CN104536125B - Longitudinal-separated-reference-added multi-cascade scanning coherent diffraction microscopy imaging device and application - Google Patents
Longitudinal-separated-reference-added multi-cascade scanning coherent diffraction microscopy imaging device and application Download PDFInfo
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Abstract
The invention discloses a longitudinal-separated-reference-added multi-cascade scanning coherent diffraction microscopy imaging device. According to the longitudinal-separated-reference-added multi-cascade scanning coherent diffraction microscopy imaging device, a coherent-light light source, a laser source beam optimizing assembly, a light limiting micro-hole, a reference sample table, a target sample table, a CCD image sensor (6) and a computer connected with the CCD image sensor (6), wherein the laser source beam optimizing assembly is special when the light source is a laser source and is composed of a light intensity attenuation sheet, a short-focus convergent lens, a diaphragm and a long-focus convergent lens, the reference sample table is controlled by a precise stepping motor to be capable of performing up-and-down and left-and-right direction displacement scanning on a plane perpendicular to the optical axis, and the target sample table is also controlled by the precise motor to be capable of performing up-and-down and left-and-right direction displacement scanning on a plane perpendicular to the optical axis. According to the longitudinal-separated-reference-added multi-cascade scanning coherent diffraction microscopy imaging device, as high-scattering reference samples are added, the quality of diffraction signals collected by the CCD is greatly improved, the anti-interference performance of the imaging method is greatly improved through a large number of redundant data generated through cascade type scanning, true, reliable and quantified imaging of the large-size weak-scattering samples can be achieved, and the application prospects in the material science, the nanotechnology and the biology are broad.
Description
Technical field
The present invention relates to a kind of scanning coherent diffraction microscopic imaging device and application, especially one add and be longitudinally separated reference
Multiple cascade scanning coherent diffraction microscopic imaging device and application.
Background technology
Scanning coherent diffraction imaging is that traditional coherent diffraction imaging technology is combined by one with ptychography technology
Novel coherent diffraction imaging method, its proposition solves traditional coherent diffraction imaging technology and requires that sample is for isolated sample
Product, a series of defects such as imaging viewing field is little, and algorithm for reconstructing convergence is slow, stagnate, reconstructed results is the most unique.But for weak scattering
Sample, owing to its diffracted signal is the faintest, conventional scanning coherent diffraction imaging technology often cannot realize the standard to them
Really imaging, even cannot imaging.For weak scattering sample, imaging results is more vulnerable in imaging process the various interference of introducing
Impact, this is accomplished by substantial amounts of redundant data and ensures the anti-interference of imaging.Further, since during scanning coherent diffraction imaging
The irradiation area requiring adjacent probe position partially overlaps, and it is pseudo-that this most inevitably introduces lattice point in rebuilding image
Shadow.Applicant is by finding, due to the part weight of adjacent position during probe scanning the reconstructed results research of analog data
The folded lattice point noise introduced is the one property taken advantage of noise, can using real probe at the fluence of whole scanning area as rectifying
Reconstructed results is corrected by positive coefficient matrix.But owing to the wavefront function of probe and target sample is in core reconstruction formula
Reciprocal relation, causes the probe reconstructed to have the artifact figure similar with target sample equally, the detecting probe information of distortion without
Method is used for producing compensation coefficient matrix.The self limiting that cannot overcome due to Phase Retrieve Algorithm, compensation coefficient matrix with wait to correct
Target sample rebuild image alignment issues be difficult to equally solve.Through retrieval, related scans coherent diffraction microscopic imaging device
And application, a kind of adding be longitudinally separated the multiple cascade scanning coherent diffraction microscopic imaging device of reference and application yet there are no
Report.
Summary of the invention
For the deficiencies in the prior art, the problem to be solved in the present invention is to provide a kind of many heavy duties adding and being longitudinally separated reference
Connection scanning coherent diffraction microscopic imaging device and application.
