CN104536125A - Longitudinal-separated-reference-added multi-cascade scanning coherent diffraction microscopy imaging device and application - Google Patents
Longitudinal-separated-reference-added multi-cascade scanning coherent diffraction microscopy imaging device and application Download PDFInfo
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Abstract
The invention discloses a longitudinal-separated-reference-added multi-cascade scanning coherent diffraction microscopy imaging device. According to the longitudinal-separated-reference-added multi-cascade scanning coherent diffraction microscopy imaging device, a coherent-light light source, a laser source beam optimizing assembly, a light limiting micro-hole, a reference sample table, a target sample table, a CCD image sensor (6) and a computer connected with the CCD image sensor (6), wherein the laser source beam optimizing assembly is special when the light source is a laser source and is composed of a light intensity attenuation sheet, a short-focus convergent lens, a diaphragm and a long-focus convergent lens, the reference sample table is controlled by a precise stepping motor to be capable of performing up-and-down and left-and-right direction displacement scanning on a plane perpendicular to the optical axis, and the target sample table is also controlled by the precise motor to be capable of performing up-and-down and left-and-right direction displacement scanning on a plane perpendicular to the optical axis. According to the longitudinal-separated-reference-added multi-cascade scanning coherent diffraction microscopy imaging device, as high-scattering reference samples are added, the quality of diffraction signals collected by the CCD is greatly improved, the anti-interference performance of the imaging method is greatly improved through a large number of redundant data generated through cascade type scanning, true, reliable and quantified imaging of the large-size weak-scattering samples can be achieved, and the application prospects in the material science, the nanotechnology and the biology are broad.
Description
Technical field
The present invention relates to a kind of scanning coherent diffraction microscopic imaging device and application, especially a kind of multiple cascade scanning coherent diffraction microscopic imaging device and application adding longitudinally separation reference.
Background technology
Scanning coherent diffraction imaging is a kind of novel coherent diffraction imaging method traditional coherent diffraction imaging technology combined with ptychography technology, its proposition solves traditional coherent diffraction imaging technical requirement sample for isolated sample, a series of defects such as imaging viewing field is little, and reconstruction algorithm is restrained slowly, stagnate, reconstructed results is not unique.But for the sample of weak scattering, because its diffracted signal is comparatively faint, scanning coherent diffraction imaging technology in the past often cannot realize the accurate imaging to them, even cannot imaging.For weak scattering sample, imaging results is more vulnerable to the impact of the various interference introduced in imaging process, and this just needs a large amount of redundant datas to ensure the anti-interference of imaging.In addition, owing to requiring that the irradiation area of adjacent probe position partially overlaps in scanning coherent diffraction imaging process, this just inevitably introduces lattice point artifact in reconstruction image.Applicant is by finding the reconstructed results research of simulated data, because the lattice point noise introduced that partly overlaps of adjacent position in probe scanning process is a kind of multiplicative noise, the fluence of real probe in whole scanning area can be corrected as compensation coefficient matrix reconstructed results.But due to the reciprocal relation of wavefront function in core reconstruction formula of probe and target sample, cause the probe reconstructed to have the artifact figure similar with target sample equally, the detecting probe information of distortion cannot be used for producing compensation coefficient matrix.Due to the self limiting that Phase Retrieve Algorithm cannot overcome, alignment issues same being difficult to that compensation coefficient matrix and target sample to be corrected rebuild image solves.Through retrieval, related scans coherent diffraction microscopic imaging device and application, especially a kind ofly add the multiple cascade scanning coherent diffraction microscopic imaging device that is longitudinally separated reference and application have not been reported.
Summary of the invention
For the deficiencies in the prior art, the problem to be solved in the present invention is to provide a kind of multiple cascade scanning coherent diffraction microscopic imaging device and the application that add longitudinally separation reference.
