kind of ground Fouling Cleaning device | |
| CN103909030B (en) | Paint spray booth's double-chain conveyor structure | |
| CN204953492U (en) | White glass cleaning device | |
| CN205438053U (en) | A automatic control by temperature change burnishing and polishing equipment that is used for metal pole or steel pipe | |
| CN203140437U (en) | Washing device for cold-rolling strip steel hot galvanizing unit finishing rolling mill work roll surfaces | |
| CN206604821U (en) | A kind of steel band for producing steel band reinforced spiral ripple pipe is oriented to cleaning device | |
| CN203399864U (en) | Low-noise adjustable leather seat | |
| CN203484677U (en) | Supporting device for engraved roller shaft head | |
| CN205362031U (en) | Shuttle track cleaning device | |
| CN202825548U (en) | Grinding pad adjustor washing equipment and chemical machinery grinding device | |
| CN203256346U (en) | Automatic adjustment device for angles of spray nozzles of single brush roll | |
| CN106592462B (en) | A kind of solar energy berth lock | |
| CN201165558Y (en) | Water absorption apparatus for electroplating workpieces | |
| CN113663848A (en) | Computer circuit board etching solution sprinkler | |
| CN108826805B (en) | Household refrigerator base | |
| CN109288092B (en) | Apple belt cleaning device that rolls | |
| CN203792154U (en) | Placement and removal jig for TFT glass grinding | |
| CN206700663U (en) | A kind of basketball stands being moved easily | |
| CN205500550U (en) | Cantilever beam overhead hoist in operation is handled to heavy metal earth | |
| CN215089607U (en) | Glass substrate cleaning device for glass processing | |
| CN206049235U (en) | A kind of universal caster wheel of damping | |
| CN213299509U (en) | Building engineering management video acquisition device | |
| CN205500583U (en) | A novel cantilever beam overhead hoist for in water treatment operation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20150429 Assignee: Zhejiang Zhaojing New Material Technology Co.,Ltd. Assignor: JIANGSU JESHINE NEW MATERIAL Co.,Ltd. Contract record no.: X2022980008188 Denomination of invention: A moving guide mechanism of sapphire wafer cleaning machine Granted publication date: 20170620 License type: Common License Record date: 20220627 |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230106 Address after: 100102 20628, Floor 2, Building A1, No. 1, Huangchang West Road, Dougezhuang, Chaoyang District, Beijing Patentee after: Youran Walker (Beijing) Technology Co.,Ltd. Address before: 212200 new materials Industrial Park, Youfang Town, Yangzhong City, Zhenjiang City, Jiangsu Province Patentee before: JIANGSU JESHINE NEW MATERIAL Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230621 Address after: 050035 No. 369, Zhujiang Avenue, high tech Zone, Shijiazhuang, Hebei Patentee after: TUNGHSU GROUP Co.,Ltd. Address before: 100102 20628, Floor 2, Building A1, No. 1, Huangchang West Road, Dougezhuang, Chaoyang District, Beijing Patentee before: Youran Walker (Beijing) Technology Co.,Ltd. |