Of the present invention add the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference, before light beam
Enter direction coaxial row successively and show coherent light light source----LASER Light Source, by light intensity attenuation sheet, short burnt collecting lens, diaphragm and length
The LASER Light Source beam optimum assembly of burnt collecting lens composition, limit light micropore, being controlled by precision electric motor can be in vertical optical axis plane
On do direction displacement up and down scanning target sample platform, ccd image sensor, and connect ccd image sensor calculating
Machine；Wherein, described light intensity attenuation sheet, short burnt collecting lens, diaphragm, focal length collecting lens, limit light micropore are fixed on device and set
Magnet base on, ccd image sensor fixed placement is orthogonal and can direction is moved up and down stepping frame at two
On, this stepping frame is simultaneously fixed at can be along the movable stepping frame of optical axis direction；
Or, of the present invention adding, is longitudinally separated the multiple cascade scanning coherent diffraction microscopic imaging device of reference along light
Bundle direction of advance coaxial row successively show coherent light light source---synchrotron radiation coherent source, limit light micropore, by precision electric motor control
The target sample platform of the scanning of direction displacement up and down, ccd image sensor can be done in vertical optical axis plane, and connect CCD
The computer of imageing sensor；Wherein, described limit light micropore is fixed on the magnet base that device sets, and ccd image sensor is solid
Surely be placed on two orthogonal and can be on the stepping frame that direction is moved up and down, this stepping frame is simultaneously fixed at can be along light
On the stepping frame that direction of principal axis is movable；
It is characterized in that:
When in device, coherent light light source is LASER Light Source, described device is arranged between limit light micropore and target sample platform
Have by precision stepper motor control and the reference sample stage that direction displacement up and down scans can be done in vertical optical axis plane；Institute
State light intensity attenuation sheet select the dynamic sensitive volume of regulation light intensity and ccd image sensor to match and attenuation multiple be 10 times～
The light intensity attenuation sheet of 1000 times；Described short burnt collecting lens and focal length collecting lens focus overlap, the focal length of short burnt collecting lens
For 10mm～200mm, the focal length of focal length collecting lens is 220mm～3000mm, and two lens expand light beam in the ratio of focal length；Institute
State diaphragm to be positioned in the focus of short burnt collecting lens and focal length collecting lens；After described limit light micropore is positioned at focal length collecting lens
Any distance, its aperture is 0.01um～500um；Described being positioned at reference to sample stage limits 0.01mm～5mm after light micropore；Described mesh
Standard specimen sample platform is positioned at reference to 0.01um～500um after sample stage；Described ccd image sensor be positioned at after target sample platform 1cm～
200cm；
When in device, coherent light light source is synchrotron radiation coherent source, described device is at limit light micropore and target sample platform
Between be provided with by precision stepper motor control and can do in vertical optical axis plane direction displacement up and down scanning reference
Sample stage；Described limit light micropore size is 0.01um～500um；Described with reference to sample stage be positioned at limit light micropore after 0.01mm～
5mm；Described target sample platform is positioned at reference to 0.01um～500um after sample stage；Described ccd image sensor is positioned at target sample
1cm～200cm after platform；
Above-mentioned adds in the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference, preferred embodiment party
Formula is:
When in device, coherent light light source is LASER Light Source, described light intensity attenuation sheet selects regulation light intensity to pass with ccd image
The light intensity attenuation sheet that the dynamic sensitive volume of sensor matches and attenuation multiple is 80 times～150 times；Described short burnt collecting lens
Overlapping with focal length collecting lens focus, the focal length of short burnt collecting lens is 40mm～80mm, and the focal length of focal length collecting lens is
400mm～800mm, two lens expand light beam in the ratio of focal length；Described diaphragm is positioned at short burnt collecting lens and focal length is assembled thoroughly
In the focus of mirror；Described limit light micropore is positioned at any distance after focal length collecting lens, and its aperture is 0.01um～300um；Institute
State to be positioned at reference to sample stage and limit 0.6mm～2mm after light micropore；Described target sample platform be positioned at reference to 10um after sample stage～
400um；Described ccd image sensor is positioned at 5cm～150cm after target sample platform；
When in device, coherent light light source is synchrotron radiation coherent source, described limit light micropore size be 0.01um～
300um；Described being positioned at reference to sample stage limits 0.6mm～2mm after light micropore；Described target sample platform is positioned at reference to after sample stage
10um～400um；Described ccd image sensor is positioned at 5cm～150cm after target sample platform.
The application adding the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference of the present invention, step
It is:
The first step: dispose a set of coherent light light source be LASER Light Source add be longitudinally separated reference multiple cascade scanning be concerned with
Diffraction microscopic imaging device, including: LASER Light Source, by light intensity attenuation sheet, short burnt collecting lens, diaphragm, focal length collecting lens group
The LASER Light Source beam optimum assembly become, limits light micropore, with reference to sample stage, target sample platform, ccd image sensor and connection
The computer of ccd image sensor；Their position of parameter adjustment as described in claim 1, and make them successively along optical axis altogether
Axle arranges；
Second step: expand, collimates and purifies light beam, and method is as follows:
The light intensity attenuation sheet selecting attenuation multiple to be 10 times～1000 times；The short burnt meeting selecting focal length to be 10mm～200mm
Poly-lens, focal length is the focal length collecting lens of 220mm～3000mm, adjusts the distance of two lens, makes the focus of two lens
Overlap；Diaphragm is placed in the focus of short burnt collecting lens and focal length collecting lens, eliminates the veiling glare of light path, is purified light
Bundle；
Or,
The first step: dispose a set of coherent light light source be synchrotron radiation coherent source add the multiple cascade being longitudinally separated reference
Scanning coherent diffraction microscopic imaging device, including: synchrotron radiation coherent source, limit light micropore, with reference to sample stage, target sample
Platform, ccd image sensor and the computer of connection ccd image sensor；Their position of parameter adjustment as described in claim 1
Put, and make them successively along optical axis co-axial alignment；
Second step: with the emergent light of synchrotron radiation coherent source for purifying light beam；
3rd step: regulation limit light micropore, produces probe hot spot, and method is as follows:
Put into the limit light micropore that aperture is 0.01um～500um in the optical path, vertical optical axis plane is finely tuned micropore position
Put, only allow the plane wave more uniform tiny area of wavefront intensity after second step optimizes to pass through micropore, as scanning probe；
4th step: carry out tandem type scanning, gathers diffracted signal, and method is as follows:
0.01mm～5mm place after limit light micropore will be placed in reference to sample stage, utilize the control reference of one group of precision stepper motor
Sample stage does the displacement of direction fixed step size up and down in the plane being perpendicular to light path, wherein step-length select 0.01um～
300um with ensure adjacent detector interregional have more than 30% overlap, arbitrarily increase scanning depending on the big I in sample region to be measured
Step number, step number is set as n1, to ensure that the Zone Full covering whole sample region to be measured this reference sample i.e. divides for n1
Individual scanning probe district；Target sample platform is placed at reference to 0.01um～500um after sample stage, also with one group of precision stepping
Motor control objective sample stage does the displacement of direction fixed step size up and down, wherein step-length choosing in the plane being perpendicular to light path
0.01um～300um with ensure adjacent detector interregional have more than 30% overlap, depending on the big I in target sample region to be measured
Arbitrarily increasing scanning step number, step number is set as n2, to ensure to cover the complete of whole target sample region to be measured this target sample i.e.