The multiple cascade scanning coherent diffraction microscopic imaging device adding longitudinally separation reference of the present invention, coherent light light source is shown along light beam working direction successively coaxial row----LASER Light Source, the LASER Light Source beam optimum assembly be made up of light intensity attenuation sheet, short burnt convergent lens, diaphragm and focal length convergent lens, target sample platform, the ccd image sensor limitting light micropore, controlled to do in vertical optical axis plane the scanning of direction displacement up and down by precision electric motor, with the computing machine being connected ccd image sensor; Wherein, described light intensity attenuation sheet, short burnt convergent lens, diaphragm, focal length convergent lens, limit light micropore are fixed on the magnet base of device setting, ccd image sensor fixed placement is orthogonal and can on the stepping frame of direction movement up and down at two, and this stepping frame is fixed on simultaneously can along on the movable stepping frame of optical axis direction;
Or, the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference that adds of the present invention shows coherent light light source along light beam working direction successively coaxial row---synchrotron radiation coherent source, target sample platform, the ccd image sensor limitting light micropore, controlled to do in vertical optical axis plane the scanning of direction displacement up and down by precision electric motor, with the computing machine being connected ccd image sensor; Wherein, described limit light micropore is fixed on the magnet base of device setting, ccd image sensor fixed placement is orthogonal and can on the stepping frame of direction movement up and down at two, and this stepping frame is fixed on simultaneously can along on the movable stepping frame of optical axis direction;
It is characterized in that:
When in device, coherent light light source is LASER Light Source, described device is provided with and is controlled by precision stepper motor and can do the reference sample sample platform that direction displacement up and down scans in vertical optical axis plane between limit light micropore and target sample platform; Described light intensity attenuation sheet is selected to regulate the dynamic sensitive volume of light intensity and ccd image sensor to match and attenuation multiple is the light intensity attenuation sheet of 10 times ~ 1000 times; Described short burnt convergent lens and focal length convergent lens focus overlap, and the focal length of short burnt convergent lens is 10mm ~ 200mm, and the focal length of focal length convergent lens is 220mm ~ 3000mm, and two lens expand light beam in the ratio of focal length; Described diaphragm is positioned in the focus of short burnt convergent lens and focal length convergent lens; Described limit light micropore is positioned at any distance after focal length convergent lens, and its aperture is 0.01um ~ 500um; Described reference sample sample platform is positioned at 0.01mm ~ 5mm after limit light micropore; Described target sample platform is positioned at 0.01um ~ 500um after reference sample sample platform; Described ccd image sensor is positioned at 1cm ~ 200cm after target sample platform;
When in device, coherent light light source is synchrotron radiation coherent source, described device is provided with and is controlled by precision stepper motor and can do the reference sample sample platform that direction displacement up and down scans in vertical optical axis plane between limit light micropore and target sample platform; Described limit light micropore size is 0.01um ~ 500um; Described reference sample sample platform is positioned at 0.01mm ~ 5mm after limit light micropore; Described target sample platform is positioned at 0.01um ~ 500um after reference sample sample platform; Described ccd image sensor is positioned at 1cm ~ 200cm after target sample platform;
Above-mentioned adds in the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference, preferred embodiment:
When in device, coherent light light source is LASER Light Source, described light intensity attenuation sheet is selected to regulate the dynamic sensitive volume of light intensity and ccd image sensor to match and attenuation multiple is the light intensity attenuation sheet of 80 times ~ 150 times; Described short burnt convergent lens and focal length convergent lens focus overlap, and the focal length of short burnt convergent lens is 40mm ~ 80mm, and the focal length of focal length convergent lens is 400mm ~ 800mm, and two lens expand light beam in the ratio of focal length; Described diaphragm is positioned in the focus of short burnt convergent lens and focal length convergent lens; Described limit light micropore is positioned at any distance after focal length convergent lens, and its aperture is 0.01um ~ 300um; Described reference sample sample platform is positioned at 0.6mm ~ 2mm after limit light micropore; Described target sample platform is positioned at 10um ~ 400um after reference sample sample platform; Described ccd image sensor is positioned at 5cm ~ 150cm after target sample platform;
When in device, coherent light light source is synchrotron radiation coherent source, described limit light micropore size is 0.01um ~ 300um; Described reference sample sample platform is positioned at 0.6mm ~ 2mm after limit light micropore; Described target sample platform is positioned at 10um ~ 400um after reference sample sample platform; Described ccd image sensor is positioned at 5cm ~ 150cm after target sample platform.
The application adding the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference of the present invention, step is:
The first step: dispose the multiple cascade scanning coherent diffraction microscopic imaging device adding longitudinally separation reference that a set of coherent light light source is LASER Light Source, comprise: LASER Light Source, the LASER Light Source beam optimum assembly be made up of light intensity attenuation sheet, short burnt convergent lens, diaphragm, focal length convergent lens, limit light micropore, reference sample sample platform, target sample platform, ccd image sensor and the computing machine being connected ccd image sensor; By their position of parameter adjustment described in claim 1, and make them successively along optical axis co-axial alignment;
Second step: expand, collimation and purification light beam, method is as follows:
Selection attenuation multiple is the light intensity attenuation sheet of 10 times ~ 1000 times; Selection focal length is the short burnt convergent lens of 10mm ~ 200mm, and focal length is the focal length convergent lens of 220mm ~ 3000mm, and the distance of adjustment two lens, makes the focus of two lens overlap; Diaphragm is placed in the focus of short burnt convergent lens and focal length convergent lens, eliminates the parasitic light of light path, is purified light beam;
Or,
The first step: dispose the multiple cascade scanning coherent diffraction microscopic imaging device adding longitudinally separation reference that a set of coherent light light source is synchrotron radiation coherent source, comprise: synchrotron radiation coherent source, limit light micropore, reference sample sample platform, target sample platform, ccd image sensor and the computing machine being connected ccd image sensor; By their position of parameter adjustment described in claim 1, and make them successively along optical axis co-axial alignment;
Second step: with the emergent light of synchrotron radiation coherent source for purification light beam;
3rd step: regulate limit light micropore, produce probe hot spot, method is as follows:
