CN104538330B - 自动调节硅片制绒工艺的装置 - Google Patents
自动调节硅片制绒工艺的装置 Download PDFInfo
- Publication number
- CN104538330B CN104538330B CN201410748135.6A CN201410748135A CN104538330B CN 104538330 B CN104538330 B CN 104538330B CN 201410748135 A CN201410748135 A CN 201410748135A CN 104538330 B CN104538330 B CN 104538330B
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- Prior art keywords
- silicon wafer
- etching device
- measurement systems
- feedback control
- reflectance measurement
- Prior art date
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 47
- 239000010703 silicon Substances 0.000 title claims abstract description 47
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims abstract description 37
- 210000002268 wool Anatomy 0.000 title claims abstract description 20
- 238000005530 etching Methods 0.000 claims abstract description 35
- 238000005259 measurement Methods 0.000 claims abstract description 22
- 238000007599 discharging Methods 0.000 claims abstract description 12
- 238000002310 reflectometry Methods 0.000 claims description 8
- 230000035611 feeding Effects 0.000 description 6
- 235000008216 herbs Nutrition 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000001802 infusion Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Weting (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410748135.6A CN104538330B (zh) | 2014-12-10 | 2014-12-10 | 自动调节硅片制绒工艺的装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410748135.6A CN104538330B (zh) | 2014-12-10 | 2014-12-10 | 自动调节硅片制绒工艺的装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104538330A CN104538330A (zh) | 2015-04-22 |
CN104538330B true CN104538330B (zh) | 2018-07-20 |
Family
ID=52853835
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410748135.6A Active CN104538330B (zh) | 2014-12-10 | 2014-12-10 | 自动调节硅片制绒工艺的装置 |
Country Status (1)
Country | Link |
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CN (1) | CN104538330B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105133039B (zh) * | 2015-09-06 | 2017-12-08 | 常州捷佳创精密机械有限公司 | 一种单多晶制绒设备 |
CN108767069A (zh) * | 2018-06-11 | 2018-11-06 | 南京八度阳光太阳能科技有限公司 | 一种太阳能制绒装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1672253A (zh) * | 2002-07-29 | 2005-09-21 | 先进微装置公司 | 过程控制系统用的动态目标设定方法及装置 |
CN1851881A (zh) * | 2005-12-08 | 2006-10-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种半导体刻蚀装置 |
CN201233901Y (zh) * | 2008-07-22 | 2009-05-06 | 上海科伟达超声波科技有限公司 | 全自动太阳能硅片制绒清洗设备 |
CN102569499A (zh) * | 2010-12-23 | 2012-07-11 | 无锡尚德太阳能电力有限公司 | 制绒系统及制绒方法 |
CN103173766A (zh) * | 2011-12-26 | 2013-06-26 | 中芯国际集成电路制造(上海)有限公司 | 湿法蚀刻工艺的先进工艺控制方法 |
CN103838176A (zh) * | 2014-03-11 | 2014-06-04 | 苏州润阳光伏科技有限公司 | 多功能添加剂自动补液装置 |
CN204480999U (zh) * | 2014-12-10 | 2015-07-15 | 苏州润阳光伏科技有限公司 | 自动调节硅片制绒工艺的装置 |
-
2014
- 2014-12-10 CN CN201410748135.6A patent/CN104538330B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1672253A (zh) * | 2002-07-29 | 2005-09-21 | 先进微装置公司 | 过程控制系统用的动态目标设定方法及装置 |
CN1851881A (zh) * | 2005-12-08 | 2006-10-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种半导体刻蚀装置 |
CN201233901Y (zh) * | 2008-07-22 | 2009-05-06 | 上海科伟达超声波科技有限公司 | 全自动太阳能硅片制绒清洗设备 |
CN102569499A (zh) * | 2010-12-23 | 2012-07-11 | 无锡尚德太阳能电力有限公司 | 制绒系统及制绒方法 |
CN103173766A (zh) * | 2011-12-26 | 2013-06-26 | 中芯国际集成电路制造(上海)有限公司 | 湿法蚀刻工艺的先进工艺控制方法 |
CN103838176A (zh) * | 2014-03-11 | 2014-06-04 | 苏州润阳光伏科技有限公司 | 多功能添加剂自动补液装置 |
CN204480999U (zh) * | 2014-12-10 | 2015-07-15 | 苏州润阳光伏科技有限公司 | 自动调节硅片制绒工艺的装置 |
Also Published As
Publication number | Publication date |
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CN104538330A (zh) | 2015-04-22 |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 215300 8th floor, science and Technology Plaza, Qianjin East Road, Kunshan Development Zone, Suzhou, Jiangsu Patentee after: Jiangsu Runyang New Energy Technology Co.,Ltd. Address before: 215300 8th floor, science and Technology Plaza, Qianjin East Road, Kunshan Development Zone, Suzhou, Jiangsu Patentee before: SUZHOU RUNYANG PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. |
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CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210121 Address after: No.1, Beijing Road, development zone, Jianhu County, Yancheng City, Jiangsu Province, 224000 Patentee after: Jiangsu Shenyang Photovoltaic Technology Co.,Ltd. Address before: 215300 8th floor, science and Technology Plaza, Qianjin East Road, Kunshan Development Zone, Suzhou, Jiangsu Patentee before: Jiangsu Runyang New Energy Technology Co.,Ltd. |
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TR01 | Transfer of patent right |