Region, portion divides for n2 scanning probe district；When gathering diffracted signal, mobile target sample platform, make target sample in the face of scanning
Probe；Mobile with reference to sample stage, make with reference to a certain regional area in n1 scanning probe district of sample in the face of scanning probe also
Scanned probe hot spot covers, fixing with reference to sample position, is made by the probe transmission light passed through with reference to sample hot spot overlay area
For modulation after probe, whole n2 scanning probe districts of scanning probe target sample successively, it is thus achieved that n2 width diffraction pattern be
All the 1st groups in n1 group diffraction pattern；Then move on reference to sample stage, make with reference to scanned other of sample a certain
Regional area is covered in the face of scanning probe scanned probe hot spot successively by setting order, fixing with reference to sample position, still
Using the probe transmission light that passes through with reference to sample hot spot overlay area as the probe after modulation, scanning probe target sample successively
All n2 scanning probe districts, it is thus achieved that n2 width diffraction pattern be the 2nd group in whole n1 group diffraction pattern；So repeat above-mentioned
Mobile with reference to the step after sample stage, covered until being scanned probe hot spot with reference to the n-th 1 scanning probe districts of sample, and
Complete whole n2 scanning probe districts of scanning probe target sample successively, it is thus achieved that n2 width diffraction pattern be whole n1 group diffraction
In pattern the n-th 1 groups；So far obtain often group and comprise the diffraction pattern that n2 opens whole n1 groups of diffraction pattern, add up to n1 × n2
Completely self-contained diffraction pattern；
5th step: the core formula that the 4th step obtains the completely self-contained following algorithm for reconstructing of diffraction pattern data separate is entered
Row is rebuild；
Formula 1:
Formula 2:
Formula 3:
In above-mentioned three formulas, P represents scanning probe, S1Represent with reference to sample, S2Represent target sample；Three formula correspond respectively to
I-th group of jth width diffraction data is to scanning probe, with reference to sample and the renewal of target sample reconstructed results, by whole n1 × n2
Width diffraction data is applied successively and be can be regarded as an iteration for one time, and iteration i.e. obtains the reconstructed results that target sample is preliminary more than 50 times,
Obtaining the reconstructed results with reference to sample, wherein i value 1～n1, corresponding to n1 the scanning lattice site with reference to sample, j simultaneously
Value 1～n2, corresponding to n2 scanning lattice site of target sample；
6th step: removing the lattice point artifact in reconstructed results, method is as follows:
Contrasting the reconstructed results of reference sample and known real information, utilization scales, aligns, puts division operation acquisition rectification
Coefficient matrix；Reapply compensation coefficient matrix and correct the reconstructed results that target sample is preliminary, obtain final target sample and rebuild
Result.
What the present invention provided adds the multiple cascade scanning coherent diffraction imaging device being longitudinally separated reference, application tradition CDI
In reference enhance principle, add between micropore and target sample strong diffraction with reference to sample, introduce with reference to sample
And the scan operation of tandem type between target sample: do stepping relative to probe location in the plane be perpendicular to light path with reference to sample
Formula scans, and corresponding to each scan position with reference to sample, target sample all does a whole set of independent dot interlace scanning.Thus will
The weak diffracted signal of weak scattering sample is loaded in the strong diffracted signal with reference to sample, the diffracted signal number that tandem type scanning produces
Increase according to amount exponentially form, add one and carry out the diffracted signal data that tandem type scanning produces with reference to sample and target sample
Amount be equivalent to tradition scanning coherent diffraction imaging method square.The most independent a large amount of redundant datas can ensure that target sample
True and reliable or even the imaging of quantification, greatly strengthen the anti-interference of formation method simultaneously.More complete only in order to obtain
Vertical redundant data, can add and more carry out multi-stage cascade with reference to sample, premise be visual with target sample with reference to sample
The projection approximation condition of tradition scanning coherent diffraction imaging is met for entirety.Apply the algorithm for reconstructing that we provide by probe, ginseng
The real space information of product and target sample separates in the same old way, it is achieved true and reliable or even quantification to large scale weak scattering sample
Scanning coherent diffraction micro-imaging.