Put into the limit light micropore that aperture is 0.01um ~ 500um in the optical path, vertical optical axis plane finely tunes micro well locations, only allow the more uniform tiny area of plane wave wavefront intensity after second step is optimized by micropore, as scan-probe;
4th step: carry out tandem type scanning, gather diffracted signal, method is as follows:
0.01mm ~ 5mm place after limit light micropore is placed in reference to sample stage, one group of precision stepper motor is utilized to control reference sample sample platform perpendicular to the displacement doing direction fixed step size up and down in the plane of light path, wherein step-length select 0.01um ~ 300um with ensure adjacent detector interregional have more than 30% overlap, large I depending on sample region to be measured arbitrarily increases scanning step number, step number is set as n1, divides in order to n1 scanning probe district with the whole sample of the ensuring coverage region to be measured i.e. Zone Full of this reference sample; Target sample platform is placed in 0.01um ~ 500um place after reference sample sample platform, utilize one group of precision stepper motor control objectives sample stage perpendicular to the displacement doing direction fixed step size up and down in the plane of light path equally, wherein step-length select 0.01um ~ 300um with ensure adjacent detector interregional have more than 30% overlap, large I depending on target sample region to be measured arbitrarily increases scanning step number, step number is set as n2, divides in order to n2 scanning probe district with the whole target sample of the ensuring coverage region to be measured i.e. Zone Full of this target sample; When gathering diffracted signal, moving target sample stage, makes target sample in the face of scan-probe; Mobile reference sample sample platform, make a certain regional area in n1 scanning probe district of reference sample in the face of scan-probe and covered by scan-probe hot spot, fixing with reference to sample position, with reference to sample hot spot overlay area through probe transmitted light as modulation after probe, whole n2 scanning probe districts of scanning probe target sample successively, the n2 width diffraction pattern of acquisition is the 1st group in whole n1 group diffraction pattern; Then mobile reference sample sample platform is continued, make not covered by scan-probe hot spot in the face of scan-probe successively by setting order by other a certain regional area of scanning with reference to sample, fixing with reference to sample position, still with reference to sample hot spot overlay area through probe transmitted light as modulation after probe, whole n2 scanning probe districts of scanning probe target sample successively, the n2 width diffraction pattern of acquisition is the 2nd group in whole n1 group diffraction pattern; So repeat the step after above-mentioned mobile reference sample sample platform, until covered by scan-probe hot spot with reference to the n-th 1 scanning probe districts of sample, and completing whole n2 scanning probe districts of scanning probe target sample successively, the n2 width diffraction pattern of acquisition is the n-th 1 groups in whole n1 group diffraction pattern; So far obtain often group and comprise the diffraction pattern that n2 opens whole n1 groups of diffraction pattern, add up to n1 × n2 width completely independently diffraction pattern;
5th step: the core formula that the 4th step obtains the completely independently following reconstruction algorithm of diffraction pattern data separate is rebuild;
Formula 1:
Formula 2:
Formula 3:
In above-mentioned three formulas, P represents scan-probe, S
1represent with reference to sample, S
2represent target sample; Three formula correspond respectively to the renewal of i-th group of jth width diffraction data to scan-probe, reference sample and target sample reconstructed results, whole n1 × n2 width diffraction data is applied successively and can be regarded as an iteration for one time, namely iteration obtains the preliminary reconstructed results of target sample for more than 50 times, obtain the reconstructed results with reference to sample simultaneously, wherein i value 1 ~ n1, correspond to n1 the scanning lattice site with reference to sample, j value 1 ~ n2, corresponding to n2 scanning lattice site of target sample;
6th step: remove the lattice point artifact in reconstructed results, method is as follows:
The reconstructed results of contrast reference sample and known real information, utilize convergent-divergent, alignment, point except operation acquisition compensation coefficient matrix; Apply compensation coefficient matrix again and correct the preliminary reconstructed results of target sample, obtain final target sample reconstructed results.
The multiple cascade scanning coherent diffraction imaging device adding longitudinally separation reference provided by the invention, reference enhance principle in application traditional C DI, the reference sample of strong diffraction is added between micropore and target sample, introduce the scan operation with reference to tandem type between sample and target sample: scanning perpendicular to the plane of light path does step-by-step movement relative to probe location with reference to sample, correspond to each scanning position with reference to sample, target sample all does independently a whole set of dot interlace scanning.So just the weak diffracted signal of weak scattering sample is loaded in the strong diffracted signal with reference to sample, the diffracted signal data volume exponentially form that tandem type scanning produces increases, add one with reference to sample and target sample carry out tandem type scan the diffracted signal data volume produced be equivalent to traditional scanning coherent diffraction imaging method square.A large amount of complete independently redundant data can ensure imaging that is true and reliable to target sample and even quantification, greatly strengthen the anti-interference of formation method simultaneously.In order to obtain more full independent redundancy data, can add more reference samples and carrying out multi-stage cascade, prerequisite is that all reference samples and target sample can be considered that entirety meets the projection approximation condition of traditional scanning coherent diffraction imaging.Apply reconstruction algorithm that we provide by probe, with reference to the real space information separated of sample and target sample, realize scanning coherent diffraction micro-imaging that is true and reliable to large scale weak scattering sample and even quantification.
In addition, in conjunction with the priori to reference sample, algorithm provided by the invention has reasonable effect in the reconstruction image artifacts removal of target sample.Algorithm of the present invention can not need any probe, rebuild the wavefront function of three when priori with reference to sample and target sample simultaneously, reciprocal relation is there is equally in three in the core reconstruction formula of this reconstruction algorithm, this just means the artifact mechanism of production of three can have the full same sex, same compensation coefficient matrix can be used to correct, and compensation coefficient matrix can be obtained by the reconstructed results of contrast reference sample and prior imformation.Because the reconstruction pattern of three has accurate alignment relation on locus, the compensation coefficient matrix drawn by the reconstructed results analyzing reference sample can be directly used in the rectification to target sample reconstructed results, without the need to again aliging.Based on above advantage, this device has broad application prospects in materialogy, nanometer technology and biology.
Accompanying drawing explanation
Fig. 1 is the schematic diagram that the present invention adds the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference.
Wherein: 1. coherent light light source (LASER Light Source or synchrotron radiation coherent source), 2. LASER Light Source beam optimum assembly (being made up of light intensity attenuation sheet, the short burnt convergent lens of 2-2., 2-3. diaphragm and 2-4. focal length convergent lens 2-1.), 3. limit light micropore, 4. reference sample sample platform, 5. target sample platform, 6.CCD imageing sensor, 7. computing machine.
Fig. 2 is the optical microphotograph picture with reference to sample chosen in experiment, is the pattern that photoetching on piezoid obtains.
Fig. 3 is the optical microphotograph picture of the target sample chosen in experiment, is the pattern that photoetching on piezoid obtains.
Fig. 4 is the width diffraction pattern that in experimentation, ccd image sensor is collected.
Fig. 5 is that multiple cascade scanning coherent diffraction micro-imaging technique rebuilds the reconstructed results with reference to sample obtained.
Fig. 6 is the reconstructed results that multiple cascade scanning coherent diffraction micro-imaging technique rebuilds the target sample obtained, and resolution is 5um, can symbolize the difference in thickness in sample area of the pattern and substrate region clearly.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
Embodiment 1 one kinds adds the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference
A kind of diffraction enhanced imaging multiple cascade scanning coherent diffraction microscopic imaging device adding longitudinally separation reference of the present invention, structural representation is as Fig. 1, LASER Light Source 1 is shown along light beam working direction successively coaxial row, by light intensity attenuation sheet 2-1, short burnt convergent lens 2-2, the LASER Light Source beam optimum assembly 2 that diaphragm 2-3 and focal length convergent lens 2-4 forms, limit light micropore 3, the reference sample sample platform 4 can doing the scanning of direction displacement up and down in the plane of vertical optical axis is controlled by precision stepper motor, the target sample platform 5 that can do the scanning of direction displacement up and down in the plane of vertical optical axis is controlled equally by precision electric motor, ccd image sensor 6 and the computing machine 7 being connected ccd image sensor, described light intensity attenuation sheet, short burnt convergent lens, diaphragm, focal length convergent lens and limit light micropore are fixed on the magnet base of device setting, ccd image sensor fixed placement is orthogonal and can on the stepping frame of direction movement up and down at two, and this stepping frame is fixed on simultaneously can along on the movable stepping frame of optical axis direction.
Further, the above-mentioned longitudinal direction that adds is separated in the diffraction enhanced imaging multiple cascade scanning coherent diffraction microscopic imaging device of reference: described LASER Light Source is He-Ne laser instrument, and the wavelength exporting light is 0.543um, and described light intensity attenuation sheet attenuation multiple is 80 times ~ 150 times; Described short burnt convergent lens focal length 40mm ~ 80mm, focal length convergent lens focal length is divided into 400mm ~ 800mm, and the focus of two lens overlaps, and two lens expand light beam in the ratio of focal length, reduce beam divergence angle simultaneously, produces directional light; For eliminating the parasitic light in light path on the public focus that diaphragm is placed on short burnt convergent lens and focal length convergent lens; Described micropore is the circular hole of aperture 150um ~ 300um, is placed in lens combination rear, only allow the center homogeneous area of the plane wave wavefront after lens combination beam-expanding collimation through, the transmission hot spot of generation is the probe for detecting sample; Reference sample sample platform is placed in 0.6mm ~ 2mm after micropore, is controlled by precision stepper motor, can be that the step-by-step movement of 0.1um ~ 300um moves perpendicular in the plane of optical axis, vertically step-length is done in left and right; Target sample platform is placed in 200um ~ 400um after reference sample sample platform, is controlled by precision stepper motor, can be that the step-by-step movement of 0.1um ~ 300um moves perpendicular in the plane of optical axis, vertically step-length is done in left and right; Ccd image sensor is placed in 10cm ~ 30cm place after target sample platform, corresponding to the light source of 0.543um wavelength, and the transverse illumination broadening of target sample about plane 200um, the diffraction light wave transition function that can receive CCD does fraunhofer approximate processing, be namely regarded as the modulus value of the Fourier transform of the transmission wavefront of load sample and detecting probe information square; The diffracted signal that described ccd image sensor is collected is transferred to computing machine, and the information of the reconstruction algorithm provided by computer run to probe and two samples is rebuild.
Embodiment 2 adds the application of the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference
Embody rule step is as follows:
The first step: dispose a set of laser coherence diffraction imaging device, structural representation is as Fig. 1, comprise: LASER Light Source (laser instrument) 1, light intensity attenuation sheet 2-1, short burnt convergent lens 2-2, diaphragm 2-3, focal length convergent lens 2-4, limit light micropore 3, reference sample sample platform 4, target sample platform 5, ccd image sensor 6 and computing machine 7; ; Described laser instrument is He-Ne laser instrument, and to export the wavelength of light be the pixel count of 0.543um, CCD is 1300 × 1340, and pixel size is 20um.