It addition, combine the priori with reference to sample, the algorithm that the present invention provides is pseudo-at the reconstruction image of target sample
Shadow removal aspect has reasonable effect.The algorithm of the present invention can be not required to any probe, with reference to sample and target sample
Priori in the case of rebuild the wavefront function of three simultaneously, three is same in the core reconstruction formula of this algorithm for reconstructing
There is reciprocal relation, this means that can have the full same sex with the artifact mechanism of production of three, it is possible to use same compensation coefficient
Matrix is corrected, and compensation coefficient matrix can be obtained with prior information with reference to the reconstructed results of sample by contrast.Due to
The reconstruction pattern of three has accurate alignment relation on locus, by analyzing what the reconstructed results with reference to sample drew
Compensation coefficient matrix can be directly used for the rectification to target sample reconstructed results, it is not necessary to again aligns.Based on above advantage, this dress
Put and have broad application prospects in biology in materialogy, nanotechnology.
Accompanying drawing explanation
Fig. 1 is the schematic diagram that the present invention adds the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference.
Wherein: 1. coherent light light source (LASER Light Source or synchrotron radiation coherent source), 2. LASER Light Source beam optimum assembly
(being made up of light intensity attenuation sheet, the short burnt collecting lens of 2-2., 2-3. diaphragm and 2-4. focal length collecting lens 2-1.), 3. limit light is micro-
Hole, 4. with reference to sample stage, 5. target sample platform, 6.CCD imageing sensor, 7. computer.
Fig. 2 is the optical microphotograph picture with reference to sample chosen in experiment, for the pattern being lithographically derived on piezoid.
Fig. 3 is the optical microphotograph picture of the target sample chosen in experiment, for the pattern being lithographically derived on piezoid.
Fig. 4 is the width diffraction pattern that in experimentation, ccd image sensor is collected.
Fig. 5 is that multiple cascade scanning coherent diffraction micro-imaging technique rebuilds the reconstructed results with reference to sample obtained.
Fig. 6 is the reconstructed results that multiple cascade scanning coherent diffraction micro-imaging technique rebuilds the target sample obtained, point
Resolution is 5um, can symbolize the difference in thickness of sample area of the pattern and substrate area clearly.
Detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, right
The present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, not
For limiting the present invention.
Embodiment 1 one kinds adds the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference
Of the present invention a kind of add the diffraction enhanced imaging multiple cascade scanning coherent diffraction micro-imaging being longitudinally separated reference
Device, structural representation such as Fig. 1, shows LASER Light Source 1 along light beam direction of advance successively coaxial row, by light intensity attenuation sheet 2-1, short
Burnt collecting lens 2-2, diaphragm 2-3 and the LASER Light Source beam optimum assembly 2 of focal length collecting lens 2-4 composition, limit light micropore 3,
By precision stepper motor control can do in the plane of vertical optical axis direction displacement up and down scanning with reference to sample stage 4, with
Sample is controlled to do the target sample platform 5 of the scanning of direction displacement up and down, CCD figure in the plane of vertical optical axis by precision electric motor
As sensor 6 and the computer 7 of connection ccd image sensor；Described light intensity attenuation sheet, short burnt collecting lens, diaphragm, focal length meeting
Poly-lens and limit light micropore are fixed on the magnet base that device sets, and ccd image sensor fixed placement is mutually hung down at two
Straight and can be on the stepping frame that direction is moved up and down, this stepping frame is simultaneously fixed at can be along the movable step of optical axis direction
Enter on frame.
Further, above-mentioned the diffraction enhanced imaging multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference is added
In: described LASER Light Source is He-Ne laser instrument, and the wavelength of output light is 0.543um, and described light intensity attenuation sheet attenuation multiple is 80
Times～150 times；Described short burnt collecting lens focal length 40mm～80mm, focal length collecting lens focal length is divided into 400mm～800mm, and two
The focus of individual lens overlaps, and light beam is expanded by two lens in the ratio of focal length, reduces beam divergence angle simultaneously, produces parallel
Light；Diaphragm is placed on the public focus of short burnt collecting lens and focal length collecting lens for the veiling glare eliminating in light path；Described
Micropore is the circular hole of aperture 150um～300um, is placed in battery of lens rear, only allows the plane wave after battery of lens beam-expanding collimation
The center homogeneous area of wavefront passes through, and the transmission hot spot of generation is the probe for detecting sample；It is placed in micro-with reference to sample stage
0.6mm～2mm behind hole, by precision stepper motor control, can in the plane be perpendicular to optical axis vertically left and right do step-length and be
The step-by-step movement of 0.1um～300um moves；Target sample platform is placed in reference to 200um～400um after sample stage, by accurate stepping electricity
Machine controls, can in the plane be perpendicular to optical axis vertically left and right do the step-by-step movement that step-length is 0.1um～300um and move；By CCD
Imageing sensor is placed in after target sample platform at 10cm～30cm, and corresponding to the light source of 0.543um wavelength, and target sample is put down
The transverse illumination broadening of face about 200um, the diffraction light wave transfer function that can receive CCD does at fraunhofer approximation
Reason, be i.e. regarded as having loaded the sample modulus value with the Fourier transformation of the transmission wavefront of detecting probe information square；Described CCD schemes
As the diffracted signal of sensor collection is transferred to computer, computer run the reconstruction algorithm provided to probe and two samples
Information rebuild.