Second step: expand, collimation and purification light beam, method is as follows:
Selective light overdamp sheet, attenuation multiple is 100 times, decay from the laser intensity of laser emitting, selecting the focal length of short burnt convergent lens to be the focal length of 50mm and focal length convergent lens is 500mm, the focus of two lens overlaps, expand light beam in the ratio 1:10 of two focal lengths of lens, reduce beam divergence angle simultaneously, produce directional light; For eliminating the parasitic light of light path in the focus that diaphragm is placed on short burnt convergent lens and focal length convergent lens.
3rd step: regulate limit light micro well locations, optimize probe mass, method is as follows:
Put into the limit light micropore of diameter 200um in the optical path, vertical optical axis plane finely tunes micro well locations, only allow the more uniform tiny area of plane wave wavefront intensity after beam-expanding collimation by micropore, as scan-probe.
4th step: carry out tandem type scanning, gather diffracted signal, method is as follows:
1mm place after limit light micropore is placed in reference to sample stage, one group of precision stepper motor is utilized to control reference sample sample platform perpendicular to the displacement doing direction fixed step size up and down in the plane of light path, wherein step-length selects 40um, and the Duplication of such adjacent detector position probe overlay area reaches 80%.Large I depending on sample region to be measured arbitrarily increases scanning step number, and step number is set as that 11 × 11=121 walks, and search coverage is the round rectangle region covering whole sample region to be measured.Target sample platform is placed in 300um place after reference sample sample platform, utilize one group of precision stepper motor control objectives sample stage perpendicular to the displacement doing direction fixed step size up and down in the plane of light path equally, wherein step-length selects 40um, the Duplication of adjacent detector position probe overlay area reaches 80%, scanning step number is set as that 11 × 11=121 walks, and search coverage is the round rectangle region covering whole target sample region to be measured.When gathering diffracted signal, moving target sample stage, makes target sample in the face of scan-probe.Mobile reference sample sample platform, make a certain regional area in 121 scanning probe districts of reference sample in the face of scan-probe and covered by scan-probe hot spot, fixing with reference to sample position, with reference to sample hot spot overlay area through probe transmitted light as modulation after probe, 121 scanning probe positions of scanning probe target sample successively, 121 width diffraction patterns of acquisition are the 1st group in whole 121 groups of diffraction patterns; Then mobile reference sample sample platform is continued, make not covered by scan-probe hot spot in the face of scan-probe successively by setting order by other a certain regional area of scanning with reference to sample, fixing with reference to sample position, still with reference to sample hot spot overlay area through probe transmitted light as modulation after probe, whole 121 scanning probe districts of scanning probe target sample successively, 121 width diffraction patterns of acquisition are the 2nd group in whole 121 groups of diffraction patterns; So repeat the step after above-mentioned mobile reference sample sample platform, until covered by scan-probe hot spot with reference to the 121st scanning probe district of sample, and completing whole 121 scanning probe districts of scanning probe target sample successively, 121 width diffraction patterns of acquisition are the 121st group in whole 121 groups of diffraction patterns; So far obtain the diffraction pattern that often group comprises whole 121 groups of 121 diffraction patterns, add up to 121 × 121=14641 width completely independently diffraction pattern;
5th step: the core formula of the following reconstruction algorithm of completely independently diffraction pattern data separate the 4th step obtained is rebuild;
Formula 1:
Formula 2:
Formula 3:
In above-mentioned three formulas, P represents scan-probe, and S1 represents with reference to sample, and S2 represents target sample; Three formula correspond respectively to the renewal of i-th group of jth width diffraction data to scan-probe, reference sample and target sample reconstructed results, whole 121 × 121 width diffraction datas are applied successively and can be regarded as an iteration for one time, namely iteration obtains the preliminary reconstructed results of target sample for 100 times, obtain the reconstructed results with reference to sample simultaneously, wherein i value 1 ~ 121, correspond to 121 scanning lattice site with reference to sample, j value 1 ~ 121, corresponding to 121 scanning lattice site of target sample.
6th step: remove the lattice point artifact in reconstructed results, method is as follows:
Real information with reference to sample obtains by other approach such as electron microscopes, will align by other approach after the reference sample real information convergent-divergent obtained with the reconstructed results of reference sample, and both carry out point except operation, can obtain compensation coefficient matrix.Again by reconstructed results preliminary for compensation coefficient matrix dot product target sample, obtain final target sample reconstructed results.
Embodiment 3 one kinds adds the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference
A kind of diffraction enhanced imaging multiple cascade scanning coherent diffraction microscopic imaging device adding longitudinally separation reference of the present invention, structural representation, as Fig. 1, is shown synchrotron radiation coherent source 1, limit light micropore 3 along light beam working direction successively coaxial row, controlled can to do in the plane of vertical optical axis reference sample sample platform 4 that direction displacement up and down scans by precision stepper motor, is controlled can to do in the plane of vertical optical axis by precision electric motor target sample platform 5, ccd image sensor 6 and the computing machine 7 being connected ccd image sensor that direction displacement up and down scans equally; Described limit light micropore is fixed on the magnet base of device setting, and ccd image sensor fixed placement is orthogonal and can on the stepping frame of direction movement up and down at two, and this stepping frame is fixed on simultaneously can along on the movable stepping frame of optical axis direction.
Further, the above-mentioned longitudinal direction that adds is separated in the diffraction enhanced imaging multiple cascade scanning coherent diffraction microscopic imaging device of reference: described coherent light light source is synchrotron radiation coherent source, exporting light is the homogeneous X-ray of 6.2keV, described micropore is the circular hole of aperture 0.01um ~ 30um, only allow the center homogeneous area of plane wave wavefront through, the transmission hot spot of generation is the probe for detecting sample; Reference sample sample platform is placed in 0.1mm ~ 2mm after micropore, is controlled by precision stepper motor, can be that the step-by-step movement of 0.1um ~ 25um moves perpendicular in the plane of optical axis, vertically step-length is done in left and right; Target sample platform is placed in 1um ~ 100um after reference sample sample platform, is controlled by precision stepper motor, can be that the step-by-step movement of 0.1um ~ 25um moves perpendicular in the plane of optical axis, vertically step-length is done in left and right; Ccd image sensor is placed in 20cm ~ 150cm place after target sample platform, corresponding to the synchrotron radiation X-ray of 6.2keV, and the transverse illumination broadening of below target sample plane 40um, the diffraction light wave transition function that can receive CCD does fraunhofer approximate processing, be namely regarded as the modulus value of the Fourier transform of the transmission wavefront of load sample and detecting probe information square; The diffracted signal that described ccd image sensor is collected is transferred to computing machine, and the information of the reconstruction algorithm provided by computer run to probe and two samples is rebuild.
Embodiment 4 adds the application of the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference
Embody rule step is as follows:
The first step: dispose a set of laser coherence diffraction imaging device, structural representation, as Fig. 1, comprising: synchrotron radiation coherent source 1, limit light micropore 3, reference sample sample platform 4, target sample platform 5, ccd image sensor 6 and computing machine 7; It is the homogeneous X-ray of 6.2keV that described synchrotron radiation coherent source exports light, and the pixel count of CCD is 1300 × 1340, and pixel size is 20um.
Second step: with the emergent light of synchrotron radiation coherent source for purification light beam;
3rd step: regulate limit light micro well locations, optimize probe mass, method is as follows:
Put into the limit light micropore of diameter 3um in the optical path, vertical optical axis plane finely tunes micro well locations, only allow the more uniform tiny area of plane wave wavefront intensity after beam-expanding collimation by micropore, as scan-probe.
4th step: carry out tandem type scanning, gather diffracted signal, method is as follows:
0.5mm place after limit light micropore is placed in reference to sample stage, one group of precision stepper motor is utilized to control reference sample sample platform perpendicular to the displacement doing direction fixed step size up and down in the plane of light path, wherein step-length selects 1.5um, and the Duplication of such adjacent detector position probe overlay area reaches 39%.Large I depending on sample region to be measured arbitrarily increases scanning step number, and step number is set as that 20 × 20=400 walks, and search coverage is the round rectangle region covering whole sample region to be measured.Target sample platform is placed in 30um place after reference sample sample platform, utilize one group of precision stepper motor control objectives sample stage perpendicular to the displacement doing direction fixed step size up and down in the plane of light path equally, wherein step-length selects 1.5um, the Duplication of adjacent detector position probe overlay area reaches 39%, scanning step number is set as that 20 × 20=400 walks, and search coverage is the round rectangle region covering whole target sample region to be measured.When gathering diffracted signal, moving target sample stage, makes target sample in the face of scan-probe.Mobile reference sample sample platform, make a certain regional area in 400 scanning probe districts of reference sample in the face of scan-probe and covered by scan-probe hot spot, fixing with reference to sample position, with reference to sample hot spot overlay area through probe transmitted light as modulation after probe, 400 scanning probe positions of scanning probe target sample successively, 400 width diffraction patterns of acquisition are the 1st group in whole 400 groups of diffraction patterns; Then mobile reference sample sample platform is continued, make not covered by scan-probe hot spot in the face of scan-probe successively by setting order by other a certain regional area of scanning with reference to sample, fixing with reference to sample position, still with reference to sample hot spot overlay area through probe transmitted light as modulation after probe, whole 400 scanning probe districts of scanning probe target sample successively, 400 width diffraction patterns of acquisition are the 2nd group in whole 400 groups of diffraction patterns; So repeat the step after above-mentioned mobile reference sample sample platform, until covered by scan-probe hot spot with reference to the 400th scanning probe district of sample, and completing whole 400 scanning probe districts of scanning probe target sample successively, 400 width diffraction patterns of acquisition are the 400th group in whole 400 groups of diffraction patterns; So far obtain the diffraction pattern that often group comprises whole 400 groups of 400 diffraction patterns, add up to 400 × 400=160000 width completely independently diffraction pattern;
5th step: the core formula of the following reconstruction algorithm of completely independently diffraction pattern data separate the 4th step obtained is rebuild;
Formula 1:
Formula 2:
Formula 3:
In above-mentioned three formulas, P represents scan-probe, and S1 represents with reference to sample, and S2 represents target sample; Three formula correspond respectively to the renewal of i-th group of jth width diffraction data to scan-probe, reference sample and target sample reconstructed results, whole 400 × 400 width diffraction datas are applied successively and can be regarded as an iteration for one time, namely iteration obtains the preliminary reconstructed results of target sample for 100 times, obtain the reconstructed results with reference to sample simultaneously, wherein i value 1 ~ 400, correspond to 400 scanning lattice site with reference to sample, j value 1 ~ 400, corresponding to 400 scanning lattice site of target sample.