Embodiment 2 adds the application of the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference
Concrete applying step is as follows:
The first step: dispose a set of laser coherence diffraction imaging device, structural representation such as Fig. 1, including: LASER Light Source (swashs
Light device) 1, light intensity attenuation sheet 2-1, short burnt collecting lens 2-2, diaphragm 2-3, focal length collecting lens 2-4, limit light micropore 3, with reference to sample
Sample platform 4, target sample platform 5, ccd image sensor 6 and computer 7；；Described laser instrument is He-Ne laser instrument, the ripple of output light
The pixel count of a length of 0.543um, CCD is 1300 × 1340, and pixel size is 20um.
Second step: expand, collimates and purifies light beam, and method is as follows:
Selecting light intensity attenuation sheet, attenuation multiple is 100 times, the laser intensity from laser emitting of decaying, and selects short burnt meeting
The focal length of poly-lens be the focal length of 50mm and focal length collecting lens be 500mm, the focus of two lens overlaps, by two focal lengths of lens
Ratio 1:10 expand light beam, reduce beam divergence angle simultaneously, produce directional light；Diaphragm is placed on short burnt collecting lens and focal length meeting
For eliminating the veiling glare of light path in the focus of poly-lens.
3rd step: regulation limit light micro well locations, optimizes probe mass, and method is as follows:
Put into the limit light micropore of diameter 200um in the optical path, vertical optical axis plane is finely tuned micro well locations, only allows warp
The plane wave more uniform tiny area of wavefront intensity after beam-expanding collimation passes through micropore, as scanning probe.
4th step: carry out tandem type scanning, gathers diffracted signal, and method is as follows:
1mm place after limit light micropore will be placed in reference to sample stage, and utilize one group of precision stepper motor to control reference sample stage and exist
Doing the displacement of direction fixed step size up and down in being perpendicular to the plane of light path, wherein step-length selects 40um, such adjacent detector position
The Duplication putting probe overlay area has reached 80%.Scanning step number, step number is arbitrarily increased depending on the big I in sample region to be measured
Being set as that 11 × 11=121 walks, search coverage is to cover the round rectangle region in whole sample region to be measured.By target sample platform
It is placed at reference to 300um after sample stage, controls target sample platform also with one group of precision stepper motor and be perpendicular to light path
Doing the displacement of direction fixed step size up and down in plane, wherein step-length selects 40um, adjacent detector position probe overlay area
Duplication has reached 80%, and scanning step number is set as that 11 × 11=121 walks, and search coverage is for covering whole target sample district to be measured
The round rectangle region in territory.When gathering diffracted signal, mobile target sample platform, make target sample in the face of scanning probe.Mobile ginseng
Sample platform in the same old way, makes with reference to a certain regional area in 121 scanning probe districts of sample in the face of scanning probe scanned probe
Hot spot covers, fixing with reference to sample position, using the probe transmission light passed through with reference to sample hot spot overlay area as after modulating
Probe, successively 121 scanning probe positions of scanning probe target sample, it is thus achieved that 121 width diffraction patterns be whole 121 groups and spread out
Penetrate the 1st group in pattern；Then move on reference to sample stage, make with reference to not scanned other a certain regional area of sample by
Setting order covers in the face of scanning probe scanned probe hot spot successively, fixing with reference to sample position, still will be with reference to sample
The probe transmission light that hot spot overlay area passes through is as the probe after modulation, whole 121 of scanning probe target sample successively
Scanning probe district, it is thus achieved that 121 width diffraction patterns be the 2nd group in whole 121 groups of diffraction patterns；So repeat above-mentioned mobile ginseng
Step after sample platform in the same old way, covered until being scanned probe hot spot with reference to the 121st scanning probe district of sample, and completes to depend on
Whole 121 scanning probe districts of secondary scanning probe target sample, it is thus achieved that 121 width diffraction patterns be whole 121 groups of diffraction patterns
In sample the 121st group；So far the diffraction pattern of whole 121 groups that often group comprises 121 diffraction patterns is obtained, add up to 121 ×
121=14641 completely self-contained diffraction pattern；
5th step: by the core formula of the completely self-contained following algorithm for reconstructing of diffraction pattern data separate that the 4th step obtains
Rebuild；
Formula 1:
Formula 2:
Formula 3:
In above-mentioned three formulas, P represents scanning probe, and S1 represents with reference to sample, and S2 represents target sample；Three formula correspondence respectively
In i-th group of jth width diffraction data to scanning probe, with reference to sample and the renewal of target sample reconstructed results, by whole 121 ×
121 width diffraction datas are applied successively and be can be regarded as an iteration for one time, and iteration i.e. obtains the reconstructed results that target sample is preliminary 100 times,
Obtaining the reconstructed results with reference to sample, wherein i value 1～121,121 corresponding to reference sample scan lattice site simultaneously,
J value 1～121, corresponding to 121 scanning lattice site of target sample.