6th step: remove the lattice point artifact in reconstructed results, method is as follows:
Real information with reference to sample obtains by other approach such as electron microscopes, will align by other approach after the reference sample real information convergent-divergent obtained with the reconstructed results of reference sample, and both carry out point except operation, can obtain compensation coefficient matrix.Again by reconstructed results preliminary for compensation coefficient matrix dot product target sample, obtain final target sample reconstructed results.
Claims (3)
1. one kind adds the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference, described device shows coherent light light source along light beam working direction successively coaxial row----LASER Light Source, the LASER Light Source beam optimum assembly be made up of light intensity attenuation sheet, short burnt convergent lens, diaphragm and focal length convergent lens, target sample platform, the ccd image sensor limitting light micropore, controlled to do in vertical optical axis plane the scanning of direction displacement up and down by precision electric motor, with the computing machine being connected ccd image sensor; Wherein, described light intensity attenuation sheet, short burnt convergent lens, diaphragm, focal length convergent lens, limit light micropore are fixed on the magnet base of device setting, ccd image sensor fixed placement is orthogonal and can on the stepping frame of direction movement up and down at two, and this stepping frame is fixed on simultaneously can along on the movable stepping frame of optical axis direction;
Or, described device shows coherent light light source along light beam working direction successively coaxial row---synchrotron radiation coherent source, target sample platform, the ccd image sensor limitting light micropore, controlled to do in vertical optical axis plane the scanning of direction displacement up and down by precision electric motor, with the computing machine being connected ccd image sensor; Wherein, described limit light micropore is fixed on the magnet base of device setting, ccd image sensor fixed placement is orthogonal and can on the stepping frame of direction movement up and down at two, and this stepping frame is fixed on simultaneously can along on the movable stepping frame of optical axis direction;
It is characterized in that:
When in device, coherent light light source is LASER Light Source, described device is provided with and is controlled by precision stepper motor and can do the reference sample sample platform that direction displacement up and down scans in vertical optical axis plane between limit light micropore and target sample platform; Described light intensity attenuation sheet is selected to regulate the dynamic sensitive volume of light intensity and ccd image sensor to match and attenuation multiple is the light intensity attenuation sheet of 10 times ~ 1000 times; Described short burnt convergent lens and focal length convergent lens focus overlap, and the focal length of short burnt convergent lens is 10mm ~ 200mm, and the focal length of focal length convergent lens is 220mm ~ 3000mm, and two lens expand light beam in the ratio of focal length; Described diaphragm is positioned in the focus of short burnt convergent lens and focal length convergent lens; Described limit light micropore is positioned at any distance after focal length convergent lens, and its aperture is 0.01um ~ 500um; Described reference sample sample platform is positioned at 0.01mm ~ 5mm after limit light micropore; Described target sample platform is positioned at 0.01um ~ 500um after reference sample sample platform; Described ccd image sensor is positioned at 1cm ~ 200cm after target sample platform;
When in device, coherent light light source is synchrotron radiation coherent source, described device is provided with and is controlled by precision stepper motor and can do the reference sample sample platform that direction displacement up and down scans in vertical optical axis plane between limit light micropore and target sample platform; Described limit light micropore size is 0.01um ~ 500um; Described reference sample sample platform is positioned at 0.01mm ~ 5mm after limit light micropore; Described target sample platform is positioned at 0.01um ~ 500um after reference sample sample platform; Described ccd image sensor is positioned at 1cm ~ 200cm after target sample platform.
2. the multiple cascade scanning coherent diffraction microscopic imaging device adding longitudinally separation reference according to claim 1, is characterized in that:
When in device, coherent light light source is LASER Light Source, described light intensity attenuation sheet is selected to regulate the dynamic sensitive volume of light intensity and ccd image sensor to match and attenuation multiple is the light intensity attenuation sheet of 80 times ~ 150 times; Described short burnt convergent lens and focal length convergent lens focus overlap, and the focal length of short burnt convergent lens is 40mm ~ 80mm, and the focal length of focal length convergent lens is 400mm ~ 800mm, and two lens expand light beam in the ratio of focal length; Described diaphragm is positioned in the focus of short burnt convergent lens and focal length convergent lens; Described limit light micropore is positioned at any distance after focal length convergent lens, and its aperture is 0.01um ~ 300um; Described reference sample sample platform is positioned at 0.6mm ~ 2mm after limit light micropore; Described target sample platform is positioned at 10um ~ 400um after reference sample sample platform; Described ccd image sensor is positioned at 5cm ~ 150cm after target sample platform;
When in device, coherent light light source is synchrotron radiation coherent source, described limit light micropore size is 0.01um ~ 300um; Described reference sample sample platform is positioned at 0.6mm ~ 2mm after limit light micropore; Described target sample platform is positioned at 10um ~ 400um after reference sample sample platform; Described ccd image sensor is positioned at 5cm ~ 150cm after target sample platform.
3. add the application of the multiple cascade scanning coherent diffraction microscopic imaging device being longitudinally separated reference described in claim 1, step is:
The first step: dispose the multiple cascade scanning coherent diffraction microscopic imaging device adding longitudinally separation reference that a set of coherent light light source is LASER Light Source, comprise: LASER Light Source (1), the LASER Light Source beam optimum assembly (2) be made up of light intensity attenuation sheet (2-1), short burnt convergent lens (2-2), diaphragm (2-3), focal length convergent lens (2-4), limit light micropore (3), reference sample sample platform (4), target sample platform (5), ccd image sensor (6) and the computing machine (7) being connected ccd image sensor; By their position of parameter adjustment described in claim 1, and make them successively along optical axis co-axial alignment;
Second step: expand, collimation and purification light beam, method is as follows:
Selection attenuation multiple is the light intensity attenuation sheet of 10 times ~ 1000 times; Selection focal length is the short burnt convergent lens of 10mm ~ 200mm, and focal length is the focal length convergent lens of 220mm ~ 3000mm, and the distance of adjustment two lens, makes the focus of two lens overlap; Diaphragm is placed in the focus of short burnt convergent lens and focal length convergent lens, eliminates the parasitic light of light path, is purified light beam;
Or,
The first step: dispose the multiple cascade scanning coherent diffraction microscopic imaging device adding longitudinally separation reference that a set of coherent light light source is synchrotron radiation coherent source, comprise: synchrotron radiation coherent source (1), limit light micropore (3), reference sample sample platform (4), target sample platform (5), ccd image sensor (6) and the computing machine (7) being connected ccd image sensor; By their position of parameter adjustment described in claim 1, and make them successively along optical axis co-axial alignment;
Second step: with the emergent light of synchrotron radiation coherent source for purification light beam;
3rd step: regulate limit light micropore, produce probe hot spot, method is as follows:
Put into the limit light micropore that aperture is 0.01um ~ 500um in the optical path, vertical optical axis plane finely tunes micro well locations, only allow the more uniform tiny area of plane wave wavefront intensity after second step is optimized by micropore, as scan-probe;
4th step: carry out tandem type scanning, gather diffracted signal, method is as follows:
0.01mm ~ 5mm place after limit light micropore is placed in reference to sample stage, one group of precision stepper motor is utilized to control reference sample sample platform perpendicular to the displacement doing direction fixed step size up and down in the plane of light path, wherein step-length select 0.01um ~ 300um with ensure adjacent detector interregional have more than 30% overlap, large I depending on sample region to be measured arbitrarily increases scanning step number, step number is set as n1, divides in order to n1 scanning probe district with the whole sample of the ensuring coverage region to be measured i.e. Zone Full of this reference sample; Target sample platform is placed in 0.01um ~ 500um place after reference sample sample platform, utilize one group of precision stepper motor control objectives sample stage perpendicular to the displacement doing direction fixed step size up and down in the plane of light path equally, wherein step-length select 0.01um ~ 300um with ensure adjacent detector interregional have more than 30% overlap, large I depending on target sample region to be measured arbitrarily increases scanning step number, step number is set as n2, divides in order to n2 scanning probe district with the whole target sample of the ensuring coverage region to be measured i.e. Zone Full of this target sample; When gathering diffracted signal, moving target sample stage, makes target sample in the face of scan-probe; Mobile reference sample sample platform, make a certain regional area in n1 scanning probe district of reference sample in the face of scan-probe and covered by scan-probe hot spot, fixing with reference to sample position, with reference to sample hot spot overlay area through probe transmitted light as modulation after probe, whole n2 scanning probe districts of scanning probe target sample successively, the n2 width diffraction pattern of acquisition is the 1st group in whole n1 group diffraction pattern; Then mobile reference sample sample platform is continued, make not covered by scan-probe hot spot in the face of scan-probe successively by setting order by other a certain regional area of scanning with reference to sample, fixing with reference to sample position, still with reference to sample hot spot overlay area through probe transmitted light as modulation after probe, whole n2 scanning probe districts of scanning probe target sample successively, the n2 width diffraction pattern of acquisition is the 2nd group in whole n1 group diffraction pattern; So repeat the step after above-mentioned mobile reference sample sample platform, until covered by scan-probe hot spot with reference to the n-th 1 scanning probe districts of sample, and completing whole n2 scanning probe districts of scanning probe target sample successively, the n2 width diffraction pattern of acquisition is the n-th 1 groups in whole n1 group diffraction pattern; So far obtain often group and comprise the diffraction pattern that n2 opens whole n1 groups of diffraction pattern, add up to n1 × n2 width completely independently diffraction pattern;
5th step: the core formula of the following reconstruction algorithm of completely independently diffraction pattern data separate the 4th step obtained is rebuild;
Formula 1:
Formula 2:
Formula 3:
In above-mentioned three formulas, P represents scan-probe, S
1represent with reference to sample, S
2represent target sample; Three formula correspond respectively to the renewal of i-th group of jth width diffraction data to scan-probe, reference sample and target sample reconstructed results, whole n1 × n2 width diffraction data is applied successively and can be regarded as an iteration for one time, namely iteration obtains the preliminary reconstructed results of target sample for more than 50 times, obtain the reconstructed results with reference to sample simultaneously, wherein i value 1 ~ n1, correspond to n1 the scanning lattice site with reference to sample, j value 1 ~ n2, corresponding to n2 scanning lattice site of target sample;
6th step: remove the lattice point artifact in reconstructed results, method is as follows:
The reconstructed results of contrast reference sample and known real information, utilize convergent-divergent, alignment, point except operation acquisition compensation coefficient matrix; Apply compensation coefficient matrix again and correct the preliminary reconstructed results of target sample, obtain final target sample reconstructed results.
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