6th step: removing the lattice point artifact in reconstructed results, method is as follows:
Real information with reference to sample can be obtained by other approach such as ultramicroscope, by obtained by other approach
Aliging with the reconstructed results of reference sample after reference sample real information scaling, both carry out a division operation, can obtain rectification
Coefficient matrix.Again by reconstructed results preliminary for compensation coefficient matrix dot product target sample, obtain final target sample and rebuild knot
Really.
Embodiment 3 one kinds adds the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference
Of the present invention a kind of add the diffraction enhanced imaging multiple cascade scanning coherent diffraction micro-imaging being longitudinally separated reference
Device, structural representation such as Fig. 1, along light beam direction of advance successively coaxial row show synchrotron radiation coherent source 1, limit light micropore 3,
By precision stepper motor control can do in the plane of vertical optical axis direction displacement up and down scanning with reference to sample stage 4, with
Sample is controlled to do the target sample platform 5 of the scanning of direction displacement up and down, CCD figure in the plane of vertical optical axis by precision electric motor
As sensor 6 and the computer 7 of connection ccd image sensor；Described limit light micropore is fixed on the magnet base that device sets,
Ccd image sensor fixed placement is orthogonal and can be on the stepping frame that direction is moved up and down at two, this stepping frame
Being simultaneously fixed at can be along the movable stepping frame of optical axis direction.
Further, above-mentioned the diffraction enhanced imaging multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference is added
In: described coherent light light source is synchrotron radiation coherent source, and output light is the homogeneous X-ray of 6.2keV, and described micropore is aperture
The circular hole of 0.01um～30um, only allows the center homogeneous area of plane wave wavefront to pass through, the transmission hot spot of generation be for
The probe of detection sample；It is placed in 0.1mm～2mm after micropore with reference to sample stage, by precision stepper motor control, light can be perpendicular to
In the plane of axle, vertically left and right is done the step-by-step movement that step-length is 0.1um～25um and is moved；Target sample platform is placed in reference to sample stage
Rear 1um～100um, by precision stepper motor control, can vertically to do step-length be 0.1um in left and right in the plane be perpendicular to optical axis
～the step-by-step movement of 25um moves；Ccd image sensor is placed in after target sample platform at 20cm～150cm, corresponding to 6.2keV
Synchrotron radiation X-ray, and the transverse illumination broadening below target sample plane 40um, the diffraction that CCD can be received
Light wave transmissions function does fraunhofer approximate processing, be i.e. regarded as having loaded sample with in Fu of the transmission wavefront of detecting probe information
The modulus value of leaf transformation square；The diffracted signal that described ccd image sensor is collected is transferred to computer, computer run and carry
The information of probe and two samples is rebuild by the reconstruction algorithm of confession.
Embodiment 4 adds the application of the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference
Concrete applying step is as follows:
The first step: dispose a set of laser coherence diffraction imaging device, structural representation such as Fig. 1, including: synchrotron radiation is concerned with
Light source 1, limits light micropore 3, with reference to sample stage 4, target sample platform 5, ccd image sensor 6 and computer 7；Described synchrotron radiation
Coherent source output light is the homogeneous X-ray of 6.2keV, and the pixel count of CCD is 1300 × 1340, and pixel size is 20um.
Second step: with the emergent light of synchrotron radiation coherent source for purifying light beam；
3rd step: regulation limit light micro well locations, optimizes probe mass, and method is as follows:
Put into the limit light micropore of diameter 3um in the optical path, vertical optical axis plane is finely tuned micro well locations, only allows through expanding
The plane wave more uniform tiny area of wavefront intensity after bundle collimation is by micropore, as scanning probe.
4th step: carry out tandem type scanning, gathers diffracted signal, and method is as follows:
0.5mm place after limit light micropore will be placed in reference to sample stage, and utilize one group of precision stepper motor to control reference sample stage
Doing the displacement of direction fixed step size up and down in the plane being perpendicular to light path, wherein step-length selects 1.5um, such adjacent detector
The Duplication of position probe overlay area has reached 39%.Scanning step number is arbitrarily increased, step depending on the big I in sample region to be measured
Number is set as that 20 × 20=400 walks, and search coverage is to cover the round rectangle region in whole sample region to be measured.By target sample
Platform is placed at reference to 30um after sample stage, controls target sample platform also with one group of precision stepper motor and is being perpendicular to light path
Doing the displacement of direction fixed step size up and down in plane, wherein step-length selects 1.5um, adjacent detector position probe overlay area
Duplication has reached 39%, and scanning step number is set as that 20 × 20=400 walks, and search coverage is for covering whole target sample district to be measured
The round rectangle region in territory.When gathering diffracted signal, mobile target sample platform, make target sample in the face of scanning probe.Mobile ginseng
Sample platform in the same old way, makes with reference to a certain regional area in 400 scanning probe districts of sample in the face of scanning probe scanned probe
Hot spot covers, fixing with reference to sample position, using the probe transmission light passed through with reference to sample hot spot overlay area as after modulating
Probe, successively 400 scanning probe positions of scanning probe target sample, it is thus achieved that 400 width diffraction patterns be whole 400 groups and spread out
Penetrate the 1st group in pattern；Then move on reference to sample stage, make with reference to not scanned other a certain regional area of sample by
Setting order covers in the face of scanning probe scanned probe hot spot successively, fixing with reference to sample position, still will be with reference to sample
The probe transmission light that hot spot overlay area passes through is as the probe after modulation, whole 400 of scanning probe target sample successively
Scanning probe district, it is thus achieved that 400 width diffraction patterns be the 2nd group in whole 400 groups of diffraction patterns；So repeat above-mentioned mobile ginseng
Step after sample platform in the same old way, covered until being scanned probe hot spot with reference to the 400th scanning probe district of sample, and completes to depend on
Whole 400 scanning probe districts of secondary scanning probe target sample, it is thus achieved that 400 width diffraction patterns be whole 400 groups of diffraction patterns
In sample the 400th group；So far the diffraction pattern of whole 400 groups that often group comprises 400 diffraction patterns is obtained, add up to 400 ×
400=160000 completely self-contained diffraction pattern；
5th step: by the core formula of the completely self-contained following algorithm for reconstructing of diffraction pattern data separate that the 4th step obtains
Rebuild；
Formula 1:
Formula 2:
Formula 3:
In above-mentioned three formulas, P represents scanning probe, and S1 represents with reference to sample, and S2 represents target sample；Three formula correspondence respectively
In i-th group of jth width diffraction data to scanning probe, with reference to sample and the renewal of target sample reconstructed results, by whole 400 ×
400 width diffraction datas are applied successively and be can be regarded as an iteration for one time, and iteration i.e. obtains the reconstructed results that target sample is preliminary 100 times,
Obtaining the reconstructed results with reference to sample, wherein i value 1～400,400 corresponding to reference sample scan lattice site simultaneously,
J value 1～400, corresponding to 400 scanning lattice site of target sample.
6th step: removing the lattice point artifact in reconstructed results, method is as follows:
Real information with reference to sample can be obtained by other approach such as ultramicroscope, by obtained by other approach
Aliging with the reconstructed results of reference sample after reference sample real information scaling, both carry out a division operation, can obtain rectification
Coefficient matrix.Again by reconstructed results preliminary for compensation coefficient matrix dot product target sample, obtain final target sample and rebuild knot
Really.
Claims (2)
1. adding the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference, described device advances along light beam
Direction coaxial row successively shows coherent light light source----LASER Light Source, by light intensity attenuation sheet, short burnt collecting lens, diaphragm and focal length
Collecting lens composition LASER Light Source beam optimum assembly, limit light micropore, by precision electric motor control can be in vertical optical axis plane
Do the target sample platform of the scanning of direction displacement up and down, ccd image sensor, and connect the computer of ccd image sensor；
Wherein, described light intensity attenuation sheet, short burnt collecting lens, diaphragm, focal length collecting lens, limit light micropore are fixed on the magnetic that device sets
On power seat, ccd image sensor fixed placement is orthogonal and can be on the stepping frame that direction is moved up and down at two, should
Stepping frame is simultaneously fixed at can be along the movable stepping frame of optical axis direction；
Or, described device shows coherent light light source along light beam direction of advance successively coaxial row---synchrotron radiation coherent source, limit
Light micropore, by precision electric motor control can do in vertical optical axis plane direction displacement up and down scanning target sample platform, CCD
Imageing sensor, and connect the computer of ccd image sensor；Wherein, described limit light micropore is fixed on the magnetic force that device sets
On seat, ccd image sensor fixed placement is orthogonal and can be on the stepping frame that direction is moved up and down at two, this step
Entering that frame is simultaneously fixed at can be along the movable stepping frame of optical axis direction；
It is characterized in that:
When in device, coherent light light source is LASER Light Source, described device limit light micropore and target sample platform between be provided with by
Precision stepper motor controls and can do the reference sample stage of the scanning of direction displacement up and down in vertical optical axis plane；Described light
Strong attenuator selects the dynamic sensitive volume of regulation light intensity and ccd image sensor to match and attenuation multiple is 10 times～1000
Light intensity attenuation sheet again；Described short burnt collecting lens and focal length collecting lens focus overlap, and the focal length of short burnt collecting lens is
10mm～200mm, the focal length of focal length collecting lens is 220mm～3000mm, and two lens expand light beam in the ratio of focal length；Described
Diaphragm is positioned in the focus of short burnt collecting lens and focal length collecting lens；Described limit light micropore is positioned at appointing after focal length collecting lens
Meaning distance, its aperture is 0.01um～500um；Described being positioned at reference to sample stage limits 0.01mm～5mm after light micropore；Described target
Sample stage is positioned at reference to 0.01um～500um after sample stage；Described ccd image sensor be positioned at after target sample platform 1cm～
200cm；
When in device, coherent light light source is synchrotron radiation coherent source, described device is between limit light micropore and target sample platform
It is provided with by precision stepper motor control and the reference sample that direction displacement up and down scans can be made in vertical optical axis plane
Platform；Described limit light micropore size is 0.01um～500um；Described being positioned at reference to sample stage limits 0.01mm～5mm after light micropore；Institute
State target sample platform to be positioned at reference to 0.01um～500um after sample stage；After described ccd image sensor is positioned at target sample platform
1cm～200cm.
The most according to claim 1 add the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference, its
It is characterised by:
When in device, coherent light light source is LASER Light Source, described light intensity attenuation sheet selects regulation light intensity and ccd image sensor
The light intensity attenuation sheet that dynamic sensitive volume matches and attenuation multiple is 80 times～150 times；Described short burnt collecting lens and length
Burnt collecting lens focus overlaps, and the focal length of short burnt collecting lens is 40mm～80mm, the focal length of focal length collecting lens be 400mm～
800mm, two lens expand light beam in the ratio of focal length；Described diaphragm is positioned at short burnt collecting lens and the focus of focal length collecting lens
On；Described limit light micropore is positioned at any distance after focal length collecting lens, and its aperture is 0.01um～300um；Described with reference to sample
Sample platform is positioned at 0.6mm～2mm after limit light micropore；Described target sample platform is positioned at reference to 10um～400um after sample stage；Described
Ccd image sensor is positioned at 5cm～150cm after target sample platform；
When in device, coherent light light source is synchrotron radiation coherent source, described limit light micropore size is 0.01um～300um；Institute
State to be positioned at reference to sample stage and limit 0.6mm～2mm after light micropore；Described target sample platform be positioned at reference to 10um after sample stage～
400um；Described ccd image sensor is positioned at 5cm～150cm after target sample platform.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107091611A (en) * | 2017-05-17 | 2017-08-25 | 中山大学 | A kind of slit micro-displacement measuring device and its measuring method |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107703642B (en) * | 2017-11-02 | 2019-12-06 | 山东建筑大学 | single-exposure high-numerical-aperture pulse laser coherent diffraction imaging device and using method |
| CN109884101B (en) * | 2019-03-06 | 2022-08-02 | 上海科技大学 | Sample imaging system, sample imaging method, computer storage medium, and computer apparatus |
| CN109782562A (en) * | 2019-03-15 | 2019-05-21 | 刘桢 | It is a kind of to calculate holographic CT-3D Reconstruction holographic imaging system based on Fresnel |
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| CN111290108B (en) * | 2020-03-07 | 2022-08-02 | 上海科技大学 | Reflection scanning coherent diffraction microscopic imaging device based on broadband light source and application |
| CN113237904A (en) * | 2021-04-28 | 2021-08-10 | 上海科技大学 | Method for improving signal-to-noise ratio of coherent X-ray diffraction pattern |
| TWI782822B (en) | 2021-12-16 | 2022-11-01 | 國立清華大學 | Three-dimensional imaging method and system using scanning-type coherent diffraction |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8072610B1 (en) * | 2008-07-01 | 2011-12-06 | Bruker Nano, Inc. | Polarization mirau interference microscope |
| CN102866133A (en) * | 2012-09-11 | 2013-01-09 | 中国科学院上海光学精密机械研究所 | Transmission type sample amplitude and phase imaging device and method |
| CN102981261A (en) * | 2012-11-30 | 2013-03-20 | 山东大学 | Laser coherence diffraction microscopic imaging device and application thereof |
| CN103134825A (en) * | 2013-02-05 | 2013-06-05 | 山东大学 | A multi-purpose synchrotron radiation coherent X-ray diffraction microscopic imaging device and application |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012226117A (en) * | 2011-04-20 | 2012-11-15 | Nikon Corp | Interference objective lens |
-
2015
- 2015-01-13 CN CN201510016101.2A patent/CN104536125B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8072610B1 (en) * | 2008-07-01 | 2011-12-06 | Bruker Nano, Inc. | Polarization mirau interference microscope |
| CN102866133A (en) * | 2012-09-11 | 2013-01-09 | 中国科学院上海光学精密机械研究所 | Transmission type sample amplitude and phase imaging device and method |
| CN102981261A (en) * | 2012-11-30 | 2013-03-20 | 山东大学 | Laser coherence diffraction microscopic imaging device and application thereof |
| CN103134825A (en) * | 2013-02-05 | 2013-06-05 | 山东大学 | A multi-purpose synchrotron radiation coherent X-ray diffraction microscopic imaging device and application |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107091611A (en) * | 2017-05-17 | 2017-08-25 | 中山大学 | A kind of slit micro-displacement measuring device and its measuring method |
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